30-01-2020 дата публикации
Номер: US20200035807A1
Принадлежит:
A device includes a substrate, a first zirconium-containing oxide layer, a first metal oxide layer and a top electrode. The first zirconium-containing oxide layer is over a substrate and having ferroelectricity or antiferroelectricity. The first metal oxide layer is in contact with the first zirconium-containing oxide layer. The first metal oxide layer has a thickness less than a thickness of the first zirconium-containing oxide layer. The top electrode is over the first zirconium-containing oxide layer. 1. A device , comprising:a substrate;a first zirconium-containing oxide layer over a substrate and having ferroelectricity or antiferroelectricity;a first metal oxide layer in contact with the first zirconium-containing oxide layer, the first metal oxide layer has a thickness less than a thickness of the first zirconium-containing oxide layer; anda top electrode over the first zirconium-containing oxide layer.2. The device of claim 1 , further comprising a second metal oxide layer claim 1 , wherein the first zirconium-containing oxide layer is between the first metal oxide layer and the second metal oxide layer.3. The device of claim 2 , wherein the second metal oxide layer has a thickness less than the thickness of the first zirconium-containing oxide layer.4. The device of claim 2 , wherein the first metal oxide layer and the second metal oxide layer are made of the same material.5. The device of claim 1 , further comprising:a second zirconium-containing oxide layer over the first zirconium-containing oxide layer; anda second metal oxide layer in contact with the second zirconium-containing oxide layer.6. The device of claim 5 , wherein the second metal oxide layer has a thickness less than a thickness of the second zirconium-containing oxide layer.7. The device of claim 5 , further comprising a third metal oxide layer claim 5 , wherein the second zirconium-containing oxide layer is between the second metal oxide layer and the third metal oxide layer.8. The device ...
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