18-12-2014 дата публикации
Номер: US20140370444A1
The present invention relates to an absorbing hard mask antireflective coating composition comprising a novel polymer, where the novel polymer comprises in the backbone of the polymer four repeat units -A-, -B-, -C- and -D-, where A is repeat unit which comprises a fused aromatic ring in its backbone, B has the structure (1), C is a hydroxylbiphenyl of structure (2) and D is a derivatized fluorene of structure (3), 4. The composition of claim 1 , where the polymer in the composition is free of aliphatic polycyclic moieties.6. The composition of claim 1 , where Ris methyl and Ris methyl.7. The composition of claim 1 , where the fused aromatic ring has 2 to 5 aromatic rings.8. The composition of claim 1 , where the fused aromatic ring has 3 or 4 aromatic rings.9. The composition of claim 1 , where the composition further comprises an acid generator.13. The composition of claim 1 , where the composition further comprises a thermal acid generator.14. The composition of further comprising a second polymer.15. The composition of further comprising a crosslinker.16. The composition of further comprising a crosslinker comprising multiple functional groups selected from the group consisting of esters claim 1 , ethers claim 1 , alcohols olefins claim 1 , methoxymethylamino claim 1 , and methoxymethylphenyl.17. The composition of further comprising a crosslinker selected from a group consisting of 1 claim 1 ,3-adamantane diol claim 1 , 1 claim 1 ,3 claim 1 ,5-adamantane triol claim 1 , polyfunctional reactive benzylic compounds claim 1 , aminoplast crosslinkers claim 1 , glycourils and powderlinks.18. A process for manufacturing a microelectronic device claim 1 , comprising;{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'a) providing a substrate with a first layer of an antireflective coating composition from ;'}b) optionally, providing at least a second antireflective coating layer over the first antireflective coating composition layer;b) coating a photoresist layer above ...
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