Antireflective coating composition and process thereof

09-12-2014 дата публикации

Номер:

US8906592B2

Автор: Clement Anyadiegwu, Douglas McKenzie, JoonYeon Cho, M. Dalil Rahman

Принадлежит: AZ Electronic Materials Luxembourg SARL

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C08 C08G C08G2 C08G22 C08G226 C08G2261 C08G2261/C08G2261/1 C08G2261/13 C08G2261/135 C08G2261/14 C08G2261/142 C08G2261/1422 C08G2261/1424 C08G2261/148 C08G2261/3 C08G2261/34 C08G2261/342 C08G2261/4 C08G2261/45 C08G2261/7 C08G2261/76 C08G6 C08G61 C08G61/C08G61/0 C08G61/02 C09 C09D C09D1 C09D16 C09D165 C09D165/C09D165/0 C09D165/00 G G0 G02 G02B G02B1 G02B1/G02B1/1 G02B1/11 G02B1/118 G03 G03F G03F7 G03F7/G03F7/0 G03F7/09 G03F7/091 G03F7/094 H H0 H01 H01L H01L3 H01L31 H01L31/H01L31/0 H01L31/02 H01L31/021 H01L31/0216 H01L31/02168 H01L31/023 H01L31/0232 H01L31/02327

IPC - классификация

C C0 C08 C08G C08G6 C08G61 C08G61/C08G61/0 C08G61/02 G G0 G02 G02B G02B1 G02B1/G02B1/1 G02B1/11 G02B1/118 G03 G03F G03F7 G03F7/G03F7/0 G03F7/09 G03F7/091

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