28-04-2004 дата публикации
Номер: KR20040034600A
Принадлежит:
A slit lens arrangement for particle beams, in particular for the projection of a mask onto a workpiece, is disclosed, comprising a combined lens, made up of a cylinder lens and a quadrupole lens, the optical axes of which run parallel to each other, whereby the optical axis of the quadrupole lens may be displaced in a parallel manner and which have a gap-like opening between the pole shoes or in the electrodes with the same spatial relationship to each other. Both lenses are thus so arranged relative to each other, that the focussing of the quadrupole lens occurs in that plane in which the cylinder lens is not focussed, and the defocusing of the quadrupole lens occurs in that plane in which the cylinder lens focuses. According to the invention, two combined lenses are provided with functionally identical elements arranged such that the optical axes of the both lenses lie coaxial to each other, define the mid-axis of the total system and whereby the beam path is telescopic throughout the ...
Подробнее