Ultraviolet systems and methods for irradiating a substrate

A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead.

Ultraviolet lamp system and method for controlling emitted ultraviolet light

Embodiments of the invention provide an apparatus, method, and program product to control a lamp system. The apparatus comprises a plasma lamp bulb ( 20 ) and a microwave generator ( 12 ) operable to generate a microwave energy field to excite the plasma lamp bulb ( 20 ) to emit ultraviolet light ( 24 ). The apparatus further comprises a sensor ( 70 ) to measure the intensity of the ultraviolet light ( 24 ) and a reflector ( 42 ) positioned between the plasma lamp bulb ( 20 ) and the sensor ( 70 ) The reflector ( 42 ) is operable to reflect at least a portion of the ultraviolet light ( 24 ) generated by the plasma lamp bulb ( 20 ). The method comprises receiving a target intensity for the ultraviolet light ( 24 ) and measuring an intensity of the ultraviolet light ( 24 ) using a sensor ( 70 ). The method further comprises comparing the target intensity to the measured intensity and, in response to the comparison, adjusting power to a microwave generator ( 12 ) to adjust the intensity of the ultraviolet light ( 24 ).

LAMP SYSTEMS AND METHODS FOR GENERATING ULTRAVIOLET LIGHT

Apparatus for generating ultraviolet light and methods of operating an ultraviolet light source. The apparatus may include a microwave chamber () enclosing an interior space, a light source () with a lamp head () coupled to the microwave chamber (), an ultraviolet (UV) transmissive member () positioned above the lamp face () and below the interior space to define a plenum () therebetween, and an exhaust system () coupled in fluid communication with the plenum. The lamp head () has a lamp face () through which ultraviolet light () and cooling air () are emitted. The UV transmissive member () is configured to transmit the ultraviolet light () into the interior space and to divert the cooling air () from the interior space. The exhaust system () configured to exhaust the cooling air () from the plenum (). 1. An apparatus for generating ultraviolet light , the apparatus provided with a flow of cooling air , the apparatus comprising:a chamber enclosing an interior space;a light source including a lamp head coupled to said chamber, said lamp head including a lamp face configured to transmit the ultraviolet light and the cooling air;an ultraviolet (UV) transmissive member positioned above said lamp face and below said interior space to define a plenum therebetween, said UV transmissive member configured to transmit the ultraviolet light into said interior space and configured to divert the cooling air from entering said interior space; andan exhaust system coupled in fluid communication with said plenum, said exhaust system configured to exhaust the cooling air from said plenum.2. The apparatus of claim 1 , further comprising:a first reflector positioned in said chamber and above said UV transmissive member, said first reflector positioned to reflect the ultraviolet light back toward said lamp head.3. The apparatus of claim 2 , further comprising:a second reflector positioned in said chamber and above said UV transmissive member, said second reflector positioned to reflect ...

ULTRAVIOLET LAMP SYSTEM AND METHOD FOR CONTROLLING EMITTED ULTRAVIOLET LIGHT

Embodiments of the invention provide an apparatus, method, and program product to control a lamp system. The apparatus comprises a plasma lamp bulb () and a microwave generator () operable to generate a microwave energy field to excite the plasma lamp bulb () to emit ultraviolet light (). The apparatus further comprises a sensor () to measure the intensity of the ultraviolet light () and a reflector () positioned between the plasma lamp bulb () and the sensor () The reflector () is operable to reflect at least a portion of the ultraviolet light () generated by the plasma lamp bulb (). The method comprises receiving a target intensity for the ultraviolet light () and measuring an intensity of the ultraviolet light () using a sensor (). The method further comprises comparing the target intensity to the measured intensity and, in response to the comparison, adjusting power to a microwave generator () to adjust the intensity of the ultraviolet light (). 1. An apparatus for generating ultraviolet light , the apparatus comprising:a plasma lamp bulb;a microwave generator operable to generate a microwave energy field to excite said plasma lamp bulb to emit the ultraviolet light;a sensor configured to measure an intensity of the ultraviolet light; anda reflector positioned between said plasma lamp bulb and said sensor, said reflector operable to reflect at least a portion of the ultraviolet light generated by said plasma light bulb.2. The apparatus of claim 1 , further comprising:a control system configured to control emission of the ultraviolet light, said control system configured to receive a target intensity for the ultraviolet light, determine the measured intensity of the ultraviolet light from said sensor, evaluate whether the target intensity corresponds to the measured intensity, and adjust power to said microwave generator to adjust the intensity of the ultraviolet light.3. The apparatus of claim 2 , wherein said control system is further configured to increase the ...

Ultraviolet Systems And Methods For Irradiating A Substrate

A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead. 1. A UV system for irradiating a substrate comprising:a lamphead including an interior;a solid state RF source capable of generating RF energy; anda UV bulb positioned in said interior of said lamphead and capable of emitting UV energy when excited by the RF energy generated by said solid state RF source.2. The system of claim 1 , wherein said solid state RF source is located outside said interior of said lamphead.3. The system of claim 1 , further comprising:a cooling device located outside said interior of said lamphead for directing cooling air at said UV bulb.4. The system of claim 1 , further comprising:a cooling device located inside said interior of said lamphead for directing cooling air at said UV bulb.5. The system of claim 2 , further comprising:at least one antenna coupled to said solid state RF source and positioned proximate to said UV bulb, said antenna being capable of receiving the RF energy from said solid state RF source and directing the RF energy toward said UV bulb.6. The system of claim 5 , wherein said UV bulb has a length and said at least one antenna further comprises a plurality of antennas claim 5 , and said plurality of antennas are spaced along the length of said UV bulb.7. The system of claim 6 , further comprising:a cooling device located outside said interior of said lamphead for directing cooling air at said UV bulb.8. The system of claim 6 , further comprising:a cooling device located inside said interior of said lamphead for directing cooling air at said UV bulb.9. The system of claim 1 , wherein said solid ...

Microwave powered lamp with optimizied cooling for different bulb chemistries

A system, method, and computer program product for optimizing the cooling of a UV bulb during a UV irradiation process is described. A power level in which to operate the UV bulb is received. In addition, a particular type of UV bulb being used in the UV irradiation process is received. Thereafter, at least one optimal UV cooling parameter that corresponds to the power level and the type of UV bulb is retrieved from a UV source parameters database. At least one control signal is then sent to a cooling device that is based on the retrieved optimal UV cooling parameter, and the control signal instructs the cooling device to cool the particular type of UV bulb according to the retrieved optimal UV cooling parameter during the UV irradiation process.

MICROWAVE EXCITED ULTRAVIOLET LAMP SYSTEM WITH DATA LOGGING AND RETRIEVAL CIRCUIT AND METHOD

A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel. 1. A microwave excited ultraviolet lamp system , comprising:a lamp head including an ultraviolet lamp;a power supply configured to supply power to said lamp head; anda data logging and retrieval circuit operatively coupled to at least one of said lamp head and said power supply and including a first memory for storing data representative of operational characteristics of the system, and a first data port coupled to said first memory and operative to transfer the data from said first memory to an external device interfaced with said first data port.2. The microwave excited ultraviolet lamp system of claim 1 , further comprising:a microwave generator configured to supply microwave energy to said ultraviolet lamp.3. The microwave excited ultraviolet lamp system of wherein said microwave generator is integrated with said lamp head.4. The microwave excited ultraviolet lamp system of claim 1 , wherein said first data port comprises a port for receiving power from the external device so that the data is transferred from said first memory to the external device using the power ...

APPARATUS AND METHODS FOR IRRADIATING SUBSTRATES WITH ULTRAVIOLET LIGHT

An apparatus for generating ultraviolet light for irradiating a substrate. The apparatus includes a housing enclosing an interior space. The housing includes an inlet for receiving a cooling air flow, and a window configured to emit ultraviolet light and discharge the cooling air flow. A lamp bulb is mounted within the interior space between the inlet and the window. First and second microwave generators are mounted between the inlet and the lamp bulb. A plate is positioned between the inlet and the first and second microwave generators, the plate at least partially defining a plenum within the housing and including first and second openings generally aligned with the respective first and second microwave generators to direct first and second portions of the cooling air flow at the first and second microwave generators. 1. An apparatus for generating ultraviolet light for irradiating a substrate , the apparatus comprising:a housing enclosing an interior space, said housing including an inlet for receiving a cooling air flow, and a window configured to emit ultraviolet light and discharge the cooling air flow;a lamp bulb mounted within said interior space between said inlet and said window;first and second microwave generators, each mounted between said inlet and said lamp bulb; anda plate structure positioned between said inlet and said first and second microwave generators, said plate structure at least partially defining a plenum within said housing and including first and second openings generally aligned with the respective first and second microwave generators to direct first and second portions of the cooling air flow at the first and second microwave generators.2. The apparatus of claim 1 , wherein said housing further comprises a top side and a rear side claim 1 , said inlet located in said top side claim 1 , and said plate structure extends from said top side to said rear side claim 1 , and includes a section oriented at an acute angle relative to vertical ...

METHOD AND APPARATUS FOR IRRADIATING A SEMI-CONDUCTOR WAFER WITH ULTRAVIOLET LIGHT

An apparatus for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer. The apparatus includes a plenum and an array of nine RF irradiator units coupled with the plenum. Each irradiator unit includes a plasma lamp bulb and an RF generator operable to generate a radiation energy field to excite the plasma lamp bulb and emit the ultraviolet light. The nine irradiator units are arranged in three rows with three of the irradiator units in each row. 1. An apparatus for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer , the apparatus comprising:a plenum; and,an array of nine RF irradiator units coupled with the plenum, each irradiator unit including a plasma lamp bulb and an RF generator operable to generate a radiation energy field to excite said plasma lamp bulb and emit the ultraviolet light, wherein said nine RF irradiator units are arranged in three rows with three of said RF irradiator units in each row.2. The apparatus of claim 1 , wherein each of said nine irradiator units further comprises a single cavity unit having a single magnetron associated with a single irradiator chamber holding said plasma lamp bulb.3. The apparatus of claim 2 , wherein said lamp bulb is 6 inches long and said magnetron further comprises a 3 kilowatt magnetron.4. The apparatus of claim 1 , further comprising:a closed loop control coupled with said array of nine irradiator units, said closed loop control providing real time power adjustments for providing uniform distribution of radiation energy based on a selected power setting.5. The apparatus of claim 1 , wherein said RF generator further comprises a microwave generator.6. A method for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer claim 1 , the method comprising:arranging the 450 mm diameter semi-conductor wafer in line with an array of nine irradiator units arranged in three rows with three of the irradiator units in each row; ...

Nozzle assembly for electrostatic spray guns

NOZZLE ASSEMBLY FOR ELECTROSTATIC SPRAY GUNS Abstract of the Disclosure An air atomizing nozzle assembly for electrostatic spray guns is disclosed. The nozzle assembly includes a fluid tip through which liquid coating material is emitted, an air cap having opening through which pressurized air passes to atomize the liquid coating material emitted from the nozzle and having a pair of opposed air horns through which pressurized air passes to shape the atomized coating material into a flat fan spray pattern, and a retaining ring for securing the air cap to the gun barrel and fluid tip. An annular diffuser is located within an internal chamber in the nozzle assembly which receives the pressurized fan-shaping air from a passageway passing through the barrel of the gun, redirects it, and equalizes the flow of the fan-shaping air to the opposed air horns. The present invention is particularly useful in applications having low liquid coating material flow rates on the order of less than about 3 fluid ounces of material per minute.

Microwave excited ultraviolet lamp system with data logging and retrieval circuit and method

A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel.

Ultraviolet curing apparatus for continuous material

An ultraviolet radiation curing system (10) is disclosed for treating a substrate (26), such as fiber optic cable or silicone tubing. The system (10) comprises a processing chamber (12) allowing transport of a continuous piece of substrate (26) to be treated. As the substrate (26) moves through the processing chamber (12), ultraviolet radiation from a plasma lamp (34) activated by a microwave generator (36) treats the surface of the substrate (26). The system (10) comprises two elliptical reflectors (42, 46) of different sizes so that larger diameter substrates may be efficiently treated with ultraviolet radiation. The system (10) may also comprise an ultraviolet-transmissive conduit (54) enclosing the substrate (26) and split into a first portion (84) and a second portion (86), where the second portion (86) is movable from the first portion (84) to open the conduit (54) and allow insertion or alignment of the substrate (26) within the conduit (54) and processing chamber (12).

Microwave powered light assembly with a movable and air permeable shutter and a method of operating this light assembly

Mikrowellenbetriebene Leuchtenanordnung, umfassend: eine Gehäusestruktur; ein in der Gehäusestruktur befestigtes Magnetron; einen optischen Hohlraum in der Gehäusestruktur; einen plasmagefüllten Lampenkolben, der in dem optischen Hohlraum befestigt ist und ausgebildet ist, um durch das Magnetron aktiviert zu werden; gekennzeichnet durch einen ein Lüftungsgittermaterial aufweisenden Verschluss, der für eine Bewegung relativ zu dem optischen Hohlraum zwischen wenigstens zwei Positionen angeordnet ist, um in einer offenen Position eine Lichttransmission von dem Lampenkolben aus dem optischen Hohlraum heraus zu erlauben und in der geschlossenen Position eine Lichttransmission von dem Lampenkolben aus dem optischen Hohlraum heraus zu verhindern, wobei das Lüftungsgittermaterial ungehinderten Luftfluss durch sich hindurch erlaubt aber jegliche signifikante UV-Strahlungstransmission durch sich hindurch verhindert. A microwave powered light assembly comprising: a housing structure; a magnetron mounted in the housing structure; an optical cavity in the housing structure; a plasma-filled lamp envelope mounted in the optical cavity and adapted to be activated by the magnetron; characterized by a shutter having a ventilation grid material disposed for movement relative to the optical cavity between at least two positions to permit light transmission from the lamp vessel out of the optical cavity in an open position and light transmission from the lamp in the closed position To prevent lamp bulbs from the optical cavity out, wherein the ventilation grille material allows unimpeded air flow through it but prevents any significant UV radiation transmission through it.

Mikrowellenbetriebene Leuchtenanordnung mit einem beweglichen und luftdurchlässigen Verschluss und ein Verfahren zum Betrieb dieser Leuchtenanordnung