06-01-2022 дата публикации
Номер: US20220006008A1
Принадлежит:
TETRAMEM INC.
Interface engineering technologies relating to low current RRAM-based crossbar array circuits are disclosed. An apparatus, in some implementations, includes: a substrate; a bottom electrode formed on the substrate; a first geometric confining layer formed on the bottom electrode. The first geometric confining layer comprises a first plurality of pin-holes. The apparatus further comprises a base oxide layer formed on the first geometric confining layer and connected to a first top surface of the bottom electrode via the first pin-holes; and a top electrode formed on the base oxide layer. The base oxide layer comprises one of: TaO, HfO, TiO, ZrO, or a combination thereof; the first geometric confining layer comprises AlO, SiO, SiN, YO, GdO, SmO, CeO, ErO, or a combination thereof. 1. An apparatus comprising:a substrate;a bottom electrode formed on the substrate;a first geometric confining layer formed on the bottom electrode, wherein the first geometric confining layer comprises a first plurality of pin-holes;a base oxide layer formed on the first geometric confining layer and connected to a first top surface of the bottom electrode via the first pin-holes; and{'sub': x', 'x', 'x', 'x', '2', '3', '2', '3', '4', '2', '3', '2', '3', '2', '3', '2', '2', '3, 'a top electrode formed on the base oxide layer, wherein the base oxide layer comprises one of: TaO, HfO, TiO, ZrO, or a combination thereof, and wherein the first geometric confining layer comprises AlO, SiO, SiN, YO, GdO, SmO, CeO, ErO, or a combination thereof.'}2. The apparatus as claimed in claim 1 , wherein the base oxide layer is at least three times as thick as the first geometric confining layer.3. The apparatus as claimed in claim 1 , further comprising:a second geometric confining layer formed on the base oxide layer, wherein the second geometric confining layer comprises a second plurality of pin-holes, and the top electrode is formed on the second geometric confining layer and is connected to a second top ...
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