01-12-2016 дата публикации
Номер: US20160351472A1
Принадлежит:
An integrated circuit device is provided as follows. A connection terminal is disposed on a first surface of a semiconductor structure. A conductive pad is disposed on a second surface, opposite to the first surface, of the semiconductor structure. A through-substrate-via (TSV) structure penetrates through the semiconductor structure. An end portion of the TSV structure extends beyond the second surface of the semiconductor structure. The conductive pad surrounds the end portion of the TSV structure. The connection terminal is electrically connected to the conductive pad through the TSV structure 1. An integrated circuit device comprising:a semiconductor structure;a connection terminal disposed on a first surface of the semiconductor structure;a conductive pad disposed on a second surface, opposite to the first surface, of the semiconductor structure;a through-substrate-via (TSV) structure penetrating through the semiconductor structure, wherein an end portion of the TSV structure extends beyond the second surface of the semiconductor structure,wherein the conductive pad surrounds the end portion of the TSV structure, andwherein the connection terminal is electrically connected to the conductive pad through the TSV structure.2. The integrated circuit device of claim 1 , further comprising:an insulating layer disposed on the second surface of the semiconductor structure, a first portion surrounding a side wall of the conductive pad; and', 'a second portion overlapping vertically the conductive pad and surrounding a part of a side wall of the TSV structure, wherein the part of the side wall is disposed between the conductive pad and the second surface of the semiconductor structure., 'wherein the insulating layer comprises3. The integrated circuit device of claim 2 ,wherein the first portion and the second portion of the insulating layer are in contact with each other.4. The integrated circuit device of claim 2 ,wherein an upper surface of the first portion of the ...
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