27-10-2010 дата публикации
Номер: CN0101873110A
Принадлежит:
The invention discloses a radio frequency matcher which comprises a signal detection module, a control module and a transmission execution module, wherein the signal detection module is used for detecting a reflected signal fed back by a load and converting the reflected signal into a DC drive signal to output; the control module comprises an amplifying circuit for amplifying and then outputting the received DC drive signal; and the transmission execution module is used for receiving the DC drive signal amplified by the amplifying circuit and driving an impedance matcher to carry out impedance matching adjustment with the load. In the invention, as a directional coupler can dynamically sample the reflected signal in real time, a detector can output a detection signal immediately so as to drive two motors to rotate and adjust the impedance of a vacuum capacitance while the reflected signal is sampled, thus achieving real-time automatic matching control, being fast, reliable, efficient and ...
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