CARBURETOR, METHOD OF VAPORIZING MATERIAL SOLUTION, AND METHOD OF WASHING CARBURETOR

A carburetor for MOCVD capable of eliminating such a phenomenon that thin-film material is adhered to the peripheral area of the carburetor near an injection port, wherein carrier gas including material solution fed through a gas passage in which a carrier gas and small amount gas oxide supply part (11) is formed is fed to a vaporization part, a foaming prevention and material solution supply part (12) feeds material for preventing the generation of the air bubbles of the carrier gas including the material solution and the material solution to the carrier gas, a solvent vaporization suppressing cooling system (13) suppresses the vaporization of solvent, and a swirl flow preventing gas supply part (14) supplies gas for preventing the occurrence of swirl flow near the gas outlet of the vaporization part. An atomizing part (15) forms the carrier gas containing the material solution jetted from the carburetor (20) in an atomized state, and a high performance vaporization tube (16) for complete ...

HEAT TREATMENT DEVICE, HEAT TREATMENT METHOD, AND PROGRAM

The purpose of the present invention is to provide a heat treatment device which can reduce a temperature difference between surfaces of objects to be treated, a heat treatment method, and a program. The heat treatment device (1) comprises: heaters (11, 12, 13, 14, 15) which heat a reaction tube (2); a temperature lowering late model memorizing part which receives many pieces of semiconductor wafers (W) in the reaction tube (2), and memorizes a temperature lowering late model that displays the temperature and time in the reaction tube (2) until reaching a preset temperature; and a control part (50) which sets the temperature and time displayed on the temperature lowering late model in the reaction tube (2). In regards to the temperature lowering late model memorizing part, temperature lowering late is memorized as a plurality of different temperature lowering late models. The inside of the reaction tube (2) is divided by a plurality of zones, and each zone sets a temperature lowering late ...

Heat insulation structure and vertical heat treatment apparatus

Provided is a heat insulation structure used for a vertical heat treatment apparatus that performs a heat treatment on a substrate. The vertical heat treatment apparatus includes: a processing container having a double tube structure including an inner tube and an outer tube closed upward, the processing container having an opening at a lower end thereof; a gas supply section and exhaust section provided on a lower side of the processing container; a lid configured to introduce or discharge the substrate into or from the opening and to open/close the opening; and a heating section provided to cover the processing container from an outside. The heat insulation structure is provided between the inner tube and the outer tube.

Heat treatment apparatus, heat treatment method, and program

Disclosed is a heat treatment apparatus including: a heating unit that heats an inside of a processing chamber that accommodates a plurality of workpieces; a temperature drop rate model storing unit that stores a temperature drop rate model; and a heat treatment performing unit that sets the temperature drop rate model stored in the temperature drop model storing unit and sets the inside of the processing chamber to the temperature and the time represented in the temperature drop rate model. The temperature drop rate model storing unit stores a plurality of temperature drop rate models, each of which has a different temperature drop rate. The processing chamber is divided into a plurality of zones, and the temperature drop rate mode is set for each of the zones. The heat treatment performing unit sets different temperature drop rate models in a plurality of zones to heat the plurality of workpieces.

VAPORIZER, FILM FORMING APPARATUS INCLUDING THE SAME, METHOD OF VAPORIZATION AND METHOD OF FORMING FILM

A vaporizer permitting to keep track of the progression of clogging therein; and relevant method of vaporization. Further, a vaporizer permitting to remove clog prior to complete clogging without the need to disassemble the vaporizer; relevant method of vaporization. In particular, a vaporizer including a gas channel wherein a carrier gas is introduced from one end of the gas channel and wherein the carrier gas containing a raw solution is fed from the other end of the gas channel into a vaporization zone to effect vaporization, characterized in that the one end of the gas channel is fitted with not only a flow rate control unit (MFC) but also means for detecting the pressure within the gas channel. Further, the vaporizer is characterized by being fitted with means for introducing in the gas channel a chemical solution capable of dissolving any deposit or sticking matter lying in the gas channel. © KIPO & WIPO 2007 ...

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND PROGRAM

Disclosed is a heat treatment apparatus including: a heating unit that heats an inside of a processing chamber that accommodates a plurality of workpieces; a temperature drop rate model storing unit that stores a temperature drop rate model; and a heat treatment performing unit that sets the temperature drop rate model stored in the temperature drop model storing unit and sets the inside of the processing chamber to the temperature and the time represented in the temperature drop rate model. The temperature drop rate model storing unit stores a plurality of temperature drop rate models, each of which has a different temperature drop rate. The processing chamber is divided into a plurality of zones, and the temperature drop rate mode is set for each of the zones. The heat treatment performing unit sets different temperature drop rate models in a plurality of zones to heat the plurality of workpieces. 1. A heat treatment apparatus comprising:a heating unit configured to heat an inside of a processing chamber that accommodates a plurality of workpieces;a temperature drop rate model storing unit configured to store a temperature drop rate model that represents a temperature and a time of the inside of the processing chamber until the plurality of workpieces reach a predetermined temperature after the plurality of workpieces are accommodated in the processing chamber; anda heat treatment performing unit configured to set the temperature drop rate model stored in the temperature drop model storing unit and set the inside of the processing chamber to the temperature and the time represented in the temperature drop rate model,wherein the temperature drop rate model storing unit stores a plurality of temperature drop rate models each having a different temperature drop rate,the processing chamber is divided into a plurality of zones, and the temperature drop rate mode is set for each of the zones, andthe heat treatment performing unit sets, at least, a temperature drop rate ...

Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film

It is aimed at providing a vaporization apparatus and a vaporization method capable of keeping track of a progressive condition of clogging of the apparatus. It is also aimed at providing a vaporization apparatus and a vaporization method capable of eliminating clogging prior to occurrence of complete clogging, without disassembling the apparatus. It provides a vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of the gas passage, and means for detecting a pressure within the gas passage is provided. The vaporization apparatus is characterized in that the same is provided with means for introducing a chemical solution capable of dissolving therein matters deposited or sticked to the inside of the gas passage, into ...

IMAGE SCANNER

PURPOSE: To attain the image information of an original while being turned by providing an original positioning marker to an original placing table and giving an angular scale indicating the rotary angle of the table to a case supporting turnably the original placing table. CONSTITUTION: The original placing table 4 is made turnable to the original read section and the original positioning marker 13 is given to the original placing table 4 and the angular scale 14 indicating the rotary angle of the table 4 is provided on the case 1 supporting turnably the original table 4. After an original is set in matching with the original positioning marker 13 of the original placing table 4 made turnable, the table 4 has only to be turned horizontally in matching with the angular scale 14 of the case 1 to obtain the desired the rotary angle of the original quickly and easily. COPYRIGHT: (C)1989,JPO&Japio ...

HEAT INSULATION STRUCTURE AND VERTICAL HEAT TREATMENT APPARATUS

Provided is a heat insulation structure used for a vertical heat treatment apparatus that performs a heat treatment on a substrate. The vertical heat treatment apparatus includes: a processing container having a double tube structure including an inner tube and an outer tube closed upward, the processing container having an opening at a lower end thereof; a gas supply section and exhaust section provided on a lower side of the processing container; a lid configured to introduce or discharge the substrate into or from the opening and to open/close the opening; and a heating section provided to cover the processing container from an outside. The heat insulation structure is provided between the inner tube and the outer tube.

Heat treatment apparatus, heat treatment method, and program

Disclosed is a heat treatment apparatus including: a heating unit that heats an inside of a processing chamber that accommodates a plurality of workpieces; a temperature drop rate model storing unit that stores a temperature drop rate model; and a heat treatment performing unit that sets the temperature drop rate model stored in the temperature drop model storing unit and sets the inside of the processing chamber to the temperature and the time represented in the temperature drop rate model. The temperature drop rate model storing unit stores a plurality of temperature drop rate models, each of which has a different temperature drop rate. The processing chamber is divided into a plurality of zones, and the temperature drop rate mode is set for each of the zones. The heat treatment performing unit sets different temperature drop rate models in a plurality of zones to heat the plurality of workpieces.

Heat treatment apparatus, heat treatment method, and program

锂二次电池及其制造方法

... 本发明的锂二次电池包括含有能够可逆地吸藏和释放出Li的正极活性物质的正极、含有能够可逆地吸藏和释放出Li的负极活性物质的负极、和具有Li传导性的电解质。所述正极活性物质包括含有锂和过渡金属的氧化物，该氧化物中锂、过渡金属和氧的组成比例为选自以下a和b之中的至少一种状态：a：相对于锂、过渡金属、氧之间成立的化学计量比而言，氧元素数量不足；b：相对于锂、过渡金属、氧之间成立的化学计量比而言，锂过量。 ...

IMAGING APPARATUS

PROBLEM TO BE SOLVED: To provide a transformable imaging apparatus which can load a largely scaled lens. SOLUTION: This digital camera 1 is configured to photograph a still image or a moving image. This digital camera 1 is provided with: a rectangular flat disc-shaped body part 2; and a lens part 3 installed in the body part 2 so as to be rotatable by using a direction crossing the extended direction of the body part 2 as rotary axes 40A and 40B. The lens part 3 is formed like a columnar shape extended to the direction crossing the extended direction of the body part 2. The top end side of the lens part 3 is provided with a largely scaled lens 31, and the body part 2 is provided with a display part 23 for displaying an image. In this case, it is possible to selectively set a state that the extended direction of the lens part 3 is made almost parallel to the extended direction of the body part 2 and a state that the extended direction of the lens part 3 is made almost perpendicular to the ...

PORTABLE TERMINAL EQUIPMENT

PURPOSE: To execute transmission and reception with a host computer at real time in a moving destination by integrating a radio telephone communication means into a portable terminal equipment. CONSTITUTION: In the internal part of a main body 1, a CPU 50, a ROM 51, a RAM 52, an input control part 53, a display control part 55, a display driver 56, a display 3', a MODEM 58, an NCU 59, a telephone circuit part 60 and a transmitter and receiver 61, etc., are mounted. These circuits are wholly arranged under the control of the CPU 50. For function as the portable terminal equipment, a program stored in the ROM 51 is readout by the command of the CPU 50 and the function is executed based on this program. Thus, the data communication with the host computer can be executed at real time in the moving destination. COPYRIGHT: (C)1989,JPO&Japio ...

Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film

It is aimed at providing a vaporization apparatus and a vaporization method capable of keeping track of a progressive condition of clogging of the apparatus. It is also aimed at providing a vaporization apparatus and a vaporization method capable of eliminating clogging prior to occurrence of complete clogging, without disassembling the apparatus. It provides a vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of the gas passage, and means for detecting a pressure within the gas passage is provided. The vaporization apparatus is characterized in that the same is provided with means for introducing a chemical solution capable of dissolving therein matters deposited or sticked to the inside of the gas passage, into the gas passage.

Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film

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