28-02-2019 дата публикации
Номер: US20190067523A1
A vertical ultraviolet light-emitting diode has, on an aluminum polar plane of an n-type AlN single crystal substrate, a layer represented by n-type AlGaN (wherein X is a rational number satisfying 0.5≤X≤1.0), an active layer, a layer represented by p-type AlGaN (wherein Y is a rational number satisfying 0.5≤Y≤1.0) and a p-type GaN layer in this order and which is equipped with a p-electrode formed on the p-type GaN layer and an n-electrode partially provided on a plane on the opposite side to the aluminum polar plane of the n-type AlN single crystal substrate, preferably an n-electrode formed by providing at least one opening functioning as a light extraction window, wherein the shortest distance between the n-electrode and an arbitrary point in a portion where the n-electrode is not provided, is not more than 400 μm. 1. A vertical ultraviolet light-emitting diode having an emission peak wavelength in range of 210 to 300 nm , comprising:{'sub': X', '1-X', 'Y', '1-Y, 'on an aluminum polar plane of an n-type AlN single crystal substrate, a layer represented by n-type AlGaN, wherein X is a rational number satisfying 0.5≤X≤1.0, an active layer, a layer represented by p-type AlGaN, wherein Y is a rational number satisfying 0.5≤Y≤1.0, and a p-type GaN layer in this order,'}the ultraviolet light-emitting diode is equipped with a p-electrode formed on the p-type GaN layer and an n-electrode partially provided on a plane on the opposite side to the aluminum polar plane of the n-type AlN single crystal substrate, andthe shortest distance between the n-electrode and an arbitrary point in a portion where the n-electrode is not provided, the portion being on the plane on the opposite side, is not more than 400 μm.2. A vertical ultraviolet light-emitting diode having an emission peak wavelength in range of 210 to 300 nm , comprising:{'sub': X', '1-X', 'Y', '1-Y, 'on an aluminum polar plane of an n-type AlN single crystal substrate, a layer represented by n-type AlGaN, wherein x ...
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