05-05-2023 дата публикации
Номер: CN116068224A
Принадлежит:
The invention provides a precision controllable modulation optical micro-electro-mechanical structure, which comprises a suspension mass block, a plurality of suspension tethers, a photonic crystal microcavity, a suspension optical waveguide, a first connecting lacing, a suspension beam, a second connecting lacing, a rigid block body and a capacitor, and is characterized in that a first capacitor end of the capacitor is fixed on the suspension beam, and a second capacitor end is fixed on the rigid block body. The optical micro-cavity is modulated by using a capacitance modulation method, so that the optical micro-cavity produced by a photoetching process can be corrected, the actual resonant wavelength of the photonic crystal micro-cavity is perfectly matched with the designed working wavelength, and the offset of the resonant wavelength caused by the change of a working environment can be adjusted, thereby improving the measurement precision. According to the invention, the capacitor only ...
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