18-04-2023 дата публикации
Номер: CN115976483A
Принадлежит:
The invention discloses a high-power ceramic heating body and a preparation method thereof, and relates to the technical field of ceramic heating body production. The invention relates to a high-power ceramic heating body and a preparation method thereof, the high-power ceramic heating body comprises a ceramic substrate, a transition layer, a heating layer and a metal electrode, and the preparation method comprises the following steps: S1, pretreatment; s2, a transition layer is deposited, a target material A is adopted, vacuum magnetron sputtering is conducted on the pretreated ceramic substrate, the power is 200-400 W, and the time is 5-30 min; s3, a heating layer is deposited, a B target material is adopted, vacuum magnetron sputtering is conducted on the ceramic substrate, the power ranges from 300 W to 500 W, the time ranges from 60 min to 120 min, and the heating layer is deposited on the transition layer; s4, printing a metal electrode; the target material A is one of a nickel target ...
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