15-01-2015 дата публикации
Номер: US20150018261A1
A post chemical-mechanical-polishing (post-CMP) cleaning composition comprising: (A) at least one compound comprising at least one thiol (—SH), thioether (—SR) or thiocarbonyl (>C═S) group, wherein Ris alkyl, aryl, alkylaryl or arylalkyl, (B) at least one sugar alcohol which contains at least three hydroxyl (—OH) groups and does not comprise any carboxylic acid (—COOH) or carboxylate (—COO—) groups, and (C) an aqueous medium. 1. A post chemical-mechanical-polishing (post-CMP) cleaning composition , comprising:{'sup': 1', '1, '(A) at least one compound comprising at least one thiol (—SH), thioether (—SR) or thiocarbonyl (>C═S) group, wherein Ris alkyl, aryl, alkylaryl or arylalkyl,'}(B) erythritol, threitol, a stereoisomer thereof, or a mixture thereof, and(C) an aqueous medium.2. The composition according to claim 1 , wherein the compound (A) further comprises at least one amino (—NH claim 1 , —NHR claim 1 , or —NRR) group claim 1 , and wherein{'sup': 1', '2', '3', '4, 'R, R, Rand Rare, independently from each other, alkyl, aryl, alkylaryl, or arylalkyl.'}3. The composition according to claim 2 , wherein the compound (A) is thiourea or a derivative thereof.4. The composition according to claim 2 , wherein compound (A) is an amino acid comprising at least one thiol (—SH) claim 2 , thioether (—SR) group claim 2 , or a derivative thereof claim 2 ,{'sup': '1', 'wherein Ris alkyl, aryl, alkylaryl or arylalkyl.'}5. The composition according to claim 4 , wherein the compound (A) is cysteine claim 4 , cystine claim 4 , glutathione claim 4 , N-acetylcysteine claim 4 , or a derivative thereof.6. (canceled)7. (canceled)8. (canceled)9. (canceled)10. (canceled)11. (canceled)12. The composition according to claim 1 , wherein the composition further comprises(D) at least one metal chelating agent.13. The composition according to claim 12 , wherein at least one metal chelating agent (D) is selected from the group consisting of propane-1 claim 12 ,2 claim 12 ,3-tricarboxylic acid ...
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