12-07-2018 дата публикации
Номер: US20180195200A1
Принадлежит:
A method for processing an electronic component using a supercritical fluid includes introducing the supercritical fluid into a cavity. The supercritical fluid is doped with a hydrogen isotope-labeled compound, an organic metal compound, an element selecting from a halogen element, oxygen, sulfur, selenium, phosphorus or arsenic, or a compound containing the element. An electronic component in the cavity is modified by the supercritical fluid at a temperature above a critical temperature of the supercritical fluid and a pressure above a critical pressure of the supercritical fluid. 1. A method for processing an electronic component using a supercritical fluid , comprising:introducing a supercritical fluid into a cavity, wherein the supercritical fluid is doped with a hydrogen isotope-labeled compound; andmodifying an electronic component in the cavity by the supercritical fluid at a temperature above a critical temperature of the supercritical fluid and a pressure above a critical pressure of the supercritical fluid.2. The method for processing the electronic component using the supercritical fluid as claimed in claim 1 , wherein the hydrogen isotope-labeled compound is a protium-labeled compound or a deuterium-labeled compound.3. The method for processing the electronic component using the supercritical fluid as claimed in claim 1 , wherein the hydrogen isotope-labeled compound is selected from the group consisting of LiH claim 1 , NaH claim 1 , KH claim 1 , CaH claim 1 , MgH claim 1 , BeH claim 1 , PH claim 1 , BH claim 1 , CH claim 1 , HF claim 1 , AsH claim 1 , NH claim 1 , AlH claim 1 , HS claim 1 , HSe claim 1 , HCl claim 1 , HBr claim 1 , HI claim 1 , NHCl and CO(NH).4. The method for processing the electronic component using the supercritical fluid as claimed in claim 1 , further comprising introducing an electromagnetic wave into the cavity claim 1 , wherein the electronic component is modified by the supercritical fluid together with the electromagnetic ...
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