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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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03-10-2002 дата публикации

IDENTIFICATION AND ENUMERATION OF COCCIDIAL SPOROCYSTS

Номер: WO0002077603A3
Автор: PFANNENSTIEL, Mary, Ann
Принадлежит:

A method for the identification and enumeration by flow cytometry of species of coccidial sporocysts of the genus Eimeria is disclosed. The method is useful in the identification and enumeration of coccidial protozoa in environmental samples, designing treatment programs for animals infected with coccidial protozoa, and for quality control of preparations containing protozoa. See Figure 1.

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Номер записи: 1
10-02-2010 дата публикации

СИСТЕМА ДИСТАНЦИОННОЙ ИДЕНТИФИКАЦИИ И КОНТРОЛЯ ТЕХНОЛОГИЧЕСКОГО ПРОЦЕССА ТОПЛИВНОЙ ЗАПРАВКИ ЖЕЛЕЗНОДОРОЖНЫХ ТРАНСПОРТНЫХ СРЕДСТВ, УСТРОЙСТВО АВТОМАТИЗИРОВАННОГО СБОРА, ОБРАБОТКИ, УЧЕТА И КОНТРОЛЯ ИДЕНТИФИКАЦИОННОЙ ИНФОРМАЦИИ, ГОРЛОВИНА ТОПЛИВНОГО БАКА И КРАН-ПИСТОЛЕТ ТОПЛИВОРАЗДАТОЧНОЙ КОЛОНКИ

Номер: RU0000091436U1
Автор: Малышева Наталья Ивановна, Тимченко Александр Юрьевич, Троицкий Анатолий Александрович
Принадлежит: Общество с ограниченной ответственностью "Центр транспортных технологий" (ООО "ЦТТ")

1. Система дистанционной идентификации и контроля технологического процесса топливной заправки железнодорожных транспортных средств, включающая в качестве устройства идентификации объектов установленный, по меньшей мере, на одном тепловозе кодовый бортовой датчик и стационарную систему обработки информации с возможностью ее последующей визуализации, отличающаяся тем, что дополнительно снабжена системой идентификации объекта заправки на экипировочной позиции, содержащей размещенную на горловине топливного бака идентификационную бесконтактную метку, взаимодействующую с устройством считывания идентификационной информации на кран-пистолете топливораздаточной колонки при установке последнего на горловине топливного бака, кроме того, кодовый бортовой датчик тепловоза через систему автоматической идентификации подвижного состава (САИ ПС) связан с системой автоматизированного учета дизельного топлива (САУ ДТ), при этом САИ ПС, САУ ДТ и система идентификации объекта заправки на экипировочной позиции соединены с устройством автоматизированного сбора, обработки, учета и контроля идентификационной информации. 2. Система по п.1, отличающаяся тем, что связь кодового бортового датчика с антенной САИ ПС и связь идентификационной бесконтактной метки горловины топливного бака с устройством считывания идентификационной информации осуществляется с помощью электромагнитного сигнала в диапазоне волн сверхвысокой частоты. 3. Устройство автоматизированного сбора, обработки, учета и контроля идентификационной информации системы дистанционной идентификации и контроля технологического процесса топливной заправки железнодорожных транспортных средств, содержащее размещенные в корпусе блоки функциональных подсистем, связанные сетью передачи данных с системами и средствами регистрации физических параметров технологического процесса, а также с аппаратными и программными интерфейсами, отличающаяся тем, что устройство связано с системой автоматической идентификации подвижного состава (САИ ПС), с ...

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Номер записи: 2
27-01-2011 дата публикации

УСТРОЙСТВО ИЗГОТОВЛЕНИЯ ИГЛ ДЛЯ СКАНИРУЮЩЕГО ТУННЕЛЬНОГО МИКРОСКОПА ИЗ ВОЛЬФРАМОВОЙ ПРОВОЛОКИ

Номер: RU0000101840U1
Автор: Соколов Игорь Викторович
Принадлежит: Соколов Игорь Викторович

1. Устройство изготовления игл для сканирующего туннельного микроскопа из вольфрамовой проволоки, содержащее устройство подачи вольфрамовой проволоки, блок электрохимического травления с щелочью и источник переменного тока, отличающееся тем, что оно содержит электромагнитный клапан, к которому крепится свободный конец проволоки, и соединенный с ним блок управления клапаном, при этом один конец источника питания подключен к нижней части проволоки, а второй конец источника питания подключается к электроду травления и параллельно ему - к верхней части проволоки, с включенным в электрическую цепь блоком управления клапаном, при этом вольфрамовая проволока в блоке электрохимического травления частично закрыта от воздействия щелочи. 2. Устройство по п.1, отличающееся тем, что в блоке электрохимического травления присутствует сквозное отверстие для вольфрамовой проволоки. 3. Устройство по п.1, отличающееся тем, что вольфрамовая проволока в блоке электрохимического травления частично закрыта от воздействия щелочи инертным к щелочи материалом. 4. Устройство по п.1, отличающееся тем, что к нижнему концу проволоки крепится груз или пружина на растяжение. 5. Устройство по п.1, отличающееся тем, что содержит блок отключения питания переменного напряжения от нижнего конца проволоки. 6. Устройство по п.1, отличающееся тем, что оно дополнительно содержит катушку для вольфрамовой проволоки, горелку для подогрева вольфрамовой проволоки и механизм протяжки вольфрамовой проволоки. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) 101 840 (13) U1 (51) МПК G01Q 10/00 (2010.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ, ПАТЕНТАМ И ТОВАРНЫМ ЗНАКАМ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (21)(22) Заявка: 2010102129/28, 26.01.2010 (24) Дата начала отсчета срока действия патента: 26.01.2010 (73) Патентообладатель(и): Соколов Игорь Викторович (RU) R U Приоритет(ы): (22) Дата подачи заявки: 26.01.2010 (72) Автор(ы): Соколов Игорь Викторович (RU) (45) Опубликовано: 27.01.2011 1 0 1 8 4 0 R U Формула ...

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Номер записи: 3
17-05-2012 дата публикации

System and method for reducing the amplitude of thermally induced vibrations in microscale and nanoscale systems

Номер: US20120118036A1
Автор: Jason Vaughn Clark
Принадлежит: PURDUE RESEARCH FOUNDATION

The present invention generally relates to a system and method for improving the precision and applicability of microscale and nanoscale electromechanical systems. The system includes a device (such as an electrostatic sensor) for measuring parameters of a force associated with noise-induced background readings of a microscale or nanoscale electromechanical system, and a device (such as an electrostatic actuator) for applying a countering force to the electromechanical system.

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Номер записи: 4
09-08-2012 дата публикации

Fast-scanning spm scanner and method of operating same

Номер: US20120204295A1
Автор: Craig Cusworth, Craig Prater, Nghi Phan
Принадлежит: BRUKER NANO INC

A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

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Номер записи: 5
29-11-2012 дата публикации

Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam

Номер: US20120304341A1
Автор: Jerome Polesel
Принадлежит: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

An electronic control device for a local probe with a piezoelectric resonator and preamplification and processing of its signals, the probe being configured for local measurement of physical properties of a sample in an environment with a particle beam directed towards the probe, in which an excitation voltage generated by an excitation mechanism is applied to the piezoelectric resonator through a first galvanic isolation transformer, and a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to a preamplification device on the output side.

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Номер записи: 6
06-12-2012 дата публикации

Multi-axis actuating apparatus

Номер: US20120306317A1
Автор: En-Te Hwu, Ing-Shouh Hwang
Принадлежит: Academia Sinica

A multi-axis actuating apparatus for a nano-positioning apparatus includes a movable element attached to a sample platform, a plurality of driving elements, and a plurality of actuators. The driving elements frictionally engage the movable element and are configured to selectively move the movable element along a first direction. The plurality of actuators move the plurality of driving elements when driving signals are applied to the plurality of actuators. Different driving signals may be applied to the plurality of actuators to cause different movement of the driving elements such that the movable element has different displacements in different directions along the plurality of driving elements. The movable element is titled due to the different displacements.

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Номер записи: 7
31-01-2013 дата публикации

Semi-auto scanning probe microscopy scanning

Номер: US20130031680A1
Автор: Huiwen Liu, Peter Gunderson
Принадлежит: SEAGATE TECHNOLOGY LLC

A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically.

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Номер записи: 8
11-07-2013 дата публикации

Mems actuator device with integrated temperature sensors

Номер: US20130175952A1
Автор: Niladri Sarkar
Принадлежит: ICSPI Corp

An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.

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Номер записи: 9
15-08-2013 дата публикации

Scanning Probe Microscope and Surface Shape Measuring Method Using Same

Номер: US20130212749A1
Автор: Nakata Toshihiko, Tachizaki Takehiro, Watanabe Masahiro
Принадлежит: HITACHI LTD.

It has been difficult to highly accurately measure the profiles of samples using scanning probe microscopes at the time when scanning is performed due to scanning mechanism fluctuations in the non drive direction, i.e., vertical direction. The present invention is provided with, on the rear side of a sample stage, a high-accuracy displacement gauge for measuring fluctuation in the non drive direction, i.e., vertical direction, at the time when the sample stage is being scanned in the horizontal directions, and as a result, highly accurate planarity evaluation with accuracy of sample nm-order or less is made possible by correcting sample surface shape measurement results obtained using a probe. 1. A scanning probe microscope which measures a surface shape of a sample by bringing a probe into proximal to or contact with the surface of the sample , comprising:a probe;a probe holder that holds the probe;probe drive unit that drives the probe holder at least in a vertical direction;first measurement unit which measures a position of the probe drive unit in the vertical direction;sample stage unit movable in a plane, on which a sample is mounted;second measurement unit which measures a position of the sample stage unit in a direction orthogonal to the plane;vertical rough stage unit configured to change a vertical relative position between the probe held by the probe holder and the sample stage unit;horizontal rough stage unit configured to change a horizontal relative position between the probe held by the probe holder and the sample stage unit;detection unit which detects a contact state between the sample and the probe held by the probe holder; andimage generation unit that generates an image of the sample surface using information obtained through measurement performed by the first measurement unit, information obtained through measurement performed by the second measurement unit, and information obtained through detection performed by the detection unit.2. The ...

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Номер записи: 10
02-01-2014 дата публикации

METHOD OF PREPARING AND IMAGING A LAMELLA IN A PARTICLE-OPTICAL APPARATUS

Номер: US20140007307A1
Автор: Foord David, Janssen Bart Jozef, JR. Brian Roberts, Lazic Ivan, Miller Thomas G., Routh, Tiemeijer Peter Christiaan
Принадлежит:

The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator. 1. A method of preparing and imaging a sample using a particle-optical apparatus , the particle-optical apparatus comprising:an electron column mounted on an evacuable sample chamber, the electron column equipped to produce a beam of electrons, the beam of electrons for irradiating the sample,a camera system for forming an electron image of the diffraction pattern caused by electrons transmitted through the sample, anda manipulator for positioning the sample in the sample chamber with respect to the beam of electrons, preparing the sample,', 'positioning the sample in the sample chamber with respect to the beam of electrons,', 'forming an electron image on the camera system using the electron column, and', 'deriving a first ptychographic image of the sample from said first electron image, the ptychographic image the result of an iterative converging process in which estimates of the sample are formed,, 'the method comprising the steps of the particle-optical apparatus comprises a focused ion beam column mounted on the sample chamber for producing a focused ion beam, the focused ion beam for machining the sample,', 'preparing the sample involves positioning the sample with respect to the ion beam and thinning the sample using the focused ion beam,', 'after forming the first image, a layer of the sample is removed using the ion beam, after which a second electron image is formed using the electron column, and', 'a second ptychographic image of the sample is derived using the second electron image, and', 'the sample is kept under vacuum at least from the moment that the sample is prepared by thinning the sample with the focused ion beam until the moment that the second electron image is taken., 'wherein2. The method of in which the first ptychographic image or one of the guesses ...

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Номер записи: 11
23-01-2014 дата публикации

ADAPTIVE MODE SCANNING PROBE MICROSCOPE

Номер: US20140026263A1
Автор: Humphris Andrew
Принадлежит: Infinitesima Limited

A scanning probe microscope comprising a probe that is mechanically responsive to a driving force. A signal generator provides a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample. A detection system is arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam. Image processing apparatus is arranged to use the height signal to form an image of the sample. Signal processing apparatus is arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample. In response to detection of the surface position, the signal processing apparatus prompts the signal generator to modify the drive signal. 1. A scanning probe microscope comprising:a probe that is mechanically responsive to a driving force,a signal generator for providing a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample;a detection system arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam;image processing apparatus that is arranged to use the height signal to form an image of the sample; andsignal processing apparatus arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample; wherein in response to detection of the surface position the signal processing apparatus prompts the signal generator to modify the drive signal.2. A scanning probe microscope according to in which the signal processing apparatus is arranged to monitor the height signal as the probe approaches a sample and to detect the surface position at which the probe interacts with the sample.3. A ...

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Номер записи: 12
03-01-2019 дата публикации

LINEAR STRUCTURE FOR DISPLACEMENT TRANSMISSION, AND ONE-DIMENSIONAL AND THREE-DIMENSIONAL MICRO MOVEMENT DEVICE USING SAME

Номер: US20190006144A1
Автор: Kim Dal Hyun, PARK Byong Chon, SHIN Chae Ho
Принадлежит:

Provided is a linear structure for displacement transmission having a structure that enables a desired movement to be performed smoothly while minimizing complexity of a system through a simple structure in performing a precise and fine movement, and a one-dimensional and three-dimensional micro movement device using the same. 1. A linear structure for displacement transmission in which a spring constant in a second direction and a third direction which are perpendicular to a first direction is smaller than the spring constant in the first direction such that the linear structure for displacement transmission is bent in the second direction or the third direction when force in the second direction or the third direction is applied and transmits a displacement in the first direction from an end of one side to an end of the other side when force in the first direction is applied , the linear structure for displacement transmission comprising:a displacement transmission plate formed in a surface shape and disposed on a plane in the second direction and the third direction; anda plurality of displacement transmission rods formed in a linear shape extended in the first direction and having ends of one side connected to the displacement transmission plate,wherein the plurality of displacement transmission rods are disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.2. The linear structure for displacement transmission of claim 1 , wherein the linear structure for displacement transmission is formed so that a ratio of an equivalent diameter of a cross section to a length of the displacement transmission rod is within the range of 1 to 10% claim 1 , andthe displacement transmitted by the linear structure for displacement transmission is within the range of 0.001 to 1% of the length of the displacement transmission rod.3. The linear structure for displacement ...

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Номер записи: 13
14-01-2016 дата публикации

Three-Dimensional Fine Movement Device

Номер: US20160011231A1
Автор: Shigeno Masatsugu, WATANABE Kazutoshi, WATANABE Masafumi
Принадлежит: HITACHI HIGH-TECH SCIENCE CORPORATION

A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member. 1. A three-dimensional fine movement device comprising:a moving body;a fixation member to which the moving body is fixed;a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween;a base member to which the three-dimensional fine movement unit is fixed; anda movement amount detector that is fixed to the base member and is configured to detect a movement amount of the fixation member.2. The three-dimensional fine movement device according to claim 1 ,wherein the movement amount detector is configured to detect a detection surface of the fixation member.3. The three-dimensional fine movement device according to claim 2 ,wherein a plurality the detection surfaces are arranged on the respective axes of the three-dimensional axes, and the movement amount detector is provided on the respective detection surface on the respective axes to detect the corresponding detection surfaces.4. The three-dimensional fine movement device according to claim 1 ,wherein the movement amount detector is a non-contact sensor.5. The three-dimensional fine movement device according to claim 4 ,wherein the non-contact sensor is a sensor that uses electrostatic capacitance, optical interference or optical diffraction.6. The three-dimensional fine movement device according to claim 1 ,wherein the moving body is a cantilever that comes into contact with ...

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Номер записи: 14
09-01-2020 дата публикации

SCANNING PROBE SYSTEM

Номер: US20200011893A1
Автор: Humphris Andrew
Принадлежит:

A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip. 1. A scanning probe system comprising: a probe comprising a cantilever extending from a base to a free end , and a probe tip carried by the free end of the cantilever; a first driver with a first driver input , the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input; a second driver with a second driver input , the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input; a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and a surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample , wherein the control system is also arranged to modify the second drive signal ...

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Номер записи: 15
19-01-2017 дата публикации

Probe system with multiple actuation locations

Номер: US20170016932A1
Автор: Andrew Humphris
Принадлежит: INFINITESIMA LTD

A probe system comprising a probe with first and second arms and a probe tip carried by the first and second arms. An illumination system is arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power. An actuation controller is arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe and thus height and lateral position of the tip. The first and second arms are mirror images of each other on opposite sides of a plane of symmetry passing through the probe tip. A detection system is provided which not only measures a height of the probe tip to generate a height signal, but also measures a tilt angle of the probe to generate a tilt signal from which the lateral position of the tip can be determined.

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Номер записи: 16
19-01-2017 дата публикации

Scanning ion conductance microscopy

Номер: US20170016933A1
Автор: Andrew James Richardson
Принадлежит: Openiolabs Ltd

A method for interrogating a surface of a sample bathed in electrolyte solution using SICM, comprising: controlling the potential between first and second electrodes bathed in the electrolyte solution to induce an ion current in the electrolyte solution, a submerged portion of the first electrode being contained within a micropipette and the second electrode being external to the micropipette; recording the ion current whilst controlling the micropipette to move with respect to a stage supporting the sample; and determining, from the ion current and calibration data, the surface height profile of the sample. Said potential can be controlled according to a spread spectrum modulated signal. Said micropipette motion can be according to an AC mode pattern having a modulation frequency greater than a resonant frequency of an assembly of the micropipette, first electrode and a first piezoelectric actuator configured to control z-axis motion of said micropipette.

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Номер записи: 17
25-01-2018 дата публикации

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANALYSIS USING SECONDARY ION MASS SPECTROMETRY

Номер: US20180025897A1
Автор: BEVIS Chris, NEWCOME Bruce H, REED David A., SCHUELER Bruno W, Smedt Rodney
Принадлежит:

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA). 1. A secondary ion mass spectrometry (SIMS) system , comprising:a sample stage;a primary ion source and ion optics for producing and directing a primary ion beam to the sample stage;an extraction lens directed at the sample stage, the extraction lens configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage; anda magnetic sector spectrograph coupled to the extraction lens along an optical path of the SIMS system, the magnetic sector spectrograph comprising an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).2. The SIMS system of claim 1 , wherein the sample stage contains a Faraday cup.3. The SIMS system of claim 1 , further comprising:a plurality of detectors spaced along a plane of the magnetic sector spectrograph.4. The SIMS system of claim 3 , wherein the plurality of detectors is for detecting a corresponding plurality of different species from a beam of the secondary ions emitted from the sample.5. The SIMS system of claim 1 , further comprising:a first additional ESA coupled along the optical path of the SIMS system, between the extraction lens and the ESA of the magnetic sector spectrograph; anda second additional ESA coupled along the optical path of the SIMS system, between the first additional ESA and the ESA of the ...

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Номер записи: 18
23-01-2020 дата публикации

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

Номер: US20200025796A1
Автор: Baur Christof, Matejka Ulrich
Принадлежит:

The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip. 1. An apparatus for a scanning probe microscope , having:a. at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip;b. at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; andc. at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.2. The apparatus according to claim 1 , wherein the at least one first reflective area is arranged on a side claim 1 , opposite the first measuring tip claim 1 , of the at least one first cantilever.3. The apparatus according to claim 1 , wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion claim 1 , and wherein the first reflective portion and the second reflective portion are not arranged in a plane.4. The apparatus according to claim 3 , wherein the at least one second reflective portion is arranged tilted by an angle β in relation to the at least one first reflective portion and/or wherein the at least one second reflective portion is rotated through an angle α relative to a longitudinal axis of the cantilever.5. The apparatus ...

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Номер записи: 19
05-02-2015 дата публикации

IONIZATION APPARATUS, MASS SPECTROMETER INCLUDING IONIZATION APPARATUS, AND IMAGE FORMING SYSTEM

Номер: US20150034821A1
Автор: Kyogaku Masafumi, Otsuka Yoichi
Принадлежит:

Provided is an ionization apparatus including: a holder configured to hold a sample; a probe configured to determine a part to be ionized of the sample held by the holder; an extract electrode configured to extract ionized ions of the sample; a liquid supply unit configured to supply liquid to a part of a region of the sample; and a unit configured to apply a first voltage between the probe and the extract electrode, in which the first voltage is pulse-modulated. 1. An ionization apparatus comprising:a holder configured to hold a sample;a probe configured to determine a part to be ionized of the sample held by the holder;an extract electrode configured to extract ionized ions of the sample;a liquid supply unit configured to supply liquid to a part of a region of the sample; anda unit configured to apply a first voltage between the probe and the extract electrode,wherein the first voltage is pulse-modulated.2. The ionization apparatus according to claim 1 , wherein a liquid bridge is formed between an end portion of the probe and the sample held by the holder.3. The ionization apparatus according to claim 1 , further comprising a unit configured to apply a second voltage between the probe and the holder.4. The ionization apparatus according to claim 1 , wherein the second voltage is pulse-modulated.5. The ionization apparatus according to claim 4 , wherein the pulse-modulated first voltage and the pulse-modulated second voltage are applied in synchronization with each other.6. The ionization apparatus according to claim 2 , wherein a time period is set claim 2 , in which one of the first voltage and the second voltage is only applied.7. The ionization apparatus according to claim 2 , wherein the second voltage is lower than the first voltage.8. The ionization apparatus according to claim 1 , further comprising a displacement measuring unit configured to measure a displacement of the probe or the sample claim 1 ,wherein a feedback control of a position of a moving ...

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Номер записи: 20
06-02-2020 дата публикации

Scanning Probe System

Номер: US20200041540A1
Автор: Humphris Andrew
Принадлежит:

A method of scanning a feature with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever. An orientation of the probe is measured relative to a reference surface to generate a probe orientation measurement. The reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis. A shape of the cantilever is changed in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle. A sample surface is scanned with the probe, wherein the sample surface defines a sample surface axis which is normal to the sample surface and the probe tip has a scanning tilt angle relative to the sample surface axis. During the scanning of the sample surface the cantilever mount is moved so that the probe tip is inserted into a feature in the sample surface with the scanning tilt angle below the first reference tilt angle. 1. A method of scanning a feature with a probe , the probe comprising a cantilever mount , a cantilever extending from the cantilever mount to a free end , and a probe tip carried by the free end of the cantilever , the method comprising: measuring an orientation of the probe relative to a reference surface to generate a probe orientation measurement , wherein the reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis; changing a shape of the cantilever in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle; and ...

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Номер записи: 21
06-02-2020 дата публикации

Nanoscale Dynamic Mechanical Analysis via Atomic Force Microscopy (AFM-nDMA)

Номер: US20200041541A1
Автор: Osechinskiy Sergey, Pittenger Bede, Ruiter Anthonius, Syed-Amanulla Syed-Asif
Принадлежит:

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device. 1. A method for determining a mechanical property of a soft viscoelastic sample with an atomic-force-microscope (AFM)-based system , the method comprising:repositioning a probe of the system towards a surface of the sample until a cantilever of the probe is deflected by a pre-determined amount from a nominal orientation of the cantilever; i) an average sample-loading force, generated by the probe, and', 'ii) an area of contact between a tip of the probe and the surface to be substantially constant;, 'modifying said repositioning to maintain at least one of'}measuring, at a set of pre-defined frequencies, a viscoelastic parameter of the surface while compensating for at least one of the creep of the surface and a spatial drift of the system; andproducing an output, perceivable by a user and representing said viscoelastic parameter as a function of at least one of variable conditions of said measuring.2. The method according to claim 1 , wherein said measuring is carried out simultaneously at multiple frequencies from said set of pre-defined frequencies.3. The method according to claim 1 , wherein said modifying includes modulating a sample-loading force applied by the probe to the sample at a given excitation frequency from said set of pre-defined frequencies.4. The method according to claim 1 , wherein said modifying includes maintaining the average sample-loading force substantially constant while a separation between the surface and the base of the probe is being modulated.5. The method according to claim 1 , wherein measuring the viscoelastic parameter includes performing dual-channel demodulation of ...

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Номер записи: 22
03-03-2022 дата публикации

Method and Apparatus for Aligning a Probe for Scanning Probe Microscopy to the Tip of a Pointed Sample

Номер: US20220065895A1
Автор: Fleischmann Claudia, Op de Beeck Jonathan, Paredis Kristof, Vandervorst Wilfried
Принадлежит:

Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.

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Номер записи: 23
14-02-2019 дата публикации

Characterizing a Height Profile of a Sample by Side View Imaging

Номер: US20190049486A1
Автор: BRANDNER Markus, GODEC-SCHÖNBACHER Martin, Gomez-Casado Alberto, Koller Daniel
Принадлежит:

A scanning probe microscope, in particular an atomic force microscope, for analyzing a sample by moving a probe and the sample relative to one another, wherein the scanning probe microscope includes a detection unit with a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view, and a determining unit for determining information indicative of a profile of at least part of a surface of the sample based on the detected image. 1. A scanning probe microscope , in particular an atomic force microscope , for analyzing a sample by moving a probe and the sample relative to one another , the scanning probe microscope comprises:a detection unit which comprises a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view; anda determining unit for determining information indicative of a profile of at least part of a surface of the sample based on the detected image.2. The scanning probe microscope according to claim 1 , wherein the determining unit is configured for determining information of at least one of the group consisting of determining one or multiple height values from a shadow image of the sample claim 1 , and determining a three dimensional surface function of at least part of the sample.3. The scanning probe microscope according to claim 1 , wherein the determining unit is configured for determining information indicative of the profile by combining multiple images of the sample detected by the detection unit from different positions and/or orientations relative to the sample.4. The scanning probe microscope according to claim 3 , wherein the detection unit is configured for detecting the multiple images of the sample by:multiple cameras of the detection unit arranged at different spatial positions and/or in different spatial orientations relative to the sample;and/or configuring at least one camera of the detection unit and the sample for being ...

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Номер записи: 24
13-02-2020 дата публикации

SCANNER AND SCANNING PROBE MICROSCOPE

Номер: US20200049733A1
Автор: Abe Masayuki, YAMASHITA Hayato
Принадлежит: OSAKA UNIVERSITY

The present invention provides a scanner capable of achieving both a wide range of measurements and a high-speed and high-precision measurement. 114-. (canceled)15. A scanner comprising:an outer frame;a first inner frame disposed inside the outer frame;a wide range Y actuator for moving the first inner frame relative to the outer frame in the Y direction;a second inner frame disposed inside the first inner frame;a wide range X actuator for moving the second inner frame relative to the first inner frame in an X direction orthogonal to the Y direction;a third inner frame disposed inside the second inner frame;a narrow range Y actuator for moving the third inner frame relative to the second inner frame in the Y direction;a movable base disposed inside the third inner frame; anda narrow range X actuator for moving the movable base relatively to the third inner frame in the X direction,wherein:the wide range Y actuator is a piezoelectric element expandable and contractible in the Y direction in response to a control signal, and is disposed between an inner side surface of the outer frame and an outer side surface of the first inner frame;the wide range X actuator is a piezoelectric element expandable and contractible in the X direction in response to a control signal, and is disposed so that one end of the wide range X actuator abuts on the approximate center in the Y direction on the inner side surface of the outer frame or on the approximate center in the Y direction on an inner side surface of the first inner frame, and the other end abuts the approximate center in the Y direction on an outer side surface of the second inner frame; andthe narrow range Y actuator is a piezoelectric element expandable and contractible in the Y direction in response to a control signal, and is disposed so that one end of the narrow range Y actuator abuts on the approximate center in X direction on an inner side surface of the second inner frame, and the other end abuts the approximate ...

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Номер записи: 25
23-02-2017 дата публикации

METHOD OF ADVANCING A PROBE TIP OF A SCANNING MICROSCOPY DEVICE TOWARDS A SAMPLE SURFACE, AND DEVICE THEREFORE

Номер: US20170052209A1
Автор: Kramer Geerten Frans Ijsbrand, Sadeghian Marnani Hamed, van den Dool Teunis Comelis
Принадлежит:

The invention is directed at a method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface. The scanning microscopy device comprises the probe for scanning the sample surface for mapping nanostructures on the sample surface. The probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface. The method comprises controlling, by a controller, an actuator system of the device for moving the probe to the sample surface, and receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling. The method further comprises maintaining, during said controlling, an electric field between the sample surface and the probe tip, and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining proximity of the sample surface relative to the probe tip. The invention is further directed at a scanning microscopy device comprising a probe for scanning a sample surface for mapping nanostructures thereon. 1. A method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface , the device comprising the probe for scanning the sample surface for mapping nanostructures on the sample surface , wherein the probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface , the method comprising:controlling, by a controller, an actuator system of the device for moving the probe to the sample surface;receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling;wherein the method further comprises:maintaining, during said controlling, an electric field between the sample surface and the probe tip; andevaluating the sensor ...

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Номер записи: 26
01-03-2018 дата публикации

MICROSCOPIC IMAGE RECOGNITION SYSTEM AND METHOD FOR DETECTING PROTEIN-BASED MOLECULE

Номер: US20180059396A1
Автор: Chiang Ching-Fen, TSAI MING-HUNG
Принадлежит:

A microscopic image recognition system for detecting a protein-based molecule by presenting a recognition image is provided. The protein-based molecule has a state of a monomer. The microscopic image recognition system includes an image capturing unit, a monomer tracking module and a texture mask. The image capturing unit is configured to capture an original image of the protein-based molecule. The monomer tracking module is configured to capture a monomer image from the original image based on a predetermined size and a predetermined brightness. The predetermined size and the predetermined brightness correspond to the monomer. The texture mask is configured to perform a two-dimensional masking process on the monomer image to form at least two texture images. The recognition image is formed by superimposing the at least two texture images. A microscopic image recognition method is also provided. 1. A microscopic image recognition system for detecting a protein-based molecule by presenting a recognition image , the protein-based molecule having a state of a monomer , and the microscopic image recognition system comprising:an image capturing unit, configured to capture an original image of the protein-based molecule;a monomer tracking module, configured to capture a monomer image from the original image based on a predetermined size and a predetermined brightness, wherein the predetermined size and the predetermined brightness correspond to the monomer; anda texture mask, configured to perform a two-dimensional masking process on the monomer image to form at least two texture images,wherein the recognition image is formed by superimposing the at least two texture images.2. The microscopic image recognition system according to claim 1 , wherein the texture mask comprises:a weighted average filter, corresponding to a mean vector; anda high-pass filter, corresponding to an edge-detecting vector,wherein the two-dimensional masking process convolves the edge-detecting ...

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Номер записи: 27
17-03-2022 дата публикации

Device and method for operating a bending beam in a closed control loop

Номер: US20220082583A1
Автор: Christof Baur, Florian Demski
Принадлежит: CARL ZEISS SMT GMBH

The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.

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Номер записи: 28
28-02-2019 дата публикации

TUNNEL CURRENT CONTROL APPARATUS AND TUNNEL CURRENT CONTROL METHOD

Номер: US20190064210A1
Автор: ARASHIDA Yusuke, KATAYAMA Ikufumi, Kawada Yoichi, TAKAHASHI Hironori, Takeda Jun, YOSHIOKA Katsumasa
Принадлежит: HAMAMATSU PHOTONICS K.K.

A tunnel current control apparatus includes a light source, a branching unit, a chopper, an optical path difference adjustment unit, a polarizer, a terahertz wave generation element, a CEP adjustment unit, a terahertz wave detection element, a quarter-wave plate, a polarization separation element, photodetectors, a differential amplifier, a lock-in amplifier, a current measurement unit, a processing unit, mirrors, and off-axis parabolic mirrors. The CEP adjustment unit can arbitrarily adjust a CEP of a terahertz wave pulse. The processing unit obtains a conversion filter used for conversion from an electric field waveform of a far field of the terahertz wave pulse to an electric field waveform of a near field based on a tunnel current measured by the current measurement unit and a correlation detected by the terahertz wave detection element. 1. A tunnel current control apparatus for controlling a tunnel current flowing between a first conductive object and a second conductive object , the apparatus comprising:a light source configured to output a light pulse;a branching unit configured to branch the light pulse, output from the light source, output one of the branched light pulses as a pump light pulse, and output the other light pulse as a probe light pulse;a terahertz wave generation element configured to generate and output a terahertz wave pulse by inputting the pump light pulse output from the branching unit;a CEP adjustment unit configured to input the terahertz wave pulse output from the terahertz wave generation element, adjust a CEP of the input terahertz wave pulse, and output the terahertz wave pulse after the CEP adjustment;a focusing element configured to input the terahertz wave pulse output from the CEP adjustment unit, and focus the input terahertz wave pulse in a gap between the first conductive object and the second conductive object;a current measurement unit configured to measure the tunnel current flowing between the first conductive object and ...

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Номер записи: 29
28-02-2019 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20190064211A1
Автор: Cleveland Jason, Grigg David A., Walters Deron, Zhang Haigang
Принадлежит:

A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system. 1. A scanning probe microscope , comprising:a probe configured to move across the surface of a sample to be monitored;a scanner, to which the probe is mounted, configured to cause said movement of the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface;a beam system for directing a light beam at the probe during said movement of the probe across the sample surface; anda detector for monitoring the deflection of the probe using the light beam;wherein the scanner is physically independent of the beam system.2. A scanning probe microscope according to claim 1 , wherein the light beam is directed at the probe by one or more optical elements and wherein none of the optical elements which direct the light beam so as to be incident upon the probe are mounted to the scanner or the probe.3. A scanning probe microscope according to claim 2 , wherein each of the said optical elements is physically mounted to the beam system.4. A scanning probe microscope according to claim 1 , wherein the scanner is moveable independently of the beam system.5. A scanning probe microscope according to claim 1 , further comprising a sample holder for holding the sample and wherein the sample holder is moveable independently of each of the scanner claim 1 , the probe and the beam system.6. A scanning probe microscope according to claim 1 , wherein the surface of the sample is arranged in use ...

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Номер записи: 30
15-03-2018 дата публикации

INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE

Номер: US20180074092A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

An information acquiring method in an atomic force microscope includes, during causing the microscope to raster scan a cantilever and a sample relatively while causing a mechanical interaction between the sample and a probe provided at a free end of the cantilever, causing a first interaction having first strength between the probe and sample, acquiring first information on the sample when the first interaction is generated, causing a second interaction having second strength between the probe and sample, and acquiring second information on the sample when the second interaction is generated. The first strength and second strength are different. The causing the first interaction, the acquiring the first information, the causing the second interaction, and the acquiring the second information are performed in a same scanning region. 1. An information acquiring method in an atomic force microscope to acquire information on a sample by raster scanning a cantilever and the sample relatively across an XY-plane , while contacting a probe provided at a free end of the cantilever with the sample to cause a mechanical interaction to be generated between the probe and the sample , the method comprising:causing a first interaction having a first strength to be generated between the probe and the sample;acquiring first information on the sample when the first interaction is generated between the probe and the sample;causing a second interaction having a second strength different from the first strength to be generated between the probe and the sample; andacquiring second information on the sample when the second interaction is generated between the probe and the sample,the causing the first interaction to be generated and the acquiring the first information, and the causing the second interaction to be generated and the acquiring the second information being performed in a same scanning region.2. The information acquiring method in an atomic force microscope according to claim ...

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Номер записи: 31
15-03-2018 дата публикации

CONDUCTIVE PROBE, ELECTRICAL PROPERTY EVALUATING SYSTEM, SCANNING PROBE MICROSCOPE, CONDUCTIVE PROBE MANUFACTURING METHOD, AND ELECTRICAL PROPERTY MEASURING METHOD

Номер: US20180074093A1
Автор: Harada Kazunori
Принадлежит: KABUSHIKI KAISHA TOSHIBA

A conductive probe includes a protruding portion provided on an elastic member, a conductive metal film covering at least a tip of the protruding portion; and an insulating thin film covering the conductive metal film provided on the tip of the protruding portion. 1. A conductive probe comprising:a protruding portion provided on an elastic member;a conductive metal film covering at least a tip of the protruding portion; andan insulating thin film covering the conductive metal film provided on the tip of the protruding portion.2. The conductive probe according to claim 1 ,wherein the insulating thin film has a conductive filament formed by metal ions diffused from the conductive metal film.3. The conductive probe according to claim 1 ,wherein:the elastic member has a cantilever shape; andthe protruding portion is provided on a top portion of the elastic member.4. The conductive probe according to claim 1 ,wherein the conductive metal film contains at least one selected from Ag, Cu, Ni, Ti and W.5. The conductive probe according to claim 1 ,{'sub': 2', '2', '5', 'm', 'n', 'm', 'n, 'wherein the insulating thin film contains at least one selected from SiO, SiON, TaO, AlO, GeSe, WOand MoO.'}6. An electrical property evaluating system comprising;a protruding portion provided on an elastic member;a conductive metal film covering at least a tip of the protruding portion;a conductive probe having an insulating thin film covering the conductive metal film provided on the tip of the protruding portion;a sample stage provided so as to be able to hold a sample to be measured;a scanning mechanism scanning the surface of the sample while changing a relative position between the conductive probe and the sample stage;a power supply portion applying a predetermined voltage between the conductive probe and the sample held by the sample stage; anda detecting portion detecting a current value varying with scanning of the conductive probe.7. A scanning probe microscope comprising:a ...

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Номер записи: 32
16-03-2017 дата публикации

PROBE ACTUATION SYSTEM WITH FEEDBACK CONTROLLER

Номер: US20170074901A1
Автор: Humphris Andrew
Принадлежит:

A probe actuation system has a detection system arranged to measure a position or angle of a probe to generate a detection signal. An illumination system is arranged to illuminate the probe. Varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary. A probe controller is arranged to generate a desired value which varies with time. A feedback controller is arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value. The probe controller receives as its inputs a detection signal and a desired value, but unlike conventional feedback systems this desired value varies with time. Such a time-varying desired value enables the probe to be driven so that it follows a trajectory with a predetermined speed. A position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe. 1. A probe actuation system comprising: a detection system arranged to measure a probe to generate a detection signal; an illumination system arranged to illuminate the probe , wherein varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary; a probe controller arranged to generate a desired value; and a feedback controller arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value , characterised in that a position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe.2. A probe actuation system comprising: a detection system arranged to measure a probe to generate a detection signal; an illumination system arranged to illuminate the probe , wherein varying the illumination of the probe causes the probe to ...

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Номер записи: 33
29-03-2018 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20180088148A1
Автор: HIRADE Masato
Принадлежит: SHIMADZU CORPORATION

A scanning probe microscope capable of increasing a relative speed of a probe and making noise unlikely to occur in a measurement result for the surface shape of a sample. When a relative movement direction of the probe is switched at the time of reciprocation in an X direction and a direction opposite to the X direction (at a starting position P and a return position P), the relative speed is gradually decreased and then the direction is switched, and after the switching, the relative speed is gradually increased, to prevent a rapid change in the relative speed. At the time of shifting the probe in a Y direction and a direction opposite to the Y direction (at the starting position P and the return position P), the relative speed of the probe is gradually increased and then the relative speed is gradually decreased, to prevent a rapid change in the relative speed. 19- (canceled)10. A scanning probe microscope , comprising:a probe that is relatively moved along a surface of a sample;a reciprocation control unit that relatively moves the probe in a first direction and a direction opposite to the first direction with respect to the surface of the sample, to reciprocate the probe;a shifting control unit that relatively moves the probe in a second direction orthogonal to the first direction with respect to the surface of the sample, to shift the probe; anda measurement control unit that measures a surface shape of the sample based on a relative displacement amount of the probe in a direction orthogonal to the first direction and the second direction, the probe being relatively moved along the surface of the sample by the reciprocation control unit and the shifting control unit,wherein, when a relative movement direction of the probe is switched, the reciprocation control unit gradually decreases a relative speed and then switches the direction, and gradually increases the relative speed after the switching, to relatively reciprocate the probe, andthe shifting control ...

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Номер записи: 34
30-03-2017 дата публикации

Integrated Micro Actuator and LVDT for High Precision Position Measurements

Номер: US20170089733A1
Автор: Bocek Dan, Cleveland Jason, Klonowski Matthew, Longmire Matthew, Proksch Roger Carlos
Принадлежит:

A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision. 1. A method , comprising:placing a sample to be tested on a top surface of one part of a housing;moving said top surface with the sample to be tested relative to another part of the housing, where said one part of said housing is movable relative to the another part of the housing, and where said moving is in a z-axis direction substantially perpendicular to said top surface and uses a flexure; anddifferentially detecting said moving of said top surface with the sample to be tested relative to the another part of the housing and producing an output signal indicative thereof.2. A method as in claim 1 , further comprising moving said top surface with the sample to be tested in x and y directions that are substantially perpendicular to each other and parallel to said top surface.3. A method as in claim 1 , wherein said top surface includes a screwable connection part which allows said flexure to be preloaded.4. A detector claim 1 , comprising:a housing, having a top surface that holds a sample to be tested on one part of the top surface, and having and side surfaces that are perpendicular to said top surface;said housing controlled to move by deflecting said sample to move said top surface with the sample,to move said one part of the housing relative to another part of the housing, where said one part moves in a z-axis direction substantially perpendicular to said top surface; anda differential detector, differentially detecting movement of said ...

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Номер записи: 35
12-05-2022 дата публикации

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

Номер: US20220146548A1
Автор: Baur Christof, Matejka Ulrich
Принадлежит:

The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip. 1. A method for adapting scan parameters of at least one measuring probe of a scanning probe microscope to a sample to be examined , wherein the method comprises the steps of:a. Obtaining first data of a sample to be examined;b. determining a variable for describing a contour of at least one portion of a sample surface of the sample to be examined from the first data; andc. determining a spacing between adjacent measurement points of the at least one measuring probe of the scanning probe microscope from the determined variable.2. The method of claim 1 , wherein the at least one measuring probe comprises at least one first measuring probe and at least one second measuring probe claim 1 , and the method further comprises the step of: determining the measuring probe suitable for scanning over the sample surface to be examined from the determined variable.3. The method of claim 1 , wherein the first data are obtained from a database claim 1 , in which design data of the sample to be examined are stored.4. The method of claim I claim 1 , wherein the first data are obtained from a scan of the at least one measuring probe over the sample surface with a constant spacing between adjacent measurement points.5. The method of claim 1 , wherein the first data are obtained from a scan of the at least one measuring probe without a tilt of the cantilever of the at least one ...

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Номер записи: 36
28-03-2019 дата публикации

AFM with Suppressed Parasitic Signals

Номер: US20190094265A1
Автор: SAHIN Ozgur
Принадлежит:

An AFM that suppress parasitic deflection signals is described. In particular, the AFM may use a cantilever with a probe tip that is offset along a lateral direction from a longitudinal axis of torsion of the cantilever. During AFM measurements, an actuator may vary a distance between the sample and the probe tip along a direction approximately perpendicular to a plane of the sample stage in an intermittent contact mode. Then, a measurement circuit may measure a lateral signal associated with a torsional mode of the cantilever during the AFM measurements. This lateral signal may correspond to a force between the sample and the probe tip. Moreover, a feedback circuit may maintain, relative to a threshold value: the force between the sample and the probe tip; and/or a deflection of the cantilever corresponding to the force. Next, the AFM may determine information about the sample based on the lateral signal. 1. An atomic force microscope (AFM) , comprising:a sample stage configured to hold a sample;a cantilever with a probe tip, the probe tip being offset along a lateral direction from a longitudinal axis of torsion of the cantilever;a first actuator, coupled to at least one of the sample stage and the cantilever, configured to vary a distance between the sample and the probe tip along a direction approximately perpendicular to a plane of the sample stage in an intermittent contact mode;a measurement circuit configured to measure a lateral signal associated with a torsional mode of the cantilever during the AFM measurements, the lateral signal corresponding to a force between the sample and the probe tip, wherein, during the AFM measurements, the variation of the distance has a fundamental frequency that is significantly less than a lowest flexural resonance frequency of the cantilever; anda feedback circuit, coupled to the measurement circuit and one of the first actuator and a second actuator, configured to maintain, relative to a threshold value, one of: the force ...

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Номер записи: 37
28-03-2019 дата публикации

A method of operating an afm

Номер: US20190094266A1
Автор: Atsushi Miyagi, Simon Scheuring
Принадлежит: Aix Marseille Universite, Institut National de la Sante et de la Recherche Medicale INSERM

A method of operating an atomic force microscope, comprising a probe, the probe being moved forth and back during respective trace and retrace times of a scan line, the method comprising: a) during trace time, oscillating the probe, b) generating a z feedback signal to keep an amplitude of oscillation of the probe constant at a setpoint value, the z feedback signal being generated by a first feedback loop, c) during retrace time, placing the probe in a drift compensation state by changing the setpoint value to a different value so that the z feedback signal being generated by the first feedback loop causes the probe to move away from the sample and oscillate free, d) detecting an amplitude of free oscillation of the probe and adjusting with a second feedback loop its excitation signal to maintain the amplitude of free oscillation of the probe close to a set value.

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Номер записи: 38
12-04-2018 дата публикации

METHODS, DEVICES AND SYSTEMS FOR SCANNING TUNNELING MICROSCOPY CONTROL SYSTEM DESIGN

Номер: US20180100875A1
Автор: Ballard Joshua, Fuchs Ehud, Moheimani Seyed Omid Reza, Owen James, RANDALL John, Tajaddodianfar Farid
Принадлежит:

Methods, devices, and systems for controlling a scanning tunneling microscope system are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a control system included in or added to a scanning tunneling microscope (STM) to receive data characterizing a tunneling current between a tip of the scanning tunneling microscope system and a sample, to estimate, in real-time, a work function associated with the scanning tunneling microscope system, and to adjust, by a control system, a position of the tip based on an estimated work function. Associated systems are described herein. 1. A method of controlling a scanning tunneling microscope system , the method comprising:receiving data characterizing a tunneling current between a tip of the scanning tunneling microscope system and a sample;estimating, in real-time, a work function associated with the scanning tunneling microscope system; andadjusting, by a control system, a position of the tip based on the estimated work function.2. The method of claim 1 , wherein the control system comprises a closed loop having a gain controller and a plant.3. The method of claim 1 , further comprising:introducing a system identification signal into a closed loop of the control system; andfiltering an output signal to identify a system identification portion of the output signal, the system identification portion of the output signal resulting at least in part from the system identification signal.4. The method of claim 3 , further comprising estimating the work function based on the system identification portion.5. The method of claim 3 , wherein the system identification signal has a fixed frequency.6. The method of claim 3 , wherein the system identification signal is selectively introduced at a first location in the control system or at a second location in the control system.7. The method of claim 1 , wherein adjusting the position of the tip comprises actuating a piezoelectric actuator to ...

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Номер записи: 39
21-04-2016 дата публикации

Method and Apparatus of Tuning a Scanning Probe Microscope

Номер: US20160109477A1
Автор: Hu Shuiqing, Huang Lin, Pittenger Bede, Silva Paul, Su Chanmin
Принадлежит:

An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve. 1tuning the SPM to determine an operating frequency of a drive of the SPM by plotting thermal data having a thermal peak on top of a conventional tuning curve; andwherein the tuning curve has two peaks separated by a valley, and wherein the operating frequency is at about a midpoint on a downslope of the valley corresponding to the thermal peak.. A method of operating a scanning probe microscope (SPM) comprising: This application is a divisional of U.S. patent application Ser. No. 14/675,140, filed on Mar. 31, 2015 and issued as U.S. Pat. No. 9,116,167 on Aug. 25, 2015, which is a divisional of U.S. patent application Ser. No. 13/674,774, filed on Nov. 12, 2012 and issued as U.S. Pat. No. 8,997,259 on Mar. 31, 2015, which claims priority under 35 U.S.C. §119(e) to U.S. Provisional Patent Application No. 61/558,970, filed on Nov. 11, 2011, the entirety of each of which is expressly incorporated by reference herein.1. Field of the InventionThe present invention is directed to scanning probe microscopes (SPMs), including atomic force microscopes (AFMs), and more particularly, to tuning the AFM for optimum operation.2. Description of Related ArtScanning probe microscopes (SPMs), such as the atomic force microscope (AFM), are devices which typically employ a probe having a tip and which cause the tip to interact with the surface of a sample with low forces to characterize the surface down to atomic dimensions. Generally, the probe is introduced to a surface of a sample to detect changes in the characteristics of a sample. By providing relative scanning movement between the tip and the ...

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Номер записи: 40
20-04-2017 дата публикации

ACTUATOR MODULE FOR ACTUATING A LOAD

Номер: US20170108531A1
Автор: Crowcombe William Edward, DE LANGE Theodorus Jacobus, PEREBOOM Hajo Pieter, VAN DEN DOOL Teunis Cornelis, WITVOET Gerrit
Принадлежит:

The disclosure concerns an actuator module () for actuating a load (). The actuator module () comprises a deformable frame () and an actuator () connected to the deformable frame (). A time-varying force distribution (F) couples to an excited state (V) of an eigenmode (V) of the deformable frame (). The force distribution (F), as well as a stiffness distribution (K) and/or mass distribution (M) of the deformable frame are adapted such that static nodal points () of the deformable frame are coincided with mode nodal points (). The locations where the nodal points coincide can be used to connect the actuator module () to a base frame to reduce transfer of vibrations to the base frame and back which may otherwise undesirably influence the transfer function from actuator to load. The disclosure further concerns a method for designing and/or manufacturing the actuator module. 1. An actuator system comprising an actuator module for actuating a load , the actuator module comprisinga deformable frame having a stiffness distribution and mass distribution determining a vibrational eigenmode of the deformable frame, wherein an interface formed by a surface of the deformable frame comprises a plurality of mode nodal points which are stationary during modal deformation of the deformable frame in an excited state of the eigenmode; andan actuator connected to the deformable frame and arranged for exerting a time-varying force distribution onto the deformable frame via a connection between the deformable frame and the actuator, wherein the interface of the deformable frame comprises a plurality of static nodal points which are stationary during static deformation of the deformable frame when the time-varying force distribution exerted by the actuator is applied under quasi-static conditions;wherein the time-varying force distribution is arranged to couple to the excited state of the eigenmode and the deformable frame comprises an actuation surface, in use, oscillating due to the ...

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Номер записи: 41
29-04-2021 дата публикации

A METHOD FOR SEM-GUIDED AFM SCAN WITH DYNAMICALLY VARIED SCAN SPEED

Номер: US20210125809A1
Автор: CHEN Jun, CHEN Ko Lun, Sun Yu, WANG Tiancong
Принадлежит:

A method discloses topography information extracted from scanning electron microscope (SEM) images to determine the atomic force microscope (AFM) image scanning speed at each sampling point or in each region on a sample. The method includes the processing of SEM images to extract possible topography features and create a feature metric map (step 1), the conversion of the feature metric map into AFM scan speed map (step 2), and performing AFM scan according to the scan speed map (step 3). The method enables AFM scan with higher scan speeds in areas with less topography feature, and lower scan speeds in areas that are rich in topography features. 1. A method of varying scan speed of atomic force microscopy (AFM) imaging at each sampling point based on prior topography information extracted from a scanning electron microscopy (SEM) image , comprising:(a) A method for producing a feature metric map based on image processing algorithms for identifying and locating topography features from the SEM image;(b) A method for converting the feature metric map into an AFM scan speed map;(c) A method for setting scan speed for each sampling point, based on the scan speed map, to use a high scan speed for locations on the sample with minimal topography feature, and use a low scan speed for locations on the sample with rich topography features.2. The method of claim 1 , wherein said SEM images are captured using secondary electron imaging mode.3. The method of claim 1 , wherein said algorithms used to generate the feature metric map is based on detecting rapid changing gray scale pixels within the SEM images.4. The method of claim 3 , wherein said algorithm can be local entropy claim 3 , local standard deviation claim 3 , local range of gray level claim 3 , and local magnitude of gradient.5. The method of claim 1 , wherein said feature metric map quantitatively describes the amount of local topography features and distinguishes the feature-containing and feature-lacking regions in ...

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Номер записи: 42
03-05-2018 дата публикации

ATOMIC FORCE MICROSCOPE AND CONTROL METHOD OF THE SAME

Номер: US20180120343A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

An atomic force microscope acquires sample information by performing relative raster scanning between a cantilever and a sample across an XY-plane, while causing an interaction to be generated between a probe provided at a free end of the cantilever and the sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information, a raster-scanning controller to control the raster scanning based on the raster scanning information, and an interaction controller to control strength of the interaction based on the raster scanning information. The interaction controller relatively reduces the strength of the interaction, when a relative speed between the cantilever and the sample across the XY-plane of the raster scanning relatively decreases. 1. An atomic force microscope to acquire sample information by performing relative raster scanning between a cantilever and a sample across an XY-plane , while causing an interaction to be generated between a probe provided at a free end of the cantilever and the sample , the atomic force microscope comprising:a raster-scanning-information generator to generate raster scanning information;a raster-scanning controller to control the raster scanning based on the raster scanning information; andan interaction controller to control strength of the interaction based on the raster scanning information,the interaction controller relatively reducing the strength of the interaction, when a relative speed between the cantilever and the sample across the XY-plane of the raster scanning relatively decreases.2. The atomic force microscope according to claim 1 , wherein the interaction controller comprises a relative-speed-information generator to generate relative speed information corresponding to the relative speed between the cantilever and the sample based on the raster scanning information claim 1 , and the interaction controller controls the strength of the interaction based on the ...

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Номер записи: 43
16-04-2020 дата публикации

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, MACHINE LEARNING DEVICE, AND PREDICTION DEVICE

Номер: US20200116480A1
Автор: Shima Shohei
Принадлежит:

A substrate cleaning method which can determine an appropriate replacement time of a cleaning tool is disclosed. The substrate cleaning method includes: rubbing a cleaning tool against a substrate in the presence of a cleaning liquid while supplying the cleaning liquid onto the substrate to thereby clean a surface of the substrate; acquiring surface data representing surface properties of the cleaning tool in a wet condition by use of an atomic force microscope after performing cleaning of the surfaces of a predetermined number of substrates; and comparing the surface data with a predetermined threshold to thereby determine a replacement time of the cleaning tool. 1. A substrate cleaning method comprising:rubbing a cleaning tool against a substrate in the presence of a cleaning liquid while supplying the cleaning liquid onto the substrate to thereby clean a surface of the substrate;acquiring surface data representing surface properties of the cleaning tool in a wet condition by use of an atomic force microscope after performing cleaning of the surfaces of a predetermined number of substrates; andcomparing the surface data with a predetermined threshold to thereby determine a replacement time of the cleaning tool.2. The substrate cleaning method according to claim 1 , wherein the surface data is an arithmetic mean roughness of the cleaning tool acquired by use of the atomic force microscope.3. The substrate cleaning method according to claim 1 , wherein the surface data is a maximum difference in height over the surface of the cleaning tool claim 1 , and the maximum difference in height is a difference between a maximum value and a minimum value of the surface roughness of the cleaning tool acquired by the atomic force microscope.4. The substrate cleaning method according to claim 1 , wherein the threshold is an average diameter of particles attached to the surface of the substrate.5. The substrate cleaning method according to claim 1 , wherein the surface data is a ...

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Номер записи: 44
16-04-2020 дата публикации

SCANNING PROBE MICROSCOPY SYSTEM FOR AND METHOD OF MAPPING NANOSTRUCTURES ON THE SURFACE OF A SAMPLE

Номер: US20200116754A1
Автор: Dekker Albert, Kastelijn Aukje Arianne Annette, Kramer Geerten Frans Ijsbrand, Kruidhof Rik, NIEUWKOOP Evert, Sadeghian Marnani Hamed, Toet Peter Martijn, van Riel Martinus Cornelius Johannes Maria
Принадлежит:

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction. 1. A scanning probe microscopy system for mapping nanostructures on the surface of a sample , comprising:a sample support structure for supporting the sample,a scan head including a probe comprising a cantilever and a probe tip arranged on the cantilever,an actuator for scanning the probe tip relative to the sample surface for mapping of the nanostructures,an optical source for providing an optical signal, and [ reflect a reference fraction of the optical signal to provide a reference signal, and', 'transmit a sensing fraction of the optical signal;, 'a partially reflecting element, configured to, directing the sensing fraction as an optical beam towards the probe tip, and', 'receiving a reflected fraction of the optical beam to provide a sensed signal;, 'a directional optics configured for ...

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Номер записи: 45
25-04-2019 дата публикации

MICRO-LOCALISATION METHOD AND DEVICE FOR AN IMAGING INSTRUMENT AND A MEASURING APPARATUS

Номер: US20190122026A1
Автор: Acher Olivier, GAILLET Melanie, Knowles Adrian, PODZOROV Alexander, Richard Simon
Принадлежит:

Disclosed is a micro-localisation device defining a system of spatial coordinates for an imaging instrument. The micro-localisation device includes at least one first zone and a second zone, adjacent to each other, each zone extending spatially over an area of macroscopic size, each zone including an elementary cell or a tiling of a plurality of elementary cells extending over the respective area of the zone, each elementary cell of the first, respectively second, zone including an orientation pattern, a positioning pattern and a periodic spatial pattern, configured to be imaged by an imaging instrument and to determine a position and, respectively an orientation of the imaging instrument in the system of spatial coordinates of the micro-localisation device. 110060611001111. Micro-localisation device () for imaging instrument ( , ) , the micro-localisation device () defining a system of spatial coordinates (O , X , Y) and being suitable to be secured to a sample or to a sample stage , wherein:{'b': 100', '1', '2', '1', '2', '1', '2', '11', '11', '1', '2', '11', '21', '22', '23', '24', '1', '2', '11', '1', '21', '22', '23', '24', '2', '11', '1', '110', '21', '22', '23', '24', '2', '210', '11', '21', '22', '23', '24', '1', '2', '1111', '2111', '1112', '2112', '2212', '2312', '2412', '11', '11', '60', '61', '100, 'the micro-localisation device () includes at least one first zone () and one second zone (), adjacent to each other, said first, respectively second zone (, ) extending spatially over a first, respectively second, area of macroscopic dimensions, said first, respectively second, zone (, ) with a predetermined position and a predetermined orientation in the system of spatial coordinates (O, X, Y) of the micro-localisation device, said first, respectively second, zone (, ) including an elementary cell () or a tiling of a plurality of elementary cells (, , , ) extending over the first, respectively second, area of said first, respectively second, zone (, ), each ...

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Номер записи: 46
11-05-2017 дата публикации

AM/FM Measurements Using Multiple Frequency of Atomic Force Microscopy

Номер: US20170131322A1
Автор: Bemis Jason, Labuda Aleksander, Proksch Roger
Принадлежит:

Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation. 1. An atomic force microscope , comprising:a cantilever having a tip at one end and a driving part at its other end;a cantilever position detector;a positioning system for controlling a position of the cantilever relative to the sample, the positioning system operating by: first operating by turning off a drive mechanism and positioning the cantilever at a specified point relative to the sample, and determining a stiffness of the cantilever from a measured thermal spectrum taken far from a surface of the sample and recording information indicative of the stiffness as representing a natural frequency of the cantilever; second approaching the tip of the cantilever to closer proximity with the sample and turning the drive mechanism on and setting a drive frequency of the cantilever to the natural frequency of the cantilever as measured during said first operating, and approaching the tip of the cantilever to the surface of the sample until contact is established by setting the feedback set point to a desired interaction amplitude that is less than a free oscillation amplitude; third operating by fully separating the sample from the tip of the cantilever and tuning the cantilever using the drive frequency using a first relationship acquired; and after said tuning, turning off the drive mechanism and acquiring an additional thermal spectrum of the cantilever that is obtained during conditions that are ...

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Номер записи: 47
11-05-2017 дата публикации

SYSTEM AND METHOD OF PERFORMING SCANNING PROBE MICROSCOPY ON A SUBSTRATE SURFACE

Номер: US20170131323A1
Автор: Crowcombe William Edward, Kramer Geerten Frans ljsbrand, Sadeghian Marnani Hamed, VAN DEN DOOL Teunis Cornelis, Winters Jasper
Принадлежит: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface. 1. Method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system , the system including at least one probe head , the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane , the method comprising:positioning the at least one probe head relative to the substrate surface;moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; anddetermining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface;wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface;characterized in thatplacing of the at least one probe head is performed by a positioning structure, andwherein the or each probe head comprises a carrier cooperating with the positioning ...

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Номер записи: 48
11-05-2017 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20170131324A1
Автор: HIRADE Masato
Принадлежит: SHIMADZU CORPORATION

A scanning probe microscope includes sample moving means and including a cylindrical piezoelectric scanner and configured to move a sample arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner by an applied voltage, scanning control means configured to control a relative position of the probe and the sample by controlling the applied voltage, sample thickness acquisition means configured to acquire a thickness value of the sample , and correlative information determination means configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner and a displacement amount of a surface of the sample in a horizontal direction using the thickness value, wherein the scanning control means performs controlling of the relative position using the correlative information. With this, it becomes possible to perform accurate sample scanning considering effects on the movement amount of the sample in the XY direction due to the thickness. 1. A scanning probe microscope for detecting a three-dimensional shape or a physical quantity of a sample surface by scanning the sample surface by a minute probe , comprising:a) sample moving means including a cylindrical piezoelectric scanner and configured to move a sample arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner by an applied voltage;b) scanning control means configured to control a relative position of the probe and the sample by controlling the applied voltage;c) sample thickness acquisition means configured to acquire a thickness value of the sample; andd) correlative information determination means configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner and a displacement amount of a surface of the sample in a horizontal direction using the thickness value,wherein the scanning ...

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Номер записи: 49
07-08-2014 дата публикации

Dielectrophoretic Tweezers as a Platform for Molecular Force Spectroscopy in a Highly Parallel Format

Номер: US20140216935A1
Автор: Vezenov Dmitri
Принадлежит: Lehigh University

Provided herein are methods of performing force spectroscopy, the methods comprising the steps of providing dielectrophoretic tweezers having at least one set of macroscopic electrodes, at least one of the electrodes having a microfabricated dielectric structure comprising a microwell; depositing force probes on a surface; binding the force probes to molecules on the surface; and applying voltage across set of macroscopic electrodes to thereby manipulate the molecules. Also provided are novel apparatus for performing force spectroscopy, the apparatus comprising dielectrophoretic tweezers having at least one set of macroscopic electrodes, at least one of the electrodes having a microfabricated dielectric structure comprising a microwell. 1. A method of performing force spectroscopy , the method comprising the steps of providing dielectrophoretic tweezers having at least one set of macroscopic electrodes , at least one of the electrodes having a microfabricated dielectric structure comprising a microwell; depositing force probes on a surface; binding the force probes to molecules on the surface; and applying voltage across set of macroscopic electrodes to thereby manipulate the molecules.2. The method of claim 1 , wherein the macroscopic electrodes comprise parallel flat electrodes configured to manipulate an array of polymer microspheres (force probes).3. The method of claim 2 , wherein the molecules are biomolecules.4. The method of claim 3 , wherein the bio molecules comprise DNA claim 3 , and wherein the environment of the probes approximates a physiological condition.5. An apparatus for performing force spectroscopy claim 3 , the apparatus comprising comprising dielectrophoretic tweezers having at least one set of macroscopic electrodes claim 3 , at least one of the electrodes having a microfabricated dielectric structure comprising a microwell. This application claims priority to U.S. Provisional Patent Application Ser. No. 61/680,984 filed Aug. 8, 2012.This ...

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Номер записи: 50
07-08-2014 дата публикации

Scanning probe microscope and control method thereof

Номер: US20140223613A1
Автор: Nobuaki Sakai
Принадлежит: Olympus Corp

A scanning probe microscope includes a cantilever having a probe at a free thereof, a displacement detector to output a displacement signal of the cantilever, a vibrator to vibrate the cantilever, and a scanner to three-dimensionally relatively move the sample and probe. A mixed signal generator includes an amplitude information detecting section to provide a vibrating signal to the vibrator and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller to control the scanner includes a Z control section, which controls the distance between the sample and the probe on the basis of the mixed signal.

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Номер записи: 51
08-09-2022 дата публикации

Method and metrology tool for determining information about a target structure, and cantilever probe

Номер: US20220283122A1
Автор: Coen Adrianus Verschuren, Mustafa Ümit ARABUL, Zili ZHOU
Принадлежит: ASML Netherlands BV

The disclosure relates to determining information about a target structure formed on a substrate using a lithographic process. In one arrangement, a cantilever probe is provided having a cantilever arm and a probe element. The probe element extends from the cantilever arm towards the target structure. Ultrasonic waves are generated in the cantilever probe. The ultrasonic waves propagate through the probe element into the target structure and reflect back from the target structure into the probe element or into a further probe element extending from the cantilever arm. The reflected ultrasonic waves are detected and used to determine information about the target structure.

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Номер записи: 52
26-05-2016 дата публикации

EXPLOITATION OF SECOND-ORDER EFFECTS IN ATOMIC FORCE MICROSCOPY

Номер: US20160146853A1
Автор: Dokukin Maxim, Sokolov Igor
Принадлежит:

A processing system cooperates with an atomic force microscope operating in ramp mode at a ramp frequency is configured to collect data indicative of at least one of physical and chemical properties of a sample. The system collects data indicative of probe movement at a frequency that is higher than the ramp frequency. This data comprises a second-order portion of the probe's signal. Based at least in part on the second-order portion, the processor obtains a parameter that is indicative at least one of a physical and a chemical property of a sample. 1. An apparatus for evaluating one of a physical and a chemical property of a surface , said apparatus comprising a processing system configured to cooperate with an atomic force microscope operating in ramp mode at a ramp frequency , said processing system being configured to collect data indicative of at least one of physical and chemical properties of a sample , wherein said processing system is configured to receive a probe signal indicative of movement of a probe at a frequency that is higher than said ramp frequency , wherein said probe signal comprises a first portion indicative of deflection and a second portion that consists of second-order effects , and wherein said processing system is further configured to obtain a parameter that is indicative at least one of a physical and a chemical property of a sample based at least in part on said second portion of said probe signal.2. The apparatus of claim 1 , wherein said processing system is configured to receive a probe signal that comprises a contact portion and a rebound portion claim 1 , and wherein said second portion comprises said rebound portion.3. The apparatus of claim 2 , wherein said processing system is configured to obtain a restored adhesion.4. The apparatus of claim 2 , wherein said processing system is configured to obtain an average restored adhesion.5. The apparatus of claim 2 , wherein said processing system is configured to obtain a viscoelastic ...

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Номер записи: 53
10-06-2021 дата публикации

PHASE-SHIFT-BASED AMPLITUDE DETECTOR FOR A HIGH-SPEED ATOMIC FORCE MICROSCOPE

Номер: US20210172976A1
Автор: MIYAGI Atsushi, SCHEURING Simon
Принадлежит:

An atomic force microscope includes a cantilever operating in amplitude modulation mode. A controller determines the amplitude of the cantilever oscillation by processing a signal representative of the cantilever motion by square-rooting a signal having a value substantially equal to a sum of a square of the received signal and a squared and phase-shifted version of the received signal. The aforementioned processing, in some implementations is implemented using analog circuit components. 1. An atomic force microscope , havinga cantilever operating in amplitude modulation mode, and receive an input signal indicative of motion of the cantilever,', 'calculate a resultant amplitude signal by square-rooting a signal having a value substantially equal to a sum of a square of the input signal and a squared and phase-shifted version of the input signal, and', 'output the resultant amplitude signal., 'a controller including at least one processor configured to2. The atomic force microscope of claim 1 , wherein the controller includes a circuit having:an input branch receiving the input signal, at least one −90 degree phase shifter for phase shifting the input signal and', 'a second multiplier for squaring the phase shifted input signal,, 'a first branch havinga second branch having a first multiplier for squaring the input signal,a merge node coupling the first and second branches, the merge node including an adder for summing the square of the input signal with the square of the phase shifted input signal,a third branch connected to the merge node, the third branch including square rooting logic configured to apply a square-root function to the output of the adder, andan output branch connected to the third branch configured to output the resultant amplitude signal.3. The atomic force microscope of claim 2 , wherein the input branch couples to both the first branch and the second branch.4. The atomic force microscope of claim 2 , wherein the at least one −90 degree phase ...

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Номер записи: 54
24-05-2018 дата публикации

ATOMIC FORCE MICROSCOPE AND CONTROL METHOD OF THE SAME

Номер: US20180143220A1
Автор: SAKAI Nobuaki
Принадлежит: OLYMPUS CORPORATION

An atomic force microscope is to acquire sample information by a raster scanning of a cantilever with respect to a sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information including timing information. The timing information includes a first timing at which a relative speed between the cantilever and sample decreases lower than a threshold, and a second timing at which the relative speed increases higher than the threshold after the first timing. The atomic force microscope also includes a raster-scanning controller to control the raster scanning, and an interaction controller to decrease the strength of an interaction between the cantilever and sample at the first timing, and increase the strength of the interaction at the second timing. 1. An atomic force microscope to acquire sample information by a raster scanning of a cantilever with respect to a sample in combination of scanning in Y-direction and scanning in X-direction faster than the scanning in Y-direction , the atomic force microscope comprising:a raster-scanning-information generator to generate raster scanning information including timing information synchronized with the scanning in the X-direction, the timing information including a first timing at which a relative speed between the cantilever and the sample decreases lower than a predetermined threshold, and a second timing at which the relative speed increases higher than the predetermined threshold after the first timing;a raster-scanning controller to control the raster scanning based on the raster scanning information; andan interaction controller to, based on the timing information, relatively decrease the strength of an interaction between a probe provided at a free end of the cantilever and the sample at the first timing, and relatively increase the strength of the interaction at the second timing.2. The atomic force microscope according to claim 1 , wherein the raster ...

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Номер записи: 55
07-05-2020 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20200141970A1
Автор: Gray David, Humphris Andrew
Принадлежит:

A scanning probe microscope with a first actuator () configured to move a feature in the form of a tip () so that the feature follows a scanning motion. A vision system () is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (). A tracking control system ()bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator () is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system () is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system. 1. A scanning probe microscope comprising:a first actuator configured to move a feature so that the feature follows a scanning motion;a steering element;a vision system configured to collect light from a field of view to generate image data, wherein the field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element;a tracking control system configured to generate one or more tracking drive signals in accordance with stored reference data;a second actuator configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the ...

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Номер записи: 56
22-09-2022 дата публикации

ATOMIC NANO-POSITIONING DEVICE

Номер: US20220299544A1
Автор: Pitters Jason, Salomons Mark, Wolkow Robert A.
Принадлежит:

A nano-positioning system for fine and coarse nano-positioning including at least one actuator, wherein the at least one actuator includes a high Curie temperature material and wherein the nano-positioning system is configured to apply a voltage to the at least one actuator to generate fine and/or coarse motion by the at least one actuator. The nano-positioning system being a stand-alone system, a scanning probe microscope, or an attachment to an existing microscope configured to perform a method of creepless nano-positioning that includes positioning a probe relative to a first area of a substrate using coarse stepping and interacting with the first area of the substrate using fine motion after less than 60 seconds of the positioning the probe. The movement of the scanning probe microscope is actuated by a high Curie temperature piezoelectric material that limits and/or eliminates creep, hysteresis and aging. 1. A nano-positioning system for fine and coarse nano-positioning , the nano-positioning system comprising at least one actuator , wherein the at least one actuator comprises a high Curie temperature material and wherein the nano-positioning system is configured to apply a voltage to the at least one actuator to generate fine motion by the at least one actuator.2. The nano-positioning system of claim 1 , wherein the nano-positioning system is further configured to apply a voltage to the least one actuator to generate coarse motion by the at least one actuator.3. The nano-positioning system of claim 2 , wherein the at least one actuator is a shear actuator claim 2 , a longitudinal actuator claim 2 , or a bimorph actuator.4. The nano-positioning system of claim 1 , further comprising at least one second actuator claim 1 , wherein the at least one second actuator comprises a high Curie temperature material and the nano-positioning system is further configured to apply a voltage to the at least one second actuator to generate fine motion by the at least one second ...

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Номер записи: 57
18-06-2015 дата публикации

PROBE-BASED DATA COLLECTION SYSTEM WITH ADAPTIVE MODE OF PROBING

Номер: US20150168444A1
Автор: Berkmyre Mike, Pryadkin Sergiy, Sanders John, Stallcup Richard, Ukraintsev Vladimir A.
Принадлежит: DCG SYSTEMS, INC.

A system for analyzing a sample is described. The system for analyzing a sample includes a probe and a controller circuit. The controller circuit configured to control a movement of the probe to at least a first position and a second position on the sample based on navigation data. In response to the movement of the probe, the controller circuit is configured to adjust a force of the probe on the sample at the first position from a first force value to a second force value and the force of the probe on the sample from a third force value to a fourth force value at said second position on the sample. And, the controller circuit is configured to acquire sample data with the probe at the first position on the sample. 1. A system for analyzing a sample comprising:a probe; and control a movement of said probe to at least a first position and a second position on the sample based on navigation data;', 'in response to said movement of said probe, adjust a force of said probe on the sample at said first position from a first force value to a second force value and said force of said probe on the sample from a third force value to a fourth force value at said second position on the sample; and', 'acquire sample data with said probe at said first position on the sample., 'a controller circuit configured to2. The system of claim 1 , wherein said controller circuit is configured to register said probe at a registration position on the sample.3. The system of claim 1 , wherein said controller circuit is configured to adjust said force of said probe based on navigation data.4. The system of claim 1 , wherein said navigation data is computer-aided design data.5. The system of claim 1 , wherein said controller circuit is configured to adjust said force of said probe based on acquired sample data.6. The system of claim 1 , wherein said controller circuit is configured to acquire sample data with said probe at said position until a signal-to-noise ratio is achieved.7. The system of ...

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Номер записи: 58
24-06-2021 дата публикации

Measuring Device for a Scanning Probe Microscope and Method for Scanning Probe Microscopic Examination of a Measurement Sample with a Scanning Probe Microscope

Номер: US20210190818A1
Автор: Büchau-Vender Frederik, Dobler Wolfgang, Nitsche Danilo
Принадлежит:

The invention relates to a measuring device for a scanning probe microscope that comprises the following: a sample receptacle which is configured to receive a measurement sample to be examined; a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured; a displacement device which is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device that is configured to detect movement measurement signals for an actual movement of the measuring probe and/or of the sample receptacle that is executed during the relative movement between the measuring probe and the sample receptacle in order to measure the measurement sample, and to relay the movement measurement signals to the control device, the movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction. The control device is configured to control the relative movement between the measuring probe and the sample receptacle in such a way that the displacement device is acted upon by the control device with compensating control signal components which cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in ...

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Номер записи: 59
14-06-2018 дата публикации

SCANNING PROBE SYSTEM WITH TWO PROVE DRIVERS

Номер: US20180164342A1
Автор: Humphris Andrew
Принадлежит:

A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip. 1. A scanning probe system comprising: a probe comprising a cantilever extending from a base to a free end , and a probe tip carried by the free end of the cantilever; a first driver with a first driver input , the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input; a second driver with a second driver input , the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input; a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and a surface detector arranged to generate a surface signal for each cycle when the surface detector detects an interaction of the probe tip with the surface of the sample , wherein the control system is also arranged to modify the ...

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Номер записи: 60
29-09-2022 дата публикации

Probe for Scanning Probe Microscope and Binary State Scanning Probe Microscope Including the Same

Номер: US20220308086A1
Автор: Kim Gwangmook, Shim Wooyoung
Принадлежит:

Provided is a scanning probe microscope, and in particular, a scanning probe microscope capable of scanning a large area using a probe including a plurality of conductive tips and capable of simply generating a surface image of a sample with high resolution by recognizing only two binary states of contact/non-contact between the conductive tips and a surface of the sample. 1. A probe comprising:a substrate;a plurality of electrodes formed on the substrate; anda tip array provided on the substrate and including a plurality of conductive tips electrically connected to the plurality of electrodes, respectively,wherein the conductive tips are compressible and relaxed.2. The probe of claim 1 , wherein the conductive tip has an elastic portion formed therein claim 1 , and a metal layer is formed on a surface of the elastic portion.3. The probe of claim 2 , wherein the elastic portion is formed of an elastomer material.4. The probe of claim 2 , wherein the tip array further includes a bottom portion claim 2 , and the conductive tips are each disposed on the bottom portion.5. The probe of claim 4 , wherein the bottom portion and the elastic portion of the conductive tip are integrally formed.6. The probe of claim 4 , wherein each of the plurality of electrodes includes a bottom portion surface metal layer formed by coating a surface of the bottom portion with a metal.7. The probe of claim 6 , wherein the bottom portion surface metal layer and the metal layer of the conductive tip connected to each electrode are integrally formed.8. The probe of claim 2 , wherein the elastic portion is formed of a polydimethylsiloxane (PDMS) material claim 2 , and the degree of irreversible deformation of the conductive tip is adjusted according to a crosslinking ratio of PDMS claim 2 , which is a material of the elastic portion claim 2 , and a thickness of the metal layer.9. The probe of claim 8 , wherein the elastic portion is prepared from a curing reaction of a curable PDMS resin and a ...

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Номер записи: 61
25-06-2015 дата публикации

SCANNING PROBE MICROSCOPE AND MEASURING METHOD USING SAME

Номер: US20150177275A1
Автор: HASHIZUME Tomihiro, Heike Seiji, Koizumi Hideaki, Nambu Akira, Yamamoto Tsuyoshi
Принадлежит:

Provided is a scanning probe microscope that takes measurements at high spatial resolution on physical information such as array structure of water molecules at a specimen-culture fluid interface in a culture fluid as well as irregularities of the surface of a specimen and composition distribution and array structure of molecules, proteins, etc. even in the atmosphere, an ambient air, vacuum, among others. The scanning probe microscope includes: a probing needle (); a specimen holder () in which a specimen () is mounted; an oscillator () that produces a periodic oscillation to change the probing needle position; a pulse oscillation type laser light source () that emits light toward a spot, which is put under measurement by the probing needle, on the specimen; a detector () that measures intensity of output light which is output from the specimen by energy spectroscopy; and a control device (). The control device decreases amplitude of the periodic oscillation to change the probing needle position by the oscillator, shortens a relative distance between the probing needle and the specimen, and synchronizes shortening of the distance between the probing needle and the specimen and emission of pulse oscillation laser light, thus optimizing efficiency of tip-enhanced detection. 1. A scanning probe microscope comprising:a probing needle;a specimen holder in which a specimen is mounted;an oscillator that produces a periodic oscillation to change the probing needle position;a pulse oscillation type laser light source that emits light toward a spot, which is put under measurement by the probing needle, on the specimen;a detector that measures intensity of output light which is output from the specimen by energy spectroscopy;a scanning mechanism that moves the specimen holder; anda control device,wherein the control device controls a relative distance between the probing needle and the specimen and synchronizes shortening of the distance between the probing needle and the ...

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Номер записи: 62
21-06-2018 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20180172726A1
Автор: NAGAI Masamichi
Принадлежит:

An image capturing control unit controls a video camera so as to capture an image while switching between a first image capturing condition suitable for capturing a laser light spot and a second image capturing condition suitable for capturing an image of a cantilever for each single image. The image composition unit creates an image in which a laser light spot image and a cantilever image clearly appearing in each of two consecutive images are composed and displays the image on a display unit. A laser light center position detection unit, a cantilever tip position detection unit, and a position adjustment amount calculation unit calculate a position adjustment amount for adjusting an optical axis from a laser light center position and a cantilever tip position obtained by image processing from two each of two consecutive images, and also display the calculated numeric value on the display unit. 1. A scanning probe microscope comprising:a cantilever displacement detection unit including a flexible cantilever provided with a probe, a laser light source unit, a reflector configured to reflect laser light emitted from the laser light source unit to irradiate the laser light to the cantilever, and a detector configured to detect light reflected from the cantilever with respect to irradiation light;a drive unit configured to move at least one of the reflector and the laser light source unit for optical axis adjustment in the cantilever displacement detector; andan image capturing unit configured to capture an image of the cantilever and a vicinity thereof to which light is irradiated for the optical axis adjustment, whereina) an image capturing control unit configured to perform image capturing while switching a first image capturing condition suitable for performing image capturing of a laser light spot formed by irradiation of the laser light to the cantilever and a second image capturing condition suitable for performing image capturing of the cantilever,b) a ...

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Номер записи: 63
21-06-2018 дата публикации

Method and Apparatus for carrier profiling of semiconductors utilizing simultaneous techniques utilizing a simulator and a Field-Programmable Gate Array

Номер: US20180172727A1
Автор: Hagmann Mark J.
Принадлежит:

Numerous carrier profiling techniques may be combined for simultaneous operation of those techniques on a single material sample. A single apparatus utilizing a Field-Programmable Gate Array (“FPGA”) may be utilized to simultaneously operate those techniques. Various hardware components necessary for the given techniques may be operationally connected to the FPGA while simulations may be performed and stored with the apparatus for real-time analysis of results. 1. An apparatus for carrier profiling in a material sample , the apparatus comprising:a. a field-programmable gate array, the field-programmable gate array being deterministic and having real-time control; i. a preamplifier', 'ii. an electrical bias supply;', 'iii. at least one stepper motor; and', 'iv. controls for the at least one stepper motor;, 'b. a scanning tunneling microscope head; the scanning tunneling microscope head further comprisingc. a front panel for control and monitoring of the field-programmable gate array; andd. at least one measurement component.2. The apparatus of claim 1 , the at least one measurement component being selected from the set of measurement components consisting of: a spectrum analyzer claim 1 , a preamplifier and terahertz detector claim 1 , a surface probe and micropositioner for said surface probe; and an antenna.3. The apparatus of claim 1 , further comprising a laser.4. The apparatus of claim 3 , the at least one measurement component being selected from the set of measurement components consisting of: a spectrum analyzer claim 3 , a preamplifier and terahertz detector claim 3 , a surface probe and micropositioner for said surface probe; and an antenna.5. The apparatus of further comprising a storage memory claim 1 , said storage memory containing simulations of desired characterization methodologies and operations of the instrument.6. A method for characterizing the carrier profile of a given sample claim 1 , the method comprising:a. placing the sample in a scanning ...

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Номер записи: 64
06-06-2019 дата публикации

Scanning probe inspector

Номер: US20190170788A1
Автор: Chung Sam Jun, Duck Mahn Oh, Sung Yoon Ryu, Young Hoon Sohn, Yun Jung Jee
Принадлежит: SAMSUNG ELECTRONICS CO LTD

A scanning probe inspector comprises: a probe that includes a cantilever and a tip whose length corresponds to a depth of a trench that is formed in a wafer; a trench detector that acquires location information of the trench using the probe, where the location information includes depth information of the trench; a controller that inserts the tip into a first point where there exists a trench based on the location information of the trench, and moves the tip through the trench using the location information of the trench; and a defect detector that detects a presence of a defect in a sidewall of the trench as the tip is moved through the trench.

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Номер записи: 65
02-07-2015 дата публикации

High throughput scanning probe microscopy device

Номер: US20150185248A1
Автор: Hamed Sadeghian Marnani, Niek Rijnveld, Teunis Cornelis Van Den Dool
Принадлежит: Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO

A scanning probe microscopy device for mapping nanostructures on a sample surface of a sample is provided. The device may comprise a plurality probes for scanning the sample surface, and one or more motion actuators for enabling motion of the probes relative to the sample, wherein each of the plurality of probes comprises a probing tip mounted on a cantilever arranged for bringing the probing tip in contact with the sampling surface for enabling the scanning. The device may further comprise a plurality of Z-position detectors for determining a position of each probing tip along a Z-direction when the probing tip is in contact with the sample surface, wherein the Z-direction is a direction transverse to the sample surface, for enabling mapping of the nanostructures.

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Номер записи: 66
28-06-2018 дата публикации

ANALYSIS METHOD OF COMPOSITION NETWORK TOPOLOGY STRUCTURE AND ANALYSIS PROGRAM THEREOF

Номер: US20180180643A1
Автор: GOHARA Takehiro, GOTO Syota, Matsumoto Hiroyuki, Yokota Hideaki, YONEZAWA Yu, YOSHIDOME Kazuhiro
Принадлежит: TDK Corporation

An analysis method of a composition network topology structure includes obtaining a three-dimensional body for analysis capable of being used for three-dimensional measurement of a concentration distribution of a specific element contained in a sample within a predetermined measurement range. The three-dimensional body for analysis is divided into unit grids composed of a plurality of finer three-dimensional bodies. An amount of the specific element contained in each of the unit grids is obtained. Maximum-point grids respectively having a largest amount of the specific element among adjacent unit grids are obtained. The composition network topology structure of the specific element owned by the sample is quantified in relation to the maximum-point grids contained in the three-dimensional body for analysis. 1. An analysis method of a composition network topology structure , comprising the steps of:obtaining a three-dimensional body for analysis capable of being used for three-dimensional measurement of a concentration distribution of a specific element contained in a sample within a predetermined measurement range;dividing the three-dimensional body for analysis into unit grids composed of a plurality of finer three-dimensional bodies;obtaining an amount of the specific element contained in each of the unit grids;obtaining maximum-point grids respectively having a largest amount of the specific element among adjacent unit grids; andquantifying the composition network topology structure of the specific element owned by the sample in relation to the maximum-point grids contained in the three-dimensional body for analysis.2. The analysis method of the composition network topology structure according to claim 1 , further comprising the steps of:forming virtual connection lines by linking a plurality of centers of the maximum-point grids existing inside the three-dimensional body for analysis;forming final virtual connection lines by deleting the virtual connection lines ...

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Номер записи: 67
16-07-2015 дата публикации

Closed Loop Controller and Method for Fast Scanning Probe Microscopy

Номер: US20150198630A1
Автор: Ma Ji, Prater Craig, Shi Jian, Su Chanmin
Принадлежит:

A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor in a bandwidth of about seven times the scan frequency. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible. 1. A method of operating a metrology instrument , comprising:generating relative motion between a probe and a sample at a scan frequency using an actuator having a fundamental resonance frequency;detecting motion of the actuator using a position sensor, wherein the position sensor exhibits noise in the detected motion;{'sub': 'fb', 'controlling the XY position of the actuator with a control signal, u, using both a feedback loop and a feed forward algorithm, wherein a feedback signal, u, associated with the feedback loop is updated during operation of the metrology instrument by combining a signal associated with a predetermined path defined by the feed forward algorithm therewith;'}wherein the the scan frequency is greater than 1/100th of the fundamental resonant frequency; andwherein the bandwidth of the feedback loop is different than a bandwidth associated with operation of the feedforward algorithm.2. The method of claim 1 , wherein the controlling step includes operating the feedback loop at a bandwidth less than the scan frequency associated with the generating step thereby attenuating noise in the actuator position compared to the noise in the detected motion in the corresponding bandwidth claim 1 , and wherein the feed forward algorithm substantially continuously updates the control signal so that ...

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Номер записи: 68
18-09-2014 дата публикации

Method and apparatus for adaptive tracking using a scanning probe microscope

Номер: US20140283227A1
Автор: Johannes Kindt, Judith Mosley
Принадлежит: BRUKER NANO INC

Methods and apparatuses are described for adaptively tracking a feature of a sample using a scanning probe microscope. The adaptive technique provides an adaptive method for tracking the feature scan-to-scan despite actual or apparent changes in feature shape due, for example, to an evolving/transitioning state of the sample, and/or actual or apparent changing position due, for example, to movement of the sample and/or drift of the piezoelectric tube actuator. In a preferred embodiment, each scan may be processed line-by-line, or subpart-by-subpart, and may be analyzed either in real time or off-line. This processing technique improves speed, processing, reaction, and display times.

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Номер записи: 69
23-07-2015 дата публикации

METHOD AND APPARATUS OF TUNING A SCANNING PROBE MICROSCOPE

Номер: US20150204902A1
Автор: Hu Shuiqing, Huang Lin, Pittenger Bede, Silva Paul, Su Chanmin
Принадлежит:

An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve. 1. A scanning probe microscope (SPM) comprising:a probe that deflects in response to thermal energy;a detector that detects the deflection;a fast thermal spectrum module coupled to the detector to generate a thermally induced displacement power spectrum (TIDPS) curve; andwherein an operating frequency of the SPM is determined based only on the TIDPS curve.2. The SPM of claim 1 , wherein the fast thermal spectrum (FTS) module includes a high speed data capture (HSDC) module that acquires thermal data from the detector.3. The SPM of claim 2 , wherein the HSDC module includes FPGA-based architecture.4. The SPM of claim 3 , wherein the HSDC module acquires data at a sampling rate that is between about 5 MHz and 50 MHz claim 3 , and a sampling duration greater than 10 ms and less than 1000 ms.5. The SPM of claim 1 , wherein the FTS module includes a FFT module that runs a FFT on data output by the HSDC module claim 1 , and further comprising a signal processing block that runs a curve fit on the output of the FFT module.6. The SPM of claim 1 , wherein at least a portion of the probe is in fluid during SPM operation.7. The SPM of claim 1 , further comprising offsetting the operating frequency to determine a final drive frequency.8. The SPM of claim 7 , wherein the offset is chosen based on the TIDPS curve.9. The SPM of claim 1 , further comprising performing multiple curve fit operations.10. The SPM of claim 9 , wherein at least one of the curve fit operations includes using a simple harmonic oscillator.11. A method of tuning a scanning probe microscope (SPM) comprising:providing a ...

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Номер записи: 70
14-07-2016 дата публикации

Nanofiber Grid and Related Methods

Номер: US20160202289A1
Автор: Behkam Bahareh, Nain Amrinder Singh
Принадлежит:

Methods and systems are provided for measuring single and multi-cell inside-out and/or outside-in forces on a nanofiber grid. Single and multi-cells are deposited on, or migrate onto the nanofiber grid where the cell or cells are in contact with at least one fiber of the nanofiber grid and forces generated by the cells are observed and measured using deflection sensing methods. Furthermore, analyte-testing platforms using the nanofiber grid are described herein. Also provided are methods and apparatus including automated analyte-testing platforms using the nanofiber grid. 1. A method of measuring a cell force comprising:a. providing one or more cells on a nanofiber grid suspended in an aqueous medium or a hydrogel, wherein the nanofiber grid comprises a plurality of high aspect ratio fibers having diameters of between about 10 nm and 10 μm, wherein the fibers are formed into a crossed pattern having one or more intersections, and wherein the fibers are fused at the intersections of the crossed pattern, wherein at least one cell is in contact with a first fiber;b. measuring deflection of the first fiber in contact with the at least one cell; andc. calculating from the deflection of the first fiber a force applied to the fiber by the at least one cell.2. The method of claim 1 , wherein the cell contacts a plurality of fibers and the deflection of more than one fiber is measured claim 1 , and forces acting on the more than one fiber for which deflection is measured are calculated.3. The method of claim 1 , in which the high aspect ratio fibers are polymeric.4. The method of claim 3 , wherein the polymer is or more of a polystyrene claim 3 , a polyester claim 3 , a polyurethane claim 3 , a polyacrylamide claim 3 , a poly (methyl methacrylate) claim 3 , a polylactic acid claim 3 , a poly(glycolic acid) claim 3 , a poly(lactic-co-glycolic acid) claim 3 , a polyaniline claim 3 , a polypyrrole claim 3 , fibrinogen claim 3 , collagen claim 3 , and mixtures and copolymers ...

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Номер записи: 71
13-07-2017 дата публикации

High speed adaptive-multi-loop mode imaging atomic force microscopy

Номер: US20170199219A1
Автор: Jiangbo LIU, Juan Ren, Qingze Zou
Принадлежит: Rutgers State University of New Jersey

A method for imaging a sample using a high speed dynamic mode atomic force microscope may include scanning a tip of a cantilever probe over a surface of the sample, regulating a vibration amplitude of the tip to remain constant at a set point value (A set ), via a first signal generated in a first feedback controller, measuring a mean tapping deflection of the tip, regulating the mean tapping deflection via a second signal generated in a second feedback controller, tracking and measuring an adjustment to the measured mean tapping deflection during the regulating. The method may further include generating an image topography of the sample based on the first signal, the second signal, and the measured adjustment of the mean tapping deflection of the cantilever probe.

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Номер записи: 72
19-07-2018 дата публикации

POSITIONING ARM FOR AND METHOD OF PLACING A SCAN HEAD ON A SUPPORT SURFACE

Номер: US20180203036A1
Автор: Crowcombe William Edward, Sadeghian Marnani Hamed, Winters Jasper
Принадлежит:

The invention is directed at a positioning arm for positioning of a scan head of a surface scanning measurement device—such as a scanning probe microscopy device—relative to a surface. The positioning arm comprises a base at a first end thereof for mounting the arm with the base to a static reference structure. The positioning arm further comprises a first and a second arm member extending from the base, the second arm member extending parallel to the first arm member. The arm comprises a bridge member at a second end thereof, connecting the first and the second arm members. The first and the second arm member are respectively connected to each one of said base and said bridge member by means of a hingeable connection. The positioning arm further comprises an actuator for inducing a relative displacement between the first and the second arm member in a longitudinal direction of said first and second arm member for swinging the second end of the positioning arm in a direction transverse to the lateral displacement. The bridge member comprises a support for supporting the scan head. 1. Positioning arm for positioning of a scan head of a surface scanning measurement device relative to a surface , wherein the positioning arm comprises a base at a first end thereof for mounting the arm with the base to a static reference structure , wherein the positioning arm further comprises a first and a second arm member extending from the base , the second arm member extending parallel to the first arm member , wherein the positioning arm comprises a bridge member at a second end thereof , the bridge member connecting the first and the second arm members at said second end of the positioning arm , wherein each one of the first and the second arm member is respectively connected to each one of said base and said bridge member by means of a hingeable connection , and wherein the positioning arm further comprises an actuator for inducing a relative displacement between the first and ...

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Номер записи: 73
06-08-2015 дата публикации

Photothermal actuation of a probe for scanning probe microscopy

Номер: US20150219684A1
Автор: Andrew Humphris, Bin Zhao
Принадлежит: INFINITESIMA LTD

Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.

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Номер записи: 74
26-07-2018 дата публикации

SYSTEMS AND METHODS FOR NANO-TRIBOLOGICAL MANUFACTURING OF NANOSTRUCTURES

Номер: US20180210007A1
Автор: Carpick Robert W., Gosvami Nitya Nand, Khare Harmandeep S., LAHOUIJ Imene
Принадлежит: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA

The presently disclosed subject matter provides systems and methods for generating nanostructures from tribological films. A probe tip can be immersed in a liquid mixture comprising a plurality of ink particles suspended in a medium. A substrate on which the tribological film is to be generated can also be immersed in the liquid mixture. A processor controlling movement of the probe tip can be configured to cause the probe tip to slide along the substrate in a shape of a desired pattern of the nanostructure with a contact force to cause one or more ink particles of the plurality of ink particles compressed underneath the probe tip to be transformed into a tribological film onto the substrate in the shape of the desired pattern of the nanostructure. 1. A method of generating a nanostructure on a substrate , comprising:immersing the substrate and a probe tip in a liquid mixture comprising a plurality of ink particles suspended in a medium;causing the probe tip to contact the substrate immersed in the liquid mixture; andcausing the probe tip to slide along the substrate in a shape of a desired pattern of the nanostructure with a contact force to cause one or more ink particles of the plurality of ink particles compressed underneath the probe tip to be transformed into a tribological film onto the substrate to thereby generate the nanostructure.2. The method of claim 1 , wherein the plurality of ink particles comprise at least one of a plurality of nanoparticles and a plurality of molecules.3. The method of claim 1 , wherein the probe tip comprises a tip of an atomic force microscopy probe.4. The method of claim 1 , wherein the substrate comprises a preexisting nanostructure and wherein the tribological film deposited on the preexisting nanostructure generates a multi-material nanostructured device.5. The method of claim 1 , further comprising:measuring an amount of friction between the probe tip and the nanostructure simultaneously while manufacturing the nanostructure ...

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Номер записи: 75
05-08-2021 дата публикации

Nanoscale Dynamic Mechanical Analysis via Atomic Force Microscopy (AFM-nDMA)

Номер: US20210239732A1
Автор: Osechinskiy Sergey, Pittenger Bede, Ruiter Anthonius, Syed-Amanulla Syed-Asif
Принадлежит:

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device. 1. A method for determining a mechanical property of a soft viscoelastic sample with an atomic-force-microscope (AFM)-based system , the method comprising: i) an average sample-loading force, generated by a probe of the system, and', 'ii) an area of contact between a tip of the probe and a surface of said viscoelastic sample configured as a thin film or a composite material with a Young modulus value no higher than 10 GPa, 'while maintaining at least one of'}to be substantially constant, repositioning the probe of the system towards the surface of said viscoelastic sample until a cantilever of the probe is deflected by a pre-determined amount from a nominal orientation of the cantilever;andmeasuring, at a set of frequencies within a range from 0.001 Hz to 1,000 Hz, a viscoelastic parameter of the surface of said sample in absence of using either a lock-in detection or a Fast-Fourier-Transform based analysis.2. The method according to claim 1 , wherein said measuring includesduring a first period of time acquiring, from a sensor of electronic circuitry of the system, a first set of electrical signals at a frequency from said set of frequencies to determine a depth of deformation of the surface with the tip of the probe, andduring a second period of time acquiring, from the sensor of the electronic circuitry of the system, a second set of electrical signals at a reference frequency to compensate for a change in the area of contact caused by the creep of the surface,wherein the sensor includes at least one of a deflection sensor and a sensor configured to measure a position of the probe with respect to the ...

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Номер записи: 76
02-08-2018 дата публикации

ELECTRICAL CONTACT AUTO-ALIGNMENT STRATEGY FOR HIGHLY PARALLEL PEN ARRAYS IN CANTILEVER FREE SCANNING PROBE LITHOGRAPHY

Номер: US20180217183A1
Автор: IVANKIN Andrey, MAGOLINE Jared A.
Принадлежит:

Disclosed embodiments provide an electrical contact alignment strategy for leveling an array of probes, pens, tips, etc., in relationship to a substrate, for example, wherein a plurality of independent electrical circuits are formed by configuring regions of the array and substrate regions to be partially conductive and connected to opposite electrodes or vice versa. 1. A lithography instrument comprising:a probe array;a controller that controls positioning of the probe array or a substrate relative to each other, wherein a plurality of components are to be manufactured on the substrate by lithography; andmeans to align the probe array or the substrate parallel to each other on an automated basis for subsequent manufacturing lithography.2. The lithography instrument of claim 1 , further comprising a motorized tip/tilt stage coupled to the controller and either the probe array or the substrate that enables tilting of the probe array or the substrate in two orthogonal planes under the control of the controller.3. The lithography instrument of claim 1 , wherein the automated alignment applies a voltage bias to either the probe array or the substrate to induce a measurable electrical current to indicate electrical contact between a region of the substrate and a corresponding region of the probe array.4. The lithography instrument of claim 1 , wherein the automated alignment forms an electric circuit capable of carrying electric current.5. The lithography instrument of claim 1 , wherein the automated alignment is performed by the controller performing iterative control and movement of either the probe array or the substrate relative to each other while measuring electrical current between corresponding conductive regions of the probe array and the substrate.6. The lithography instrument of claim 1 , wherein the automated alignment positions the probe array or the substrate such that the probe array and the substrate are positioned parallel to each other within 0.005° in ...

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Номер записи: 77
23-10-2014 дата публикации

METHOD FOR CONTROLLING A SCANNING MICROSCOPE

Номер: US20140317789A1
Автор: Herrero Julio Gomez, Martin David Martinez, Ruiz-Castellanos Miriam Jaafar
Принадлежит:

The invention relates to a control method having at least two control loops for a scanning microscope provided with a microlever and an actuator suitable for energizing the microlever, in which a first loop maintains as a controlled variable the oscillation amplitude of the microlever and as a manipulated variable the amplitude of the electric signal supplied to the actuator, and a second loop uses as a controlled variable the amplitude of the aforementioned electric signal and as a manipulated variable the tip-sample distance. Said procedure makes it possible to ignore changes of sign in the tip-sample interaction. 1. A method of control with at least two control loops for a scanning microscope provided with a micro-cantilever and an actuator adapted to excite the micro-cantilever , wherein a first loop has an oscillation amplitude of the micro-cantilever as a controlled variable and an amplitude of an electrical signal introduced into the actuator as a manipulated variable , and a second loop that uses the amplitude of the previous electrical signal as the controlled variable and a tip-sample distance as the manipulated variable.2. The method according to claim 1 , wherein the amplitude falls within the range of 0.01 nm to 1000 nm.3. The method according to claim 1 , wherein a third control loop is provided in which the excitation frequency is the manipulated variable and the movement phase is the controlled variable.4. The method according to claim 1 , wherein an electrical potential is applied to the micro-cantilever claim 1 , said electrical potential having two components—one alternating at a given frequency and one continuous—and a fourth control loop is provided claim 1 , the controlled variable of which is the movement amplitude of the micro-cantilever at the given frequency and the potential of the continuous component is the manipulated variable. The invention falls within the field of atomic force microscopes. In particular, it relates to a method for ...

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Номер записи: 78
10-08-2017 дата публикации

Force Measurement with Real-Time Baseline Determination

Номер: US20170227577A1
Автор: Hu Shuiqing, Liu Changchun, Pittenger Bede, Su Chanmin
Принадлежит:

An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts. 1. An AFM having a probe that interacts with a sample , the AFM comprising:a scanner to position at least one of the probe and the sample at a location of interest of the sample;a Z-axis scanner to move at least one of the probe and the sample to lessen a separation therebetween and cause the two to interact;a detector to measure a deflection of the probe;a processor to discriminate a deflection artifact from a deflection due to probe-sample interaction from the measured deflection data by continuously identifying a baseline during the moving step to derive an artifact free deflection and compare it with a predefined trigger force;wherein the Z-axis scanner retracts the probe from the sample if the artifact free deflection substantially corresponds to the trigger force; andwherein the processor determines the force between the sample and the probe, wherein the force is less than 20 pN.2. The AFM of claim 1 , wherein the force is used as a trigger to change a parameter associated with the moving step.3. The AFM of claim 2 , wherein the parameter is at least one of a speed claim 2 , a direction and a force gradient.4. The AFM of claim 1 , wherein the processor compares a drive ramp to a fit line based on data corresponding to the deflection claim 1 , and further extrapolates the baseline based on the comparison.5. The AFM of claim 4 , wherein the fit line is determined by performing a least squares fit.6. The AFM of claim 5 , wherein the processor provides a rolling baseline until a threshold trigger is met. This application is a divisional of U.S. application Ser. No. 14/563,826, filed Dec. 8, 2014 (U.S. Pat. No. 9,575,090, issued Feb. 21, 2017), which ...

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Номер записи: 79
18-07-2019 дата публикации

SCANNING PROBE NANOTOMOGRAPH COMPRISING AN OPTICAL ANALYSIS MODULE

Номер: US20190219608A1
Автор: ALEKSEEV Alexander Mihaylovich, EFIMOV Anton Evgenievich, SOKOLOV Dmitry Yurjevich, VOLKOV Aleksey Dmitrievich
Принадлежит:

The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a scanning probe nanotomograph having an optical analysis module and comprising a base, on which a piezo-scanner unit, a probe unit and a punching unit are mounted, a sixth actuator is introduced, which is installed on said base, on which an optical analysis module is fastened, which comprises a lens and an analyser, optically connected to each other; moreover, the sixth actuator facilitates displacement of the optical analysis module along the third axis Z. The invention aims at expanding functional capabilities by means of using the optical analysis module. The technical result of the invention consists in enabling the optical observation and study of objects while same are being sectioned, which expands the functional capabilities of the apparatus. 1. A scanning probe nanotomograph having an optical analysis module comprising a base , on which a piezo-scanner unit is mounted , on which a piezo-scanner is fastened , comprising an object holder comprising an object having a measured surface , wherein the piezo-scanner facilitates displacement of the object holder along with the object along a first axis X , along a second axis Y , and along a third axis Z , the second axis Y and the third axis Z form an object scanning plane relative to a probe , and the first X axis is perpendicular to the object scanning plane , wherein the piezo-scanner unit comprises a first actuator facilitating its displacement along with the piezo-scanner , the object holder and the object along the third axis Z , on a base , a probe unit is also mounted , having a probe holder , in which the probe is fastened , configured to interact with the measured surface of the object , wherein the probe unit comprises a second actuator facilitating displacement of the probe holder along with the probe along the first axis X , and comprises a third ...

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Номер записи: 80
18-07-2019 дата публикации

WIDE-FIELD SCANNING PROBE MICROSCOPE COMBINED WITH AN APPARATUS FOR MODIFYING AN OBJECT

Номер: US20190219610A1
Автор: ALEKSEEV Alexander Mihaylovich, EFIMOV Anton Evgenievich, SOKOLOV Dmitry Yurjevich, VOLKOV Aleksey Dmitrievich
Принадлежит: Chastnoe Uchrezhdenie "Nazarbayev University Research and Innovation System"

The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution. 1. A scanning probe microscope combined with a device for modifying the surface of an object and scanning , comprising a base , on which are mounted a piezo scanner unit with piezo scanner having the longitudinal axis 0-01 , disposed along the first coordinate X , wherein the object holder is secured on the piezo scanner with object , which has a measurement surface disposed in the plane of the second coordinate Y and third coordinate Z , also containing the probe unit with probe holder , in which the probe is secured which has the capability of interacting with the measurement surface of the object , a punch unit with punch also being mounted on the base and having a cutting edge arranged on the punch drive , wherein the cutting edge is disposed along the second coordinate Y and has the capability of interacting with the object , the piezo scanner having the capability of moving the object holder along the first coordinate X , along the second coordinate Y , and along the third coordinate Z , and provides scanning of the object in the plane of the second coordinate Y and third coordinate Z , as well as its movement along the ...

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Номер записи: 81
27-08-2015 дата публикации

METHOD AND APPARATUS FOR AUTOMATED SCANNING PROBE MICROSCOPY

Номер: US20150241468A1
Автор: HOWALD Lukas Emanuel, MATTER Urs, SUM Robert
Принадлежит:

This invention concerns scanning probe microscopes and related instruments (“SPMs”) when used to investigate or measure large samples whose size is a multiple of the typical operational scanning area of an SPM, say 150 μm×150 μm at most. To avoid frequent readjustments or other time-consuming human interaction and errors when focusing the SPM, a multi-step, automated method for the SPM-scanning of large samples is disclosed, comprising a “coarse”, i.e. low resolution, non-SPM scanning or mapping step adapted to scan a large sample and providing an integral map of the sample, followed by a preferably mathematical evaluation step identifying areas of interest of the sample, which areas are then subjected to a focused “fine” raster scanning step by the SPM with high resolution. The associated apparatus provides the means to execute this novel three-step process. 1. A method for automatic raster scanning a surface of a sample using a mapping means for mapping said surface and a scanning means for raster scanning said surface , said surface being substantially larger than the scanning area of said scanning means , said method being characterized by the following steps: by coarsely positioning said mapping means over said surface of said sample in a given distance, preferably several mm,', 'stepwise reducing said distance, preferably by steps of a few μm, thereby in each step recording a focal plane of said surface and', 'from said recorded focal planes, developing an integral or total three-dimensional map of said surface including an elevation profile,, 'mapping the complete surface, or a large part of it,'}analysing said integral map to identify and localize at least one area of interest within said surface, thereby deriving the elevation of said area of interest,positioning said raster scanning means over said area of interest at a distance given by the derived elevation, andraster scanning said area of interest of said surface by said raster scanning means.2. The ...

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Номер записи: 82
27-08-2015 дата публикации

PRECISE PROBE PLACEMENT IN AUTOMATED SCANNING PROBE MICROSCOPY SYSTEMS

Номер: US20150241469A1
Автор: Fonoberov Vladimir, Hand Sean, Lopez Andrew, Milligan Eric, Osborne Jason, Wu Robert
Принадлежит:

A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors. 1. A scanning probe microscope (SPM) system for characterizing target regions of a sample , the SPM system comprising:a probe including a tip having an apex adapted to interact with nanoscale features of the sample, wherein a relative position of the apex and specific nanoscal features of the sample is not visually observable; location information for each of a plurality of features of interest in remote regions of the sample according to a sample-specific coordinate system; and', 'feature identification information for each of the plurality of features of interest, the feature identification information including structural properties of each of the plurality of features of interest;, 'a sample data module configured to maintain shuttling of the relative positioning between the probe and the sample to globally reposition the probe to specific locations in remote regions of the sample; and', 'scanning within a target region to cause interaction of the probe tip and the nanoscale features of the sample to produce a three-dimensional image of that target region;, 'a probe positioning system including ...

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Номер записи: 83
26-08-2021 дата публикации

SCANNING PROBE MICROSCOPE AND OPTICAL AXIS ADJUSTMENT METHOD IN SCANNING PROBE MICROSCOPE

Номер: US20210263068A1
Автор: YAMASAKI Kenji
Принадлежит:

It is intended to save time for adjusting a position of a detection unit. In a position adjustment process of a detector, a control device moves the detector obliquely with respect to a boundary line partitioning photodiodes on a plane on which the detector moves and moves the detector so that the position of the center of gravity of a spot of a laser beam and the center of a light-receiving surface coincide in response to the incident of at least a part of the laser beam on the light-receiving surface. 1. A scanning probe microscope comprising:a cantilever;an irradiation unit configured to irradiate the cantilever with a laser beam;a detection unit including a light-receiving surface for receiving the laser beam reflected by the cantilever, the detection unit being configured to detect the laser beam incident on the light-receiving surface;a drive unit configured to move the detection unit along a plane intersecting with an optical axis of the laser beam incident on the light-receiving surface; anda control unit configured to control the drive unit,wherein the light-receiving surface is provided with a plurality of light-receiving areas, andwherein the control unit performs a first control for controlling the drive unit so that the detection unit is moved obliquely with respect to an axis parallel to a boundary line partitioning the plurality of light-receiving areas and a second control for adjusting so that a center of gravity of a spot of the laser beam on the light-receiving surface is brought to be positioned at a center of the light-receiving surface in response to receiving the laser beam by the light-receiving surface.2. The scanning probe microscope as recited in claim 1 ,wherein the control unit performs the second control in response to detection by the detection unit that the center of gravity of the spot has passed over the boundary line partitioning the plurality of light-receiving areas.3. The scanning probe microscope as recited in claim 2 ,wherein ...

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Номер записи: 84
23-08-2018 дата публикации

DEVICE AND METHOD FOR MEASURING AND/OR MODIFYING SURFACE FEATURES ON A SURFACE OF A SAMPLE

Номер: US20180238931A1
Автор: Sadeghian Marnani Hamed
Принадлежит:

The present document describes a device for measuring and/or modifying surface features and/or sub-surface features on or below a surface of a sample. The system comprises a sample carrier, one or more heads, and a support structure. The support structure comprises a reference surface for providing a positioning reference. The heads are separate from the sample carrier and the support structure, and the device further comprises a pick and place manipulator arranged for positioning the heads at respective working positions. The manipulator comprises a gripper and an actuator for moving the gripper, wherein the actuator is arranged for providing a motion in a direction transverse to the reference surface. The gripper is arranged for engaging and releasing the respective heads from the transverse motion. The document also describes a method of measuring and/or modifying surface features on a surface of a sample. 1. A device for measuring and/or modifying surface features and/or sub-surface features on or below a surface of a sample , the system comprising:a sample carrier for supporting the sample for exposing the surface for enabling said measuring and/or modifying, one or more heads including at least one of surface measuring equipment or surface modification equipment, and a support structure for supporting the one or more heads, wherein the support structure comprises a reference surface for providing a positioning reference for enabling positioning of each of said one or more heads at a respective working position,wherein the heads are separate from the sample carrier and the support structure such as to be not connected thereto, and wherein the device further comprises a pick and place manipulator arranged for gripping of respective ones of the heads and positioning thereof at their respective working positions,wherein the manipulator comprises a gripper and an actuator for moving the gripper and the reference surface relative to each other, wherein the actuator ...

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Номер записи: 85
23-07-2020 дата публикации

Z-POSITION MOTION STAGE FOR USE IN A SCANNING PROBE MICROSCOPY SYSTEM, SCAN HEAD AND METHOD OF MANUFACTURING

Номер: US20200233013A1
Автор: Dekker Albert, Kastelijn Aukje Arianne Annette, van Riel Martinus Cornelius Johannes Maria
Принадлежит:

The present document relates to a Z-position motion stage for use in a scanning probe microscopy system. The stage comprises a support element for mounting the z-position motion stage on a scan head, and at least one first actuator mounted on the support element for enabling motion of a probe of the scanning probe microscopy system. The probe is connected to or attachable to the z-position motion stage. The support element and the at least one first actuator are shaped and mounted such as to form a rotation symmetric element which is rotation symmetric around a notional common longitudinal axis. The document further relates to a scan head, a method of manufacturing a z-position motion stage, and a Z-position motion stage obtained with such a method. 1. A Z-position motion stage for use in a scanning probe microscopy system , the z-position motion stage comprising:a support element for mounting the z-position motion stage on a scan head of the scanning probe microscopy system; andat least one first actuator mounted on the support element that enables motion of a probe of the scanning probe microscopy system,wherein the probe is connected to or attachable to the z-position motion stage,wherein the support element and the at least one first actuator are shaped and mounted to form a rotation symmetric element which is rotation symmetric around a notional common longitudinal axis,wherein the support element comprises at least one projecting portion, the at least one projecting portion being circumferentially arranged around the notional common longitudinal axis and rotation symmetric therewith, andwherein the at least one projecting portion comprises an apex portion forming a stationary ring for supporting the z-position motion stage on the scan head.2. The Z-position motion stage according to claim 1 , wherein the support element has a circular shape in cross section transverse to the notional common longitudinal axis.3. The Z-position motion stage according to claim 1 ...

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Номер записи: 86
13-11-2014 дата публикации

Method and device for controlling a scanning probe microscope

Номер: US20140338073A1
Автор: Marija PLODINEC, Marko Loparic, Roderick Yh Lim
Принадлежит: UNIVERSITAET BASEL

The present invention relates to a method for controlling a scanning probe microscope having a probe ( 2 ) with a tip ( 21 ) for interacting with a sample ( 4 ), and a nanoscanner ( 1 ) for retaining the sample ( 4 ) or the probe ( 2 ), comprising the steps of monitoring the extension of the piezo element ( 1 ) along a first direction (R) along which the tip ( 21 ) is moved towards the sample ( 4 ), and adjusting the level of the probe ( 2 ) along the first direction (R) by means of an additional actuator ( 3 ), when the nanoscanner ( 1 ) exhibits an extension below or above a threshold value. The invention further relates to a device ( 100 ) for controlling a scanning probe microscope.

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Номер записи: 87
23-09-2021 дата публикации

SCANNING PROBE MICROSCOPE AND SETTING METHOD THEREOF

Номер: US20210293849A1
Автор: Higa Kunihito, Shigeno Masatsugu, Shikakura Yoshiteru, YAMAMOTO Hiroyoshi
Принадлежит:

Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force. 1. A scanning probe microscope for scanning a surface of a sample with a probe of a cantilever , the scanning probe microscope comprising:a movement driving unit capable of moving the cantilever and the sample relatively at least in z direction; anda control device controlling the movement driving unit to perform an approach operation of making the cantilever and the sample approach each other at a predetermined speed, and to stop the approach operation when it is determined that a contact between the probe and the sample are has been made,wherein the predetermined speed is set such that, when a control operation to stop the approach operation is performed, force applied to the sample due to the contact between the probe and the sample does not exceed a preset first force.2. The scanning probe microscope of claim 1 , wherein the predetermined speed is set based at least on a time lag between when the control operation to stop the approach operation is performed and when the approach operation is stopped.3. The scanning probe microscope of or claim 1 , wherein the control device stops the approach operation when the contact between the probe and the sample is detected ...

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Номер записи: 88
30-07-2020 дата публикации

Thermally Stable, Drift Resistant Probe for a Scanning Probe Microscope and Method of Manufacture

Номер: US20200241038A1
Автор: Mukhopadhyay Deepkishore, Wong Jeffrey K.
Принадлежит:

A probe assembly for a surface analysis instrument such as an atomic force microscope (AFM) that accommodates potential thermal drift effects includes a substrate defining a base of the probe assembly, a cantilever extending from the base and having a distal end, and a reflective pad disposed at or near the distal end. The reflective pad has a lateral dimension (e.g., length) between about twenty-five (25) microns, and can be less than a micron. Ideally, the reflective pad is patterned on the cantilever using photolithography. A corresponding method of manufacture of the thermally stable, drift resistant probe is also provided. 1. A probe assembly for a surface analysis instrument , the probe assembly including:a substrate defining a base of the probe assembly;a cantilever extending from the base and having a free end; anda reflective pad disposed at the distal end, wherein the reflective pad is patterned on any region of the cantilever using photolithography.2. The probe assembly of claim 1 , wherein the reflective pad has a lateral dimension that is controllable to less than about plus or minus twenty-five (25) microns at any point on the cantilever.3. The probe assembly of claim 2 , wherein the dimension is less than a micron.4. The probe assembly of claim 3 , wherein the lateral dimension is at least one of a length and a width.5. The probe assembly of claim 2 , wherein the at least one reflective pad is disposed on a front side of the cantilever.6. The probe assembly of claim 2 , wherein the reflective pad extends to a distal end of the free end.7. The probe assembly of claim 1 , wherein the at least one reflective pad includes a reflective pad disposed on a front side of the cantilever and a reflective pad disposed on a back side of the cantilever.8. The probe assembly of claim 7 , where the material of the at least one reflective pad is a high stress material.9. The probe assembly of claim 1 , wherein the at least one reflective pad includes at least two ...

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Номер записи: 89
07-09-2017 дата публикации

Modular Atomic Force Microscope

Номер: US20170254834A1
Автор: Cleveland Jason, Costales Paul, Gannepalli Anil, Hensel Jonathan, HODGSON James, Klonowski Matthew, Proksch Roger, Rutgers Maarten, Viani Mario, Walters Deron
Принадлежит:

A modular AFM/SPM which provides faster measurements, in part through the use of smaller probes, of smaller forces and movements, free of noise artifacts, that the old generations of these devices have increasingly been unable to provide. The modular AFM/SPM includes a chassis, the foundation on which the modules of the instrument are supported; a view module providing the optics for viewing the sample and the probe; a head module providing the components for the optical lever arrangement and for steering and focusing those components; a scanner module providing the XYZ translation stage that actuates the sample in those dimensions and the engage mechanism; a isolation module that encloses the chassis and provides acoustic and/or thermal isolation for the instrument and an electronics module which, together with the separate controller, provide the electronics for acquiring and processing images and controlling the other functions of the instrument. All these modules and many of their subassemblies are replaceable and potentially upgradeable. This allows updating to new technology as it becomes available. 1. An atomic force microscope system operating to characterize a sample , comprising:a chassis;an atomic force microscope cantilever, coupled to the chassis;a view system, coupled to said chassis, that has optical features which allow optical viewing in an area of the cantilever or of the sample, said view system having a light source emitting light along a first optical axis, an image receiving structure located along a second optical axis spaced from and parallel to the first optical axis, a focus adjustment mechanism formed of a first lens group and a second lens group, each of said lens groups including multiple lenses, and said first lens group being movable, and the second lens group being fixed, said first and second lens groups each being along a common optical axis,said light from said light source being produced along said first optical axis directed ...

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Номер записи: 90
07-10-2021 дата публикации

A SCANNING PROBE MICROSCOPE AND A METHOD FOR OPERATING THEREOF

Номер: US20210311090A1
Автор: BIEMOND Jan Jacobus Benjamin, KRAMER Lukas, Winters Jasper
Принадлежит:

A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals. 1. A method of operating a scanning probe microscope wherein a control loop is provided that is configured for controlling one or more feedback parameters of the scanning probe microscope , wherein the scanning probe microscope comprises a sensor device including a cantilever having a probe tip , wherein the scanning probe microscope includes at least one stage actuator for actuating at least one of an object stage or sensor stage to vary a relative distance between the sensor device and a sample , and wherein a controller is provided with one or more control parameters configured to control the at least one stage actuator for keeping the sample at a desired distance with respect to the cantilever , the method including: an excitation signal having a plurality of frequency components is introduced in the control loop, and', 'a resulting response signal indicative of a cantilever displacement or a stage-sample distance between the sensor device and the sample is measured,', 'wherein a model response function is ...

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Номер записи: 91
15-09-2016 дата публикации

Closed Loop Controller and Method for Fast Scanning Probe Microscopy

Номер: US20160266166A1
Автор: Ma Ji, Prater Craig, Shi Jian, Su Chanmin
Принадлежит:

A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor in a bandwidth of about seven times the scan frequency. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible. 1{'sup': 'rd', 'generating, with an actuator, relative motion between a probe and a sample at a scan frequency greater than ⅓the fundamental resonance of the actuator over a selected scan size;'}controlling the XY position of the actuator using both a feedback loop and a feed forward algorithm, wherein the bandwidth of the feedback loop is different than a bandwidth associated with operation of the feedforward algorithm; andrepeating the generating and the controlling steps to zoom to a second scan size smaller than the selected scan size while maintaining XY position error at less than about 1% of the selected scan size.. A method of operating a metrology instrument, comprising: This application is a divisional of U.S. patent application Ser. No. 14/558,483, filed Dec. 2, 2014 (issued as U.S. Pat. No. 9,244,096 on Jan. 26, 2016), which is a divisional of U.S. patent application Ser. No. 11/800,679, filed May 7, 2007 (issued as U.S. Pat. No. 8,904,560 on Dec. 2, 2014), both entitled Closed Loop Controller and Method for Fast Scanning Probe Microscopy. The subject matter of these applications is hereby incorporated by reference in their entirety.This invention was made with United States government support awarded by the following agency: NIST/ATP (Award #70NANB4H3055). The United States has certain rights in ...

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Номер записи: 92
14-10-2021 дата публикации

SYSTEM AND METHOD OF PERFORMING SCANNING PROBE MICROSCOPY ON A SUBSTRATE SURFACE

Номер: US20210318353A1
Автор: BIEMOND Jan Jacobus Benjamin, BIJNAGTE Anton Adriaan, HERFST Roelof Willem, MATUROVA Klara
Принадлежит:

The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system. A probe tip and substrate surface are moved relative to each other in one or more directions parallel to the scanning plane to position the probe tip to a scanning position on the substrate surface with the probe tip; a displacement is measured by an encoder of said probe tip in said one or more directions; and a fiducial pattern is provided fixed relative to the substrate surface, said fiducial pattern having a scannable structure that is scannable by said probe tip and said structure forming a grid of fiducial marks in said one or more dimensions; said grid dimensioned to allow for measuring placement deviations of the probe tip relative to the probe head by identifying one or more fiducial marks in the fiducial pattern. 1. A method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system , the system including at least one probe head , the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to a scanning plane , the method comprising:moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the scanning plane to position the probe tip at a scanning position on the substrate surface using the probe tip;measuring, by a displacement encoder, a displacement of said probe tip in said one or more directions, wherein the displacement encoder measures a distance of the probe tip relative to at least one of the group consisting of: a surface of a metrology frame, a surface that is statically connected to a metrology frame, and a two-dimensional optical encoder surface; andproviding a scannable encoder structure fixed relative to the substrate surface and having coded X and Y coordinates, wherein the scannable encoder structure ...

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Номер записи: 93
14-09-2017 дата публикации

METHOD AND APPARATUS FOR AVOIDING DAMAGE WHEN ANALYSING A SAMPLE SURFACE WITH A SCANNING PROBE MICROSCOPE

Номер: US20170261532A1
Автор: Baur Christof, Fettig Rainer, Pieper Hans Hermann
Принадлежит:

The present application relates to a method for avoiding damage when analyzing a sample surface with a scanning probe microscope, the method comprising the step of: detecting an electrostatic interaction between a charging of the sample surface and a measuring tip of the scanning probe microscope in the course of the approach of the measuring tip to the sample surface already at a distance from the sample surface which is greater than the distance of the measuring tip when analyzing the sample surface. 1. A method for avoiding damage when analyzing a sample surface with a scanning probe microscope , wherein the method comprises the following step:detecting an electrostatic interaction between a charging of the sample surface and a measuring tip of the scanning probe microscope in the course of the approach of the measuring tip to the sample surface already at a distance from the sample surface which is greater than the distance of the measuring tip when analyzing the sample surface.2. The method according to claim 1 , furthermore comprising the step of: terminating the approach of the measuring tip to the sample surface as soon as the detected electrostatic interaction exceeds a threshold value.3. The method according to claim 1 , furthermore comprising the step of: determining a distance between the measuring tip and the sample surface during the approach of the measuring tip to the sample surface.4. The method according to claim 1 , wherein the measuring tip comprises electrically conductive and/or semiconducting material.5. The method according to claim 1 , wherein the distance between the measuring tip and the sample surface at the beginning of the approach is in a range of 1000 μm to 10 μm claim 1 , preferably 500 μm to 20 μm claim 1 , more preferably 250 μm to 40 μm claim 1 , and most preferably of 125 μm to 80 μm.6. The method according to claim 1 , wherein an approach speed between the sample surface and the measuring tip comprises a range of 0.01 μm/s to ...

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Номер записи: 94
13-09-2018 дата публикации

Inspection Mechanism for Metal Blank

Номер: US20180259325A1
Автор: Chen Kuo Hsiu, HOU HSIN HONG, SU PO CHENG, Yang Shun Yu
Принадлежит:

An inspection mechanism for metal blank, adapted for sensing the surface condition of a metal blank, includes a framework, a holding device, a shuffling device, and an inductive control device. It mainly utilizes the inductive control device to drive the holding device to hold and position the metal blank and control the shuffling device to move the sensor of the inductive control device to the path of sensing the metal blank, so as to conduct the sensing operation. 1. An inspection mechanism for metal blank , adapted for sensing the surface condition of a metal blank , comprising:a framework, comprising a platform and a foot unit arranged next to said platform;a holding device arranged on said platform for holding the metal blank;a shuffling device, comprising a lateral rail arranged on said foot unit, a perpendicular rail slidably arranged on said lateral rail, and a base arranged on said perpendicular rail; anda inductive control device, comprising a controller and a sensor arranged on said base, wherein said base is adaptable for controllably horizontally and vertically move along said lateral rail and said perpendicular rail, wherein said controller is electrically connected with said holding device, said base, and said sensor, so as to control the actuation of said holding device and the horizontal and vertical moving distance of said base and to record the value of the surface condition of the metal blank sensed by said sensor.2. The inspection mechanism for metal blank claim 1 , as recited in claim 1 , wherein said holding device comprises a shelf arranged on said platform and a holder arranged under said shelf claim 1 , wherein said shelf has four slots provided thereon claim 1 , wherein said holder comprises a telescopic cylinder controlled by said controller and four holding posts driven by said telescopic cylinder to move to or from one another claim 1 , wherein each said holding post protrudes from the surface of said shelf from one said slot ...

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Номер записи: 95
13-09-2018 дата публикации

SCANNING PROBE MICROSCOPE

Номер: US20180259552A1
Автор: HIRADE Masato, KOBAYASHI Kanji
Принадлежит: SHIMADZU CORPORATION

A scanning probe microscope includes: a laser source ; a photodetector ; and a Y-drive mechanism provided for at least either the laser source or photodetector , for driving the object in a first direction (Y direction) in a plane perpendicular to an optical axis of the object. The Y-drive mechanism includes: a Y-screw shaft extending in the Y direction; a Y-guide shaft extending parallel to the Y-screw shaft; a support member for supporting the object, the support member coupled with the Y-screw shaft via a nut member screwed on the Y-screw shaft as well as coupled with the Y-guide shaft via a slide member mounted on the Y-guide shaft in a slidable manner; and a Y-drive motor for rotating the Y-screw shaft 1. A scanning probe microscope , comprising:a laser source;a photodetector for detecting light emitted from the laser source and reflected by a cantilever; anda first drive mechanism provided for at least one of the laser source and the photodetector, for driving an object in a first direction in a plane orthogonal to an optical axis of the object;wherein the first drive mechanism comprises:a first screw shaft extending in the first direction;a first guide shaft extending parallel to the first screw shaft;a support member for supporting the object, the support member coupled with the first screw shaft via a first nut member screwed on the first screw shaft as well as coupled with the first guide shaft via a first slide member mounted on the first guide shaft in a slidable manner; anda first drive motor for rotating the first screw shaft.2. The scanning probe microscope according to claim 1 , further comprising:a second drive mechanism for driving the object in a second direction intersecting with the first direction in the plane;wherein the second drive mechanism comprises:a second screw shaft extending in the second direction;a second guide shaft extending parallel to the second screw shaft;a base member for supporting the first drive mechanism, the base member ...

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Номер записи: 96
21-10-2021 дата публикации

PAN-SHARPENING FOR MICROSCOPY

Номер: US20210325428A1
Автор: Borodinov Nikolay, Ievlev Anton V., Kalinin Sergei V., OVCHINNIKOVA Olga S., Vasudevan Rama K.
Принадлежит:

Techniques for generating full-spatial resolution, full spectral resolution image(s) from a 3D spectral-data cube for any spectral value within a given spectral range are provided without requiring the acquisition of all full-spatial resolution, full spectral resolution data by an instrument. The 3D spectral-data cube is generated from a limited number of full-spatial resolution, sparse spectral resolution data and a sparse-spatial resolution, full-spectral resolution data of the same area of the sample. The use of the 3D spectral-data cube reduces the data acquisition time. 1. A system comprising: [ 'for each first-spatial resolution monochromatic image, each first-spatial resolution point has an associated spectral value at a respective color within the given spectral range, where a number of images in the set is less than a number of slices of the 3D spectral-data cube; and', "acquire a set of two or more first-spatial resolution monochromatic images corresponding to slices of a 3D spectral-data cube, the 3D spectral-data cube has two spatial dimensions and one spectral dimension, the two spatial dimensions having the first-spatial resolution, each point in the two spatial dimensions has an associated spectrum extending over a given spectral range, the 3D spectral-data cube is indicative of one or more constitutive materials of a sample and their abundance on the sample's surface,"}, 'acquire second-spatial resolution spectral maps of the sample, the second-spatial resolution being less than the first-spatial resolution, each second-spatial resolution point of the second-spatial resolution spectral maps has an associated spectrum extending over the given spectral range, and, 'an instrument configured to receive the set of two or more first-spatial resolution monochromatic images and the second-spatial resolution spectral maps of the sample;', 'produce the 3D spectral-data cube by combining the two or more first-spatial resolution monochromatic images and the ...

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Номер записи: 97
14-09-2017 дата публикации

Piezoelectric positioning device and positioning method by means of such a piezoelectric positioning device

Номер: US20170263843A1
Автор: ANIC Juergen, Kempter Christian, KORTEN Ulrich
Принадлежит:

A piezoelectric positioning device () has at least one piezoelectric actuator () having a first connection contact () and a second connection contact (). A control device () with digital/analog converters () connected to the connection contacts () is used to control the at least one piezoelectric actuator (). In comparison with a coarse converter (), a fine converter () has a comparatively smaller voltage range and lower voltage levels, with the result that a high degree of positioning accuracy can be achieved. 1. A piezoelectric positioning device comprising:at least one piezoelectric actuator comprising, respectively, a first connection contact and a second connection contact, [{'sub': 1', '1', '1, 'a first digital/analog converter connected to the first connection contact and providing a first analog converter output voltage Uin a first voltage range ΔUin first voltage levels Δu,'}, {'sub': 2', '2', '2, 'claim-text': {'br': None, 'sub': 1', '2', '1', '2, 'where: ΔU>ΔU≧Δu>Δu.'}, 'a second digital/analog converter connected to the second connection contact and providing a second analog converter output voltage Uin a second voltage range ΔUin second voltage levels Δu,'}], 'a control device configured to control the at least one piezoelectric actuator, and comprising2. The positioning device as claimed in claim 1 , wherein the first voltage levels Δuhave a maximum voltage inaccuracy Δu claim 1 , where: ΔU≧Δu+Δuand/or ΔU≦64·Δu.3. The positioning device as claimed in further comprising a first voltage amplifier arranged downstream of the first digital/analog converter and a second voltage amplifier is arranged downstream of the second digital/analog converter.4. The positioning device as claimed in claim 1 , further comprising a non-reactive resistor connected between the second digital/analog converter and the second connection contact.5. The positioning device as claimed in claim 3 , further comprising a low-pass filter connected between the first digital/analog ...

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Номер записи: 98
22-09-2016 дата публикации

SCANNING ION CONDUCTANCE MICROSCOPY USING SURFACE ROUGHNESS FOR PROBE MOVEMENT

Номер: US20160274146A1
Автор: CLARKE RICHARD, FROLENKOV GREGORY, KLENERMAN DAVID, KORCHEV YURI EVGENIEVICH, LI CHAO, NOVAK PAVEL, OSTANIN VICTOR PETROVICH, SHEVCHUK ANDREW
Принадлежит:

A method for interrogating a surface using scanning ion conductance microscopy (SICM), comprising the steps of: 1. A method for interrogating a surface using scanning ion conductance microscopy (SICM) , comprising the steps of:a) repeatedly bringing a SICM probe into proximity with the surface at discrete, spaced locations in a region of the surface and measuring surface height at each location;b) estimating surface roughness or other surface characteristic for the region based upon the surface height measurements; andc) repeatedly bringing the probe into proximity with the surface at discrete, spaced locations in the region, the number and location of which is based upon the estimated surface roughness or other surface characteristic in the region, and obtaining an image of the region with a resolution adapted to the surface roughness or other surface characteristic.2. The method according to claim 1 , wherein steps b) and c) are repeated recursively for sub-regions according to the required image resolution.3. The method according to claim 1 , wherein the step of bringing the probe into proximity with the surface at each location is performed by approaching each location from a distance greater than the height of the surface at that location.4. The method according to claim 1 , wherein lateral movement of the probe occurs only when the probe is distant from the surface.5. The method according to claim 1 , wherein claim 1 , during the step of bringing the scanning probe into proximity with the surface claim 1 , the approach is terminated when a measured probe current reaches a threshold value.6. The method according to claim 5 , wherein the threshold value is based upon the probe current measured when the probe is distant from the surface.7. The method according to claim 5 , wherein the approach is terminated when probe current is reduced by 0.25% to 1%.8. The method according to claim 6 , wherein for each measurement claim 6 , the distance traveled by the probe ...

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Номер записи: 99
13-08-2020 дата публикации

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANALYSIS USING SECONDARY ION MASS SPECTROMETRY

Номер: US20200258733A1
Автор: BEVIS Chris, Newcome Bruce H., REED David A., Schueler Bruno W., Smedt Rodney
Принадлежит:

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA). 1a sample stage;a primary ion source and ion optics for producing and directing a primary ion beam to the sample stage;an extraction lens directed at the sample stage, the extraction lens configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage; anda magnetic sector spectrograph coupled to the extraction lens along an optical path of the SIMS system, the magnetic sector spectrograph comprising an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).. A secondary ion mass spectrometry (SUvIS) system, comprising: This patent application is a continuation application of U.S. patent application Ser. No. 16/557,197, filed on Aug. 30, 2019, which is a continuation application of U.S. patent application Ser. No. 16/039,292, filed on Jul. 18, 2018 (now U.S. Pat. No. 10,403,489), which is a continuation application of U.S. patent application Ser. No. 15/550,014, filed on Aug. 9, 2017 (now U.S. Pat. No. 10,056,242), which is a U.S. National Phase application under 35 U.S.C. § 371 of International Application No. PCT/US2016/017370, filed on Feb. 10, 2016, which claims the benefit of U.S. Provisional Application No. 62/114,521, filed on Feb. 10, 2015, U.S. Provisional Application No. 62/114,519, filed on Feb. 10, 2015, and U.S. Provisional ...

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Номер записи: 100
11-11-2021 дата публикации

SURFACE ANALYSIS DEVICE

Номер: US20210349125A1
Автор: HIRADE Masato, KOBAYASHI Kanji
Принадлежит:

A surface analysis device () is provided with a sample stage () for placing a sample thereon, a cantilever to be arranged to face the sample stage (), and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage (), to shift the sample stage () relative to a measurement unit () so that the measurement unit () and the sample stage () separate from each other in a first direction in which the cantilever and the sample stage () face each other, and then slidably move the stage () in a direction intersecting with the first direction. 1. A surface analysis device for analyzing a sample surface , comprising:a sample stage configured to place a sample thereon;a measurement unit including a cantilever to be arranged to face the sample stage and a cantilever drive unit for driving the cantilever; anda drive mechanism configured to relatively displace the measurement unit and the sample stage,wherein the drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to the measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the sample stage in a second direction intersecting with the first direction,wherein the drive mechanism includes a sample stage holding unit for holding the sample stage and a moving mechanism for moving the sample stage between a measurement position and a sample take-out position,wherein the first direction is a vertical direction,wherein the moving mechanism is configured to lift and lower the sample stage holding unit so that the sample stage is lifted and lowered between the measurement position and a retracted position positioned lower than the measurement position and slidably move the sample stage holding unit so that the sample stage is moved between the sample take-out position and the retracted position ...

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Номер записи: 101