01-01-2015 дата публикации
Номер: US20150001681A1
Принадлежит:
A method includes holding bonded wafers by a wafer holding module. A gap between the bonded wafers along an edge is filled with a protection material. 1. A method , comprising:holding bonded wafers by a wafer holding module; andfilling a gap between the bonded wafers along an edge with a protection material.2. The method of claim 1 , further comprising preheating the bonded wafers.3. The method of claim 2 , wherein the bonded wafers are heated to a temperature ranging from 50° C. to 200° C.4. The method of claim 2 , wherein the bonded wafers are heated by the wafer holding module.5. The method of claim 1 , further comprising performing a thermal process after the gap is filled.6. The method of claim 1 , further comprising rotating the bonded wafers by the wafer holding module.7. The method of claim 1 , wherein the gap is filled by spraying the protection material by a jet nozzle.8. The method of claim 1 , wherein the protection material comprises epoxy or underfill material.9. The method of claim 1 , wherein the protection material comprises carbon claim 1 , silicon claim 1 , and oxygen.10. The method of claim 1 , wherein the protection material comprises carbon claim 1 , alumina claim 1 , and oxygen.11. A wafer assembly claim 1 , comprising:two wafers bonded together; andan edge seal comprising a protective material filled in a gap between the two wafers along an edge.12. The wafer assembly of claim 11 , wherein the protection material comprises epoxy or underfill material.13. The wafer assembly of claim 11 , wherein the protection material comprises carbon claim 11 , silicon claim 11 , and oxygen.14. The wafer assembly of claim 11 , wherein the protection material comprises carbon claim 11 , alumina claim 11 , and oxygen.15. The wafer assembly of claim 11 , wherein the gap has a distance up to 4 mm from the edge of the bonded wafers.16. An apparatus claim 11 , comprising:a wafer holding module, wherein the wafer holding module is configured to hold bonded wafers; ...
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