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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Форма поиска

Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
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Применить Всего найдено 5460. Отображено 100.
12-01-2012 дата публикации

Method of forming cu pillar capped by barrier layer

Номер: US20120007231A1
Автор: Wei Sen CHANG

A nickel barrier layer is formed on an upper sidewall surface of a Cu pillar. A mask layer with an opening for defining the Cu pillar window has an upper portion and a lower portion. The upper portion of the mask layer is removed after the formation of the Cu pillar so as to expose the upper sidewall surface of the Cu pillar. The nickel barrier layer is then deposited on the exposed sidewall surface of the Cu pillar followed by removing and the lower portion of the mask layer.

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19-01-2012 дата публикации

Interconnections for flip-chip using lead-free solders and having reaction barrier layers

Номер: US20120012642A1
Принадлежит: International Business Machines Corp

An interconnection structure suitable for flip-chip attachment of microelectronic device chips to packages, comprising a two, three or four layer ball-limiting composition including an adhesion/reaction barrier layer, and having a solder wettable layer reactive with components of a tin-containing lead free solder, so that the solderable layer can be totally consumed during soldering, but a barrier layer remains after being placed in contact with the lead free solder during soldering. One or more lead-free solder balls is selectively situated on the solder wetting layer, the lead-free solder balls comprising tin as a predominant component and one or more alloying components. With a two-layer ball-limiting composition comprising an adhesion/reaction barrier layer, wherein the adhesion/reaction barrier layer serves both as an adhesion layer and a reaction barrier layer, the adhesion/reaction barrier layer can be comprised of a material selected from the group consisting of Zr and ZrN

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02-02-2012 дата публикации

Semiconductor device and method of designing a wiring of a semiconductor device

Номер: US20120025377A1
Принадлежит: Toshiba Corp

A semiconductor device has an LSI chip including a semiconductor substrate, an LSI core section provided at a center portion of the semiconductor substrate and serving as a multilayered wiring layer of the semiconductor substrate, a first rewiring layer provided adjacent to an outer periphery of the LSI core section on the semiconductor substrate and including a plurality of wiring layers, a first pad electrode disposed at an outer periphery of the first rewiring layer, and an insulation layer covering the first pad electrode. The semiconductor device includes a second rewiring layer provided on the LSI chip and including a rewiring connected to the first pad electrode. The semiconductor device includes a plurality of ball electrodes provided on the second rewiring layer. The first rewiring layer is electrically connected to the LSI core section and the first pad electrode.

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01-03-2012 дата публикации

Conductive connection structure with stress reduction arrangement for a semiconductor device, and related fabrication method

Номер: US20120049343A1

A semiconductor device disclosed herein includes a conductive connection structure having a stepped profile that serves as a stress relief feature. The conductive connection structure includes a stress buffer arrangement for a contact pad. The stress buffer arrangement has a stepped via that terminates at the contact pad, and the stepped via has a plurality of inwardly sloped and concentric sections in a stacked orientation. The connection structure also includes underbump metallization overlying at least a portion of the contact pad and lining the stepped via, and a conductive connection element coupled to the underbump metallization. The conductive connection element fills the lined recess.

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15-03-2012 дата публикации

Semiconductor device having pad structure with stress buffer layer

Номер: US20120061823A1

A semiconductor device has a pad structure with a ring-shaped stress buffer layer between a metal pad and an under-bump metallization (UBM) layer. The stress buffer layer is formed of a dielectric layer with a dielectric constant less than 3.5, a polymer layer, or an aluminum layer. The stress buffer layer is a circular ring, a square ring, an octagonal ring, or any other geometric ring.

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22-03-2012 дата публикации

Semiconductor device and manufacturing method thereof

Номер: US20120068334A1
Принадлежит: Toshiba Corp

Semiconductor devices of embodiments include a plurality of solder bumps electrically connected on a plurality of electrode pads disposed on a semiconductor substrate in parallel at a pitch of 40 μm or less via under bump metals. The ratio of the diameter (the top diameter) of the portion of each solder bump most away from the semiconductor substrate and the diameter (the bottom diameter) of the bottom side of each solder bump is 1:1 to 1:4.

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19-04-2012 дата публикации

Microelectronic assemblies having compliancy and methods therefor

Номер: US20120091582A1
Принадлежит: Tessera LLC

A microelectronic assembly is disclosed that includes a semiconductor wafer with contacts, compliant bumps of dielectric material overlying the first surface of the semiconductor wafer, and a dielectric layer overlying the first surface of the semiconductor wafer and edges of the compliant bumps. The compliant bumps have planar top surfaces which are accessible through the dielectric layer. Conductive traces may be electrically connected with contacts and extend therefrom to overlie the planar top surfaces of the compliant bumps. Conductive elements may overlie the planar top surfaces in contact with the conductive traces.

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26-04-2012 дата публикации

Conductive feature for semiconductor substrate and method of manufacture

Номер: US20120098121A1

A conductive feature on a semiconductor component is disclosed. A first passivation layer is formed over a substrate. A bond pad is formed over the first passivation layer. A second passivation layer overlies the first passivation layer and the bond pad. The second passivation layer has a first opening overlying the bond pad and a plurality of second openings exposing a top surface of the first passivation layer. A buffer layer overlies the second passivation layer and fills the plurality of second openings. The buffer layer has a third opening overlapping the first opening and together exposes a portion the bond pad. The combined first opening and third opening has sidewalls. An under bump metallurgy (UBM) layer overlies the sidewalls of the combined first opening and third opening, and contacts the exposed portion of the bond pad. A conductive feature overlies the UBM layer.

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10-05-2012 дата публикации

Method for manufacturing a semiconductor device having a refractory metal containing film

Номер: US20120115324A1
Принадлежит: Renesas Electronics Corp

A semiconductor device and a method for manufacturing the same of the present invention in which the semiconductor device is provided with a fuse structure or an electrode pad structure, suppress the copper blowing-out from a copper containing metal film. The semiconductor device comprises a silicon substrate, SiO 2 film provided on the silicon substrate, copper films embedded in the SiO 2 film, TiN films covering an upper face of a boundary region between an upper face of copper films and the copper films, and the SiO 2 film, and SiON films covering an upper face of the TiN films.

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24-05-2012 дата публикации

Package carrier

Номер: US20120125669A1

A package carrier including a substrate, at least an under bump metallurgic (UBM) layer and at least a conductive bump is provided. The substrate has a conductive structure and at least a pad connected with the conductive structure. A region of the pad connected with the conductive structure is a signal source region. The UBM layer is disposed on the pad and includes a first conductive pattern and a second conductive pattern. A side wall of the second conductive pattern is directly connected to a side wall of the first conductive pattern, and the second conductive pattern is disposed close to the signal source region. The conductivity of the second conductive pattern is smaller than the conductivity of the first conductive pattern. The conductive bump is disposed on the UBM layer.

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24-05-2012 дата публикации

Method of manufacturing semiconductor device

Номер: US20120129335A1
Принадлежит: Fujitsu Semiconductor Ltd

A method of manufacturing a semiconductor device including the following steps: forming an insulator layer over a first conductor over a semiconductor substrate; forming a barrier layer to coat the surface of the insulator layer; forming a second conductor over the barrier layer; melting the second conductor in an atmosphere containing either hydrogen or carboxylic acid in a condition that the surface of the insulator layer over the first conductor is coated with the barrier layer; and removing the barrier layer partially from the surface of the insulator layer with the second conductor as a mask.

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12-07-2012 дата публикации

Increasing Dielectric Strength by Optimizing Dummy Metal Distribution

Номер: US20120180018A1

A method includes providing a wafer representation including a metal layer and a plurality of bump pads over the metal layer, wherein the metal layer includes directly-under-bump-pad regions. A solid metal pattern is inserted into the metal layer, wherein the solid metal pattern includes first parts in the directly-under-bump-pad regions and second parts outside the directly-under-bump-pad regions. Portions of the second parts of the solid metal pattern are removed, wherein substantially no portions of the first parts of the solid metal pattern are removed. The remaining portions of the solid metal pattern not removed during the step of removing form dummy metal patterns. The dummy metal patterns and the plurality of bump pads are implemented in a semiconductor wafer.

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19-07-2012 дата публикации

Packaging substrate with conductive structure

Номер: US20120181688A1
Автор: Shih-Ping Hsu
Принадлежит: Individual

A packaging substrate with conductive structure is provided, including a substrate body having at least one conductive pad on a surface thereof, a stress buffer metal layer disposed on the conductive pad and a thickness of the stress buffer metal layer being 1-20 μm, a solder resist layer disposed on the substrate body and having at least one opening therein for correspondingly exposing a portion of top surface of the stress buffer metal layer, a metal post disposed on a central portion of the surface of the stress buffer metal layer, and a solder bump covering the surfaces of the metal post. Therefore, a highly reliable conductive structure is provided, by using the stress buffer metal layer to release thermal stresses, and using the metal post and the solder bump to increase the height of the conductive structure.

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02-08-2012 дата публикации

Customized rf mems capacitor array using redistribution layer

Номер: US20120193781A1
Принадлежит: RF Micro Devices Inc

Disclosed is a method for fabricating a customized micro-electromechanical systems (MEMS) integrated circuit using at least one redistribution layer. The method includes steps of providing a substrate on which MEMS components are fabricated and coupling predetermined ones of the MEMS components via the redistribution traces.

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02-08-2012 дата публикации

Chip package structure

Номер: US20120196438A1
Принадлежит: Individual

The formation of the conductive wire of a chip package consists of a plurality of steps. Coat a first dielectric layer on the pad-mounting surface and a slot is formed on each bonding pad correspondingly. Then coat a second dielectric layer and produce a wiring slot corresponding to each bonding pad and the slot thereof. Next each wiring slot is filled with electrically conductive metal so as to form a conductive wire. Later Coat a third dielectric layer and a corresponding slot is formed on one end of each conductive wire while this slot is filled with electrically conductive metal to form a solder point. The above steps can further be repeated so as to form an upper-layer and a lower-layer conductive wire. Thereby precision of the chip package, use efficiency of the wafer and yield rate of manufacturing processes are all improved.

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11-10-2012 дата публикации

Solder ball contact susceptible to lower stress

Номер: US20120256313A1
Принадлежит: International Business Machines Corp

A solder ball contact and a method of making a solder ball contact includes: a first insulating layer with a via formed on an integrated circuit (IC) chip and a metal pad; an under bump metallurgy (UBM) structure disposed within the via and on a portion of the first insulating layer, surrounding the via; a second insulating layer formed on an upper surface of an outer portion of the UBM structure that is centered on the via; and a solder ball that fills the via and is disposed above an upper surface of an inner portion of the UBM structure that contacts the via, in which the UBM structure that underlies the solder ball is of a greater diameter than the solder ball.

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01-11-2012 дата публикации

Spherical solder reflow method

Номер: US20120273155A1
Принадлежит: International Business Machines Corp

The present disclosure relates to methods of making solder balls having a uniform size. More particularly, the disclosure relates to improved solder ball formation processes that prevent or reduce bridging/merging of two or more solder balls during reflow. The processes of the instant disclosure are desirable because they do not require a sifting step to obtain uniformly-sized solder balls.

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29-11-2012 дата публикации

Pad structure, circuit carrier and integrated circuit chip

Номер: US20120299192A1
Автор: Yeh-Chi Hsu, Yu-Kai Chen
Принадлежит: Via Technologies Inc

A pad structure is suitable for a circuit carrier or an integrated circuit chip. The pad structure includes an inner pad, a conductive via and an outer pad. The conductive via connects the inner pad. The outer pad connects the conductive via and further connects a conductive ball or a conductive bump. The outer diameter of the outer pad is greater than the outer diameter of the inner pad.

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17-01-2013 дата публикации

Semiconductor Device with Solder Bump Formed on High Topography Plated Cu Pads

Номер: US20130015575A1
Принадлежит: Stats Chippac Pte Ltd

A semiconductor device has a first conductive layer formed over a substrate. A first insulating layer is formed over the substrate and first conductive layer. A second conductive layer is formed over the first conductive layer and first insulating layer. A second insulating layer is formed over the first insulating layer and second conductive layer. The second insulating layer has a sidewall between a surface of the second insulating material and surface of the second conductive layer. A protective layer is formed over the second insulating layer and surface of the second conductive layer. The protective layer follows a contour of the surface and sidewall of the second insulating layer and second conductive layer. A bump is formed over the surface of the second conductive layer and a portion of the protective layer adjacent to the second insulating layer. The protective layer protects the second insulating layer.

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17-01-2013 дата публикации

Solder Bump with Inner Core Pillar in Semiconductor Package

Номер: US20130015576A1
Автор: Yaojian Lin
Принадлежит: Stats Chippac Pte Ltd

A flip chip semiconductor package has a substrate with a plurality of active devices. A contact pad is formed on the substrate in electrical contact with the plurality of active devices. A passivation layer, second barrier layer, and adhesion layer are formed between the substrate and an intermediate conductive layer. The intermediate conductive layer is in electrical contact with the contact pad. A copper inner core pillar is formed by plating over the intermediate conductive layer. The inner core pillar has a rectangular, cylindrical, toroidal, or hollow cylinder form factor. A solder bump is formed around the inner core pillar by plating solder material and reflowing the solder material to form the solder bump. A first barrier layer and wetting layer are formed between the inner core pillar and solder bump. The solder bump is in electrical contact with the intermediate conductive layer.

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31-01-2013 дата публикации

Semiconductor device, semiconductor device unit, and semiconductor device production method

Номер: US20130026629A1
Автор: Sumiaki Nakano
Принадлежит: Panasonic Corp

An example of a semiconductor device according to the present invention includes: a protective film ( 1 ) which has an opening to expose a part of the surface of an electrode pad ( 4 ) and covers the surface of the electrode pad ( 4 ) excluding the opening; and a bump ( 6 ) which is electrically connected with the electrode pad ( 4 ) through the opening of the protective film ( 1 ) and has a part exposed outside within the area of the electrode pad ( 4 ), wherein probe marks ( 7 ) are formed by a probe brought into contact with the electrode pad ( 4 ) for electrical characteristic inspection, and the probe marks ( 7 ) are positioned within a region where the protective film ( 1 ) is formed and are covered by the protective film ( 1 ).

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07-02-2013 дата публикации

Integrated Inductor

Номер: US20130032923A1

A system and method for providing an integrated inductor with a high Quality factor (Q) is provided. An embodiment comprises a magnetic core that is in a center of a conductive spiral. The magnetic core increases the inductance of the integrated inductor to allow the inductor to be used in applications such as a RF choke. The magnetic core may be formed in the same manner and time as an underbump metallization.

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11-04-2013 дата публикации

Semiconductor device having multiple bump heights and multiple bump diameters

Номер: US20130087910A1
Принадлежит: Texas Instruments Inc

A semiconductor die includes a first contact stack including a first UBM pad on a first die pad, a second contact stack including a second UBM pad on a second die pad, and a third contact stack including a third UBM pad on a third die pad. The second UBM pad perimeter is shorter than the first UBM pad perimeter, and the third UBM pad perimeter is longer than the second UBM pad perimeter. A first solder bump is on the first UBM pad, a second solder bump is on the second UBM pad, and a third solder bump is on the third UBM pad. The first solder bump, second solder bump and third solder bump all have different sizes.

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02-05-2013 дата публикации

Method to form solder deposits and non-melting bump structures on substrates

Номер: US20130105329A1
Принадлежит: Atotech Deutschland GmbH and Co KG

Described is a method of forming a metal or metal alloy layer onto a substrate comprising the following steps i) provide a substrate including a permanent resin layer on top of at least one contact area and a temporary resin layer on top of the permanent resin layer, ii) contact the entire substrate area including the at least one contact area with a solution suitable to provide a conductive layer on the substrate surface and i) electroplate a metal or metal alloy layer onto the conductive layer.

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16-05-2013 дата публикации

METHOD FOR FORMING STUDS USED FOR SELF-ALIGNMENT OF SOLDER BUMPS

Номер: US20130119536A1

A method and a combination of studs, silicon chips, and solder bumps configured to restrict motion of a plurality of silicon chips. The combination includes: a plurality of studs, a plurality of silicon chips, a plurality of target solder bumps, where the plurality of solder bumps are melted between the plurality of silicon chips, where lateral positions of the plurality of studs are in accord with a pitch of the plurality of target solder bumps by using the pitch as a reference, where (i) lateral positions and lateral widths of studs of the plurality of studs located at a first silicon chip of the plurality of silicon chips and (ii) lateral positions and lateral widths of studs of the plurality of studs located at a second silicon chip of the plurality of silicon chips are restricted such that relative lateral motion on the respective silicon chips is restricted. 1. A method for forming a plurality of studs configured to restrict lateral relative motion of a plurality of silicon chips when solder bumps are melted between the plurality of silicon chips , the method comprising the steps of:setting a pitch and an accuracy of expected lateral shift for a plurality of solder bumps to be arranged between the plurality of silicon chips;determining lateral positions of target solder bumps based on the set pitch;using the determined lateral positions of the target solder bumps as a reference for determining (i) a first lateral position of each of a plurality of alignment solder bumps on a first one of the silicon chips and (ii) a second lateral position of each of a plurality of purposely-not-aligned solder bumps on a second one of the silicon chips, wherein the first and second lateral positions are determined such that an accuracy of relative shift between the first lateral position and the second lateral position is larger than the accuracy of expected lateral shift;using the determined lateral positions of the target solder bumps as a reference for determining lateral ...

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16-05-2013 дата публикации

Test Structure and Method of Testing Electrical Characteristics of Through Vias

Номер: US20130120018A1

A method and apparatus for testing the electrical characteristics, such as electrical continuity, is provided. A substrate, such as a wafer or an interposer, having a plurality of through vias (TVs) is provided. Along one side of the substrate, a conductive layer electrically couples two or more of the TVs. Thereafter, the electrical characteristics of the TVs may be test by, for example, a probe card in electrical contact with the TVs on the other side of the substrate. During testing, current passes through a first TV from a first side of the substrate, to the conductive layer on a second side of the substrate, to a second TV, and back to the first side of the substrate through the second TV.

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30-05-2013 дата публикации

Semiconductor Device and Method of Forming RDL Under Bump for Electrical Connection to Enclosed Bump

Номер: US20130134580A1
Принадлежит: Stats Chippac Pte Ltd

A semiconductor device has a semiconductor wafer with a plurality of semiconductor die. A first conductive layer is formed over a surface of the wafer. A first insulating layer is formed over the surface of the wafer and first conductive layer. A second conductive layer has first and second segments formed over the first insulating layer. A second insulating layer is formed over the first insulating layer and second conductive layer. A UBM layer is formed over the second insulating layer and the first segment of the second conductive layer. A first bump is formed over the UBM layer. The first bump is electrically connected to the second segment and electrically isolated from the first segment of the second conductive layer. A second bump is formed over the surface of the wafer and electrically connected to the first segment of the second conductive layer.

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06-06-2013 дата публикации

SOLDER BUMP CONNECTIONS

Номер: US20130140695A1

Solder bump connections and methods for fabricating solder bump connections. The method includes forming a layer stack containing first and second conductive layers, forming a dielectric passivation layer on a top surface of the second conductive layer, and forming a via opening extending through the dielectric passivation layer to the top surface of the second conductive layer. The method further includes forming a conductive plug in the via opening. The solder bump connection includes first and second conductive layers comprised of different conductors, a dielectric passivation layer on a top surface of the second conductive layer, a via opening extending through the dielectric passivation layer to the top surface of the second conductive layer, and a conductive plug in the via opening. 1. A method of fabricating a solder bump connection , the method comprising:forming a layer stack containing a first conductive layer and a second conductive layer on the first conductive layer;forming a dielectric passivation layer on a top surface of the second conductive layer;forming a via opening extending through the dielectric passivation layer to the top surface of the second conductive layer; andforming a conductive plug in the via opening that is coupled by the second conductive layer with the first conductive layer.2. The method of further comprising:forming a dielectric layer; andforming a metal line in the dielectric layer that contacts the first conductive layer;wherein the dielectric passivation layer is arranged relative to the dielectric layer such that the layer stack is disposed in part between the dielectric passivation layer and the dielectric layer.3. The method of wherein the dielectric passivation layer and the conductive plug have approximately equal thicknesses.4. The method of wherein the dielectric passivation layer is comprised of a photosensitive polyimide (PSPI) claim 1 , the first conductive layer is comprised of titanium-tungsten (TiW) or a bilayer ...

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06-06-2013 дата публикации

UBM Structures for Wafer Level Chip Scale Packaging

Номер: US20130140706A1

A wafer level chip scale semiconductor device comprises a semiconductor die, a first under bump metal structure and a second under bump metal structure. The first under bump metal structure having a first enclosure is formed on a corner region or an edge region of the semiconductor die. A second under bump metal structure having a second enclosure is formed on an inner region of the semiconductor die. The first enclosure is greater than the second enclosure.

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13-06-2013 дата публикации

SOLDER INTERCONNECT BY ADDITION OF COPPER

Номер: US20130149857A1
Принадлежит: LSI Corporation

A method of forming an electronic device provides an electronic device substrate having a solder bump pad located thereover. A nickel-containing layer is located over the solder bump pad. A copper-containing layer is formed on the nickel-containing layer prior to subjecting the electronic device to a reflow process. 1. A method of forming an electronic device , comprising:providing an electronic device substrate having a solder bump pad located thereover and a nickel-containing layer located over said solder bump pad; andforming a copper-containing layer on said nickel-containing layer prior to subjecting said electronic device to a reflow process.2. The method of claim 1 , wherein said copper-containing layer is formed by electroplating.3. The method of claim 1 , wherein said copper-containing layer is formed by stencil printing.4. The method of claim 1 , further comprising forming a solder bump over said nickel-containing layer.5. The method of claim 4 , wherein said solder bump is essentially free of Cu prior to said forming.6. The method of claim 4 , further comprising melting said solder bump claim 4 , thereby forming a (Ni claim 4 ,Cu)/Sn intermetallic compound region between said solder bump and said nickel-containing layer.7. The method of claim 6 , wherein said intermetallic compound region has a concentration of copper in a range of about 55 wt % to about 65 wt %.8. The method of claim 6 , wherein said solder bump includes a concentration of copper in a range of about 0.5 wt % to about 4 wt %.9. The method of claim 1 , wherein said solder bump has a diameter of about 100 μm and said Cu-layer has a thickness in a range of about 0.5 μm to about 2 μm.10. A method of forming an electronic device claim 1 , comprising:providing an electronic device substrate having a solder bump located thereover; andforming a copper-containing layer on said solder bump.11. The method of claim 10 , wherein said electronic device substrate is an integrated circuit substrate.12. ...

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18-07-2013 дата публикации

SEMICONDUCTOR MODULE, METHOD FOR MANUFACTURING THE SEMICONDUCTOR MODULE, AND MOBILE APPARATUS

Номер: US20130181344A1
Принадлежит: SANYO ELECTRIC CO., LTD.

Bump electrodes and wiring layers are formed by selectively removing a copper sheet while the copper sheet is being held on a supporting base by an adhesion layer. Subsequently, a device mounting board is formed by laminating an insulating resin layer in such a manner that Au/Ni layers are exposed on the bump electrodes and the adhesion layer. The device mounting board and a semiconductor device held on the supporting base are temporarily press-bonded to each other and then the supporting base and the adhesion layer are removed. Then the device mounting board and the semiconductor device are finally and permanently press-bonded together. 1. A semiconductor module , comprising:an insulating resin layer;a wiring layer disposed on one main surface of said insulating resin layer;a bump electrode protruding on a side of said insulating resin layer from said wiring layer; anda semiconductor device where a device electrode is disposed counter to said bump electrode,wherein said wiring layer has an end surface formed in a tapered shape such that the end surface of said wiring layer enters inside a wiring layer forming region as the end surface thereof approaches the semiconductor device, andthe bump electrode runs through the insulating resin layer, and the bump electrode and the device electrode are electrically connected to each other.2. A semiconductor module according to claim 1 , wherein the bump electrode is tapered in the same direction as a tapered direction of the end surface of the wiring layer.3. A method claim 1 , for fabricating a semiconductor module claim 1 , including:forming a wiring layer, where a substrate electrode is provided, by selectively removing a metallic sheet held on a supporting base; andforming a device mounting board, which includes the wiring layer, the substrate electrode, and an insulating resin layer, by forming the insulating resin layer on the supporting base in a manner such that a top face itself of the substrate electrode or a ...

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18-07-2013 дата публикации

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Номер: US20130183799A1
Принадлежит: ELPIDA MEMORY, INC.

Provided is a method for manufacturing a semiconductor device, which includes: preparing a semiconductor wafer; and peeling off an adhesive layer from the semiconductor wafer. The prepared semiconductor wafer includes at least one semiconductor chip having a bump electrode group formed by arraying bump electrodes in a matrix, and the adhesive layer formed on one surface having the bump electrodes. The bump electrode group is formed by arraying the bump electrodes so that the number of bump electrodes in a second direction can be smaller than that in a first direction. To peel off the adhesive layer from the semiconductor wafer, the adhesive layer is peeled off from the semiconductor wafer along the first direction from one end side of the semiconductor wafer. 1. A method for manufacturing a semiconductor device , comprising:preparing a semiconductor wafer that includes at least one semiconductor chip having a bump electrode group formed by arraying bump electrodes in a matrix, the number of the bump electrodes in a second direction being smaller than that in a first direction, and an adhesive layer formed on one surface having the bump electrode group; andpeeling off the adhesive layer from the semiconductor wafer along the first direction from one end side of the semiconductor wafer.2. The method for manufacturing a semiconductor device according to claim 1 , wherein when the adhesive layer is peeled off claim 1 , in a state where a peeling tape is pressed to the adhesive layer on the semiconductor wafer by a roller claim 1 , the roller is moved along the first direction from the one end side of the semiconductor wafer.3. The method for manufacturing a semiconductor device according to claim 1 , wherein pitches between the bump electrodes constituting the bump electrode group are equal to one another.4. The method for manufacturing a semiconductor device according to claim 1 , further comprising adhering the adhesive layer to the one surface of the semiconductor ...

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29-08-2013 дата публикации

Electronic device and electronic component

Номер: US20130221523A1
Принадлежит: Yaskawa Electric Corp

The disclosure discloses an electronic device including an electronic component including a chip main body, a plurality of electrodes, a passivation which includes openings, and UBMs which are respectively formed to be smaller than an opening area of the opening, a substrate including a plurality of substrate electrodes, and a plurality of spherical solder bumps configured to electrically connect the plurality of electrodes with the plurality of substrate electrodes. The solder bump is bonded to the electrode at a bonding portion located on a bottom surface of the spherical shape. Each of the plurality of electrodes includes an exposed portion generated because a bonding area between the solder bump and the electrode via the UBM is smaller than the opening area. The solder bump is separated apart from the passivation via an upper space located above the exposed portion of the electrode.

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12-09-2013 дата публикации

SEMICONDUCTOR CHIP AND MANUFACTURING METHOD THEREOF

Номер: US20130234323A1
Автор: Miyazaki Toru
Принадлежит: ELPIDA MEMORY, INC.

A semiconductor device comprising stacked substrates through a bump, the bump comprising a solder bump formed on a copper bump wherein the solder bump includes Zn. 1. A semiconductor device comprising:a first substrate; anda second substrate stacked on the first substrate through a bump,the bump comprising a solder bump formed on a copper bump formed over the second substrate;wherein the solder bump includes Zn.2. The semiconductor device according to claim 1 , further comprising;a through-electrode penetrating the second substrate, the bump being electrically connected with the through-electrode.3. The semiconductor device according to claim 1 ,wherein a concentration of Zn in an upper portion of the solder bump is lower than a concentration of Zn in a lower portion of the solder bump, the lower portion of the solder bump is in contact with the copper bump.4. The semiconductor device according to ;wherein the solder bump includes 1 to 5% by weight of Zn.5. The semiconductor device according to ;wherein the solder bump further includes Bi6. The semiconductor device according to ;wherein the solder bump further includes Bi.7. The semiconductor device according to ;wherein the solder bump further includes Cu.8. The semiconductor device according to ;wherein the solder hump further includes Cu.9. The semiconductor device according to ;wherein the solde bump further includes Cu.10. A method of manufacturing a semiconductor device claim 4 , the semiconductor device comprising a first substrate stacked on a second substrates through a bump claim 4 , the bump comprising a solder bump formed on a copper hump formed over the first substrate claim 4 , the method comprising:forming the copper bump over the first substrate;forming a Sn/Zn alloy layer on the copper bump;forming a Sn/Ag alloy layer on the Sn/Zn alloy; andheating and reflowing the Sn/Zn alloy layer and the Sn/Ag alloy layer.11. The method according to ;wherein the first substrate has a through-electrode ...

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12-09-2013 дата публикации

Semiconductor device bonding with stress relief connection pads

Номер: US20130234327A1
Принадлежит: ROHM CO LTD

An inventive semiconductor device includes: a semiconductor chip; an internal pad provided on a surface of the semiconductor chip for electrical connection; a surface protective film covering the surface of the semiconductor chip and having a pad opening from which the internal pad is exposed; a stress relief layer provided on the surface protective film and having an opening portion through which the internal pad exposed from the pad opening is exposed; a connection pad including an anchor buried in the pad opening and the opening portion and connected to the internal pad, and a projection provided integrally with the anchor as projecting on the stress relief layer, the projection having a width greater than an opening width of the opening portion; and a metal ball provided for external electrical connection as covering the projection of the connection pad.

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19-09-2013 дата публикации

SOLDERING RELIEF METHOD AND SEMICONDUCTOR DEVICE EMPLOYING SAME

Номер: US20130244384A1
Принадлежит: QUALCOMM INCORPORATED

A semiconductor device includes a substrate having a first side and a second side, the second side having a mounting location for at least one semiconductor element, and the first side having a plurality of locations electrically connected to locations on the second side. A plurality of electrically conductive interconnects are provided at the locations, each having a first end attached at the location and a second end spaced from the substrate, and an encapsulant partially encapsulates the plurality of interconnects and has a surface lying in a first plane. The second ends are located on the side of the first plane opposite from the substrate first side, an annular space in the encapsulant surrounds each of the plurality of electrically conductive interconnects, and the annular space has a bottom located between the first plane and the substrate first side. Also a method for making such a semiconductor device. 1. A method of forming a semiconductor device comprising:providing a substrate having a top side having a mounting location for at least one semiconductor element and a bottom side having a plurality of locations electrically connected to locations on said top side;forming a plurality of electrically conductive interconnects at the plurality of locations on the bottom side;at least partially encapsulating, with an encapsulant, the plurality of electrically conductive interconnects without completely encapsulating the interconnects; andremoving a portion of the encapsulant adjacent to each of the interconnects to expose previously encapsulated portions of the interconnects while leaving portions of the interconnects adjacent to the bottom side encapsulated by the encapsulant.2. The method of claim 1 , wherein the removing is performed by laser ablation.3. The method of claim 1 , wherein the interconnects are solder balls and wherein a diameter of at least one of the solder balls lies in a plane parallel to the bottom side.4. The method of claim 3 , wherein ...

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26-09-2013 дата публикации

CHIP STRUCTURE, CHIP BONDING STRUCTURE USING THE SAME, AND MANUFACTURING METHOD THEREOF

Номер: US20130249086A1
Автор: Lin Ching-San
Принадлежит: RAYDIUM SEMICONDUCTOR CORPORATION

A chip structure, a chip bonding structure, and manufacturing methods thereof are provided. The chip structure includes a chip, a plurality of bumps, and an insulation layer. The bumps are disposed on the chip. Each bump has a first bump portion and a second bump portion connected to each other, wherein the first bump portion and the second bump portion have different activities. The bumps are subjected to chemical reaction to form an insulation layer on the surface of one of the first bump portion and the second bump portion which has higher activity, so as to avoid short-circuit between the adjacent bumps. 1. A chip structure , comprising:a chip;at least one bump disposed on the chip, wherein the bump includes a first bump portion and a second bump portion connected to each other, wherein the first bump portion and the second bump portion have different activities; andan insulation layer having an element identical to the element in a higher activity one of the first bump portion and the second bump portion, wherein the insulation layer is formed on the surface of the higher activity one of the first bump portion and the second bump portion.2. A chip bonding structure , comprising:a substrate including a plurality of conducting films spaced apart from each other;a chip including a plurality of bumps respectively aligned to the plurality of conducting films; anda conducting layer disposed between the substrate and the chip, wherein the conducting layer includes a plurality of conducting particles electrically connecting the bump and the aligned conducting film;wherein a portion of at least one of the plurality of bumps reacts with a reactant to form an insulation layer on the surface of the portion.3. The chip bonding structure of claim 2 , wherein the bump includes a first bump portion and a second bump portion connected to each other claim 2 , wherein the first bump portion and the second bump portion have different activities claim 2 , wherein the insulation ...

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03-10-2013 дата публикации

Copper Sphere Array Package

Номер: US20130256885A1
Принадлежит: CONEXANT SYSTEMS, INC.

Presented is a method for fabricating a semiconductor package, and the associated semiconductor package. The method includes providing a compliant coverlay having a resin film disposed thereon. A plurality of metallic spheres may be placed at predetermined positions in the resin film. A top surface and a bottom surface of the metallic spheres may be flattened. Tamp blocks on opposing sides of the metallic spheres may be used. The resin film may then be cured to permanently set the metallic spheres in the resin film, and the compliant overlay may then be removed. A semiconductor die may then be placed on the plurality of metallic spheres. An encapsulating layer may then be deposited over the semiconductor die, the plurality of metallic spheres, and the resin film. The semiconductor package may then be diced. The method does not include fabricating a metal leadframe for the semiconductor die. 1. A method for fabricating a semiconductor package , said method comprising:providing a compliant coverlay having a resin film disposed thereon;placing a plurality of metallic spheres at predetermined positions in said resin film;flattening a top surface and a bottom surface of each of said plurality of metallic spheres;2. The method of claim 1 , further comprising curing said resin film to permanently set said plurality of metallic spheres in said resin film.3. The method of claim 1 , further comprising placing a semiconductor die on said plurality of metallic spheres.4. The method of claim 1 , further comprising depositing an encapsulating layer over said semiconductor die claim 1 , said plurality of metallic spheres claim 1 , and said resin film.5. The method of claim 1 , further comprising removing said compliant coverlay from said resin film.5. The method of claim 1 , further comprising dicing said semiconductor package.6. The method of claim 1 , wherein said flattening said top surface and said bottom surface of each of said plurality of metallic spheres is achieved by ...

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10-10-2013 дата публикации

Semiconductor Device and Method of Confining Conductive Bump Material During Reflow with Solder Mask Patch

Номер: US20130264704A1
Автор: Pendse Rajendra D.
Принадлежит:

A semiconductor device has a semiconductor die with die bump pads and substrate with trace lines having integrated bump pads. A solder mask patch is formed interstitially between the die bump pads or integrated bump pads. The solder mask patch contains non-wettable material. Conductive bump material is deposited over the integrated bump pads or die bump pads. The semiconductor die is mounted over the substrate so that the conductive bump material is disposed between the die bump pads and integrated bump pads. The bump material is reflowed without a solder mask around the integrated bump pads to form an interconnect between the semiconductor die and substrate. The solder mask patch confines the conductive bump material within a footprint of the die bump pads or integrated bump pads during reflow. The interconnect can have a non-fusible base and fusible cap. 1. A method of making a semiconductor device , comprising:providing a substrate including a plurality of trace lines;forming a mask patch between the trace lines; anddisposing an interconnect structure over one of the trace lines.2. The method of claim 1 , wherein:the trace lines include integrated bump pads that are co-linear with the trace lines; andthe mask patch is formed between the integrated bump pads.3. The method of claim 1 , further including disposing a semiconductor die over the substrate.4. The method of claim 1 , wherein the mask patch is isolated and formed within an array of integrated bump pads on the trace lines.5. The method of claim 1 , wherein the interconnect structure includes a non-fusible portion and fusible portion.6. The method of claim 1 , wherein the mask patch confines the interconnect structure on one of the trace lines.7. A method of making a semiconductor device claim 1 , comprising:providing a substrate including a plurality of trace lines comprising integrated bump pads; andforming a plurality of isolated mask patches between the integrated bump pads.8. The method of claim 7 , ...

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17-10-2013 дата публикации

FAN-OUT CHIP SCALE PACKAGE

Номер: US20130273731A1
Принадлежит:

A chip scale package has a semiconductor die having an array of die bond pads arranged with a bond pad density per unit area, embedded in a molded die support body having a surface supporting an array of conducting contacts, each of the contacts connected by an electrical lead to a corresponding one of the die bond pads. 122-. (canceled)23. A method of making a chip scale package , comprising:providing a semiconductor die having a first area supporting a plurality of first bond pads;arranging a dielectric layer over at least a portion of the first area;embedding the semiconductor in a die support body formed of a molding material, in an orientation and position wherein the dielectric layer over at least a portion of the first area is exposed;exposing at least two of the first bond pads by opening a hole in the dielectric layer over each of said at least two first bond pads; andforming a plurality of electrical leads on the dielectric layer, each of said electrical leads forming at least one second bond pad and extending from the at least one second bond to a corresponding one of the first bond pads; andforming a conducting bump pad on at least one of the second bond pads.24. The method of claim 23 , wherein said dielectric layer is a self-supporting polymeric film structure.25. The method of claim 24 , wherein said self-supporting polymeric film structure is a dielectric polymeric film supported on a sacrificial substrate claim 24 , and wherein said arranging a dielectric layer over at least a portion of the first area includes positioning said first face of a semiconductor die on said self-supporting polymeric film structure claim 24 , and wherein said method further comprises:removing said sacrificial substrate after said embedding the semiconductor in a die support body formed of a molding material.26. The method of claim 24 , wherein an outer perimeter of said semiconductor die surrounds said first area claim 24 ,wherein said arranging a dielectric layer over at ...

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24-10-2013 дата публикации

QFN Package and Manufacturing Process Thereof

Номер: US20130280865A1
Автор: Shen Geng-Shin
Принадлежит:

The present invention provides a Quad Flat Non-leaded (QPN) package, which comprises a chip, a lead frame, a plurality of composite bumps and an encapsulant. The chip has a plurality of pads, and the lead frame has a plurality of leads. Each of the plurality of composite bumps has a first conductive layer and a second conductive layer. The first conductive layer is electrically connected between one of the pads and the second conductive layer, and the second conductive layer is electrically connected between the first conductive layer and one of the leads. The encapsulant encapsulates the chip, the leads and the composite bumps. Thereby, a QFN package with composite bumps and a semi-cured encapsulant is forming between the spaces of leads of lead frame before chip bonded to the lead frame are provided. 1. A manufacturing process for Quad Flat Non-leaded (QFN) packages , comprising the steps of: forming an upper unit by forming a semi-cured encapsulant onto a top carrier;', 'forming a lower unit by disposing the matrix lead frame on a bottom carrier, wherein the matrix lead frame has a plurality of leads;', 'bonding the upper unit and the lower unit by laminating the semi-cured encapsulant with the matrix lead frame to have the leads be in contact with the top carrier;', 'curing the semi-cured encapsulant to a fully cured encapsulant; and', 'removing the top carrier to form the lead frame module;, 'forming a lead frame module on a matrix lead frame, comprising the step ofbonding a plurality chips on the matrix lead frame of the lead frame module, each of the chips being electrically connected to a part of the leads of the matrix lead frame by a plurality of bumps on each of the chips;encapsulanting the chips and. the matrix lead frame; andforming a QFN package by singulating the encapsulated chips and the encapsulated matrix lead frame, wherein the QFN package comprises one of the encapsulated chips and a part of the encapsulated matrix lead frame,2. The ...

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31-10-2013 дата публикации

Electrical Connection Structure

Номер: US20130288473A1
Принадлежит:

A structure comprises a top metal connector formed underneath a bond pad. The bond pad is enclosed by a first passivation layer and a second passivation layer. A polymer layer is further formed on the second passivation layer. The dimension of an opening in the first passivation layer is less than the dimension of the top metal connector. The dimension of the top metal connector is less than the dimensions of an opening in the second passivation layer and an opening in the polymer layer. 1. A method comprising:depositing a first passivation layer over a substrate;forming a first opening with a first dimension in the first passivation layer;depositing a second passivation layer over the first passivation layer;forming a second opening with a second dimension in the second passivation layer; andforming a bond pad with a third dimension in the first opening and the second opening, whereinthe third dimension is greater than the second dimension.2. The method of claim 1 , further comprising:depositing a protection layer on the second passivation layer, wherein the protection layer comprises a third opening with a fourth dimension.3. The method of claim 2 , wherein:the second dimension is greater than the fourth dimension.4. The method of claim 2 , further comprising:forming a top metal connector with a fifth dimension, wherein the top metal connector is formed underneath the bond pad.5. The method of claim 4 , wherein:the fourth dimension is greater than the fifth dimension; andthe fifth dimension is greater than the first dimension.6. The method of claim 4 , further comprising:forming a top portion of the bond pad in the second passivation layer; andforming a bottom portion of the bond pad in the first passivation layer.7. The method of claim 6 , further comprising: the dielectric layer is underneath the first passivation layer; and', 'the top metal connector is embedded in the dielectric layer., 'depositing a dielectric layer over the substrate, wherein8. A method ...

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07-11-2013 дата публикации

CHIP-ON-FILM DEVICE

Номер: US20130292819A1
Принадлежит: NOVATEK MICROELECTRONICS CORP.

A chip-on-film device including a flexible circuit film having a wire, a passivation layer having a hole, an adhesive layer, a pad, an interconnection, and a bump is provided. A part of the adhesive layer is disposed in the hole. The pad is disposed under the passivation layer, and a part of the pad is disposed under the hole. A part of the interconnection is disposed under the passivation layer, and disposed at a side of the pad, wherein the interconnection does not touch the pad. A part of the bump is disposed on the adhesive layer. The bump is electrically connected to the pad via the adhesive layer. The bump is welded on the wire. A part of a first part of the bump overlaps the pad, and a second part of the bump extends to an outside of the pad and at least partially overlaps the interconnection. 1. A chip-on-film (COF) device , comprising:a flexible circuit film having at least a wire;a passivation layer having a first hole;a first adhesive layer, at least a part of the first adhesive layer being disposed in the first hole;a first pad disposed under the passivation layer, and at least a part of the first pad being disposed under the first hole;a first metal interconnection, at least a part of the first metal interconnection being disposed under the passivation layer and disposed at a first side of the first pad, wherein the first metal interconnection does not touch the first pad; anda metal bump, at least a part of the metal bump being disposed on the first adhesive layer, and the metal bump being electrically connected to the first pad via the first adhesive layer and welded on the at least one wire,wherein the metal bump comprises a first part and a second part, wherein at least a part of the first part overlaps the first pad along a perpendicular direction of the COF device, and the second part extends to an outside of the first pad along a first horizontal direction of the COF device and partially overlaps the first metal interconnection.2. The COF device ...

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07-11-2013 дата публикации

CONDUCTIVE STRUCTURE AND METHOD FOR FORMING THE SAME

Номер: US20130292821A1
Автор: CHI Chung-Pang
Принадлежит: CHIPMOS TECHNOLOGIES INC.

A conductive structure for a semiconductor chip and a method for forming the conductive structure are provided. The semiconductor chip comprises a plurality of first pads and second pads. The pad area is defined with a first area, a second area and a third area, wherein the first area is located between the second area and the third area. Each of the first pads and the second pads are interlaced to each other on the first area. The conductive structure comprises a plurality of conductive bumps formed on each of the first pads and the second pads respectively to electrically connect with each of the first pads and the second pads. Each of the conductive bumps has a first bump-width disposed on the first area and a second bump-width disposed on one of the second and third areas in which the first bump-width is shorter than the second bump-width.

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07-11-2013 дата публикации

BUMP STRUCTURE, SEMICONDUCTOR PACKAGE HAVING THE BUMP STRUCTURE, AND METHOD OF FORMING THE BUMP STRUCTURE

Номер: US20130292822A1
Принадлежит: Samsung Electronics Co., Ltd

A bump structure includes a first bump and a second bump. The first bump is disposed on a connection pad of a substrate. The first bump includes a lower portion having a first width, a middle portion having a second width smaller than the first width, and an upper portion having a third width greater than the second width. The second bump is disposed on the upper portion of the first bump. 1. A bump structure , comprising:a first bump disposed on a connection pad of a substrate and including a lower portion having a first width, a middle portion having a second width smaller than the first width, and an upper portion having a third width greater than the second width; anda second bump disposed on the upper portion of the first bump.2. The bump structure of claim 1 , wherein the lower portion of the first bump comprises a first conductive material claim 1 , the middle portion of the first bump comprises a second conductive material claim 1 , and the upper portion of the first bump comprises a third conductive material.3. The bump structure of claim 2 , wherein the first conductive material has a first ductility claim 2 , the second conductive material has a second ductility greater than the first ductility claim 2 , and the third conductive material has a third ductility smaller than the second ductility.4. The bump structure of claim 2 , wherein the first conductive material is substantially the same as the third conductive material.5. The bump structure of claim 4 , wherein the first conductive material and the third conductive material comprise copper (Cu).6. The bump structure of claim 5 , wherein the second conductive material comprises tin (Sn).7. The bump structure of claim 2 , wherein the second bump comprises a fourth conductive material substantially the same as the second conductive material.8. The bump structure of claim 1 , wherein the second bump has a fourth width greater than the second width.9. A semiconductor package claim 1 , comprising:a ...

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07-11-2013 дата публикации

CU PILLAR BUMP WITH ELECTROLYTIC METAL SIDEWALL PROTECTION

Номер: US20130295762A1
Принадлежит:

A method of forming a bump structure includes providing a semiconductor substrate and forming an under-bump-metallurgy (UBM) layer on the semiconductor substrate. The method further includes forming a mask layer on the UBM layer, wherein the mask layer has an opening exposing a portion of the UBM layer. The method further includes forming a copper layer in the opening of the mask layer and removing a portion of the mask layer to form a space between the copper layer and the mask layer. The method further includes performing an electrolytic process to fill the space with a metal layer and removing the mask layer. 1. A method of forming a bump structure , comprising:providing a semiconductor substrate;forming an under-bump-metallurgy (UBM) layer on a semiconductor substrate;forming a mask layer on the UBM layer, wherein the mask layer has an opening exposing a portion of the UBM layer;forming a copper layer in the opening of the mask layer;removing a portion of the mask layer to form a space between the copper layer and the mask layer;performing an electrolytic process to fill the space with a metal layer; andremoving the mask layer.2. The method of claim 1 , wherein the metal layer comprises nickel.3. The method of claim 1 , wherein the metal layer comprises gold.4. The method of claim 1 , wherein the copper layer has a thickness greater than 40 um.5. The method of claim 4 , wherein the electrolytic process forms the metal layer to cover the surface of the copper layer.6. The method of claim 5 , further comprising:forming a cap layer on the metal layer within the opening of the mask layer before removing the mask layer.7. A method of forming a bump structure claim 5 , comprising:forming an under-bump-metallurgy (UBM) layer on a semiconductor substrate;forming a mask layer on the UBM layer, wherein the mask layer has an opening exposing a portion of the UBM layer;forming a copper layer in the opening of the mask layer;performing a mask pullback process to form a space ...

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14-11-2013 дата публикации

SELF-ALIGNED PROTECTION LAYER FOR COPPER POST STRUCTURE

Номер: US20130299972A1
Автор: Liu Chung-Shi, Yu Chen-Hua
Принадлежит:

A semiconductor device includes a semiconductor substrate and a conductive post overlying and electrically connected to the substrate. The semiconductor device further includes a manganese-containing protection layer on a surface of the conductive post. The semiconductor device further includes a cap layer over a top surface of the conductive post. A method of forming a semiconductor device includes forming a bond pad region on a semiconductor substrate. The method further includes forming a conductive post overlying and electrically connected to the bond pad region. The method further includes forming a protection layer on a surface of the conductive post, wherein the protection layer comprises manganese (Mn). The method further includes forming a cap layer on a top surface of the conductive post. 1. A semiconductor device , comprising:a semiconductor substrate;a conductive post overlying and electrically connected to the substrate;a manganese-containing protection layer on a surface of the conductive post; anda cap layer over a top surface of the conductive post.2. The semiconductor device of claim 1 , further comprising an under bump metallurgy (UBM) layer between the conductive post and the semiconductor substrate claim 1 , wherein an entirety of a top surface of the UBM layer is covered by the conductive post.3. The semiconductor device of claim 1 , further comprising an alloy layer between the conductive post and the semiconductor substrate claim 1 , wherein an entirety of a top surface of the alloy layer is covered by the conductive post.4. The semiconductor device of claim 1 , manganese-containing protection layer comprises MnN claim 1 , MnOor MnON.5. The semiconductor device of claim 1 , wherein the cap layer comprises at least one of nickel claim 1 , tin claim 1 , tin-lead claim 1 , gold claim 1 , bismuth claim 1 , silver claim 1 , palladium claim 1 , indium claim 1 , nickel-palladium-gold claim 1 , or nickel-gold.6. The semiconductor device of claim 1 , ...

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21-11-2013 дата публикации

METHOD FOR MANUFACTURING Sn ALLOY BUMP

Номер: US20130309862A1
Принадлежит:

Provided is a method for manufacturing an Sn alloy bump, wherein composition of the Sn alloy bump can be readily controlled. The method for manufacturing an Sn alloy bump formed of an alloy composed of Sn and other one or more types of metals has a step of forming an Sn layer on an electrode pad in a resist opening formed on a substrate by electrolytic plating; a step of laminating Sn and an alloy layer on the Sn layer by electrolytic plating; and a step of forming an Sn alloy bump by melting the Sn layer and the laminated alloy layer after removal of a resist. 1. A method for manufacturing an Sn alloy bump formed of an alloy composed of Sn and other one or more types of metals , the method comprising:a step of forming an Sn layer on an electrode in a resist opening formed on a substrate by electrolytic plating;a step of laminating an alloy layer composed of Sn and the other metal on the Sn layer by electrolytic plating; anda step of forming an Sn alloy bump by melting the Sn layer and the alloy layer after removal of the resist.2. The method for manufacturing an Sn alloy bump according to claim 1 , wherein the other metal is Ag and the method comprises:a step of forming an Sn—Ag layer as the alloy layer on the Sn layer by electrolytic plating; anda step of forming an Sn—Ag bump as the Sn alloy bump by melting the Sn layer and the Sn—Ag layer after removal of the resist.3. The method for manufacturing an Sn alloy bump according to claim 1 , wherein the other metal is composed of two types of metals and the method comprises:a step of laminating two layers of an alloy layer composed of Sn and one of the two types of metals and an alloy layer composed of Sn and the other of the two types of metals on the Sn layer by electrolytic plating; anda step of forming an Sn alloy bump by melting the Sn layer and the two alloy layers laminated thereon after removal of the resist.4. The method for manufacturing an Sn alloy bump according to claim 3 , wherein one of the two types ...

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28-11-2013 дата публикации

Semiconductor device having wafer-level chip size package

Номер: US20130313703A1
Автор: Kiyonori Watanabe
Принадлежит: Oki Semiconductor Co Ltd

A semiconductor device including a semiconductor substrate with circuit elements and electrode pads formed on one surface. The surface is covered by a dielectric layer with openings above the electrode pads. A metal layer is included on the dielectric layer and patterned to form a conductive pattern with traces leading to the electrode pads. A protective layer is included as having openings exposing part of the conductive pattern. Each opening is covered by an electrode such as a solder bump, which is electrically connected through the conductive pattern to one of the electrode pads. The thickness of the protective layer, which may function as a package of the semiconductor device, is thus reduced. The protective layer may be formed from a photosensitive material, simplifying the formation of the openings for the electrodes.

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05-12-2013 дата публикации

COAXIAL SOLDER BUMP SUPPORT STRUCTURE

Номер: US20130320528A1

A solder bump support structure and method of manufacturing thereof is provided. The solder bump support structure includes an inter-level dielectric (ILD) layer formed over a silicon substrate. The ILD layer has a plurality of conductive vias. The structure further includes a first insulation layer formed on the ILD layer. The solder bump support structure further includes a pedestal member formed on the ILD layer which includes a conductive material formed above the plurality of conductive vias in the ILD layer coaxially surrounded by a second insulation layer. The second insulation layer is thicker than the first insulation layer. The structure further includes a capping under bump metal (UBM) layer formed over, and in electrical contact with, the conductive material and formed over at least a portion of the second insulation layer of the pedestal member. 1. A solder bump support structure comprising:an inter-level dielectric (ILD) layer formed over a silicon substrate having a plurality of conductive vias;a first insulation layer formed on the ILD layer;a pedestal member formed on the ILD layer comprising a conductive material formed above the plurality of conductive vias coaxially surrounded by a second insulation layer, wherein the second insulation layer is thicker than the first insulation layer; anda capping under bump metal (UBM) layer formed over, and in electrical contact with, the conductive material and formed over at least a portion of the second insulation layer of the pedestal member.2. The solder bump structure of claim 1 , wherein the thickness of the first insulation layer ranges from about 0.1 to about 5 microns.3. The solder bump structure of claim 1 , wherein the thickness of the second insulation layer ranges from about 1 to about 25 microns.4. The solder bump support structure of claim 1 , wherein the first insulation layer comprises a spin-on polymer.5. The solder bump support structure of claim 1 , wherein the first insulation layer ...

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12-12-2013 дата публикации

Semiconductor package and method for manufacturing the same

Номер: US20130328192A1
Принадлежит: Amkor Technology Inc

One embodiment provides a semiconductor package by forming a redistribution layer extending from a bonding pad of a semiconductor chip using a photoresist pattern plated with the seed layer. Fabrication of the semiconductor package is relatively simple thereby shortening a manufacturing time and reducing the manufacturing cost, and which can increase an adhered area of input/output terminals and can prevent delamination by connecting and welding the input/output terminals to a pair of redistribution layers.

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26-12-2013 дата публикации

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME, AND WIRING SUBSTRATE AND METHOD OF MANUFACTURING THE SAME

Номер: US20130341788A1
Автор: MACHIDA Yoshihiro
Принадлежит:

A semiconductor device has a semiconductor substrate, an electrode pad formed on a surface of the semiconductor substrate, and a protruding electrode electrically connected to the electrode pad. The protruding electrode comprises a pedestal part formed on the electrode pad and a protruding part formed on the pedestal part. The protruding part has a columnar part with a width smaller than that of the pedestal part, and a tapered part with a width gradually increased from an end of the columnar part side toward an end of the pedestal part side. An angle of inclination of a side surface of the tapered part with respect to a plane surface perpendicular to the surface is larger than an angle of inclination of a side surface of the pedestal part and an angle of inclination of a side surface of the columnar part with respect to the plane surface. 1. A semiconductor device comprising:a semiconductor substrate;an electrode pad formed on a surface of the semiconductor substrate; anda protruding electrode electrically connected to the electrode pad, whereinthe protruding electrode comprises a pedestal part formed on the electrode pad and a protruding part formed on the pedestal part, andthe protruding part comprises a tapered part formed on the pedestal part and a columnar part formed on the tapered part,the columnar part has a width smaller than that of the pedestal part, and the tapered part has a width which is gradually increased from an end of the columnar part side of the tapered part toward an end of the pedestal part side of the tapered part, andan angle of inclination of a side surface of the tapered part with respect to a plane surface perpendicular to the surface of the semiconductor substrate is larger than an angle of inclination of a side surface of the pedestal part with respect to the plane surface and an angle of inclination of a side surface of the columnar part with respect to the plane surface.2. The semiconductor device as claimed in claim 1 , wherein a ...

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26-12-2013 дата публикации

Semiconductor Device and Method of Forming a Wafer Level Package with Top and Bottom Solder Bump Interconnection

Номер: US20130341789A1
Принадлежит: STATS CHIPPAC, LTD.

A semiconductor device is made by forming solder bumps over a copper carrier. Solder capture indentations are formed in the copper carrier to receive the solder bumps. A semiconductor die is mounted to the copper carrier using a die attach adhesive. The semiconductor die has contact pads formed over its active surface. An encapsulant is deposited over the copper carrier, solder bumps, and semiconductor die. A portion of the encapsulant is removed to expose the solder bumps and contact pads. A conductive layer is formed over the encapsulant to connect the solder bumps and contact pads. The conductive layer operates as a redistribution layer to route electrical signals from the solder bumps to the contact pads. The copper carrier is removed. An insulating layer is formed over the conductive layer and encapsulant. A plurality of semiconductor devices can be stacked and electrically connected through the solder bumps. 1. A method of making a semiconductor device , comprising:providing a plurality of first interconnect structures;disposing a first semiconductor die between the first interconnect structures;depositing an encapsulant over the first semiconductor die and the first interconnect structures;removing a portion of the encapsulant to expose a contact pad of the first semiconductor die; andforming a first conductive layer over a first surface of the encapsulant between the first interconnect structures and the contact pad of the first semiconductor die.2. The method of claim 1 , further including forming a second conductive layer over a second surface of the encapsulant opposite the first surface of the encapsulant.3. The method of claim 1 , further including forming an insulating layer over the first conductive layer.4. The method of claim 1 , further including disposing a second semiconductor die over the first semiconductor die.5. The method of claim 1 , further including forming an under bump metallization layer over the first conductive layer.6. The method of ...

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26-12-2013 дата публикации

SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME

Номер: US20130344693A1
Автор: Suzuki Shinya
Принадлежит: RENESAS ELECTRONICS CORPORATION

A technique which improves the reliability in coupling between a bump electrode of a semiconductor chip and wiring of a mounting substrate, more particularly a technique which guarantees the flatness of a bump electrode even when wiring lies in a top wiring layer under the bump electrode, thereby improving the reliability in coupling between the bump electrode and the wiring formed on a glass substrate. Wiring, comprised of a power line or signal line, and a dummy pattern are formed in a top wiring layer beneath a non-overlap region of a bump electrode. The dummy pattern is located to fill the space between wirings to reduce irregularities caused by the wirings and space in the top wiring layer. A surface protection film formed to cover the top wiring layer is flattened by CMP. 118-. (canceled)19. A method of manufacturing a semiconductor device comprising steps of:(a) forming a semiconductor element in a semiconductor substrate;(b) forming a first insulating film over the semiconductor element;(c) forming a pad over the first insulating film;(d) forming a second insulating film over the pad and the first insulating film such that the second insulating film covers a top surface of the pad and side surfaces of the pad;(e) forming a third insulating film over the second insulating film;(f) polishing the third insulating film by a CMP method;(g) after the step (f), forming a fourth insulating film over the third insulating film, wherein a material of the fourth insulating film is different from materials of the second and third insulating films;(h) forming an opening which reaches the pad, by etching the second, third, and fourth insulating films; and(i) forming a bump electrode over the pad and the fourth insulating film, said bump electrode being electrically connected to the pad.20. The method of manufacturing a semiconductor device according to claim 19 ,wherein the semiconductor substrate has a pair of long sides and a pair of short sides in planar view;wherein, ...

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02-01-2014 дата публикации

Integrated wluf and sod process

Номер: US20140001631A1
Принадлежит: Intel Corp

This disclosure relates generally to a wafer having a plurality of semiconductor chips having a major surface, a metal contact positioned on one of the plurality of semiconductor chips and having a side surface and contact surface, the contact surface substantially parallel to the major surface, wherein the contact surface defines a thickness of the metal contact relative to the major surface, an underfill layer abutting the one of the plurality of semiconductor chips and the side surface of the metal contact, the underfill layer having a top surface substantially parallel to the major surface, wherein the top surface of the underfill layer defines a thickness of the underfill layer relative to the major surface, the thickness of the underfill layer being not greater than the thickness of the metal contact, and a solder bump formed in electrical contact with the contact surface of the metal contact.

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09-01-2014 дата публикации

NON-CIRCULAR UNDER BUMP METALLIZATION (UBM) STRUCTURE, ORIENTATION OF NON-CIRCULAR UBM STRUCTURE AND TRACE ORIENTATION TO INHIBIT PEELING AND/OR CRACKING

Номер: US20140008788A1
Принадлежит: QUALCOMM INCORPORATED

Some exemplary embodiments of this disclosure pertain to a semiconductor package that includes a packaging substrate, a die and a set of under bump metallization (UBM) structures coupled to the packaging substrate and the die. Each UBM structure has a non-circular cross-section along its respective lateral dimension. Each UBM structure includes a first narrower portion and a second wider portion. The first narrower portion has a first width. The second wider portion has a second width that is greater than the first width. Each UBM structure is oriented towards a particular region of the die such that the first narrower portion of the UBM structure is closer than the second wider portion of the UBM structure to the particular region of the die. 1. A semiconductor package comprising:a packaging substrate;a die; anda set of under bump metallization (UBM) structures coupled to the packaging substrate and the die, wherein each UBM structure has a non-circular cross-section along its respective lateral dimension, each UBM structure includes a first narrower portion and a second wider portion, the first narrower portion having a first width, the second wider portion having a second width that is greater than the first width, each UBM structure oriented towards a particular region of the die such that the first narrower portion of the UBM structure is closer than the second wider portion of the UBM structure to the particular region of the die.2. The semiconductor package of claim 1 , wherein each UBM structure is oriented on the die such that the first narrower portion of the UBM structure is susceptible to compression stress claim 1 , and the second wider portion of the UBM structure is susceptible to peeling stress claim 1 , the second wider portion being on an opposite end of the first narrower portion of the UBM structure.3. The semiconductor package of claim 1 , wherein each UBM structure has a longitudinal axis that is oriented towards the particular region of the ...

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09-01-2014 дата публикации

Semiconductor Device and Method of Forming Bump-on-Lead Interconnection

Номер: US20140008792A1
Автор: Pendse Rajendra D.
Принадлежит: STATS CHIPPAC, LTD.

A semiconductor device has a semiconductor die with a plurality of composite bumps formed over a surface of the semiconductor die. The composite bumps have a fusible portion and non-fusible portion, such as a conductive pillar and bump formed over the conductive pillar. The composite bumps can also be tapered. Conductive traces are formed over a substrate with interconnect sites having edges parallel to the conductive trace from a plan view for increasing escape routing density. The interconnect site can have a width less than 1.2 times a width of the conductive trace. The composite bumps are wider than the interconnect sites. The fusible portion of the composite bumps is bonded to the interconnect sites so that the fusible portion covers a top surface and side surface of the interconnect sites. An encapsulant is deposited around the composite bumps between the semiconductor die and substrate. 1. A method of making a semiconductor device , comprising:providing a semiconductor die including an interconnect structure formed over the semiconductor die;providing a substrate including a conductive trace formed over the substrate; andbonding the interconnect structure to an upper surface and side surface of the conductive trace.2. The method of claim 1 , further including bonding the interconnect structure to an interconnect site of the conductive trace claim 1 , wherein the interconnect site includes a width less than 1.2 times a width of the conductive trace away from the interconnect site.3. The method of claim 1 , wherein the interconnect structure includes a fusible portion and non-fusible portion.4. The method of claim 3 , wherein the non-fusible portion of the interconnect structure includes a conductive pillar and the fusible portion of the interconnect structure includes a bump formed over the conductive pillar.5. The method of claim 1 , further including bonding the interconnect structure to the conductive trace using thermocompression.6. The method of claim 1 , ...

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09-01-2014 дата публикации

DIE POWER STRUCTURE

Номер: US20140009219A1
Принадлежит: ORACLE INTERNATIONAL CORPORATION

A die including a first set of power tiles arranged in a first array and having a first voltage; a second set of power tiles arranged in a second array offset from the first array and having a second voltage; a set of power mesh segments enclosed by the second set of power tiles and having the first voltage; a first power rail passing underneath the set of power mesh segments and the first set of power tiles; and a set of vias operatively connecting the power rail with the set of power mesh segments and the first plurality of power tiles. 19.-. (canceled)10. The method of operating a die , comprising:distributing a first power signal having a first voltage across a first plurality of power tiles arranged in a first array and a first plurality of mesh segments;distributing a second power signal having a second voltage across a second plurality of power tiles arranged in a second array and a second plurality of mesh segments,wherein the first plurality of power tiles encloses the second plurality of mesh segments,wherein the second plurality of power tiles encloses the first plurality of mesh segments, andwherein the first array and the second array are offset on the die; andpropagating the first power signal to a first power rail operatively connected to the first plurality of power tiles and the first plurality of mesh segments by a first plurality of vias.11. The method of claim 10 , further comprising:propagating the second power signal to a second power rail operatively connected to the second plurality of power tiles and the second plurality of mesh segments by a second plurality of vias.12. The method of claim 11 , further comprising:injecting the first power signal into the die using a first bump above the second array and operatively connecting to the first plurality of power tiles using a zipper structure;and injecting the second power signal into the die using a second bump above the first array and operatively connecting to the second plurality of power ...

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16-01-2014 дата публикации

CONTACT SUPPORT PILLAR STRUCTURE FOR FLIP CHIP SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURE THEREFORE

Номер: US20140015127A1
Принадлежит:

In one aspect, there is provided a semiconductor device that comprises an interconnect layer located over a semiconductor substrate. A passivation layer is located over the interconnect layer and has a contact support pillar opening formed therein. Contact support pillars that comprise a conductive metal and have a metal extension are located within the opening of the passivation layer. 1. A semiconductor device , comprising:an interconnect layer located over a semiconductor substrate;a passivation layer located over the interconnect layer and having an opening formed therein;contact support pillars located within the opening, the contact support pillars comprising a metal and having a metal extension thereon.2. The semiconductor device recited in claim 1 , wherein the contact support pillars and the metal extension have a different metallic composition.3. The semiconductor device recited in claim 2 , wherein the metal is gold and the extensions are comprised of a gold alloy.4. The semiconductor device recited in claim 1 , wherein the semiconductor device comprises opposing integrated circuit (IC) flip chips claim 1 , each comprising the contact support pillars and the extensions claim 1 , the extensions of the IC flip chips contacting each other to provide electrical connection between the IC flip chips.5. The semiconductor device recited in claim 3 , wherein the contact support pillars include a barrier layer and a gold seed layer located over the barrier layer.6. The semiconductor device recited in claim 3 , wherein the gold alloy extension comprises gold/tin claim 3 , gold/germanium claim 3 , or gold/silicon.7. A semiconductor device claim 3 , comprising:an interconnect layer located over a semiconductor substrate;a passivation layer located over the interconnect layer and having openings formed therein;contact support pillars located within the openings, the contact support pillars comprising a metal and having a metal extension thereon.8. The semiconductor ...

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23-01-2014 дата публикации

Semiconductor manufacturing method and semiconductor structure thereof

Номер: US20140021601A1
Принадлежит: Chipbond Technology Corp

A semiconductor manufacturing method includes providing a carrier; forming a first photoresist layer; forming plural core portions; removing the first photoresist layer; forming a second photoresist layer; forming a plurality of connection portions, each of the plurality of connection portions includes a first connection layer and a second connection layer and connects to each of the core portions to form a hybrid bump, wherein each of the first connection layers comprises a base portion, a projecting portion and an accommodating space, each base portion comprises an upper surface, each projecting portion is protruded to the upper surface and located on top of each core portion, each accommodating space is located outside each projecting portion, the second connection layers cover the projecting portions and the upper surfaces, and the accommodating spaces are filled by the second connection layers; removing the second photoresist layer to reveal the hybrid bumps.

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06-02-2014 дата публикации

SEMICONDUCTOR DEVICES HAVING MULTI-BUMP ELECTRICAL INTERCONNECTIONS AND METHODS FOR FABRICATING THE SAME

Номер: US20140035131A1
Принадлежит:

A method may include providing a substrate including a chip pad, forming on the substrate a solder stack including at least two solder layers which are stacked and at least one intermediate layer interposed between the at least two solder layers. The solder stack can be reflowed to form a bump stack that is electrically connected to the chip pad. The bump stack may include at least two solder bumps which are stacked and the at least one intermediate layer interposed between the at least two solder bumps. Related structures are also disclosed. 1. A method for fabricating a semiconductor device , the method comprising:providing a substrate including a chip pad;forming on the substrate a solder stack including at least two solder layers which are stacked and at least one intermediate layer interposed between the at least two solder layers; andreflowing the solder stack to form a bump stack that is electrically connected to the chip pad, the bump stack including at least two solder bumps which are stacked and the at least one intermediate layer interposed between the at least two solder bumps.2. The method of claim 1 , wherein forming the solder stack comprises:forming a mask layer including an opening therein on the substrate;forming a first solder layer, the intermediate layer and a second solder layer stacked on one another in the opening; andremoving the mask layer.3. The method of claim 2 , wherein the first and second solder layers are formed by electroplating the same solder.4. The method of claim 2 , wherein one of the first and second solder layers is formed by electroplating solder that has a melting point greater than that of solder used to form the other.5. The method of claim 2 , wherein the intermediate layer is formed by electroplating or depositing noble or high melting point metal compared to metal used to form at least one of the first and second solder layers.6. The method of claim 2 , wherein forming the bump stack comprises:reflowing the first ...

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13-02-2014 дата публикации

METHOD OF MAKING A SEMICONDUCTOR DEVICE HAVING A POST-PASSIVATION INTERCONNECT STRUCTURE

Номер: US20140045326A1

A method of making a semiconductor device includes forming a passivation layer overlying a semiconductor substrate, the semiconductor substrate having a first region and a second region, wherein the first region is a conductive pad and the second region is adjacent to the first region. The method further includes forming a first protective layer overlying the passivation layer and forming an interconnect layer overlying the first protective layer. The method further includes forming a plurality of slots in the second region and forming a second protective layer overlying the interconnect layer, wherein the second protective layer fills each slot of the plurality of slots. The method further includes exposing a portion of the interconnect layer through the second protective layer; forming a barrier layer on the exposed portion of the interconnect layer; and forming a solder bump on the barrier layer. 1. A method of making a semiconductor device , the method comprising:forming a passivation layer overlying a semiconductor substrate, the semiconductor substrate having a first region and a second region, wherein the first region is a conductive pad and the second region is adjacent to the first region;forming a first protective layer overlying the passivation layer;forming an interconnect layer overlying the first protective layer;forming a plurality of slots in the second region;forming a second protective layer overlying the interconnect layer, wherein the second protective layer fills each slot of the plurality of slots;exposing a portion of the interconnect layer through the second protective layer;forming a barrier layer on the exposed portion of the interconnect layer; andforming a solder bump on the barrier layer.2. The method of claim 1 , wherein exposing the portion of the interconnect layer comprises forming an opening in the second protection layer using at least one of wet etching claim 1 , dry etching claim 1 , or laser drilling.3. The method of claim 1 , ...

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20-02-2014 дата публикации

Semiconductor Device and Method of Forming a Fan-Out PoP Device with PWB Vertical Interconnect Units

Номер: US20140048906A1
Принадлежит: STATS CHIPPAC, LTD.

A semiconductor device has a semiconductor package and an interposer disposed over the semiconductor package. The semiconductor package has a first semiconductor die and a modular interconnect unit disposed in a peripheral region around the first semiconductor die. A second semiconductor die is disposed over the interposer opposite the semiconductor package. An interconnect structure is formed between the interposer and the modular interconnect unit. The interconnect structure is a conductive pillar or stud bump. The modular interconnect unit has a core substrate and a plurality of vertical interconnects formed through the core substrate. A build-up interconnect structure is formed over the first semiconductor die and modular interconnect unit. The vertical interconnects of the modular interconnect unit are exposed by laser direct ablation. An underfill is deposited between the interposer and semiconductor package. A total thickness of the semiconductor package and build-up interconnect structure is less than 0.4 millimeters. 1. A method of making a semiconductor device , comprising:providing a semiconductor package including a first semiconductor die and a modular interconnect unit disposed in a peripheral region around the first semiconductor die;providing an interposer;disposing the interposer over the semiconductor package;providing a second semiconductor die; anddisposing the second semiconductor die over the interposer opposite the semiconductor package.2. The method of claim 1 , further including forming an interconnect structure between the interposer and the modular interconnect unit.3. The method of claim 2 , wherein the interconnect structure includes a conductive pillar or stud bump.4. The method of claim 1 , further including forming the modular interconnect unit of the semiconductor package by:providing a core substrate; andforming a plurality of vertical interconnects through the core substrate.5. The method of claim 4 , further including exposing the ...

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20-02-2014 дата публикации

SOLDER ON TRACE TECHNOLOGY FOR INTERCONNECT ATTACHMENT

Номер: US20140048931A1
Принадлежит: QUALCOMM INCORPORATED

A solder on trace device includes a conductive trace on a semiconductor substrate surface. The conductive trace has a sidewall and a bonding surface. The solder on trace device also includes a passivation layer on at least one end of the conductive trace. The solder on trace device further includes a pre-solder material on the sidewall and the bonding surface of the conductive trace. 1. A solder on trace device , comprising:a conductive trace on a semiconductor substrate surface, the conductive trace comprising a bonding surface and a sidewall;a passivation layer on at least one end of the conductive trace; anda pre-solder material on the sidewall and the bonding surface of the conductive trace.2. The solder on trace device of claim 1 , in which the pre-solder material is on a portion of the semiconductor substrate surface and comprises the bonding surface of the conductive trace.3. The solder on trace device of claim 1 , further comprising an oxidation layer on exposed portions of the conductive trace outside the bonding surface.4. The solder on trace device of claim 1 , further comprising a dry film residue on portions of the conductive trace claim 1 , the semiconductor substrate surface and the passivation layer.5. The solder on trace device of claim 1 , in which a pitch of the conductive trace and another conductive trace is less than one hundred fifty microns.6. The solder on trace device of claim 1 , in which the pre-solder material comprises a conductive paste claim 1 , a molten solder claim 1 , or a conductive liquid.7. The solder on trace device of claim 1 , incorporated into at least one of a music player claim 1 , a video player claim 1 , an entertainment unit claim 1 , a navigation device claim 1 , a communications device claim 1 , a personal digital assistant (PDA) claim 1 , a fixed location data unit claim 1 , and a computer.8. A method of fabricating a solder on trace device claim 1 , comprising:opening a layer on a surface of a semiconductor ...

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20-02-2014 дата публикации

METHOD OF FORMING AN INTEGRATED CIRCUIT DEVICE

Номер: US20140051244A1

A method of forming an integrated circuit device includes forming an under-bump metallurgy (UBM) layer overlying a semiconductor substrate. Next, a first photoresist film is formed on the UBM layer where the first photoresist film has a first photosensitivity and a first thickness. Additionally, the method includes forming a second photoresist film on the first photoresist film. Next, the method includes performing an exposure process on the second photoresist film and the first photoresist film. The method further includes removing an exposed portion of the second photoresist film to form a first opening. The method further also includes removing an exposed portion of the first photoresist film to expose a portion of the UBM layer. Furthermore, the method includes forming a copper layer in the first opening. The method also includes removing the second photoresist film and the first photoresist film where the copper layer forms a copper post. 1. A method of forming an integrated circuit device , comprising:forming an under-bump-metallurgy (UBM) layer overlying a semiconductor substrate;forming a first photoresist film on the UBM layer, the first photoresist film having a first photosensitivity and a first thickness,forming a second photoresist film on the first photoresist film, the second photoresist film having a second photosensitivity and a second thickness, wherein the first photosensitivity is greater than the second photosensitivity and the second thickness is greater than the first thickness;performing an exposure process on the second photoresist film and the first photoresist film;removing an exposed portion of the second photoresist film to form a first opening;removing an exposed portion of the first photoresist film to expose a portion of the UBM layer and form a second opening underlying the first opening and a third opening underlying the second opening; wherein the second opening surrounded by the first photoresist film has a top diameter and a ...

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27-02-2014 дата публикации

TERMINAL STRUCTURE AND SEMICONDUCTOR DEVICE

Номер: US20140054767A1
Принадлежит: TDK Corporation

The present invention relates to a terminal structure comprising; a base material ; an external electrode formed on the base material; an insulating coating layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode; an under-bump metal layer filling the opening and covering part of the insulating coating layer; and a dome-shaped bump covering the under-bump metal layer, wherein in a cross section along a lamination direction, the under-bump metal layer has a convex shape toward the bump, and the thickness Tof the under-bump metal layer at a center of the opening is equal to or greater than the thickness Tof the under-bump metal layer at an end portion of the opening. 1. A terminal structure comprising:a base material;an electrode formed on the base material;an insulating coating layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode;an under-bump metal layer filling the opening and covering part of the insulating coating layer; anda dome-shaped bump covering the under-bump metal layer, whereinin a cross section along a lamination direction, the under-bump metal layer has a convex shape toward the bump, and a thickness of the under-bump metal layer at a center of the opening is equal to or greater than the thickness of the under-bump metal layer at an end portion of the opening.2. The terminal structure according to claim 1 , whereinassuming that on an upper surface of the insulating coating layer on the electrode,point A is defined as a position of an end portion on the opening side of the insulating coating layer andpoint B is defined as a position of an end portion of the under-bump metal layer; andon a basis of an upper surface of the insulating coating layer on the electrode, point C is defined as a position where the thickness of the under-bump metal layer is half the thickness of the under-bump metal layer at the point A, {'br': None, 'i': ' ...

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27-02-2014 дата публикации

TERMINAL STRUCTURE AND SEMICONDUCTOR DEVICE

Номер: US20140054768A1
Принадлежит: TDK Corporation

The present invention relates to a terminal structure comprising: a base material ; an external electrode formed on the base material; an insulating coating layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode; an under-bump metal layer filling the opening and covering part of the insulating coating layer; and a dome-shaped bump covering the under-bump metal layer, wherein in a cross section along a lamination direction, a height Hat which the bump has a maximum diameter (L) is lower than a maximum height Hof the under-bump metal layer. 1. A terminal structure comprising:a base material;an electrode formed on the base material;an insulating coating layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode;an under-bump metal layer filling the opening and covering part of the insulating coating layer; anda dome-shaped bump covering the under-bump metal layer, whereinin a cross section along a lamination direction, a height at which the bump has a maximum diameter is lower than a maximum height of the under-bump metal layer.2. The terminal structure according to claim 1 , wherein the bump has a maximum diameter of 5 to 40 μm.3. The terminal structure according to wherein the bump contains tin as a main component.4. The terminal structure according to claim 1 , wherein the under-bump metal layer contains nickel as a main component.5. The terminal structure according to claim 1 , wherein the bump contains titanium.6. A semiconductor device comprising the terminal structure according to . 1. Field of the InventionThe present invention relates to a terminal structure and a semiconductor device.2. Related Background ArtFor high-density packaging of high performance semiconductors such as central processing unit (CPU), a transition is underway from a wire bonding mounting method as a general-purpose technique to a flip-chip mounting method of forming a ...

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27-02-2014 дата публикации

TERMINAL STRUCTURE, AND SEMICONDUCTOR ELEMENT AND MODULE SUBSTRATE COMPRISING THE SAME

Номер: US20140054769A1
Принадлежит: TDK Corporation

A preferred terminal structure comprises a base material; an electrode formed on the base material; an insulating covering layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode; an under bump metal layer containing Ni, filling the opening on the electrode; and a dome-shaped bump containing Sn and Ti, covering the under bump metal layer, wherein at least part of the under bump metal layer has a portion sandwiched between the external electrode and the insulating covering layer. 1. A terminal structure comprising:a base material;an electrode formed on the base material;an insulating covering layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode;an under bump metal layer containing Ni, filling the opening on the electrode; anda dome-shaped bump containing Sn, covering the under bump metal layer, whereinat least part of the under bump metal layer has a portion sandwiched between the external electrode and the insulating covering layer.2. The terminal structure according to claim 1 , wherein the under bump metal layer has a portion sandwiched between the external electrode and the insulating covering layer over an entire outer periphery thereof.3. The terminal structure according to claim 1 , wherein the bump further contains Ti.4. A semiconductor element comprising the terminal structure according to .5. A module substrate comprising the terminal structure according to . 1. Field of the InventionThe present invention relates to a terminal structure, and a semiconductor element and a module substrate comprising the same.2. Related Background ArtIn cases where an advanced semiconductor, such as a CPU (Central Processing Unit), is densely packaged, the transition proceeds from a packaging method using bonding wires, which is a general-purpose technique, to a flip chip packaging method in which bumps comprising solder and the like are formed on chip ...

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27-02-2014 дата публикации

TERMINAL STRUCTURE, AND SEMICONDUCTOR ELEMENT AND MODULE SUBSTRATE COMPRISING THE SAME

Номер: US20140054770A1
Принадлежит: TDK Corporation

A preferred terminal structure comprises a base material; an electrode formed on the base material; an insulating covering layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode; an under bump metal layer containing Ni, formed in a region in the opening on the electrode so that an upper surface of the metal layer is at a position lower than an upper surface of the insulating covering layer in a peripheral edge portion of the opening; and a dome-shaped bump containing Sn and Ti, formed in a region in the opening on the under bump metal layer, wherein an end portion of a boundary between the under bump metal layer and the bump is in contact with an inner wall of the opening portion in the insulating covering layer. 1. A terminal structure comprising:a base material;an electrode formed on the base material;an insulating covering layer formed on the base material and on the electrode and having an opening exposing at least part of the electrode;an under bump metal layer containing Ni, formed in a region in the opening on the electrode so that an upper surface of the metal layer is at a position lower than an upper surface of the insulating covering layer in a peripheral edge portion of the opening; anda dome-shaped bump containing Sn and Ti, formed in a region in the opening on the under bump metal layer, whereinan end portion of a boundary between the under bump metal layer and the bump is in contact with an inner wall of the opening portion in the insulating covering layer.2. The terminal structure according to claim 1 , wherein the end portion of the boundary between the under bump metal layer and the bump is in contact with the inner wall over an entire circumferential direction of the inner wall.3. A semiconductor element comprising the terminal structure according to .4. A module substrate comprising the terminal structure according to . 1. Field of the InventionThe present invention relates to a ...

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27-02-2014 дата публикации

Method for Self-Assembly of Substrates and Devices Obtained Thereof

Номер: US20140054771A1
Принадлежит: IMEC

A method for defining regions with different surface liquid tension properties on a substrate is disclosed. The method includes: providing a substrate with a main surface having a first surface liquid tension property that is at least partially covered with a seed layer; forming at least one micro-bump on the seed layer leaving part of the seed layer exposed; patterning the exposed seed layer to expose part of the main surface; forming at least one closed-loop structure that encloses a region of the main surface and the at least one micro-bump; and chemically treating the main surface of the substrate to provide on a surface of at least one closed-loop structure and the at least one micro-bump a second surface liquid tension property. The second surface liquid tension property is substantially different from the first surface liquid tension property of the main surface and is liquid phobic. 1. A method for defining regions on a substrate with different surface liquid tension properties comprising:providing a substrate with a main surface that has a first surface liquid tension property and is at least partially covered with a seed layer;forming at least one micro-bump on the seed layer leaving a portion of the seed layer exposed;exposing part of the main surface by patterning the exposed seed layer;forming from the seed layer at least one closed-loop structure that encloses a region of the main surface that includes the at least one micro-bump; andchemically treating the main surface of the substrate to provide a surface of the at least one closed-loop structure and the at least one micro-bump with a second surface liquid tension property that is substantially different from the first surface liquid tension property, wherein the second surface liquid tension property is liquid phobic.2. The method according to claim 1 , wherein chemically treating the main surface of the substrate further comprises depositing a material on the main surface of the substrate that is ...

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27-02-2014 дата публикации

Copper Post Solder Bumps on Substrates

Номер: US20140057392A1

A method comprises forming semiconductor flip chip interconnects having electrical connecting pads and electrically conductive posts terminating in distal ends operatively associated with the pads. We solder bump the distal ends by injection molding, mask the posts on the pads with a mask having a plurality of through hole reservoirs and align the reservoirs in the mask to be substantially concentric with the distal ends. Injecting liquid solder into the reservoirs and allowing it to cool provides solidified solder on the distal ends, which after mask removal produces a solder bumped substrate which we position on a wafer to leave a gap between the wafer and the substrate. The wafer has electrically conductive sites on the surface for soldering to the posts. Abutting the sites and the solder bumped posts followed by heating joins the wafer and substrate. The gap is optionally filled with a material comprising an underfill. 1. In a method comprising forming a semiconductor flip chip from a wafer having solderable electrical conducting sites and a substrate having electrical connecting pads and electrically conductive posts operatively associated with said pads and extending away from said pads to terminate in distal ends , the steps comprising solder bumping said distal ends through openings in a solder mask by injection molding solder onto said distal ends to produce a solder bumped substrate and soldering said solder bumped substrate to said sites wherein said distal ends extend into said mask through said openings.2. The method of claim 1 , comprising:a. providing said substrate having said posts on said pads;b. providing said mask wherein said openings comprise a plurality of through hole reservoirs and aligning said reservoirs in said mask to be substantially concentric with said distal ends;c. injecting liquid solder into said reservoirs to provide a volume of liquid solder on said distal ends;d. cooling said liquid solder in said reservoirs to solidify said ...

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27-02-2014 дата публикации

Methods and Apparatus of Packaging Semiconductor Devices

Номер: US20140057431A1

Methods and apparatuses for wafer level packaging (WLP) semiconductor devices are disclosed. A redistribution layer (RDL) is formed on a first passivation layer in contact with a conductive pad over a surface of a die. The RDL layer is on top of a first region of the first passivation layer. A second passivation layer is formed on the RDL layer with an opening to expose the RDL layer, and over the first passivation layer. An under bump metallization (UBM) layer is formed over the second passivation layer in contact with the exposed RDL layer. A second region of the first passivation layer disjoint from the first region is determined by projecting an outer periphery of a solder ball or other connector onto the surface.

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06-03-2014 дата публикации

PACKAGE ON PACKAGE STRUCTRUE AND METHOD FOR MANUFACTURING SAME

Номер: US20140061903A1
Принадлежит:

A method for manufacturing a package on package structure includes the steps of: providing a connection substrate comprising a main body and electrically conductive posts, the main body comprising a first surface and an opposite second surface, each electrically conductive post passing through the first and second surfaces, and each end of the two ends of the electrically conductive post protruding from the main body; arranging a first package device on a side of the first surface of the connection substrate, arranging a package adhesive on a side of the second surface of the connection substrate, thereby obtaining a semi-finished package on package structure; and arranging a second package device on a side of the package adhesive furthest from the first package device, thereby obtaining a package on package structure. 1. A method for manufacturing a package on package structure , comprising:providing a connection substrate, the connection substrate comprising a main body and a plurality of electrically conductive posts attached in the main body, the main body comprising a first surface and an opposite second surface, each electrically conductive post passing through the first and second surfaces, and opposite ends of the electrically conductive post protruding out of the main body;attaching a first package device on the first surface of the connection substrate, attaching a package adhesive on the second surface of the connection substrate, thereby obtaining a semi-finished package on package structure, the first package device comprising a circuit substrate and a semiconductor chip packaged on the circuit substrate, the circuit substrate comprising a plurality of first solder pads, the first solder pads aligned with the corresponding electrically conductive posts, and each first solder pad being in contact with and electrically connected to the corresponding electrically conductive post, the package adhesive covering the second surface of the connection substrate ...

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06-03-2014 дата публикации

SEMICONDUCTOR STRUCTURE

Номер: US20140061906A1
Автор: LIAO TSUNG JEN
Принадлежит: CHIPMOS TECHNOLOGIES INC.

A semiconductor structure includes a semiconductor substrate, a metal layer formed on the semiconductor substrate, a conductive pillar, and a solder ball. The conductive pillar is formed on and electrically connected with the metal layer, wherein the conductive pillar has a bearing surface and a horizontal sectional surface under the bearing surface, and the contact surface area of the bearing surface is larger than the area of the horizontal sectional surface. The solder ball is located on the conductive pillar and covers the bearing surface. 1. A semiconductor structure comprising:a semiconductor substrate;a metal layer formed on the semiconductor substrate;a conductive pillar formed on the metal layer and electrically coupled with the metal layer, wherein the conductive pillar comprises a bearing surface and a horizontal cross-sectional surface under the bearing surface, and the contact surface area of the bearing surface is larger than the area of the horizontal cross-sectional surface; anda solder ball placed on the conductive pillar and covering the bearing surface.2. The semiconductor structure according to claim 1 , wherein the contact surface area of the bearing surface is larger than or equal to 1.2 times the area of the horizontal cross-sectional surface.3. The semiconductor structure according to claim 2 , wherein the semiconductor structure comprises a pillar height measured from the highest point of the bearing surface to a surface of the metal layer and a lowest point height measured from the lowest point of the bearing surface to the surface of the metal layer claim 2 , wherein the lowest point height is between 70% and 95% of the pillar height.4. The semiconductor structure according to claim 3 , wherein the bearing surface is a concave surface.5. The semiconductor structure according to claim 3 , wherein the bearing surface comprises at least one protrusion.6. The semiconductor structure according to claim 5 , wherein the bearing surface further ...

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13-03-2014 дата публикации

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR ASSEMBLY WITH LEAD-FREE SOLDER

Номер: US20140070409A1

A semiconductor device includes a semiconductor substrate, a pad region on the semiconductor substrate, a passivation layer over the semiconductor substrate and at least a portion of the pad region, and a bump structure overlying the pad region. The passivation layer has an opening defined therein to expose at least another portion of the pad region. The bump structure is electrically connected to the pad region via the opening. The bump structure includes a copper layer and a SnAg layer overlying the copper layer. The SnAg layer has a melting temperature higher than the eutectic temperature of Sn and Ag. 1. A semiconductor device , comprising:a semiconductor substrate;a pad region on the semiconductor substrate;a passivation layer over the semiconductor substrate and at least a portion of the pad region, the passivation layer having an opening defined therein to expose at least another portion of the pad region; anda bump structure overlying the pad region and electrically connected to the pad region via the opening;wherein the bump structure comprises a copper layer and a SnAg layer overlying the copper layer, and the SnAg layer has a melting temperature higher than the eutectic temperature of Sn and Ag.2. The semiconductor device of claim 1 , wherein the Ag content in the SnAg layer is greater than 1.2 weight percent.3. The semiconductor device of claim 1 , wherein the Ag content in the SnAg layer is less than 1.6 weight percent.4. The semiconductor device of claim 1 , wherein the copper layer is a copper post with a thickness greater than 40 um.5. The semiconductor device of claim 1 , wherein the copper layer has a thickness less than 10 um.6. The semiconductor device of claim 1 , further comprising a nickel layer between the copper layer and the SnAg layer.7. The semiconductor device of claim 1 , further comprising an under-bump metallization (UBM) layer between the bump structure and the pad region.8. The semiconductor device of claim 1 , further comprising a ...

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13-03-2014 дата публикации

SEMICONDUCTOR DEVICE AND INFORMATION PROCESSING SYSTEM INCLUDING THE SAME

Номер: US20140073127A1
Принадлежит: ELPIDA MEMORY, INC.

A method of forming a semiconductor device includes forming first and second bumps on a semiconductor substrate, forming first and second penetration electrodes penetrating the semiconductor substrate, forming a first conductive structure making a first electrical path between the first bump and the first penetration electrode, and forming a second conductive structure making a second electrical path between the second bump and the second penetration electrode, the second conductive structure being smaller in resistance value than the first conductive structure. 1. A device manufacturing method comprising:providing a semiconductor substrate;forming first and second penetration electrodes each penetrating the semiconductor substrate;forming a multi-level wiring structure on the semiconductor substrate, the multi-level wiring structure comprising a lower-level wiring, an upper-level wiring and an interlayer insulating film between the lower-level wiring and the upper-level wiring;forming a first wiring pad as the lower-level wiring, the first wiring pad being electrically connected to the first penetration electrode;forming a second wiring pad formed as the upper-level wiring;forming a plurality of first through electrodes in the interlayer insulating film to make an electrical connection between the first and second wiring pads;forming a third wiring pad formed as the lower-level wiring, the third wiring being electrically connected to the second penetration electrode;forming a fourth wiring pad as the upper-level wiring; andforming a plurality of second through electrodes in the interlayer insulating film to make an electrical connection between the third and fourth wiring pads,wherein a number of the first through electrodes is greater than a number of the second through electrodes.2. The device manufacturing method as claimed in claim 1 , wherein a size of the first penetration electrode is substantially the same as a size of the second penetration electrode.3. ...

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20-03-2014 дата публикации

Interconnection Structure and Method of Forming Same

Номер: US20140077360A1

An embodiment bump on trace (BOT) structure includes a contact element supported by an integrated circuit, an under bump metallurgy (UBM) feature electrically coupled to the contact element, a metal ladder bump mounted on the under bump metallurgy feature, the metal ladder bump having a first tapering profile, and a substrate trace mounted on a substrate, the substrate trace having a second tapering profile and coupled to the metal ladder bump through direct metal-to-metal bonding. An embodiment chip-to-chip structure may be fabricated in a similar fashion. 1. A bump on trace (BOT) structure , comprising:a contact element supported by an integrated circuit;an under bump metallurgy (UBM) feature electrically coupled to the contact element;a metal ladder bump mounted on the under bump metallurgy feature, the metal ladder bump having a first tapering profile; anda substrate trace mounted on a substrate, the substrate trace having a second tapering profile and coupled to the metal ladder bump through direct metal-to-metal bonding.2. The structure of claim 1 , wherein the metal ladder bump is coupled to the substrate trace without forming intermetallic compounds.3. The structure of claim 1 , wherein a distal end of the metal ladder bump and the substrate trace are each free of solder.4. The structure of claim 1 , wherein a bottom width of the metal ladder bump is greater than a top width of the ladder bump.5. The structure of claim 1 , wherein a ratio of a top width of the metal ladder bump to a bottom width of the metal ladder bump is between about 0.75 to about 0.97.6. The structure of claim 1 , wherein a ratio of a top width of the substrate trace to a bottom width of the substrate trace is between about 0.75 to about 0.97.7. The structure of claim 1 , wherein the first tapering profile of the metal ladder bump is linear.8. The structure of claim 1 , wherein sidewalls of the metal ladder bump are coated with a metal oxide.9. The structure of claim 1 , wherein a ...

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20-03-2014 дата публикации

Solder interconnect with non-wettable sidewall pillars and methods of manufacture

Номер: US20140077367A1
Принадлежит: International Business Machines Corp

A solder interconnect structure is provided with non-wettable sidewalls and methods of manufacturing the same. The method includes forming a nickel or nickel alloy pillar on an underlying surface. The method further includes modifying the sidewall of the nickel or nickel alloy pillar to prevent solder wetting on the sidewall.

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20-03-2014 дата публикации

REPAIRING ANOMALOUS STIFF PILLAR BUMPS

Номер: US20140077368A1
Принадлежит: GLOBALFOUNDRIES INC.

A system for repairing pillar bumps includes a pillar bump repair device that is adapted to form a plurality of strain-relieving notches in a pillar bump that is positioned above a metallization system of a semiconductor chip. The system further includes a pillar bump support device that is adapted to substantially support the pillar bump while the pillar bump repair device is forming each of the plurality of strain-relieving notches. 117.-. (canceled)18. A device , comprising:a plurality of pillar bumps formed above a metallization system of a semiconductor chip; anda plurality of first notches formed on a first side of at least one of said plurality of pillar bumps, wherein each of said plurality of first notches is positioned along said first side in a substantially vertical alignment.19. The device of claim 18 , wherein said first side of said at least one of said plurality of pillar bumps is oriented substantially away from a center of said semiconductor chip.20. The device of claim 18 , further comprising a plurality of second notches formed on a second side of said at least one of said plurality of pillar bumps claim 18 , wherein each of said plurality of second notches is positioned along said second side in a substantially vertical alignment.21. The device of claim 18 , wherein said metallization system comprises a plurality of metallization layers claim 18 , and wherein at least one of said metallization layers comprises one of a low-k dielectric material and an ultra-low-k dielectric material.22. The device of claim 18 , wherein said at least one of said plurality of pillar bumps comprises copper.23. A pillar bump support device claim 18 , comprising:a pillar bump contact surface that is adapted to contact an outer surface of a pillar bump formed above a metallization system of a semiconductor chip, wherein said pillar bump support device is adapted to substantially support said pillar bump when a force is imposed on said pillar bump during a pillar bump ...

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27-03-2014 дата публикации

Wafer Level Semiconductor Package

Номер: US20140084462A1
Принадлежит: BROADCOM CORPORATION

There are disclosed herein various implementations of improved wafer level semiconductor packages. One exemplary implementation comprises forming a post-fabrication redistribution layer (post-Fab RDL) between first and second dielectric layers affixed over a surface of a wafer, and forming a window for receiving an electrical contact body in the second dielectric layer, the window exposing the post-Fab RDL. At least one of the first and second dielectric layers is a pre-formed dielectric layer, which may be affixed over the surface of the wafer using a lamination process. In one implementation, the window is formed using a direct laser ablation process. 18-. (canceled)9. A wafer level semiconductor package comprising:a wafer including a post fabrication redistribution layer (post-Fab RDL) formed between first and second dielectric layers, at least one of said first and second dielectric layers being a pre-formed dielectric layer comprising an Ajinomoto™ Build-up Film (ABF).10. The wafer level semiconductor package of claim 9 , further comprising a window for receiving an electrical contact body in said second dielectric layer claim 9 , said window exposing said post-Fab RDL.11. The wafer level semiconductor package of claim 9 , further comprising a window for receiving an electrical contact body in said second dielectric layer claim 9 , said window formed using a direct laser ablation process so as to expose said post-Fab RDL.12. The wafer level semiconductor package of claim 9 , further comprising a window in said second dielectric layer exposing said post-Fab RDL claim 9 , and an under-bump metallization (UBM) in said window for receiving an electrical contact body.13. The wafer level semiconductor package of claim 9 , further comprising a window in said second dielectric layer exposing said post-Fab RDL claim 9 , and a solder ball received in said window so as to be electrically coupled to said post-Fab RDL.14. The wafer level semiconductor package of claim 9 , ...

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01-01-2015 дата публикации

MECHANISMS FOR FORMING HYBRID BONDING STRUCTURES WITH ELONGATED BUMPS

Номер: US20150001704A1
Принадлежит:

Embodiments of mechanisms for forming a package structure are provided. The package structure includes a semiconductor die and a substrate. The package structure includes a pillar bump and an elongated solder bump bonded to the semiconductor die and the substrate. A height of the elongated solder bump is substantially equal to a height of the pillar bump. The elongated solder bump has a first width, at a first horizontal plane passing through an upper end of a sidewall surface of the elongated solder bump, and a second width, at a second horizontal plane passing through a midpoint of the sidewall surface. A ratio of the second width to the first width is in a range from about 0.5 to about 1.1. 1. A package structure , comprising:a semiconductor die;a substrate;a pillar bump bonded to the semiconductor die and the substrate; andan elongated solder bump bonded to the semiconductor die and the substrate, wherein a height of the elongated solder bump is substantially equal to a height of the pillar bump, wherein the elongated solder bump has a first width, at a first horizontal plane passing through an upper end of a sidewall surface of the elongated solder bump, and a second width, at a second horizontal plane passing through a midpoint of the sidewall surface, and wherein a ratio of the second width to the first width is in a range from about 0.5 to about 1.1.2. The package structure as claimed in claim 1 , wherein the pillar bump comprises a pillar and a bonding layer.3. The package structure as claimed in claim 2 , wherein the pillar is a conductive pillar.4. The package structure as claimed in claim 2 , wherein the pillar has a melting point higher than that of the elongated solder bump.5. The package structure as claimed in claim 2 , wherein the pillar has a sidewall surface substantially perpendicular to a main surface of the semiconductor die.6. The package structure as claimed in claim 2 , wherein the bonding layer is a solder layer.7. The package structure as ...

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01-01-2015 дата публикации

SYSTEMS AND METHODS FOR AVOIDING PROTRUSIONS IN INJECTION MOLDED SOLDER

Номер: US20150001706A1
Принадлежит:

A method includes positioning a solder mask on an integrated circuit (IC) package substrate with the solder mask having cavities that extend to the IC package substrate, applying molten solder to the flexible solder mask to fill the cavities of the solder mask with solder, and removing the solder mask to expose solder bumps on the IC package substrate. The molten solder includes silver and an additive to reduce formation of a silver compound that causes deformation of solder bumps. 1. A method comprising:positioning a solder mask on an integrated circuit (IC) package substrate, wherein the solder mask includes cavities that extend to the IC package substrate;applying molten solder to the flexible solder mask to fill the cavities of the solder mask with solder; andremoving the solder mask to expose solder bumps on the IC package substrate, wherein the molten solder includes silver and an additive to reduce formation of a silver compound that causes deformation of solder bumps, and wherein the solder bumps have a pitch of 300 micrometers (300 μm) or less.2. The method of claim 1 , wherein applying molten solder includes applying molten solder that includes an additive that includes zinc to reduce formation of a silver compound.3. The method of claim 1 , wherein applying molten solder includes applying molten solder having a zinc concentration in a range of two to five percent by weight (2-5 wt %).4. The method of claim 1 , wherein applying molten solder further includes applying molten solder having an iron concentration of 0.3 percent by weight (0.3 wt %).5. The method of claim 1 , wherein applying molten solder further includes applying molten solder that includes tin and an additive to reduce formation of a silver-tin compound.6. The method of claim 1 , wherein applying molten solder further includes applying molten solder having an additive that decreases undercooling to provide an increased solidification temperature of the molten solder and reduces formation of ...

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01-01-2015 дата публикации

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

Номер: US20150001711A1
Принадлежит:

In a semiconductor device in which a plurality of semiconductor chips are stacked, performance is enhanced without deteriorating productivity. The semiconductor device has a plurality of elements, an interlayer insulating film, a pad, and a bump electrode electrically connected with the pad sequentially formed on a main surface of a silicon substrate and has a back-surface electrode formed on a back surface of the silicon substrate and electrically connected with the bump electrode. The bump electrode has a protruding portion penetrating through the pad and protruding toward the silicon substrate side. The back-surface electrode is formed so as to reach the protruding portion of the bump electrode from the back surface side of the silicon substrate toward the main surface side and to cover the inside of a back-surface electrode hole portion which does not reach the pad, so that the back-surface electrode is electrically connected with the bump electrode. 1. A semiconductor device comprising:a semiconductor substrate having a main surface and a back surface positioned on an opposite side to the main surface;a first insulating film formed on the main surface of the semiconductor substrate;a first hole formed in the first insulating film;a second hole formed in the back surface of the semiconductor substrate;an electrode having a first portion which is formed at least in and entirely fills the first hole and a protruding portion which extends from the semiconductor substrate; anda conductive film conformally formed in the second hole and electrically connected to a bottom surface of the electrode.2. The semiconductor device according to claim 1 , wherein a protective insulating film is formed at a boundary portion between the electrode and the semiconductor substrate so that the electrode and the semiconductor substrate are electrically insulated from each other.3. The semiconductor device according to claim 1 , further comprising a second insulating film formed at a ...

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01-01-2015 дата публикации

SOLDER BUMP CONNECTION AND METHOD OF MAKING

Номер: US20150001712A1
Принадлежит:

A layer of material can protect a surface of a passivation layer against damage during a final via plug process. The protective layer can be a conductive bump limiting metallurgy (BLM) base layer and can include titanium tungsten (TiW), though other materials can be employed. Examples include applying the protective layer after formation of a via opening and prior to formation of a via opening, and can include applying more protective material after conductor plug formation to enhance protection. Photosensitive and non-photosensitive passivation layers can be so protected. 18-. (canceled)9. A solder bump connection comprising:a layer stack including a first dielectric layer on an underlying dielectric layer, the underlying dielectric layer including a metal line, at least a portion of the metal line contacting a bottom surface of the first dielectric layer;a passivation layer on at least a portion of a top surface of the layer stack;a ball limiting metallurgy (BLM) base layer of a first conductor on at least a portion of a top surface of the passivation layer;a via opening through the passivation layer over the at least a portion of the metal line and including a connection to a top surface of the at least a portion of the metal line;a conductive plug of a second conductor substantially filling the via;a seed layer of a third conductor in at least the via opening under the conductive plug;a solder ball above the conductive plug; anda supplemental layer of the first conductor over both a portion of the base layer on the passivation layer and on a top surface of the conductive plug.10. The solder bump connection of claim 9 , wherein the base layer conforms to a surface of the via opening under the conductive plug claim 9 , and the seed layer conforms to a top surface of the base layer in the via opening under the conductive plug.11. (canceled)12. (canceled)13. The solder bump connection of claim 9 , wherein the first conductor includes at least one of a titanium ...

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05-01-2017 дата публикации

Semiconductor Package System and Method

Номер: US20170005049A1
Принадлежит:

A first protective layer is formed on a first die and a second die, and openings are formed within the first protective layer. The first die and the second die are encapsulated such that the encapsulant is thicker than the first die and the second die, and vias are formed within the openings. A redistribution layer can also be formed to extend over the encapsulant, and the first die may be separated from the second die. 1. A semiconductor device comprising:a semiconductor die with a first sidewall;a first protective layer over the semiconductor die, wherein a second sidewall of the first protective layer is recessed from the first sidewall of the semiconductor die;an opening through the first protective layer;an encapsulant covering the first sidewall and the second sidewall, wherein the encapsulant has a top surface that is planar with the first protective layer; anda conductive material filling the opening and extending over the encapsulant.2. The semiconductor device of claim 1 , further comprising a second protective layer over the conductive material.3. The semiconductor device of claim 2 , further comprising an underbump metallization extending through the second protective layer to make electrical contact with the conductive material.4. The semiconductor device of claim 2 , wherein the second protective layer has a third sidewall aligned with a fourth sidewall of the encapsulant.5. The semiconductor device of claim 1 , further comprising a through via extending through the encapsulant and in electrical connection with the conductive material.6. The semiconductor device of claim 1 , wherein the conductive material is in physical contact with the encapsulant.7. The semiconductor device of claim 6 , wherein the conductive material is copper.8. A semiconductor device comprising:a protective material overlying a first surface of a semiconductor die, the protective material having a second surface facing away from the first surface;an encapsulant encapsulating the ...

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05-01-2017 дата публикации

Semiconductor Device And Bump Formation Process

Номер: US20170005051A1
Принадлежит:

A semiconductor device includes a solder bump overlying and electrically connected to a pad region, and a metal cap layer formed on at least a portion of the solder bump. The metal cap layer has a melting temperature greater than the melting temperature of the solder bump. 1. A method of forming a packaging assembly , the method comprising disposing a bump structure between a semiconductor substrate and a package substrate , the bump structure electrically connecting the semiconductor substrate to the package substrate , wherein the bump structure comprises a solder bump and a metal cap layer covering at least a portion of the solder bump while a top portion of the solder bump remains exposed , and the metal cap layer has a melting temperature greater than a melting temperature of the solder bump.2. The method of claim 1 , wherein disposing the bump structure comprises the metal cap layer comprising at least one of nickel claim 1 , palladium and gold.3. The method of claim 2 , wherein disposing the bump structure further comprises the metal cap layer comprising copper.4. The method of claim 2 , wherein disposing the bump structure comprises the solder bump comprising a lead-free solder material.5. The method of claim 2 , further comprising forming the metal cap layer on a middle sidewall surface of the solder bump.6. The method of claim 2 , further comprising forming the metal cap layer on a lower sidewall surface of the solder bump and covering a bottom portion of the solder bump.7. A method of forming a semiconductor device claim 2 , the method comprising:forming a solder material layer over a semiconductor substrate, the solder material layer comprising a substantially homogenous material;forming a metal cap layer conformally over the solder material layer;removing a portion of the metal cap layer to expose at least a top portion of the solder material layer, while a remaining portion of the metal cap layer covers at least a portion of the solder material layer; ...

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05-01-2017 дата публикации

UNDER BUMP METALLURGY (UBM) AND METHODS OF FORMING SAME

Номер: US20170005052A1
Принадлежит:

A device package includes a die, fan-out redistribution layers (RDLs) over the die, and an under bump metallurgy (UBM) over the fan-out RDLs. The UBM comprises a conductive pad portion and a trench encircling the conductive pad portion. The device package further includes a connector disposed on the conductive pad portion of the UBM. The fan-out RDLs electrically connect the connector and the UBM to the die. 1. A device package comprises:a die;fan-out redistribution layers (RDLs) over the die; a conductive pad portion; and', 'a trench encircling the conductive pad portion; and, 'an under bump metallurgy (UBM) over the fan-out RDLs, wherein the UBM comprisesa connector disposed on the conductive pad portion of the UBM, wherein the fan-out RDLs electrically connect the connector and the UBM to the die.2. The device package of claim 1 , wherein the UBM further comprises a retaining wall portion encircling the trench.3. The device package of claim 2 , wherein a width of the retaining wall portion is about 10 μm to about 20 μm.4. The device package of claim 2 , wherein the connector is not disposed on the retaining wall portion of the UBM.5. The device package of claim 1 , wherein a width of the trench is between about 10 μm to about 20 μm.6. The device package of claim 1 , wherein the fan-out RDLs comprise a conductive line claim 1 , wherein the UBM is formed on a top surface of the conductive line claim 1 , and wherein the trench exposes a portion of the conductive line.7. The device package of claim 6 , wherein the fan-out RDLs comprise a polymer layer extending over a top surface of the conductive line.8. The device package of claim 7 , wherein an entirety of the UBM is disposed in an opening in the polymer layer.9. The device package of claim 7 , wherein the polymer layer covers edge portions of the UBM.10. The device package of claim 7 , wherein the polymer layer is at least partially disposed in the trench.11. A device package comprising:a device die;a conductive ...

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05-01-2017 дата публикации

CHIP MOUNTING STRUCTURE

Номер: US20170005053A1
Принадлежит:

Highly reliable chip mounting is accomplished by using a substrate having such a shape that a stress exerted on a flip-chip-connected chip can be reduced, so that the stress exerted on the chip is reduced and separation of an interlayer insulating layer having a low dielectric constant (low-k) is minimized. Specifically, in a chip mounting structure, a chip including an interlayer insulating layer having a low dielectric constant (low-k) is flip-chip connected to a substrate via bumps is shown. In the chip mounting structure, the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at corner portions of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate. 1. A chip mounting structure , comprising:a chip including an interlayer insulating layer having a low dielectric constant; anda substrate to which the chip is flip-chip connected via a bump,wherein the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at a corner portion of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate.2. The chip mounting structure according to claim 1 , wherein the substrate has such a shape that satisfies A Подробнее

13-01-2022 дата публикации

METHOD FOR FORMING CONDUCTIVE LAYER, AND CONDUCTIVE STRUCTURE AND FORMING METHOD THEREFOR

Номер: US20220013479A1
Автор: Hsieh Ming-Teng
Принадлежит: CHANGXIN MEMORY TECHNOLOGIES, INC.

A method for forming the conductive layer includes: providing a first conductive film and a solution with a conductive material; coating a surface of the first conductive film with the solution, before performing the coating, a temperature of the first conductive film being lower than an evaporation temperature or a sublimation temperature of the solution; and in a process step of performing the coating or after performing the coating, heating the first conductive film, such that the temperature of the first conductive film is higher than or equal to the evaporation temperature or the sublimation temperature of the solution, and forming a second conductive film covering the surface of the first conductive film, wherein the second conductive film including the conductive material. 1. A method for forming a conductive layer , comprising:providing a first conductive film and a solution with a conductive material;coating a surface of the first conductive film with the solution, and prior to said coating, a temperature of the first conductive film being lower than an evaporation temperature or a sublimation temperature of the solution; andin a process step of performing the coating or after performing the coating, heating the first conductive film, such that the temperature of the first conductive film is higher than or equal to the evaporation temperature or the sublimation temperature of the solution, and forming a second conductive film covering the surface of the first conductive film, the second conductive film comprising the conductive material.2. The method for forming a conductive layer of claim 1 , wherein the first conductive film has a damaged surface; the damaged surface is coated with the solution; and after said coating claim 1 , the second conductive film covering the damaged surface is formed.3. The method for forming a conductive layer of claim 1 , wherein in a process step of heating the first conductive film claim 1 , the temperature of the first ...

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07-01-2016 дата публикации

INTEGRATED CIRCUIT ASSEMBLY AND INTEGRATED CIRCUIT PACKAGING STRUCTURE

Номер: US20160005674A1
Автор: WU Ya Tzu, Yang Yu Lin
Принадлежит:

An integrated circuit packaging structure includes a chip, an electrical bump, a heat dissipation bump, a lead frame, and a sealant. The chip includes an active surface and an electronic component that is formed by using a semiconductor process. The electrical bump is electrically connected to the electronic component through the active surface. The heat dissipation bump is connected to the active surface. The lead frame is electrically connected to the electrical bump. The sealant covers the chip, the lead frame, and the electrical bump, wherein the heat dissipation bump and a part of the lead frame are exposed without being covered. The height of the heat dissipation bump relative to the active surface is unequal to that of the electrical bump relative to the active surface. 1. An integrated circuit assembly , comprising:a chip, including an active surface and an electronic component that is formed by using a semiconductor process;a heat conductor, formed by using the semiconductor process, and protruding on the active surface;an electrical conductor, formed by using the semiconductor process, and protruding on the active surface;an electrical bump, electrically connected to the active surface via the electrical conductor, so as to be electrically connected to the electronic component through the active surface; anda heat dissipation bump, connected to the active surface via the heat conductor, so as to be connected to the active surface;wherein, through the height difference formed by the heat conductor and the electrical conductor, the height of the heat dissipation bump relative to the active surface is higher than that of the electrical bump relative to the active surface.2. (canceled)3. (canceled)4. (canceled)5. The integrated circuit assembly as claimed in claim 1 , wherein the volume of the heat dissipation bump is greater than that of the electrical bump.6. (canceled)7. The integrated circuit assembly as claimed in claim 1 , wherein materials of the heat ...

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07-01-2016 дата публикации

Methods and Apparatus of Packaging Semiconductor Devices

Номер: US20160005704A1
Принадлежит:

Methods and apparatuses for wafer level packaging (WLP) semiconductor devices are disclosed. A redistribution layer (RDL) is formed on a first passivation layer in contact with a conductive pad over a surface of a die. The RDL layer is on top of a first region of the first passivation layer. A second passivation layer is formed on the RDL layer with an opening to expose the RDL layer, and over the first passivation layer. An under bump metallization (UBM) layer is formed over the second passivation layer in contact with the exposed RDL layer. A second region of the first passivation layer disjoint from the first region is determined by projecting an outer periphery of a solder ball or other connector onto the surface. 1. A semiconductor device comprising:a contact pad over a substrate;a redistribution layer in electrical connection with the contact pad;a passivation layer over the redistribution layer;an underbump metallization extending through the passivation layer to be in physical contact with a surface of the redistribution layer facing away from the substrate; anda solder ball in physical contact with the underbump metallization, wherein the solder ball is laterally separated from the redistribution layer in a direction parallel with a major surface of the substrate.2. The semiconductor device of claim 1 , wherein the underbump metallization comprises a reflowable material along a top surface of the underbump metallization.3. The semiconductor device of claim 1 , wherein the underbump metallization extends through the passivation layer at two or more locations.4. The semiconductor device of claim 1 , wherein the redistribution layer comprises a plurality of sub-layers.5. The semiconductor device of claim 1 , wherein the underbump metallization comprises a plurality of sub-layers.6. The semiconductor device of claim 1 , wherein the underbump metallization comprises a plurality of connection branches.7. The semiconductor device of claim 1 , wherein a sidewall of ...

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07-01-2016 дата публикации

SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME

Номер: US20160005707A1
Принадлежит:

A semiconductor package includes a package board that includes an circuit pattern and a plurality of contact pads electrically connected to the circuit pattern; a semiconductor chip having a plurality of chip pads; and a bump structure including a plurality of connecting bumps electrically connected with the semiconductor chip and the circuit pattern and a plurality of gap adjusting bumps bonded to the semiconductor chip and shaped into a slender bar between the semiconductor chip and the package board, the gap adjusting bumps spacing the semiconductor chip from the package board such that a gap space, S, is maintained between the package board and the semiconductor chip. A method of fabrication and a memory unit are disclosed. 1. A semiconductor package comprising:a package board comprising an circuit pattern and a plurality of contact pads electrically connected to the circuit pattern;a semiconductor chip having a plurality of chip pads; anda bump structure comprising a plurality of connecting bumps electrically connected with the semiconductor chip and the circuit pattern and a plurality of gap adjusting bumps bonded to the semiconductor chip and shaped into a slender bar between the semiconductor chip and the package board, the gap adjusting bumps spacing the semiconductor chip from the package board such that a gap space, S, is maintained between the package board and the semiconductor chip.2. The semiconductor package of claim 1 , wherein the semiconductor chip includes a passivation pattern covering an active face thereof and through which the chip pads are exposed and the plurality of gap adjusting bumps comprises at least one slender body connected to the passivation layer and a sidewall solder member arranged on a sidewall of the slender body.3. The semiconductor package of claim 2 , wherein the sidewall of the slender body is shaped into a concave face that is directed to a center of the slender body and is at least partially covered with the sidewall ...

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04-01-2018 дата публикации

INTERFACE STRUCTURES FOR PACKAGED CIRCUITRY AND METHOD OF PROVIDING SAME

Номер: US20180005972A1
Принадлежит:

Techniques and mechanisms for determining an accessibility of circuit functionality via interface structures of a microelectronic device. In an embodiment, a packaged microelectronic device includes a substrate having interconnect structures formed therein. The interconnect structures variously couple one or more integrated circuit (IC) dies of the packaged microelectronic device to respective conductors (or “contact lands”) at a side of the substrate. Access to some functionality of the one or more IC dies via certain ones the contact lands—the access during an operational mode of the packaged microelectronic device—may be selectively disabled based on testing which evaluates performance characteristics of the packaged microelectronic device. In another embodiment, some of the contact lands are covered with an insulator material to prevent deposition of solder on such contact lands. 1. A microelectronic device comprising:a substrate including a first side and a second side;contact lands disposed at the first side, the contact lands including first contact lands and second contact lands;one or more integrated circuit (IC) dies coupled to the substrate via the second side, wherein each of the contact lands is coupled to a respective interconnect structure extending at least partially through the substrate;a package mold disposed on the second side and the one or more IC dies; 'any solder ball of the device is disposed on a contact land other than the each contact land to prevent a respective functionality of a circuit component.', 'solder balls each disposed on a respective one of the second contact lands, wherein, for each contact land of the first contact lands2. The microelectronic device of claim 1 , wherein claim 1 , of the first contact lands and the second contact lands claim 1 , only the second contact lands have respective solder balls disposed thereon.3. The microelectronic device of claim 2 , wherein respective surfaces of one or more of the first contact ...

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07-01-2021 дата публикации

SEMICONDUCTOR PACKAGE HAVING MAGNETIC INTERCONNECTS AND RELATED METHODS

Номер: US20210005566A1

Implementations of semiconductor packages may include a first die including a plurality of contact pads, a second die including a plurality of contact pads, a plurality of solder interconnects bonding the plurality of contact pads of the first die to the plurality of contact pads of the second die, and a plurality of magnetic particles each coated in an oxide included in each of the plurality of solder interconnects. 1. A semiconductor package comprising:a first die comprising a plurality of contact pads;a second die comprising a plurality of contact pads;a plurality of solder interconnects bonding the plurality of contact pads of the first die to the plurality of contact pads of the second die; anda plurality of magnetic particles each coated in an oxide comprised in each of the plurality of solder interconnects.2. The package of claim 1 , wherein the plurality of magnetic particles comprise Ni claim 1 , Co claim 1 , Fe claim 1 , FeO claim 1 , or any combination thereof.3. The package of claim 1 , wherein a pitch of the plurality of solder interconnects is less than 100 micrometers.4. The package of claim 1 , wherein the plurality of contact pads of the first die are bonded to the plurality of contact pads of the second die through an application of a magnetic field to the plurality of solder interconnects.5. The package of claim 1 , wherein the plurality of magnetic particles is more heavily concentrated near the second die than the first die.6. The package of claim 1 , wherein the oxide comprises silicon dioxide.7. A method of forming a semiconductor package comprising:forming a plurality of solder interconnects on a first die, wherein the plurality of solder interconnects comprise magnetic particles coated in an oxide;coupling a second die over the first die;reflowing the plurality of solder interconnects; andapplying a magnetic field to the plurality of solder interconnects to join the first die to the second die.8. The method of claim 7 , wherein the magnetic ...

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02-01-2020 дата публикации

DEVICE CONTAINING AND METHOD OF PROVIDING CARBON COVERED COPPER LAYER

Номер: US20200006263A1
Автор: Seidemann Georg
Принадлежит:

A device and method of preventing corrosion of a copper layer in a PCB is disclosed. A first dielectric is disposed on a substrate. A copper layer is plated in an opening in the first dielectric and, after conditioning the copper layer, a redistribution layer is plated on the copper layer. A solder resist layer is disposed above the copper layer. A solder ball is disposed in an opening in the solder resist layer. The solder ball is in conductive contact with the copper layer and in physical contact with the redistribution layer. A non-conductive carbon layer is disposed on and in contact with the redistribution layer or tsi-diehe solder resist layer. The carbon layer is substantially thinner than the copper layer and acts as a diffusion barrier to moisture for the copper layer. 1. A device comprising:a substrate comprising at least one of a semiconductor or mold compound;a first dielectric disposed on substrate;a copper layer plated in an opening in the first dielectric;a solder resist layer above the copper layer;a solder ball in an opening in the solder resist layer, the solder ball in conductive contact with the copper layer; anda non-conductive carbon layer on the substrate, the non-conductive carbon layer formed from carbon rather than a carbon compound and configured to act as a diffusion barrier to moisture for the copper layer.2. The device of claim 1 , wherein the carbon layer is disposed on the substrate below the first dielectric.3. The device of claim 1 , wherein the carbon layer is disposed between the solder resist layer and the first dielectric.4. The device of claim 1 , wherein the carbon layer is disposed on the solder resist layer.5. The device of claim 4 , wherein the carbon layer is further disposed on at least one of the solder ball or an interconnect element.6. The device of claim 4 , wherein the carbon layer is adjacent to the solder ball and the solder ball is free from the carbon layer.7. The device of claim 1 , further comprising:a ...

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03-01-2019 дата публикации

CHIP ENCAPSULATING METHOD AND CHIP ENCAPSULATING STRUCTURE

Номер: US20190006195A1
Принадлежит:

A chip encapsulating method includes: fixing a plurality of wafers to a first panel level substrate, the wafer including a plurality of chips; forming a re-distribution layer on the wafer for each of the chips; forming each individual chip and the re-distribution layer connected to the chip by cutting; fixing the chip and the re-distribution layer connected thereto to a second panel level substrate; and encapsulating the chip to form an encapsulating layer. A chip encapsulating structure is prepared by the above described chip encapsulating method. 1. A chip encapsulating method , comprising:fixing a plurality of wafers to a first panel level substrate, the wafer comprising a plurality of chips;forming a re-distribution layer on the wafer for each of the chips;forming each individual chip and the re-distribution layer connected to the chip by cutting;fixing the chip and the re-distribution layer connected to the chip to a second panel level substrate; andencapsulating the chip to form an encapsulating layer.2. The chip encapsulating method of claim 1 , wherein when the chip and the re-distribution layer connected with the chip are fixed to the second panel level substrate claim 1 , the re-distribution layer is close to the second panel level substrate;after the chip is encapsulated, the chip encapsulating method further comprises:removing the second panel level substrate;fixing the encapsulating layer to a third panel level substrate, and forming a solder ball on one side of the re-distribution layer.3. The chip encapsulating method of claim 1 , wherein when the chip and the re-distribution layer connected with the chip are fixed to the second panel level substrate claim 1 , the re-distribution layer is close to the second panel level substrate;after the chip is encapsulated, the chip encapsulating method further comprises:cutting the encapsulating layer, to form each individual chip encapsulating body; andforming a solder ball for each of the chip encapsulating ...

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02-01-2020 дата публикации

STRUCTURES FOR BONDING A GROUP III-V DEVICE TO A SUBSTRATE

Номер: US20200006271A1
Принадлежит:

Various embodiments of the present application are directed towards a method for forming an integrated chip in which a group III-V device is bonded to a substrate, as well as the resulting integrated chip. In some embodiments, the method includes: forming a chip including an epitaxial stack, a metal structure on the epitaxial stack, and a diffusion layer between the metal structure and the epitaxial stack; bonding the chip to a substrate so the metal structure is between the substrate and the epitaxial stack; and performing an etch into the epitaxial stack to form a mesa structure with sidewalls spaced from sidewalls of the diffusion layer. The metal structure may, for example, be a metal bump patterned before the bonding or may, for example, be a metal layer that is on an etch stop layer and that protrudes through the etch stop layer to the diffusion layer. 1. An integrated chip comprising:a substrate comprising a semiconductor substrate, complementary metal-oxide-semiconductor (CMOS) devices on the semiconductor substrate, and an interconnect structure covering the semiconductor substrate and the CMOS devices;a mesa structure on the substrate and comprising semiconductor material;a bump structure between the substrate and the mesa structure, wherein the bump structure comprises conductive material; anda diffusion layer recessed into the mesa structure, between the bump structure and the mesa structure;wherein the diffusion layer comprises semiconductor and conductive material respectively from the mesa structure and the bump structure, andsidewalls of the diffusion layer are spaced from sidewalls of the mesa structure.2. The integrated chip according to claim 1 , further comprising:an etch stop layer on the mesa structure, between the mesa structure and the substrate, wherein the bump structure protrudes through the etch stop layer to the diffusion layer.3. The integrated chip according to claim 2 , wherein the bump structure wraps around an adjoining corner of ...

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03-01-2019 дата публикации

SEMICONDUCTOR DEVICE AND BUMP FORMATION PROCESS

Номер: US20190006303A1

A semiconductor device includes a semiconductor substrate. A pad region is disposed on the semiconductor substrate. A micro bump is disposed on the pad region. The micro bump has a first portion on the pad region and a second portion on the first portion. The first portion and the second portion have different widths. The first portion has a first width and the second portion has a second width. The first width is larger or smaller than the second width. The micro bump includes nickel and gold. The semiconductor device also includes a passivation layer overlying a portion of the pad region. 115.-. (canceled)16. A method of fabricating a semiconductor device , the method comprising:forming a first sacrificial layer over a semiconductor substrate;forming a first opening in the first sacrificial layer to expose a conductive pad over the semiconductor substrate;forming a conductive bump in the first opening;forming a barrier layer on sidewalls of the first opening and on a top surface of the conductive bump;forming a conductive cap in the first opening with the barrier layer interposing in between the conductive bump and the conductive cap; andremoving the first sacrificial layer.17. The method of fabricating the semiconductor device of claim 16 , wherein the forming the barrier layer comprises:forming the barrier layer on a top surface of the first sacrificial layer and in the first opening; andremoving a portion of the barrier layer on the top surface of the first sacrificial layer.18. The method of fabricating the semiconductor device of claim 17 , wherein the portion of the barrier layer on the top surface of the first sacrificial layer is removed by chemical mechanical planarization.19. The method of fabricating the semiconductor device of claim 16 , further comprising:forming a second sacrificial layer over the first sacrificial layer after the forming the conductive cap in the first opening;forming a second opening in the second sacrificial layer exposing a top ...

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03-01-2019 дата публикации

Metal pad modification

Номер: US20190006304A1
Автор: Ekta Misra, Krishna Tunga
Принадлежит: International Business Machines Corp

The present invention provides a structure. In an exemplary embodiment, the structure includes a base material, at least one metal pad, where a first surface of the metal pad is in contact with the base material, and a metal pedestal, where the metal pedestal is in contact with the metal pad, where a radial alignment of the metal pad is shifted by an offset distance, with respect to the metal pedestal, such that the metal pad is shifted towards a center axis of the base material, where a first dimension of the metal pad is smaller than a second dimension of the metal pad, where the second dimension is orthogonal to a line running from a center of the metal pad to the center axis of the base material, where the first dimension is parallel to the line.

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03-01-2019 дата публикации

SEMICONDUCTOR CHIP

Номер: US20190006306A1
Принадлежит: MURATA MANUFACTURING CO., LTD.

A semiconductor chip includes a semiconductor substrate having a main surface, first and second electrodes, a first insulating layer, and first and second bumps. The first and second electrodes are formed above the main surface of the semiconductor substrate. The first insulating layer is formed above a first portion of the first electrode. The first bump is formed above a second portion of the first electrode and above the first insulating layer and is electrically connected to the first electrode. The second bump is formed above the second electrode. The area of the second bump is larger than that of the first bump in a plan view of the main surface of the semiconductor substrate. The first insulating layer adjusts the distance from the main surface of the semiconductor substrate to the top surface of the first bump in a direction normal to the main surface. 1. A semiconductor chip comprising:a semiconductor substrate having a main surface;a first electrode formed above the main surface of the semiconductor substrate;a second electrode formed above the main surface of the semiconductor substrate;a first insulating layer formed above a first portion of the first electrode;a first bump that is formed above a second portion of the first electrode and above the first insulating layer, and that is electrically connected to the first electrode; anda second bump formed above the second electrode, an area of the second bump being larger than an area of the first bump in a plan view of the main surface of the semiconductor substrate,wherein a level on which the first bump is formed is higher than a level on which the second bump is formed.2. The semiconductor chip according to claim 1 , wherein a longest distance from the main surface of the semiconductor substrate to a top surface of the first bump in a direction normal to the main surface of the semiconductor substrate is substantially equal to a longest distance from the main surface of the semiconductor substrate to a ...

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