PROCEDURE AND DEVICE FOR THE PRODUCTION OF MULTI-LAYER ACTUATORS

TORSION ACTUATOR AND A PROCEDURE FOR ITS PRODUCTION

Multilayer piezoelectric device

Method for enhancing connection strength between ceramic sheet and surface electrode layer in piezoelectric ceramic sheet

Piezo-eement comprising multilayer structure that is produced by folding and its mfg. method

METHOD FOR PRODUCING A CERAMIC COMPONENT AND CERAMIC COMPONENT

The invention relates to a method for producing a ceramic component, in which method a body (SB) comprising inner electrodes, the outer edges of which lie on at least one outer face (OF1) of said body, and a composition (EC) comprising an electrophoretically mobile insulation material (IM) are provided. The insulation material (IM) is deposited in a structured manner on the outer face (OF1) of the body on the outer edges of the inner electrodes by means of electrophoresis and is used to create an electrically insulating layer (IS) on said outer edges. The invention also relates to a ceramic component comprising an insulating layer of this type.

Multilayer piezoelectric device and method of producing same

A multilayer piezoelectric device comprised of piezoelectric layers and internal electrode layers alternately stacked, wherein the internal electrode layers have a thickness of 1 to 3 mum and contain 20 to 90 wt % of gold as an essential ingredient, based on 100 wt % of the metal ingredients in the internal electrode layers, and at least one element selected from palladium, platinum, and rhodium.

MULTILAYER PIEZOELECTRIC ELEMENT, PIEZOELECTRIC VIBRATION APPARATUS, AND ELECTRONIC DEVICE

In an embodiment, a multilayer piezoelectric element includes a multilayer piezoelectric body and multiple internal electrodes. The multilayer piezoelectric body has a pair of principal faces in a first-axis direction, a pair of end faces in a second-axis direction crossing at right angles with the first-axis direction and defining the longitudinal direction, and a pair of side faces in a third-axis direction crossing at right angles with the first-axis direction and second-axis direction. The multiple internal electrodes are placed inside the multilayer piezoelectric body and stacked in the first-axis direction. Among the multiple internal electrodes, a center internal electrode placed at the center part of the multilayer piezoelectric body is such that its first cross-sectional shape, as viewed from the third-axis direction, has undulations greater than the undulations of the second cross-sectional shape of the center internal electrode as viewed from the second-axis direction.

Piezoelectric actuator unit, manufacturing method thereof, piezoelectric structural body, and liquid ejecting apparatus using the same

The present invention is a piezoelectric actuator unit 29 having piezoelectric vibrators 33 vibrating in the lamination direction of electrode layers and piezoelectric material layers which are alternately laminated. The piezoelectric vibrators are arranged in one row in the direction of vibrator arrangement perpendicular to the lamination direction. Each of the piezoelectric vibrators includes the area on one side and the area on the other side in the direction of the vibrator width perpendicular to the lamination and vibrator arrangement directions, and either of the area on one side and the area on the other side forms active parts capable of performing piezoelectric deformation, and the other area forms inactive parts incapable of performing piezoelectric deformation, and in the adjacent piezoelectric vibrators, the arrangement of the active part and inactive part is opposite. According to the present invention, the number of nozzles of the liquid ejecting apparatus can be increased ...

Laminate-type piezoelectric device and method for manufacturing the same

A laminate-type piezoelectric device includes: a piezoelectric layer (2); and an internal electrode layer (3) which is laminated on the piezoelectric layer (2), has a lower surface flat along a surface of the piezoelectric layer (2) and has an edge sidewall in its tip portion having an inclined surface (3A) making an acute angle with respect to the surface of the underlying piezoelectric layer (2). The piezoelectric layers (2) and the internal electrode layers (3) are alternately laminated on each other.

Multi-layered film, method of manufacturing the same, and manufacturing apparatus of the same

A multi-layered film includes a first electroconductive layer, a dielectric layer, and a second electroconductive layer, which are sequentially layered and disposed on a main surface of a substrate. A lower surface of the dielectric layer comes into contact with an upper surface of the first electroconductive layer, an upper surface and an side surface of the dielectric layer is coated with the second electroconductive layer, and an side end of a portion at which the first electroconductive layer directly overlaps the second electroconductive layer is located inside a side end of the substrate on the main surface of the substrate.

Film structure body and method for manufacturing the same

A film structure body has: a substrate that is a silicon substrate including an upper surface composed of a (100) plane; an orientation film including a zirconium oxide film that is cubic crystal (100)-oriented on the upper surface; and a conductive film including a platinum film that is cubic crystal (100)-oriented on the orientation film.

Piezoelectric device and method of manufacturing piezoelectric device

A piezoelectric device (10, 50, 90, 100, 150, 160) includes: a substrate (12, 30, 110, 170); a first electrode (14, 32, 114) which is layered over the substrate (12, 30, 110, 170); a first piezoelectric film (16, 34, 116) which is layered over the first electrode (14, 32, 114); a metal oxide film (18, 36, 62A, 62B, 118) which is layered over the first piezoelectric film (16, 34, 116); a metal film (20, 38, 64A, 64B, 120) which is layered over the metal oxide film (18, 36, 62A, 62B, 118); a second piezoelectric film (22, 44, 74, 122) which is layered over the metal film (20, 38, 64A, 64B, 120); and a second electrode (24, 46, 82, 124) which is layered over the second piezoelectric film (22, 44, 74, 122).

セラミック多層構成素子の製造方法

Gestapelte piezoelektrische Einrichtung und Verfahren zur Herstellung derselben

Um eine gestapelte piezoelektrische Einrichtung, welche kostengünstig und hinsichtlich der Bondfestigkeit zwischen einer piezoelektrischen Schicht und einer inneren Elektrodenschicht herausragend ist, bereitzustellen, umfaßt die piezoelektrische Einrichtung piezoelektrische Schichten und nicht weniger als 50 Gewichtsprozent von Cu enthaltende innere Elektrodenschichten, die abwechselnd gestapelt sind. Zwischen der inneren Elektrodenschicht und der piezoelektrischen Schicht gibt es einen Diffusionsbereich, der durch wechselseitige Diffusion von Komponenten der inneren Elektrodenschicht und der piezoelektrischen Schicht in die andere Schicht erzeugt wird und zumindest eine Komponente des piezoelektrischen Materials und Cu umfaßt. Der Duffusionsbereich belegt nicht weniger als 90 Prozent der Fläche eines Übergangs zwischen der inneren Elektrodenschicht und der piezoelektrischen Schicht, und die Dicke des Diffusionsbereichs beträgt nicht mehr als 10 Prozent der Dicke der inneren Elektrodenschicht ...

A PROCESS FOR PRODUCING AN ASSEMBLY OF LAMINAR PIEZOCERAMIC ELEMENTS AND AN ASSEMBLY PRODUCED THEREBY

PIEZOELECTRIC PORCELAIN COMPOSITION AND PIEZOELECTRIC CONTROL MEMBER

MANUFACTURING PROCESS FOR A MONOLITHIC PIEZOELECTRIC ELEMENT

Process for producing ceramic member, ceramic member, gas sensor element, fuel cell element, layer-built piezoelectric element, injector, and fuel injection system

A ceramic member is produced which has sufficiently sintered metallic layers and in which the metallic layers are reduced in the content of an impurity residue such as a resin and have a high porosity. The production process comprises a step in which a layered molding comprising two or more metallic paste layers containing a metallic ingredient (M1) and superposed through a ceramic green sheet is produced and a step in which this layered molding is burned. When the mass proportion of the metallic ingredient (M1) to all metallic ingredients contained in the metallic paste layers is expressed by X, then at least one of the metallic paste layers is a second metallic paste layer which is higher in mass proportion X than a first metallic paste layer adjacent thereto in the layer superposition direction.

Metallization processing method of three-dimensional quartz-sensitive structure

The invention belongs to the field of processing methods and specifically relates to a metallization processing method of a three-dimensional quartz-sensitive structure. The metallization processing method of the three-dimensional quartz-sensitive structure is characterized by comprising the following steps: step 1: processing a surface electrode; and step 2: processing side electrodes and the surface electrode in a non-equal height structure. The metallization processing method has the following significant effects: (1) realizing the processing of three types of combined electrodes, including the surface electrode, the side electrodes and the surface electrode in the non-equal height structure; (2) enabling the dimensional precision of the surface electrode to be high and be controlled within plus or minus 1 mu m, simultaneously being good in compatibility with other processes and being easy to process; (3) being applied in batch production of quartz micro-devices; and (4) processingthe ...

Base metal inner electrode material for multi-layer piezoelectric ceramic actuator and preparation method of base metal inner electrode material

The invention discloses a base metal inner electrode material for a multi-layer piezoelectric ceramic actuator. The inner electrode material is composed of a base material, a coating material coating the outer surface of the base material and base metal nanoparticles. The coating material layer is formed by mixing a porous biomass charcoal material and an active auxiliary solvent. The base material is either a piezoelectric single crystal or a piezoelectric film, and the thickness of the base material is 1-500 [mu] m. The active auxiliary solvent is a mixture of butadiene styrene rubber emulsion and one or more of hydroxybenzenesulfonic acid, benzene disulfonic acid or benzene disulfonate. The invention also discloses a preparation method of the base metal inner electrode material for a multi-layer piezoelectric ceramic actuator. The porous biomass carbon material is added into the coating material, and the porous biomass carbon material is prepared from waste rice straws, so that the raw ...

PIEZOELECTRIC ACTUATOR AND PIEZOELECTRIC ACTUATOR DRIVE METHOD

This piezoelectric actuator comprises: a layered body including a plurality of flat electrodes and a plurality of piezoelectric ceramic layers, which have been layered; a low-potential external electrode provided on one of the end faces of the layered body; and a high-potential external electrode provided on the other end face of the layered body. The flat electrodes include low-potential flat electrodes connected electrically to the low potential external electrode and high-potential flat electrodes connected electrically to the high-potential external electrode, the low-potential flat electrodes and the high-potential flat electrodes being positioned alternately in the layering direction. On one of the main surfaces of the layered body, the flat electrode positioned on the outermost side is a low-potential flat electrode. The inner side of this low-potential flat electrode is in contact with the - side of the polarization of an active region, and the outer side of this low-potential flat ...

Stacked piezoelectric device and method of fabrication threreof

A stacked piezoelectric device having high durability and a method of fabrication thereof facilitating easy control of the process of fabrication, comprising a piezoelectric stack (10) having a first side electrode (11) and a second side electrode (12), piezoelectric layers (131, 132) and internal electrode layers (141, 142) having substantially the same area, internal electrode layers (141, 142) having ends thereof exposed to the side (101) of the stack (10), the first side electrode (11) including first insulative portions (111) formed at the ends of alternate ones of the internal electrode layers (141) and a first conductive portion (121) formed over the first insulative portions (111), a second side electrode (12) being similarly configured to form insulative portions (112) at the other ends, the first and second insulative portions (111, 112) being formed of an insulative resin, while the first and second conductive portions (112, 122) being formed of a conductive resin.

FILM STRUCTURE BODY AND METHOD FOR MANUFACTURING THE SAME

A film structure body has: a substrate that is a silicon substrate including an upper surface composed of a plane; an orientation film including a zirconium oxide film that is cubic crystal-oriented on the upper surface; and a conductive film including a platinum film that is cubic crystal-oriented on the orientation film.

METHOD FOR PRODUCING AN ELECTRIC COMPONENT AND ELECTRIC COMPONENT

METHOD FOR PRODUCING AN ELECTRONIC STRUCTURAL ELEMENT AS A STACK

PIEZOELECTRIC ELEMENT

Laminierte Struktur, Verfahren zur Herstellung derselben und Vielfach-Ultraschallwandlerfeld

A PROCESS FOR PRODUCING AN ASSEMBLY OF LAMINAR PIEZOCERAMIC ELEMENTS AND AN ASSEMBLY PRODUCED THEREBY

PIEZOELECTRIC ACTUATOR

Method for producing a piezoelectric multilayer component and a piezoelectric multilayer component

Method for producing a piezoelectric multilayer component and a piezoelectric multilayer component

The invention relates to a method for producing a piezoelectric multilayer component, in which piezoelectric green films and electrode material are provided, arranged alternately on top of one another and sintered, wherein the electrode material is provided with a PbO-containing coating and/or PbO is mixed into the electrode material. The invention further relates to a piezoelectric multilayer component, which on the surface of the inner electrodes (20) comprises a region having poling cracks (25).

LAMINATED PIEZOELECTRIC ELEMENT AND PROCESS FOR PRODUCING THE SAME

Piezoelectric/electrostrictive device and method of manufacturing same

A pair of opposing thin plate sections, movable sections, and fixed sections for supporting the thin plate sections and the movable sections are provided on a ceramic substrate. After a wiring pattern and a gap or an insulating layer of cermet layer for filling the gap are formed on a ceramic substrate, these are sintered. After that, piezoelectric/electrostrictive layers and cermet electrode layers including a piezoelectric/electrostrictive material and a conductive material are alternately stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive device having the piezoelectric/electrostrictive element in multilayer structure is obtained.

MANUFACTURING METHOD FOR ELECTRODE OF HIGH-TEMPERATURE PIEZOELECTRIC ELEMENT AND STRUCTURE OF PIEZOELECTRIC ELEMENT

A manufacturing method for an electrode of a high-temperature piezoelectric element, comprises: coating traditional conductive slurry on surfaces of a molded piezoelectric material (1); then polarizing the piezoelectric material (1); and then removing the coating of conductive slurry (2) on the surfaces there of, and connecting the piezoelectric material to outside electrode lead wires (3) to output a signal generated by piezoelectric effect thereof. A structure of a high-temperature piezoelectric element, comprises polarized piezoelectric material (1), wherein the coating of metallic conductive slurry (2) is removed from the surfaces of the polarized piezoelectric material (1) and the surfaces of the polarized piezoelectric material (1) is connected to electrode lead wires (3) to output a signal generated by piezoelectric effect thereof. By removing the traditional coating of slurry for electrode, it is avoided that the output resistance of the piezoelectric element is reduced because ...

Piezoelectric actuator and lens driving device

There are provided a piezoelectric actuator and a lens driving apparatus having the piezoelectric actuator. The lens driving device includes: a lens barrel having a lens hole where at least one lens is disposed, and having a tip friction member on an outer surface thereof; a base having a guiding part guiding the lens barrel to move along an optical axis direction; a piezoelectric actuator having a piezoelectric body disposed at an edge of the base to apply a driving force when a power is applied, the piezoelectric body having at least one friction member at one side thereof to be in contact with the tip friction member; and a preload member applying an elastic force for elastically supporting the piezoelectric actuator against the lens barrel to keep the tip friction member and the friction member in contact with each other.

Piezoelectric devices

Piezoelectric devices are provided. A device can include a top electrode, a first piezoelectric layer having an upper surface disposed on a lower surface of the top electrode, a first center electrode having an upper surface disposed on a lower surface of the first piezoelectric layer, an insulating layer having an upper surface disposed on a lower surface of the first center electrode, a second center electrode having an upper surface disposed on a lower surface of the insulating layer, a second piezoelectric layer having an upper surface disposed on a lower surface of the second center electrode, and a bottom electrode having an upper surface disposed on a lower surface of the second piezoelectric layer. The insulating layer can be positioned substantially at a vertical center of the piezoelectric device. The first center electrode can be electrically connected to the second center electrode.

METHOD FOR PRODUCING AN ELECTRIC COMPONENT

Mehrschichtiges Piezoelement und Verfahren zu dessen Herstellung

Es werden ein mehrschichtiges Piezoelement (1) und ein Verfahren zur Herstellung des mehrschichtigen Piezoelements (1) offenbart. Das mehrschichtige Piezoelement (1) besteht aus piezoelektrischen Keramikschichten (2) und Elektrodenbildungsschichten (3), die abwechselnd aufeinander geschichtet sind. Die piezoelektrischen Keramikschichten (2) bestehen aus einer kristallorientierten Keramik als einem polykristallinen Material. Die kristallorientierte Keramik besteht hauptsächlich aus einer isotropen Perowskitverbindung, bei der die spezifische {100}-Kristallebene jedes Kristallkorns, das das polykristalline Material bildet, orientiert ist. Die Elektrodenbildungsschichten (3) weisen Elektrodenabschnitte (31) auf, die Innenelektroden bilden, die ein leitendes Metall enthalten. Die isotrope Perowskitverbindung wird durch eine allgemeine Formel (1): [Agh{Lix(K1-yNay)1-x}1-h]j(Nb1-z-wTazSbw)O3-k ..... (1) ausgedrückt, wobei 0 <= x <= 0,2, 0 <= y <= 1, 0 <= z <= 0,4, 0 <= w <= 0,2, x + z + w > 0 ...

Herstellungsverfahren für piezoelektrisches Schichtelement

Die Erfindung befasst sich mit einem Verfahren zur Herstellung eines piezoelektrischen Schichtelements, mit dem sich auf der Seitenfläche eines Schichtkörpers, ohne eine Beschädigung herbeizuführen, leicht Nute bilden lassen. Hierzu wird ein Verfahren zur Herstellung eines piezoelektrischen Schichtelements durch abwechselndes Übereinanderschichten einer piezoelektrischen Schicht und einer Innenelektrodenschicht vorgeschlagen, mit: einem Grünlagenherstellungsschritt, in dem eine Grünlage (110) für eine Grundfläche hergestellt wird, die einen Teil der piezoelektrischen Schicht bildet; einem Einzelkörperausbildungsschritt, in dem ein Einzelkörper (3) mit einem schmalen Schichtteil (30) ausgebildet wird, indem eine schmale piezoelektrische Materialschicht (115), die einen Teil der piezoelektrischen Schicht bildet und eine kleinere Fläche als die Grünlage (110) für die Grundfläche hat, und eine Elektrodenmaterialschicht (20), die die Innenelektrodenschicht bildet und eine kleinere Fläche als ...

Verfahren und Vorrichtung zur Herstellung von Mehrschicht-Aktoren

PIEZOELECTRIC ACTUATOR

METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE

A method is provided for manufacturing a piezoelectric device including a piezoelectric element that is disposed above a diaphragm and that has a multilayer structure including a first electrode disposed above the diaphragm, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The method includes forming the multilayer structure including the first electrode, the piezoelectric layer, and the second electrode above the diaphragm, forming a voltage application electrode extending outwardly from an end of the second electrode to cover a region located above the piezoelectric layer in an inactive section having no second electrode, applying a voltage between the first electrode and the second electrode, and removing the voltage application electrode.

PIEZOELECTRIC DEVICES

Piezoelectric devices are provided. A device can include a top electrode, a first piezoelectric layer having an upper surface disposed on a lower surface of the top electrode, a first center electrode having an upper surface disposed on a lower surface of the first piezoelectric layer, an insulating layer having an upper surface disposed on a lower surface of the first center electrode, a second center electrode having an upper surface disposed on a lower surface of the insulating layer, a second piezoelectric layer having an upper surface disposed on a lower surface of the second center electrode, and a bottom electrode having an upper surface disposed on a lower surface of the second piezoelectric layer. The insulating layer can be positioned substantially at a vertical center of the piezoelectric device. The first center electrode can be electrically connected to the second center electrode.

PIEZOELECTRIC ACTUATER UNIT, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC STRUCTURAL BODY, AND LIQUID EJECTING APPARATUS USING THE SAME

The present invention is a piezoelectric actuator unit 29 having piezoelectric vibrators 33 vibrating in the lamination direction of electrode layers and piezoelectric material layers which are alternately laminated. The piezoelectric vibrators are arranged in one row in the direction of vibrator arrangement perpendicular to the lamination direction. Each of the piezoelectric vibrators includes the area on one side and the area on the other side in the direction of the vibrator width perpendicular to the lamination and vibrator arrangement directions, and either of the area on one side and the area on the other side forms active parts capable of performing piezoelectric deformation, and the other area forms inactive parts incapable of performing piezoelectric deformation, and in the adjacent piezoelectric vibrators, the arrangement of the active part and inactive part is opposite. According to the present invention, the number of nozzles of the liquid ejecting apparatus can be increased ...

Multilayered piezoelectric element and method of manufacturing the same

In a multilayered piezoelectric element, a side insulating film is accurately formed even on a thin multilayered structure. The element includes: a multilayered structure having a step formed on a side surface of the multilayered structure such that an end of an internal electrode is located on a projecting portion of either side surface; a side insulating film for covering the end of the internal electrode on the projecting portion of the side surface; a first flat electrode formed on one principal surface of the multilayered structure; a second flat electrode formed on the other principal surface of the multilayered structure; a first side electrode formed on a first side surface of the multilayered structure and connected to a first group of electrodes; and a second side electrode formed on a second side surface of the multilayered structure and connected to a second group of electrodes.

Vielschichtbauelement und Verfahren zur Herstellung eines Vielschichtbauelements

Vielschichtbauelement (1), aufweisend einen Grundkörper (2) mit einem Stapel aus alternierend angeordneten dielektrischen Schichten (3) und internen Elektrodenschichten (4a, 4b), wobei in einem Isolationsbereich (7), in dem keine Außenkontaktierung auf den Grundkörper (2) aufgebracht ist, an den Außenseiten (8) des Grundkörpers (2) eine Länge jedes kürzest möglichen Pfads zwischen gegenpoligen benachbarten internen Elektrodenschichten (4a, 4b), der nicht durch ein dielektrische Material der dielektrischen Schichten (3) zwischen den internen Elektrodenschichten (4a, 4b) führt, größer ist als ein direkter Abstand zwischen den benachbarten Elektrodenschichten (4a, 4b), wobei die internen Elektrodenschichten (4a, 4b) im Isolationsbereich (7) 250 µm bis 400 µm von den Außenseiten des Grundkörpers (2) beabstandet sind, wobei die internen Elektrodenschichten (4a, 4b) auf einer gesamten freiliegenden Außenfläche abgetragen sind, wobei die freiliegende Außenfläche von den Seitenflächen des Grundkörpers ...

Beschleunigungssensor und Verfahren zum Herstellen desselben

Ein Beschleunigungssensor umfaßt ein piezoelektrisches Element und Tragerahmen zum Tragen der Enden des piezoelektrischen Elements in der Längsrichtung. Das piezoelektrische Element wird durch Stapeln einer geraden Anzahl von piezoelektrischen Schichten, die größer als oder gleich sechs Schichten ist, gebildet. Zwischen den Schichten und auf der Vorder- und der Rückfläche des piezoelektrischen Elements sind Elektroden vorgesehen. Die Zwischenschichtelektroden, die segmentierte Elektroden und Führungselektroden umfassen, sind abwechselnd gestapelt, wobei sich die piezoelektrischen Schichten zwischen denselben befinden. Die Zwischenschichtelektrode in der Mitte in der Dickenrichtung ist eine Führungselektrode. Die piezoelektrischen Schichten sind in der Dickenrichtung polarisiert, so daß eine Ladung, die dieselbe Polarität aufweist, aus den Elektroden extrahiert wird, wenn die Beschleunigung angelegt wird. Ferner sind der Mittelabschnitt und beide Endabschnitte jeder piezoelektrischen Schicht ...

Stacked ceramic body production comprises arranging a pressing part on a green leaf to form a pressing leaf, stacking a number of pressing leaves to form a non-sintered stacked body, degreasing, and sintering

Stacked ceramic body is made by arranging a pressing part (13) made from copper or a copper compound as electrode paste on a green leaf (11, 12) formed from a dielectric oxide containing lead oxide as main component to form a pressing leaf (10), stacking pressing leaves, degreasing by heat treating and removing organic components contained in the non-sintered stacked body, and sintering. Production of a stacked ceramic body comprises: (a) arranging a pressing part (13) made from copper or a copper compound as electrode paste on a green leaf (11, 12) formed from a dielectric oxide containing lead oxide as the main component to form a pressing leaf (10); (b) stacking a number of pressing leaves to form a non-sintered stacked body; (c) degreasing by heat treating and removing organic components contained in the non-sintered stacked body; and (d) sintering the non-sintered stacked body whilst an oxygen partial pressure is adjusted from room temperature to 400-600 degrees C to an oxygen partial ...

PIEZOELECTRIC/ ELECTROSTRICTIVE DEVICE AND ITS PRODUCTION METHOD

ELECTROACTIVE POLYMER DEVICE AND METHOD FOR MANUFACTURING SUCH AN ELECTROACTIVE POLYMER DEVICE

A method for manufacturing an electroactive polymer device which includes a layered structure including a dielectric polymer layer and an electrode layer, wherein the electrode layer is arranged on a surface of the dielectric polymer layer. The method includes: providing the dielectric polymer layer; determining a surface area location of a defect on a first surface of the dielectric polymer layer; creating an electrode layer including an area void of electrode layer material surrounding the surface area location,and the electrode layer includes a patch of electrode material covering the surface area location and a remainder part of the surface of the dielectric polymer layer surrounding the area void of electrode layer material, in which the patch and the remainder part are electrically isolated from one another.

Piezoelectric ceramic plate, plate-shaped substrate and electronic component

FIRST STAGE CERAMIC ASSEMBLED SUBSTRATE, SECOND STAGE CERAMIC ASSEMBLED SUBSTRATE, METHOD OF MANUFACTURING SECOND STAGE CERAMIC ASSEMBLED SUBSTRATE, AND METHOD OF MANUFACTURING STACKED ELECTRONIC COMPONENT

The purpose of the present invention is to fabricate a stacked electronic component in which internal electrodes are arranged appropriately even if a stacking error has occurred in the internal electrodes at the stage of a ceramic assembled substrate. A first-stage ceramic assembled substrate comprising a plurality of first-stage first internal electrodes 12 arranged side by side in the X-direction with a first gap 13 therebetween having a width a, and a plurality of first-stage second internal electrodes 15 arranged side by side in the X-direction with a second gap 16 therebetween having a width b is fabricated and used. The first-stage first internal electrodes 12 have, in at least one end thereof in the Y-direction, a first cutout 14 extending in the X-direction and the Y-direction and having the width b in the X-direction. The first-stage second internal electrodes 15 have, in at least one end thereof in the Y-direction, a second cutout 17 extending in the X-direction and the Y-direction ...

Method and device for the production of multi-layered actuators

A method of manufacturing multilayer actuators is described, in which films (1), known as green films, having regions applied thereon made of metal plating to implement electrodes, are processed into compressed multilayer composite elements before a sintering step. Film elements (4), whose area defines the cross-sectional area of a finished actuator, are individually separated from the green film (1) having metal plating and stacked into a film stack to prepare for the manufacture of a multilayer composite element. Furthermore, a device having separating means (31, 32, 33, 35) for performing the method is described, in which the separating means is designed for the purpose of individually separating film elements (4), whose area defines the cross-sectional area of a finished actuator, from the green film (1) and stacking the separated film elements (4) directly afterward.

PIEZOELECTRIC COMPOSITION AND ELECTRONIC COMPONENT

A piezoelectric composition according to the present invention comprising: a carbon, and a main component composed of an alkali metal niobate based compound. The amount of carbon contained is 350 to 700 ppm by weight.

多層デバイスおよび多層デバイスの製造方法

アクチュエータ素子及び該アクチュエータ素子の製造方法

Laminated piezoelectric element for diesel injector has insulation filler filled in grooves formed at side face of laminate with specified elasticity modulus

The piezoelectric element has the grooves (41,42) formed at the side face of the laminate (10) exposing the edges of internal electrodes (21,22). The insulation filler (5) is filled in the grooves, covering the periphery of the internal electrodes. The elasticity modulus of the filler is 100-15,000 Pa/[deg]C. The electrodes (31,32) are formed at the side face of the laminate. An independent claim is also included for fuel injector.

Piezoelectric multi layer component particularly bending transducer or multilayer actuator, has piezoelectric layer with front side and rear side and electrode surface is oppositely arranged on front and rear side of piezoelectric layer

The piezoelectric multi layer component has a piezoelectric layer (10) with a front side (20) and a rear side. An electrode surface (30) is oppositely arranged on the front and rear side of the piezoelectric layer. One of the electrode surfaces has a closed inner surface (40) and an open marginal surface (50) which partly surrounds the inner surface so that a transition area (60) is positioned between a piezoelectrically active area (70) and a piezoelectrically inactive area (80) in the piezoelectric layer. Independent claims are also included for the following: (1) a multi layer component has an edge surface, which has a net like structure (2) a method for production of a piezoelectric multi layer element.

Multilayer component e.g. varistor, has inner electrodes comprising first and second portions that are electrically conductively connected with each other, where first and second portions provide different electrically conductive materials

The component (100) has inner electrodes (12) arranged between adjacent dielectric sheets (11). The inner electrodes comprise a first portion (13) that is provided with a first electrically conductive material, and a second portion (14), which is provided with a second electrically conductive material. The first and second portions are electrically conductively connected with each other such that the electrically conductive materials are different. Etching rate of the second electrically conductive material is higher than that of the first electrically conductive material. An independent claim is also included for a method for producing a multi-layer component.

Piezoelectric element

A piezoelectric device is formed by simultaneously firing a piezoelectric ceramic mainly composed of a perovskite complex oxide represented by general formula ABO3 and electrodes mainly composed of copper. The piezoelectric ceramic is represented by Pb(alpha-a)Mea[(M(1/3)M(2+b)/3)zTix Zr(1-x-z)]O3, wherein Me represents a metal element, M is an acceptor element which is a divalent metal element, and M is a donor element which is a pentavalent metal element, and satisfies equations of 0.05<=z<=0.40, 0< bz/3<=0.035, 0.345<=x<=0.480, 0.965<=alpha<=1.020, and 0<=a<=0.05. In other words, the B sites contain excessive donors, and thus a piezoelectric device having good piezoelectric characteristics can be obtained even in the cases where a base metal material mainly composed of inexpensive copper is used as the internal electrode material.

Piezoelectric element, and stacked piezoelectric structure

Stacked piezoelectric device

A stacked piezoelectric device, which is inexpensive and excellent in electric transmission efficiency and little deterioration of strength of an internal electrode layer, is provided by having an internal electrode layer containing not less than 50 percent by weight of Cu element, and not more than 5 percent of a pore occurrence expressed by (B/A)x100 (%) wherein A is an area of an interface between the internal electrode layer and the piezoelectric layer and B is a sum of areas of pores which appear in the interface and have a diameter of not less than 0.1 micrometers. Preferably, a surface roughness Ra of the interface of the piezoelectric layer contacting the internal electrode layer is not more than 0.5 C (mum) wherein C is a thickness of the internal electrode layer in micrometers. The piezoelectric material constituting the piezoelectric layer preferably comprises PZT which is a Pb(Zr,Ti)O₃-based oxide having a perovskite structure.

MULTILAYER PIEZOELECTRIC ELEMENT

A multilayer piezoelectric element includes a laminated body and a lateral electrode. The laminated body includes a piezoelectric layer and an internal electrode layer. The piezoelectric layer is formed along a plane including a first axis and a second axis perpendicular to each other. The internal electrode layer is laminated on the piezoelectric layer. The internal electrode layer has a leading portion exposed to the lateral surface of the laminated body and is electrically connected with the lateral electrode via the leading portion. A dummy electrode layer is formed with a gap to surround the internal electrode layer excluding the leading portion on the plane of the piezoelectric layer. The dummy electrode layer is composed of a material whose thermal shrinkage start temperature is higher than that of a conductive metal constituting the internal electrode layer.

MICRO-VIBRATION SENSOR AND PREPARATION METHOD THEREOF

A micro-vibration sensor and preparation method thereof. The method includes a metal sheet is coated with first curing material, and first curing material is cured into first cured layer; piezoelectric thin film element is attached to edge of first cured layer; one side, attached with piezoelectric thin film element, of first cured layer is vertically placed into second curing material, and second curing material is cured into second cured layer; and metal sheet is removed to obtain micro-vibration sensor. Due to fact that piezoelectric thin film element is arranged at a crack tip, during micro-vibration, stress in stress field of crack tip is rapidly increased due to crack stress deformation, and stress signal is efficiently converted into electric signal; and micro-vibration sensor has characteristics of being low in detection limit and high in accuracy.

Electrically conductive paste for generating a stacked piezoelectric element almost without pores in an internal electrode layer has hardly any structural defects like loosening and cracking

Piezoelectric elements (11) and first (21) and second (22) internal electrode layers are stacked. An electrically conductive paste on a green compact is coated with a piezoelectric material. Green compacts are stacked so as to generate a stacked body, which is baked. An independent claim is also included for a method for generating a stacked piezoelectric element.

Ein Verfahren zum Herstellen eines Bauelements auf einem Substrat

Verfahren zum Herstellen einer unteren Elektrode eines piezoelektrischen Bauelements auf einem Substrat (100), das folgende Schritte umfasst:Bilden einer Schichtstruktur (133) auf dem Substrat (100), wobei die Schichtstruktur (133) ein leitfähiges Material umfasst;Bilden einer Hilfsschicht (140) auf der Schichtstruktur (133);Bilden einer Planarisierungsschicht (150) auf der Hilfsschicht (140) und auf dem Substrat (100);Freilegen eines Teils der Hilfsschicht (140);Anwenden eines chemisch-mechanischen Polierens auf die Hilfsschicht (140) und die Planarisierungsschicht (150), so dass die Planarisierungsschicht (150) eine geringere Dicke umfasst als eine Gesamtdicke von Hilfsschicht (140) und Schichtstruktur (133), wobei die Dicke der Planarisierungsschicht (150) gleich der Dicke der Schichtstruktur (133) ist; undselektives Entfernen der Hilfsschicht (140), um eine planare Oberfläche der Schichtstruktur (133) und der Planarisierungsschicht (150) zu bilden.

Multi-layer piezoelectric actuator for activating a valve in a motor vehicle, has a neutral phase without an inner electrode layer between piezoelectric layers near an inner electrode

A multi-layer structure of piezoelectric layers is assembled with electrodes fitted in between them. As mutual contact is made on outer electrodes (5,6) on the sides, there is a neutral phase without an inner electrode layer between two piezoelectric layers near an inner electrode contacted on each opposite side. Inner electrodes are each assembled from multiple compressive layers. As a result of layers pressed over each other, part electrodes (10-12,13-15) are pressed over, each of which stops in the connection area for the outer electrodes on a side with the greatest thickness. An Independent claim is also included for a method for producing a multi-layer piezoelectric actuator for activating a valve in a motor vehicle.

Piezokeramischer Aktor

Ein Brennstoffeinspritzventil (1) weist einen piezokeramischen Aktor (2) mit keramischen Schichten (26, 27) und elektrisch leitenden Zwischenschichten (28, 29) auf. Zum Laden des Aktors (2) ist an die elektrisch leitenden Zwischenschichten (28, 29) eine elektrische Spannung anlegbar. Die Zwischenschichten (28, 29) bestehen aus Silber und einem Absorptionsmittel aus Titanoxid oder Zirkonoxid. Bei der Herstellung des Aktors (2) bildet das Absorptionsmittel mit einem in den keramischen Schichten (26, 27) vorgesehenen Bleioxidüberschuss eine kristalline Verbindung, so dass die Ausbildung der aus Silber bestehenden Zwischenschichten (28, 29) verbessert ist.

Piezoelektrisches Bauelement, Abzweigfilter und Verfahren zum Herstellen des piezoelektrischen Bauelements

Ein laminiertes piezoelektrisches Bauelement umfasst ein in einer Richtung längeres piezoelektrisches Element und mehrere sich orthogonal zur Längsrichtung erstreckende und so angeordnete Innenelektroden, dass sie einander jeweils über die piezoelektrischen Schichten gegenüberliegen. Die Biegeschwingung, in welcher das piezoelektrische Element orthogonal zur Längsrichtung desselben gebogen wird, wird unter Verwendung eines piezoelektrischen Longitudinaleffekts angeregt.

Methods of manufacturing a crystal-oriented ceramic and of manufacturing a ceramic laminate

Piezoelectric material, piezoelectric element, and electronic apparatus

The present invention provides a piezoelectric material not containing lead and potassium, having a high relative density, a high Curie temperature, and a high mechanical quality factor, and exhibiting good piezoelectricity. The piezoelectric material contains 0.04 percent by mole or more and 2.00 percent by mole or less of Cu relative to 1 mol of metal oxide represented by General formula (1) below. ((Na1-zLiz)xBa1-y)(NbyTi1-y)O3(in Formula, 0.70≦x≦0.99, 0.75≦y≦0.99, and 0 Подробнее

Piezoelectric actuator unit, manufacturing method thereof, piezoelectric structural body, and liquid ejecting apparatus using the same

The present invention is a piezoelectric actuator unit 29 having piezoelectric vibrators 33 vibrating in the lamination direction of electrode layers and piezoelectric material layers which are alternately laminated. The piezoelectric vibrators are arranged in one row in the direction of vibrator arrangement perpendicular to the lamination direction. Each of the piezoelectric vibrators includes the area on one side and the area on the other side in the direction of the vibrator width perpendicular to the lamination and vibrator arrangement directions, and either of the area on one side and the area on the other side forms active parts capable of performing piezoelectric deformation, and the other area forms inactive parts incapable of performing piezoelectric deformation, and in the adjacent piezoelectric vibrators, the arrangement of the active part and inactive part is opposite. According to the present invention, the number of nozzles of the liquid ejecting apparatus can be increased ...

Method for Making Electrical Contact With an Electronic Component in the Form of a Stack, and Electronic Component Having a Contact-Making Structure

A method is provided for making electrical contact with an electronic component in the form of a stack formed from a plurality of material layers, which react upon application of an electric field, and a plurality of electrode layers, wherein each material layer is arranged between two of the electrode layers. An insulation structure is generated on at least one stack circumferential region of the stack, which exposes each second electrode layer of the at least one stack circumferential region for electrical contact to be made. Also, a contact-making structure is applied to the at least one stack circumferential region which is provided with the insulation structure. Before the step of generating the contact-making structure, the material layers are partially removed by a material-removing method such that the electrode layers are exposed close to the surface.

ULTRASOUND TRANSDUCER AND METHOD FOR WAFER LEVEL BACK FACE ATTACHMENT

Methods and systems are provided for a single element ultrasound transducer. In one embodiment, the ultrasound transducer comprises a front face, a back face parallel to the front face, a piezoelectric layer having a top surface electrically coupled to the signal pad and a bottom surface electrically coupled to the ground pad. In this way, the transducer can work robustly and may be automatically mounted to an imaging probe.

Acoustic wave device and manufacturing method for same

An acoustic wave device includes a piezoelectric substrate including an electrode formation surface, and an IDT electrode provided on the electrode formation surface. The IDT electrode includes a close contact layer located on the electrode formation surface, and a main electrode layer located on the close contact layer. The close contact layer includes first and second layers that respectively include first and second lateral surfaces. An area of a surface of the second layer that is in close contact with the main electrode layer is smaller than an area of a surface of the first layer that is in close contact with the piezoelectric substrate. An inclination angle of the second lateral surface is smaller than an inclination angle of the first lateral surface.

The piezoelectric element and provided with the piezoelectric vibration device, portable terminal, the sound generator, a sound generation device, electronic equipment

MULTI-LAYER COMPONENT AND METHOD FOR PRODUCING A MULTI-LAYER COMPONENT

A multi-layer component (1) is specified, having a basic body (2) with a stack of alternately arranged dielectric layers (3) and internal electrode layers (4a, 4b). In an insulation region (7) on the outer sides (8) of the basic body (2), a length of a connecting line (d) between adjacent internal electrode layers (4a, 4b) of opposite polarity is greater than a direct interval between the adjacent electrode layers (4a, 4b). Furthermore, a method for producing a multi-layer component (1) is specified. A first step of the method comprises the provision of a basic body (2) having a stack of alternately arranged dielectric layers (3) and internal electrode layers (4a, 4b). A further step of the method comprises the extension of the connecting line between adjacent internal electrode layers (4a, 4b) of opposite polarity on the outer sides (8) of the basic body (2).

Stacked piezoelectric device and method of fabrication thereof

A stacked piezoelectric device and a method of fabrication thereof includes a piezoelectric stack having a first side electrode and a second side electrode, piezoelectric layers and internal electrode layers. The piezoelectric layers and internal electrode layers have substantially the same area. The internal electrode layers have ends thereof exposed to one side of the stack. The first side electrode includes first insulative portions formed at the ends of alternate ones of the internal electrode layers and a first conductive portion formed over the first insulative portions. The second side electrode is similarly configured to form insulative portions at the other ends. The first and second insulative portions are formed of an insulative resin, while the first and second conductive portions are formed of a conductive resin. The first and second conductive portions are also formed to directly cover the ends of the internal electrode layers.

Piezoelectric/electrostrictive device and method of manufacturing same

A pair of opposing thin plate sections, movable sections, and fixed sections for supporting the thin plate sections and the movable sections are provided on a ceramic substrate. After a wiring pattern and a gap or an insulating layer of cermet layer for filling the gap are formed on a ceramic substrate, these are sintered. After that, piezoelectric/electrostrictive layers and cermet electrode layers including a piezoelectric/electrostrictive material and a conductive material are alternately stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive device having the piezoelectric/electrostrictive element in multilayer structure is obtained.

Stacked -type piezoelectric device and production method

A stacked-type piezoelectric device comprising a ceramic stacked body constituted by alternately stacking ceramic layers and internal electrode layers one upon another, and a pair of external electrodes bonded respectively to a pair of bond surfaces formed on an outer peripheral surface of the ceramic stacked body, in which the ceramic stacked body has, at least partially in a peripheral direction, a groove portion recessed in a groove shape from its outer peripheral surface in such a fashion as to be adjacent to a stacking surface of each internal electrode layer, and a production method thereof.

Method of manufacturing piezoelectric microactuators having wrap-around electrodes

A method of manufacturing a piezoelectric microactuator having a wrap-around electrode includes forming a piezoelectric element having a large central electrode on a top face, and having a wrap-around electrode that includes the bottom face, two opposing ends of the device, and two opposing end portions of the top face. The device is then cut through the middle, separating the device into two separate piezoelectric microactuators each having a wrap-around electrode.

Method of manufacturing multilayer ceramic device

A method of manufacturing a multilayer ceramic device capable of obtaining a superior multilayer ceramic device even if the number of layers increases or even if the multilayer ceramic device is upsized, and specifically suitable for manufacturing a multilayer piezoelectric device is provided. After a laminate in which ceramic precursor layers including a raw material of a ceramic layer and internal electrode precursor layers including copper metal as a raw material of an internal electrode layer are alternately stacked is formed, the laminate is heated to degrease the laminate. At this time, an atmospheric gas including an inert gas, 7 mol % to 50 mol % of water vapor, and, if necessary, hydrogen is used to adjust an oxygen partial pressure within a range of p(O₂)<=(25331xKP)^2/3, where p(O₂) represents an oxygen partial pressure; Kp represents a water dissociation equilibrium constant; and the pressure unit is Pa. Thereby, while the oxidation of copper ...

Piezoelectric device and method of manufacturing piezoelectric device

Vielschichtbauelement und Verfahren zur Herstellung eines Vielschichtbauelements

Vielschichtbauelement und Verfahren zur Herstellung eines Vielschichtbauelements. Es wird ein Vielschichtbauelement (1) angegeben, aufweisend einen Grundkörper (2) mit einem Stapel aus alternierend angeordneten dielektrischen Schichten (3) und internen Elektrodenschichten (4a, 4b). In einem Isolationsbereich (7) an den Außenseiten (8) des Grundkörpers (2) ist eine Länge einer Verbindungslinie (d) zwischen gegenpoligen benachbarten internen Elektrodenschichten (4a, 4b) größer, als ein direkter Abstand zwischen den benachbarten Elektrodenschichten (4a, 4b). Des Weiteren wird ein Verfahren zur Herstellung eines Vielschichtbauelements (1) angegeben. Das Verfahren umfasst in einem ersten Schritt das Bereitstellen eines Grundkörpers (2) mit einem Stapel aus alternierend angeordneten dielektrischen Schichten (3) und internen Elektrodenschichten (4a, 4b). In einem weiteren Schritt umfasst das Verfahren die Verlängerung der Verbindungslinie zwischen gegenpoligen benachbarten internen Elektrodenschichten ...

Producing multilayer actuators involves separating foil elements whose area defines actuator cross-section from metallized green foil with, stacking for manufacture

The method involves processing so-called green foils containing a flexible bonding medium with embedded piezoelectric and/or electrostrictive material particles and metal electrode areas to form compressed multilayer compound elements before a sintering stage. Foil elements which defines the cross-section of a finished actuator are separated from the green foil and stacked. Their are prepared for the manufacture of a multilayer compound element. The method involves processing foils containing a flexible bonding medium in which piezoelectric and/or electrostrictive material particles are embedded, so-called green foils (1), with applied areas of metal electrodes to form compressed multilayer compound elements (8) before a sintering stage. Foil elements (4) whose area defines the cross-sectional area of a finished actuator are separated from the green foil with metallisation and stacked in preparation for the manufacture of a multilayer compound element. Independent claims are also included ...

Piezokeramisches Mehrschicht-Bauelement

Die Erfindung betrifft ein piezokeramisches Mehrschicht-Bauelement umfassend wenigstens eine piezoelektrische Keramikschicht (10) und wenigstens eine Elektrodenschicht (20), wobei die Elektrodenschicht (20) aus einem Nichtedelmetall oder einer Nichtedelmetalllegierung oder Kohlenstoff ausgebildet ist.

Multilayer ceramic body with monolithic structure

A novel ceramic body consists of superposed alternating high density ceramic layers and high porosity ceramic layers with ceramic microstructures forming bridges between adjacent high density layers, the ceramic content of the overall body being 20-99 vol.%. The body may consist of luminescent ceramic, in which the high porosity layer voids are filled with either a resin matrix containing finely dispersed light scattering powder or a light reflective material, or may include a ferroelectric layer, the high porosity layer voids being filled with electrically conductive material. Also claimed is a method of producing a layered structure ceramic body by (a) stacking green ceramic foils alternately with foil matrices (FM) of thermally and/or oxidatively decomposable (preferably cellulose-based) material, having openings (DB) in the form of a microstructure; (b) pressure laminating the stack so that the green foil ceramic material flows into the microstructure (DB); and (c) sintering so that ...

Piezoelektrisches Bauelement und Verfahren zur Herstellung desselben

Ein piezoelektrisches Bauelement enthält einen piezoelektrischen Keramikkörper mit einer Perowskit-Schichtstruktur, und seine C-Achse ist in Dickenrichtung gewählt und gerichtet. In dem piezoelektrischen Keramikkörper sind geradlinig geformte Elektroden senkrecht zu der gewählten und gerichteten C-Achse ausgebildet. Die auf beiden Stirnflächen des piezoelektrischen Keramikkörpers freiliegenden Elektroden sind mit leitenden Materialien und mit Isoliermaterialien bedeckt. Der piezoelektrische Keramikkörper ist in die entgegengesetzten Richtungen auf beiden Seiten der in Breitenrichtung angeordneten Elektroden polarisiert. Außerdem sind äußere Elektroden auf den Seiten ausgebildet, wo die leitenden Materialien und die Isoliermaterialien ausgebildet sind, wodurch zwei Gruppen von Elektroden in einer interdigitalen Elektrodenform angeordnet sind.

Torsionsaktuator und ein Verfahren zu dessen Herstellung

Elektrostriktives Element und Herstellungsverfahren dafür

Elektrostriktives Element (1, 21), welches aufweist:einen dielektrischen Film (2), der aus einem Elastomer aufgebaut ist;Filmelektroden (3, 22), die innerhalb von Umfangsrändern beider Vorder- und Rückseiten des dielektrischen Films (2) ausgebildet sind und die sich dehnen und kontrahieren können, um einer Dehnung und Kontraktion des dielektrischen Films (2) zu folgen; undStromsammler (5, 23), deren eines Ende mit einem Umfangsrand der Filmelektrode (3, 22) verbunden ist, und deren anderes Ende sich zu einer Außenseite des dielektrischen Films (2) erstreckt,wobei jede der Filmelektroden (3, 22) ein strangförmiges Carbon-Nanoröhrchen-Aggregat (24) ist, und derart ausgebildet ist, dass eine Faserrichtung des Carbon-Nanoröhrchen-Aggregats (24) mit einer Dehn- und Kontraktionsrichtung des dielektrischen Films (2) übereinstimmt, wobei das strangförmige Carbon-Nanoröhrchen-Aggregat (24) ein solches Carbon-Nanoröhrchen-Aggregat ist, in dem eine Vielzahl von Carbon-Nanoröhrchen (7) in der Faserrichtung ...

Electrical element

An electrical element 20 comprises a ceramic member 30; wherein said ceramic member comprises at least one layer having a depth; and first and second electrode layers 41, 42 disposed adjacent the at least one layer of the ceramic member such that a potential difference may be established through at least a portion of the ceramic member during operation. The electrical element is arranged adjacent to a flexible membrane 10. The first electrode layer comprises a first group of electrodes G1(41) comprising at least two fingers and a second group of electrodes G2(41) comprising at least one finger. The second electrode layer comprises a first group of electrodes G1(42) comprising at least two fingers and a second group of electrodes G2(42) comprising at least one finger. The fingers of the first and second groups of electrodes are arranged alternately in both the first and second electrode layers in an interdigitation direction. For each group of electrodes all the fingers in said group are ...

Layered piezoelectric element and injection device using the same

There is provided a layered piezoelectric element having a high bending resistance and a high insulating characteristic, and an excellent displacement characteristic and an injection device using the piezoelectric element. The layered piezoelectric element includes a layered body (4) having a plurality of piezoelectric layers (1) layered via an internal electrode layer (2). At least a portion of a peripheral portion (31) located between two adjacent piezoelectric layers (1, 1) in the layer direction and located between a side end portion (2a) of the internal electrode layer (2) and a side surface (4a) of the layered body (4) is a scattered portion where a plurality of metal regions (3) are scattered via voids (21).