Metallization processing method of three-dimensional quartz-sensitive structure

The invention belongs to the field of processing methods and specifically relates to a metallization processing method of a three-dimensional quartz-sensitive structure. The metallization processing method of the three-dimensional quartz-sensitive structure is characterized by comprising the following steps: step 1: processing a surface electrode; and step 2: processing side electrodes and the surface electrode in a non-equal height structure. The metallization processing method has the following significant effects: (1) realizing the processing of three types of combined electrodes, including the surface electrode, the side electrodes and the surface electrode in the non-equal height structure; (2) enabling the dimensional precision of the surface electrode to be high and be controlled within plus or minus 1 mu m, simultaneously being good in compatibility with other processes and being easy to process; (3) being applied in batch production of quartz micro-devices; and (4) processingthe ...

Method for machining micro-mechanical quartz tuning fork gyro sensitive structure

The invention belongs to the field of quartz tuning fork gyro machining, and in particular relates to a method for machining a micro-mechanical quartz tuning fork gyro sensitive structure. The method is characterized in that: the machining method can realize high-accuracy three-dimensional quartz structure machining; the tuning fork thickness error is controlled within +/- 0.5mu m and the plane dimension accuracy error can be controlled within +/- 1mu m; high-accuracy three-dimensional complex electrode pattern processing can be realized; the distance from an electrode to an edge of the tuning fork three-dimensional quartz structure is 10 mu m; the relative position error with the surface of the tuning fork three-dimensional quartz structure can be controlled within +/- 1mu m; different-polarity electrodes can be formed on the same side surface and the machining error is controlled within +/- 5mu m; the precision finishing of a mass block can be realized; the thickness error of the mass ...

Low-moisture content packaging method for thin outline (TO) packaging structure

The invention relates to a low-moisture content packaging method for a thin outline (TO) packaging structure and a packaging assembly thereof, belonging to the technical field of air tightness packaging. The invention is characterized in that an aeration hole is designed on the base of a TO packaging assembly and is used for degassing and aeration treatment and the leakage rate detection of a sealing weld joint, and the design of the aeration hole changes the traditional packaging mode of the TO assembly. On the basis of the TO assembly with an aeration hole structure, the invention adopts a TO packaging assembly packaging method for achieving the packaging by two-time packaging. The invention solves the problem of low-moisture content packaging of the TO packaging assembly; the moisture content in a packaging body can be controlled within 500*10<-6>; the gas purity is controlled to be at least 99 percent; the pressure in the packaging body can be controlled; for low-vacuum packaged products ...

Temperature compensation test system and method for temperature compensation crystal oscillator

The invention provides a temperature compensation test system and method for a temperature compensation crystal oscillator. The system comprises a test upper computer; a frequency source; the test upper computer sets the temperature of the high and low temperature test box; the plurality of test circuit boards are located in the high and low temperature test box, and each test circuit board comprises an FPGA frequency measurement circuit, an ARM control circuit and a plurality of TCXO test circuits; the FPGA frequency measurement circuit is used for measuring the frequency of the temperature compensation crystal oscillator on each test circuit board according to a control instruction sent by the test upper computer; each TCXO test circuit is used for collecting the frequencies of the corresponding temperature compensation crystal oscillator at different temperatures; the ARM control circuit is used for determining the voltage-controlled voltage of each temperature-compensation crystal oscillator ...

Method for machining micro-mechanical quartz tuning fork gyro sensitive structure

The invention belongs to the field of quartz tuning fork gyro machining, and in particular relates to a method for machining a micro-mechanical quartz tuning fork gyro sensitive structure. The method is characterized in that: the machining method can realize high-accuracy three-dimensional quartz structure machining; the tuning fork thickness error is controlled within +/- 0.5mu m and the plane dimension accuracy error can be controlled within +/- 1mu m; high-accuracy three-dimensional complex electrode pattern processing can be realized; the distance from an electrode to an edge of the tuning fork three-dimensional quartz structure is 10 mu m; the relative position error with the surface of the tuning fork three-dimensional quartz structure can be controlled within +/- 1mu m; different-polarity electrodes can be formed on the same side surface and the machining error is controlled within +/- 5mu m; the precision finishing of a mass block can be realized; the thickness error of the mass ...

A BOG condensate recovery system for filling car system

The utility model discloses a BOG condensate recovery system for filling car system, including LNG storage tank (1), BOG condensation recoverer (2), liquid nitrogen storage tank (3) and a plurality of tank wagon (4), the top of every tank wagon (4) is provided with BOG and draws forth the branch pipe, BOG draws forth the lateral duct and crosses the heat source channel import of BOG fairlead (5) connecting BOG condensation recoverer (2), the heat source channel export of BOG condensation recoverer (2) is through tube coupling LNG storage tank (1), the fluid -discharge tube of tube coupling liquid nitrogen storage tank (3) is passed through in the cold source channel import of BOG condensation recoverer (2), the cold source channel exit linkage nitrogen gas blow -down pipe of BOG condensation recoverer (2), liquid nitrogen storage tank (3) is connected to the nitrogen gas blow -down pipe. The beneficial effects of the utility model are that: the disposable cost reduction that drops into ...

Diaphragm of capacitive vacuum gauge and capacitive vacuum gauge

The invention provides a diaphragm of a capacitive vacuum gauge and the capacitive vacuum gauge thereof, the diaphragm comprises a diaphragm layer, an anti-etching layer and a conductive layer, the diaphragm layer is used for dividing the internal space of the vacuum gauge into a vacuum space and a measured space, and the diaphragm layer is made of a quartz material; the anti-etching layer is arranged at one end, far away from the fixed electrode, of the diaphragm layer; and the conductive layer is arranged at one end, close to the fixed electrode, of the diaphragm layer and is used for being electrically connected with an electrode column of the vacuum gauge. According to the vacuum gauge, the diaphragm layer made of the quartz material is used as the diaphragm, and the anti-etching layer is arranged at one end of the diaphragm layer, which is positioned in the measured space, so that the anti-etching property or the anti-corrosion property of the vacuum gauge is effectively improved, ...

Application program and system parameter control method and device applied to sensor

The invention provides an application program and system parameter control method and device applied to a sensor. The method comprises the steps that a target application program is determined according to system parameters; the system parameters are stored in a first area of an embedded memory; the application program is stored in a second area of the embedded memory; and loading the system parameters, and running the target application program. According to the method, the system parameters and the application programs are stored in the partitioned mode, then the target application program is selected from the stored application programs through the stored system parameters, the independent application programs or the system parameters in the chip can be changed, and flexible control over the system parameters and the application programs in the chip is achieved.

Quartz vibrating beam accelerometer

The invention relates to the technical field of accelerometers, and provides a quartz vibrating beam accelerometer. The quartz vibrating beam accelerometer comprises a pendulum assembly mechanism; the pendulum assembly mechanism comprises a rigid frame, a flexible beam and a mass pendulum which are connected in sequence; the rigid frame and the mass pendulum are respectively fixed on the vibrating beam mechanism; and the vibration reduction mechanism comprises multiple stages of vibration reduction structures which are sequentially connected, and one end of the rigid frame is connected with the multiple stages of vibration reduction structures. According to the quartz vibrating beam accelerometer provided by the invention, the vibration reduction mechanism is connected with the rigid frame, mechanical isolation is carried out on external input impact through a stress isolation mode, external instantaneous impact force is attenuated step by step, the influence of external vibration or impact ...

Capacitive vacuum gauge

The invention provides a capacitive vacuum gauge, and relates to the technical field of vacuum gauges.The capacitive vacuum gauge comprises an outer shell, an inner shell, a differential circuit, an upper cover, a lower gauge body and a quartz crystal diaphragm, and the quartz crystal diaphragm is arranged in a second cavity and divides the second cavity into a pressure reference cavity and a test pressure cavity; at least one side of the quartz crystal diaphragm is provided with a conductive layer, and the flatness tolerance of the quartz crystal diaphragm is not greater than 5mm; the interior of the pressure reference cavity is vacuum and is internally provided with a capacitance electrode. The quartz crystal material which has higher flatness and is not easy to deform in the sealing process is used as the diaphragm, so that the accuracy of the measurement result of the vacuum gauge is ensured; compared with a ceramic thin film and a metal thin film with the same thickness, the quartz ...

Digital quartz crystal temperature sensor and temperature detection method

The invention provides a digital quartz crystal temperature sensor and a temperature detection method. The digital quartz crystal temperature sensor comprises a quartz resonator, a signal amplification circuit and a controller, the signal amplification circuit is used for performing signal conversion on a response signal output by the quartz resonator and then transmitting the response signal to the controller; the controller comprises an analog-to-digital conversion module, a data processing module, an oscillating circuit and a digital-to-analog conversion module which are connected in sequence; the oscillating circuit is used for outputting a driving signal to the digital-to-analog conversion module and the data processing module; the data processing module is used for demodulating the response signal based on the driving signal to obtain a demodulated signal, and compensating the response signal based on the demodulated signal; the processor is also used for determining a target frequency ...

Crash sensor

The invention relates to the technical field of sensors, and provides a crash sensor, which comprises a quartz tuning fork movement and a signal analysis output circuit, the signal analysis output circuit comprises an acquisition module, a comparison module and an output module, and the acquisition module is used for acquiring electric charge quantity generated by the quartz tuning fork movement due to collision or impact and generating a voltage signal; the comparison module is used for comparing the voltage signal with a threshold voltage signal to generate a comparison result; the output module is used for being in communication connection with an execution component of the carrier, and the output module can generate an output signal according to the comparison result and output the output signal to the execution component so that the execution component can act. The detection of collision or impact of a carrier can be realized through the quartz tuning fork meter core with high sensitivity ...

'Digitalized position code' input method

A "Digitalized position code" input method for inputting numerals, letters, signs and Chinese characters on communication products or computer features that the letters and signs are divided into 3 lines on keyboard and their positions in each line are expressed by 10 numeral keys .Its advantages are small size of keyboard, and convenient use of numerals to search Chinese characters.

Quartz gyroscope digital circuit ADC/DAC synchronous acquisition system and method

The invention provides a quartz gyroscope digital circuit ADC/DAC synchronous acquisition system and a quartz gyroscope digital circuit ADC/DAC synchronous acquisition method. The first timer starts to work under the triggering of the microprocessor and generates two paths of complementary PWM (Pulse Width Modulation) signals, and one path of complementary PWM signal is used for controlling a built-in ADC (Analog to Digital Converter) of the microprocessor to collect an amplified and modulated displacement signal on a tuning fork driving end of the quartz gyroscope; the plug-in ADC is used for collecting a displacement signal amplified and modulated at the tuning fork detection end of the quartz gyroscope under the control of the other path of complementary PWM signal; and the second timer starts to work under the triggering of the first timer, and the built-in DAC is started to output a driving signal to the tuning fork driving end under the control of the microprocessor. According to ...

Quartz tuning fork gyroscope

The invention provides a quartz tuning fork gyroscope. The quartz tuning fork gyroscope comprises a tuning fork structure, a first cover plate and a second cover plate, the tuning fork structure is clamped between the first cover plate and the second cover plate and comprises a tuning fork body and an outer frame, and the tuning fork body is arranged in the outer frame; the tuning fork body comprises a pair of driving parts, a pair of detection parts, a connecting beam and a coupling beam, one end of the coupling beam is connected with the pair of driving parts, the other end of the coupling beam is connected with the pair of detection parts, and the tuning fork body is connected with the outer frame through the connecting beam; the detection part comprises a detection interdigital finger and a detection hammer head connected with the detection interdigital finger; the detection interdigitals are provided with opposite first opposite surfaces, the first opposite surfaces are provided with ...

Quartz gyroscope orthogonal coupling error suppression method and system

The invention provides a quartz gyroscope orthogonal coupling error suppression method and system, and the method comprises the steps: generating a first signal according to an orthogonal component representing an orthogonal coupling error of a quartz gyroscope, the amplitude of the first signal is controlled by the orthogonal component, and the first signal has the same frequency as a driving signal of the quartz gyroscope; the driving signal is generated by a digital control oscillator; according to the first signal, a cancellation signal is generated, the cancellation signal is a signal which is equal to an orthogonal coupling error signal in amplitude and opposite to the orthogonal coupling error signal in polarity, the orthogonal coupling error signal is collected by a detection end of the quartz gyroscope, and the detection end is connected with the digital control oscillator; the cross-coupling error signal is suppressed based on the cancellation signal. According to the method, ...

Thin-film capacitive vacuum gauge

The invention relates to the technical field of vacuum gauges, and provides a thin-film capacitive vacuum gauge, which comprises a shell; a stress release structure; the electrode plate is arranged in the shell, and the electrode plate is connected with the shell through a stress release structure and divides the shell into a reference cavity and a process cavity; and the elastic film is arranged in the process cavity and is connected with the electrode plate to form a closed cavity. According to the thin-film capacitive vacuum gauge provided by the invention, the stress release structure is arranged between the shell and the electrode polar plate and is used for releasing the stress conducted to the electrode polar plate and the elastic thin film by the shell and reducing and even eliminating the conduction of the stress to the elastic thin film, so that the warping phenomenon of the elastic thin film caused by the stress is reduced; the vacuum degree measurement deviation is reduced, ...

Liquefied natural gas (LNG) station with multifunctional air temperature type heating device

The invention discloses a liquefied natural gas (LNG) station with a multifunctional air temperature type heating device. The LNG station comprises a pipeline system consisting of pipelines, a tank truck connected with the pipeline system, a low-temperature immersed pump 3, an LNG storage tank 1, an LNG dispenser 4 and an energy action group (EAG) reheater 5. Due to the installation of the pipeline system, one multifunctional air temperature type heating device can be used for pressurizing the tank truck (without a pump) by unloading, pressurizing the LNG storage tank and adjusting the pressure of the LNGT storage tank, and the multifunctional air temperature type heating device and the EAG reheater are combined into a whole; therefore, the number of equipment, the space and the cost investment of the LNG station are reduced and the LNG station is easy to operate.

LNG (liquefied natural gas) pump-free air-entrapping method with BOG (boil off gas) recycling function and LNG pump-free air-entrapping device

The invention discloses an LNG (liquefied natural gas) pump-free air-entrapping method with a BOG (boil off gas) recycling function and an LNG pump-free air-entrapping device. The LNG air-entrapping device with the pump-free air-entrapping and BOG recycling functions comprises an LNG air-entrapping machine (6), a tank car (1), an LNG storage tank (2), a pressurizer (3), a liquid nitrogen cold trap (5) and a liquid nitrogen storage tank (4). As the LNG air-entrapping device is a pump-free device, the operating and maintaining costs are low, and the safety is high. The LNG pump-free air-entrapping method is in a pump-free process during the unloading and liquid adding process, so that the power consumption is saved; and meanwhile, BOG is not diffused during unloading by the method, and the BOG in the tank car during unloading and the BOG in a vehicle-mounted steel cylinder in liquid adding process are automatically condensed and recycled, so that the energy loss is reduced.

Quartz gyroscope circuit

The invention provides a quartz gyroscope circuit. The quartz gyroscope circuit comprises a closed-loop driving loop, the closed-loop driving loop comprises a driving interdigital, a driving end circuit and a controller; the driving end circuit is used for converting a driving response charge signal generated by the driving interdigital into a driving response voltage signal and transmitting the driving response voltage signal to the controller; the controller is used for generating an original digital reference signal, adjusting the frequency and amplitude of the original digital reference signal based on the driving response voltage signal, generating a driving voltage signal, and transmitting the driving voltage signal to the driving end circuit; and the driving end circuit is used for amplifying the driving voltage signal and acting the amplified driving voltage signal on the driving interdigitals, so that the oscillation frequency of the driving interdigitals is in the resonant frequency ...

Mechanical pressurization first-aid repair device

The invention relates to the technical field of pipeline repair, and discloses a mechanical pressurization first-aid repair device which comprises a supporting mechanism, an ejector rod and a blocking piece used for blocking the inner wall and the outer wall of a pipeline at a pipeline crack, the supporting mechanism comprises a transverse plate, connecting rods and a supporting part used for being attached to the pipeline, and the connecting rods are symmetrically arranged; the connecting rod penetrates through the transverse plate and is in threaded connection with the transverse plate, and the connecting rod penetrates through the supporting part and is connected with the supporting part; the ejector rod penetrates through the transverse plate to be connected with the plugging piece. A pipeline crack is quickly blocked through the supporting mechanism and the blocking piece, and the cost is low; welding is avoided, and follow-up pipeline repairing treatment is facilitated; double-layer ...

Quartz gyroscope digital circuit phase compensation method and system

The invention provides a quartz gyroscope digital circuit phase compensation method and a quartz gyroscope digital circuit phase compensation system. The method comprises the following steps: generating a same-direction signal and an orthogonal signal through a digital control oscillator in a microprocessor; using the same-direction signal as a reference signal to perform same-direction demodulation on a driving displacement signal output by an ADC in the microprocessor, and using the orthogonal signal as a reference signal to perform orthogonal demodulation on the driving displacement signal; according to the delay of a driving loop in a digital circuit of the quartz gyroscope, performing angle rotation on the driving displacement signal subjected to the same-direction demodulation and the orthogonal demodulation to obtain a new same-direction signal and a new orthogonal signal. According to the invention, phase compensation is realized, the phase stability of a driving loop is ensured ...

Low-moisture content packaging method for thin outline (TO) packaging structure and packaging assembly thereof

The invention relates to a low-moisture content packaging method for a thin outline (TO) packaging structure and a packaging assembly thereof, belonging to the technical field of air tightness packaging. The invention is characterized in that an aeration hole is designed on the base of a TO packaging assembly and is used for degassing and aeration treatment and the leakage rate detection of a sealing weld joint, and the design of the aeration hole changes the traditional packaging mode of the TO assembly. On the basis of the TO assembly with an aeration hole structure, the invention adopts a TO packaging assembly packaging method for achieving the packaging by two-time packaging. The invention solves the problem of low-moisture content packaging of the TO packaging assembly; the moisture content in a packaging body can be controlled within 500*10<-6>; the gas purity is controlled to be at least 99 percent; the pressure in the packaging body can be controlled; for low-vacuum packaged products ...

Metallization processing method of three-dimensional quartz-sensitive structure