Touch Substrate, Manufacturing and Driving Method Thereof, and Touch Display Device

Реферат: A touch substrate, a manufacturing and driving method thereof and a touch display device are provided. The touch substrate includes: a base substrate and a force sensor being located on the base substrate and including at least one force sensing unit, the force sensing unit including a plurality of extension parts and at least one connection part, the plurality of extension parts extending along a first direction X, the plurality of extension parts being sequentially connected by the at least one connection part. The touch substrate can increase the change in resistance caused by the touch force so as to facilitate detection of the change in touch force by the detection chip.

Заявка: 1. A touch substrate , comprising:a base substrate; anda force sensor, located on the base substrate and comprising at least one force sensing unit, the force sensing unit comprising a plurality of extension parts and at least one connection part, the plurality of extension parts extending along a first direction, the plurality of extension parts being sequentially connected by the at least one connection part.2. The touch substrate according to claim 1 , wherein connection parts adjacent to each other in a second direction are located on different sides of a same surface of the base substrate and respectively connected with two ends of a same extension part; and the second direction is perpendicular to the first direction.3. The touch substrate according to claim 1 , wherein the force sensing unit comprises a line-shaped part with a shape of a square waveform or a zigzag.4. The touch substrate according to claim 2 , wherein the force sensing unit further comprises a protection part claim 2 , and the protection part is directly connected with an end of one of two adjacent connection parts claim 2 , and spaced apart from the other of the two adjacent connection parts claim 2 , and the protection part is located on a side of the force sensing unit away from a bonding area.5. The touch substrate according to claim 1 , further comprising a touch sensor claim 1 , wherein the touch sensor is located on the base substrate and comprises a plurality of touch sensing units; the touch sensor and the force sensor are located in a same layer; and each of the extension parts is located between adjacent touch sensing units.6. The touch substrate according to claim 5 , further comprising a first detection chip and a second detection chip claim 5 , wherein the first detection chip is configured to detect a change in resistance value or a change in voltage value of the force sensor so as to detect a magnitude of a touch force; and the second detection chip is configured to detect a change in capacitance value of the touch sensor so as to detect a touch position.7. The touch substrate according to claim 6 , wherein the first detection chip and the second detection chip are an integral structure; and wires of the plurality of touch sensing units and a wire of the force sensing unit are connected with the same detection chip.8. The touch substrate according to claim 5 , further comprising:a processor;a memory; anda computer program instruction stored in the memory, the computer program instruction being executed by the processor to perform following steps:extracting a touch position detected by the touch sensor and a force signal detected by the force sensor;obtaining a corrected force signal by compensating the force signal according to the touch position, so as to compensate the force signal when different positions are pressed, and output a same force signal when different positions of the force sensor are pressed by a same touch force; andoutputting the corrected force signal.9. A manufacturing method of a touch substrate claim 5 , comprising:forming a force sensor on a base substrate, the force sensor comprising at least one force sensing unit, the force sensing unit comprising a plurality of extension parts and at least one connection part, the plurality of extension parts extending along a first direction, the plurality of extension parts being sequentially connected by the at least one connection part.10. The manufacturing method of the touch substrate according to claim 9 , wherein connection parts adjacent to each other in a second direction are located on different sides of a same surface of the base substrate and respectively connected with two ends of a same extension part claim 9 , and the second direction is perpendicular to the first direction.11. The manufacturing method of the touch substrate according to claim 10 , further comprising forming a protection part of the force sensing unit claim 10 , wherein the protection part is electrically connected with one of two adjacent connection parts located on the same side of the base substrate claim 10 , and insulated from the other of the two adjacent connection parts located on the same side of the base substrate claim 10 , and the protection part is located on a side away from a bonding area.12. The manufacturing method of the touch substrate according to claim 9 , further comprising forming a touch sensor at the same time during forming the force sensor claim 9 , wherein the touch sensor comprises a plurality of touch sensing units; and each of the extension parts is formed between adjacent touch sensing units.13. A driving method of the touch substrate according to claim 5 , comprising:providing a driving signal to the force sensor; andoutputting a force signal according to a change in voltage difference on two ends of the force sensing unit to determine a magnitude of a touch forcebefore outputting the force signal, the method further comprising: compensating the force signal, wherein compensating the force signal comprises: compensating the force signal when different positions are pressed so as to output a same force signal when different positions of the force sensor are pressed by a same touch force.14. The driving method of the touch substrate according to claim 5 ,driving the touch sensor to detect a touch position at the same time during driving the force sensor to detect a magnitude of a touch force.15. The driving method of the touch substrate according to claim 5 , driving the force sensor and the touch sensor in a time division manner claim 5 , wherein the force sensor is grounded when the touch sensor is driven to detect a touch position.16. A touch display device claim 1 , comprising the touch substrate according to .17. The touch substrate according to claim 2 , wherein the force sensing unit further comprises a protection part claim 2 , the protection part is located on an edge of the force sensing unit away from a bonding area claim 2 , the protection part is directly connected with one of two adjacent connection parts claim 2 , and spaced apart from the other of the two adjacent connection parts.18. The touch substrate according to claim 17 , wherein an opening is provided between the protection part and the other of the two adjacent connection parts.19. The touch substrate according to claim 1 , further comprising a force signal compensation unit configured to output a same force signal when different positions of the force sensor are pressed by a same touch force.20. The touch substrate according to claim 6 , further comprising a touch position fitting unit configured to obtain an actual touch position by a fitting method according to the touch position outputted by the touch sensor.

Описание: The application claims priority to the Chinese patent application No. 201710296329.0, filed on Apr. 28, 2017, the entire disclosure of which is incorporated herein by reference as part of the present application.At least one embodiment of the present disclosure relates to a touch substrate, a manufacturing method thereof and a touch display device.The current 3D touch (force touch) brought by iPhone is more and more widely applied, realizes more touch functions by detecting a magnitude of a touch force, and meanwhile, outputs different levels of force feedbacks by determining a magnitude of a touch force, gives consumers a better touch experience. It can be predicted that 3D touch will be more and more widely applied on consumer electronics.At least one embodiment of the present disclosure relates to a touch substrate, a manufacturing and driving method thereof, and a touch display device, which can increase a change in resistance value caused by a touch force so as to facilitate a detection of a change in touch force by a detection chip.At least one embodiment of the present disclosure provides a touch substrate, comprising:a base substrate; anda force sensor, located on the base substrate and comprising at least one force sensing unit, the force sensing unit comprising a plurality of extension parts and at least one connection part, the plurality of extension parts extending along a first direction, the plurality of extension parts being sequentially connected by the at least one connection part.At least one embodiment of the present disclosure further provides a manufacturing method of a touch substrate, comprising:forming a force sensor on a base substrate, the force sensor comprising at least one force sensing unit, the force sensing unit comprising a plurality of extension parts and at least one connection part, the plurality of extension parts extending along a first direction, the plurality of extension parts being sequentially connected by the at least one connection part.At least one embodiment of the present disclosure provides a driving method of any one of the touch substrates as mentioned above, comprising:providing a driving signal to the force sensor; andoutputting a force signal according to a change in voltage difference on two ends of the force sensing unit to determine a magnitude of a touch force, the change in voltage difference on two ends of the force sensing unit caused by a change in resistance value of the force sensing unit under an action of an external force.At least one embodiment of the present disclosure further provides a touch display device, comprising any one of the touch substrates as mentioned above.In order to make objects, technical details and advantages of the embodiments of the disclosure apparent, the technical solutions of the embodiments will be described in a clearly and fully understandable way in connection with the drawings related to the embodiments of the disclosure. Apparently, the described embodiments are just a part but not all of the embodiments of the disclosure. Based on the described embodiments herein, those skilled in the art can obtain other embodiment(s), without any inventive work, which should be within the scope of the disclosure.Unless otherwise defined, all the technical and scientific terms used herein have the same meanings as commonly understood by one of ordinary skill in the art to which the present disclosure belongs. The terms “first,” “second,” etc., which are used in the disclosure, are not intended to indicate any sequence, amount or importance, but distinguish various components. Also, the terms “comprise,” “comprising,” “include,” “including,” etc., are intended to specify that the elements or the objects stated before these terms encompass the elements or the objects and equivalents thereof listed after these terms, but do not preclude the other elements or objects. The phrases “connect”, “connected”, etc., are not intended to limit to a physical connection or mechanical connection, but may include an electrical connection, directly or indirectly. “On,” “under,” “right,” “left” and the like are only used to indicate relative position relationship, and when the position of the object which is described is changed, the relative position relationship may be changed accordingly.The implementation of the force touch function of iPhone requires an additional force sensor, a driver IC thereof and a peripheral circuit. Thus, not only the cost is increased but also the thickness is increased, which is against the will of consumers.As illustrated in , a touch display device includes an array substrate and an opposing substrate which is cell-assembled with the array substrate. A liquid crystal cell is formed by the array substrate and the opposing substrate , and liquid crystals (not illustrated in the figure) can be filled into the liquid crystal cell. A force sensor is located on a force touch carrier material , and a protective layer is located on a side of the force touch carrier material away from the force sensor . The force sensor is connected with a first detection chip by a first flexible printed circuit (FPC). A touch sensor includes a first sensor and a second sensor . One of the first sensor and the second sensor is a touch driving sensor (Tx) and the other of the first sensor and the second sensor is a touch sensing sensor (Rx). The first sensor and the second sensor are connected with a second detection chip by a second FPC . The touch display device further includes an upper polarizer and a lower polarizer . The force touch carrier material can include a base substrate made of glass material or polyethylene terephthalate (PET). A driver IC can also be located on the array substrate .In the touch display device as illustrated in , the touch sensor and the force sensor of the touch display device are separately designed, so the thickness of the touch display device can be increased and the assembly and the manufacturing process can also be more complex.The base substrate is deformed under an action of a touch force, so the resistance of the force sensor would change. Generally, the change in resistance caused by deformation due to an external force is small.At least one embodiment of the present disclosure provides a touch substrate, which, as illustrated in , includes:a base substrate , a material of the base substrate, for example, including glass material or PET material; anda force sensor , located on the base substrate and including at least one force sensing unit , the force sensing unit including a plurality of extension parts and at least one connection part , the plurality of extension parts extending along a first direction X, the plurality of extension parts being sequentially connected by the at least one connection part . At least one includes one or more. A plurality includes at least two.In the touch substrate provided by at least one embodiment of the present disclosure, as the force sensing unit includes the plurality of extension parts extending along the first direction X and the plurality of extension parts are sequentially connected through one or more connection parts , the number of the extension parts of the force sensing unit in a unit area can be increased, and the change in resistance caused by the touch force can be increased to facilitate detection of a change in touch force by a detection chip.In the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the force sensing unit includes a line-shaped part. For example, the line-shaped part includes a square waveform line-shaped part. The plurality of extension parts extending along the first direction X are connected into a line with a shape of a square waveform by the plurality of connection parts . For example, the force sensing unit includes a “z”-shaped part. For example, strip electrodes can be adopted to form the line-shaped part.For example, two adjacent extension parts are connected with each other by one connection part , and n extension parts can be sequentially connected by n−1 connection parts .Description is given in by taking the case that the force sensor includes one force sensing unit as an example. The force sensor can also include a plurality of force sensing units . When the force sensor includes the plurality of force sensing units , the effect and the accuracy of the force touch can be improved.According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the connection parts adjacent to each other in a second direction Y are located on different sides (different ends) and of the same surface of the base substrate , and respectively connected with two ends of the same extension part . The second direction Y is perpendicular to the first direction X.As illustrated in , the connection part includes a first connection part located on a first side of the base substrate and a second connection part located on a second side of the base substrate , and the first side and the second side are respectively located on both sides of the base substrate . For example, the first side can be close to a side of the base substrate ; the second side can be close to the other side of the base substrate ; and the two sides are opposite to each other. The first connection part and the second connection part adjacent to each other in the second direction Y are respectively connected with two ends of the same extension part .According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the force sensing unit further includes a protection part . The protection part is electrically connected with one of two adjacent connection parts located on the same side of the base substrate , and insulated from the other of the two adjacent connection parts located on the same side of the base substrate . The protection part is located on a side of the force sensing unit away from a bonding area . Thus, when the force sensor and other structures (for example, formed in the same layer with Tx and Rx) are formed in the same layer, the design of a small opening on the first side of the base substrate is favorable for the Tx and Rx located internal to be protected by the force sensor. For example, the protection part can be formed in the same layer or different layers with the extension parts and/or the connection parts .According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the touch substrate further includes a first detection chip which is configured to detect a change in resistance value or a change in voltage value of the force sensor so as to detect a magnitude of a touch force. Two ends and of each force sensing unit in the force sensor are respectively connected with two ends of the first detection chip by wires . A change in voltage value caused by a change in resistance is detected by the first detection chip , so as to generate a signal of a magnitude of a touch force and provide the signal of the magnitude of the touch force to a system terminal. A change in resistance value of the force sensing unit can result in a change in voltage value of two ends of the force sensing unit, and a magnitude of a touch force can be detected by detecting a change in voltage value caused by a change in resistance value.For example, as illustrated in , the extension part can have a zigzag shape, so as to further improve the touch effect and the touch accuracy. For example, as illustrated in , the connection part can also have a zigzag shape, so as to further improve the touch effect and the touch accuracy. For example, in order to improve the blanking effect of the touch substrate, the protection part can also have a zigzag shape.The connection part can also be in other forms. For example, as illustrated in , the connection part can also be connected with ends on different sides of adjacent extension parts , so that the plurality of extension parts can be sequentially connected end to end to form one line. For example, the force sensing unit can include a line-shaped part. For example, as illustrated in , the force sensing unit includes a zigzag line-shaped part. The force sensing unit as illustrated in can further improve the touch accuracy and the touch effect. For example, two ends of the line-shaped part of the force sensing unit are respectively connected with two ends of the first detection chip .As illustrated in , the touch substrate provided by an embodiment of the present disclosure further includes a touch sensor . The touch sensor can be configured to detect a pressing (touch) position. The touch sensor is located on the base substrate and includes a plurality of touch sensing units . The plurality of touch sensing units are connected with a second detection chip by respective wires . The second detection chip is configured to detect a change in capacitance value of the touch sensor , so as to detect a touch position. The touch sensing unit includes a first touch sensing unit and a second touch sensing unit . One of the first touch sensing unit and the second touch sensing unit is a touch driving unit, and the other of the first touch sensing unit and the second touch sensing unit is a touch sensing unit. The touch driving unit can be configured to receive a touch driving signal, and the touch sensing unit can be configured to output a touch sensing signal. Thus, the pressing (touch) position can be detected. For example, each row of second touch sensing units in a horizontal direction can be electrically connected with each other or applied with the same signal, and can be taken as touch driving units (Tx). The first touch sensing units in a vertical direction can be taken as touch sensing units (Rx). For example, the touch driving units are insulated from each other, and the touch sensing units are insulated from each other. As a node of each touch sensor must connect Tx and Rx to a bonding area at the edge by wires respectively from the inside of the touch substrate, the wires will occupy partial visible area, so as to produce a touch blind area . The touch blind area can be as illustrated by a dotted box in .According to the touch substrate provided by an embodiment of the present disclosure, as the force sensor adopts the means of detecting a change in resistance value and does not interfere with the operation of the touch sensor, time-division driving can be not adopted, so the report rate of the touch sensor can be improved. Of course, a time-division driving manner can also be adopted. In the case of scanning of the touch sensor, the force sensor can be grounded (GND attribute).According to the touch substrate provided by an embodiment of the present disclosure, in order to save the process, as illustrated in , the touch sensor and the force sensor can be located in the same layer, and each of the extension parts is located between adjacent touch sensing units . For example, the force sensor and the touch sensor are manufactured on a surface of the base substrate , so one base substrate integrates functional layers such as the touch sensor and the force sensor. The base substrate , for example, can include a glass substrate. For example, as illustrated in , in a direction perpendicular to the base substrate , the force sensing units and the touch sensing units are not overlapped. For example, the touch sensor can be made from a transparent conductive material, and the force sensor can be made from a transparent conductive material. For example, the transparent conductive material includes but not limited to indium tin oxide (ITO). The force sensor adopts any one of the structure as illustrated in , which is favorable for the arrangement of the touch sensor and the force sensor in the same layer.The arrangement of the touch sensor and the force sensor in the same layer can save a carrier material (a base substrate) required for the manufacturing of the force sensor, integrate products, allow the products to have higher physical strength, and meanwhile, can reduce the space required by the force sensor, and reduce the thickness of a terminal product.In a case that the touch sensor and the force sensor are located in the same layer, the extension part of the force sensor is disposed between Tx and Rx; the second detection chip transmit a driving signal to Tx required by the touch sensor; Rx is responsible for receiving and sending a signal of the touch sensor; and Fx is configured to collect a force signal generated by an action of touch force.According to the touch substrate provided by an embodiment of the present disclosure, due to adoption of the two-in-one (located in the same layer) design of the force sensor and the touch sensor, the any-pen function can be easily realized, and original handwriting can be realized merely by one common conductive pen. Of course, finger touch can also be adopted.For example, the wires of the touch sensing units and the wires of the force sensing units can be located in the same layer with the touch sensor and the force sensor .According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the force sensor includes a plurality of force sensing units . Two force sensing units are illustrated in , but the number of the force sensing units can be more. Respective force sensing units can be sequentially located along the same direction. For example, the plurality of force sensing units can be sequentially located along a second direction Y opposite to the extension direction (the first direction X) of the extension parts thereof.According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the force sensing units are all connected with the first detection chip by respective wires. For example, both the first force sensing unit and the second force sensing unit are connected with the first detection chip by respective wires.According to the calculation formula of conductor resistance, R=ρL/s, in which R refers to resistance; ρ refers to an electric resistivity of a conductor; L refers to a length of the conductor; and s refers to a cross-sectional area of the conductor. A touch force causes deformation of the touch substrate, and increase of a length of the force sensing unit , resulting in an increase in resistance.As for a large-size touch substrate, the force sensors can be divided into 2 group or more. The driving voltage (VDDIN) can be reduced at the same time during taking into account the sensitivity (ΔR).In the case of calculation by adoption of one group, supposing the change in resistance produced by the force sensing unit after being applied by a touch force is ΔR, and before being applied by a touch force, a resistance of the first force sensing unit is Rf and a resistance of the second force sensing unit is Rf:According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the touch substrate can be deformed by applying touch force to the touch sensor; the resistance of the touch sensing units is increased due to deformation; the first detection chip determines and classifies a magnitude of a touch force and outputs information containing a magnitude of a touch force to the system terminal; and the system terminal provides a response corresponding to a level of touch force. Thus, the magnitude of the touch force can be detected.In the embodiment of the present disclosure, description is given by taking the case that one end of the force sensing unit is grounded as an example, the reference voltage can also be in other values, and no limitation will be given herein. Two ends of the force sensing unit can be connected with different pins of the first detection chip respectively, so as to realize signal transmission. For example, one end and the other end of the line-shaped part of the force sensing unit are connected with different pins of the first detection chip respectively, so as to obtain the change in voltage difference of the force sensing unit when being pressed by an external force.According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the first detection chip and the second detection chip are an integral structure, and the wires of the plurality of touch sensing units and the wires of the force sensing units are connected with the same detection chip . Thus, the touch product has simpler structure; the product structure and the manufacturing process are significantly simplified; and then the efficiency can be improved. For clarity of illustration, the connecting relationships between the touch sensing units and the detection chip are not completely illustrated in .As illustrated in , the touch sensing unit can adopt an abnormal structure, so as to increase the coupling area and be favorable for improving the touch effect. illustrates a first touch driving unit , a second touch driving unit , a third touch driving unit , a first touch sensing unit , a second touch sensing unit , a third touch sensing unit and a grounded wire .According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , each of the extension parts is located between adjacent touch sensing units , extending from the first side of the base substrate to the second side, and extending from a side of the base substrate to the other side.According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , in order to eliminate static electricity, a grounded wire can be further located on a periphery of the force sensor .As illustrated in , a part (connection part) connected with adjacent extension parts can be manufactured by the same process with the touch sensor , and can also be formed by an external bonding FPC.If the force sensing function is not required, the force sensing unit can be converted into GND attribute by an FPC at the bonding end, and the force sensor is directly converted into a common touch sensor without changing a mask of the force sensor, so as to realize the double-duty design of the force sensor.By adoption of the touch sensor, force signal output can be inconsistent when the same force is adopted to press (touch) different positions of the touch substrate.As illustrated in , under the condition of a complete device, when the same force is adopted to press a periphery of a screen and a center of the screen, as the deformation quantity caused at different positions is different, the force signal detected by the force sensor may not reflect a magnitude of a touch force accurately. Thus, a mechanism, by which different positions have the same force signal feedback under the same force, is required.A manipulator is adopted to respectively press the touch substrate by the same force, and force signals detected by the force sensor, when different positions of the screen are pressed (e.g., 9-point test), are recorded to determine the compensation factor of each point. Subsequently, the first detection chip performs position compensation on the force signal in the first detection chip according to actual touch position, and the actual touch position can be detected by the touch sensor .Supposing that the force signals outputted when the above 9 points are pressed by the same force are as illustrated in the following table 1:And then corresponding compensation factor of a node of each touch sensor in the case of being pressed by a force is estimated.For example, the flow of the force signal compensation mechanism is as follows:(1) Finger pressing.(2) Detecting a touch position by the touch sensor.(3) Detecting a magnitude of a touch force by the force sensor and outputting a force signal (first force signal).(4) Making compensation settings on the force signal (the first force signal) by the first detection chip according to the touch position, and outputting an accurate force signal (compensated force signal, corrected force signal, a second force signal).(5) Outputting a report point and the corrected force value by the system according to a coordinate and the corrected force signal outputted by the first detection chip.For example, the touch substrate can include a processor, a memory and a computer program instruction stored in the memory, so as to realize the force signal compensation mechanism. As illustrated in , the computer program instruction is executed by the processor to perform the following steps:extracting a touch position detected by the touch sensor and a force signal detected by the force sensor;obtaining a corrected force signal by compensating the force signal according to the touch position, in which the compensation method includes: compensating the force signal when different positions are pressed, so that same force signal can be outputted when different positions of the force sensor are pressed by the same force; andoutputting the corrected force signal.As illustrated in , in order to solve the problem of inconsistent force signal output when different positions are pressed by the same touch force, the touch substrate provided by an embodiment of the present disclosure further includes a force signal compensation unit . The force signal compensation unit is configured to compensate the force signal when different positions are pressed, so as to output the same force signal when different positions of the force sensor are pressed by the same touch force.There is a touch blind area in the case of single-layer touch (as illustrated in ). The touch blind area can be as illustrated in . An actual touch position (may be deviated from an actual coordinate, but within the range allowable by consumer experience) can be obtained by a fitting method according to a change in capacitance value of a capacitor node on the periphery of the touch position. At this point, the magnitude of the touch force at the touch position can also be corrected by the force signal compensation mechanism according to a fitted position (the actual touch position).When the touch blind area is pressed, an output position of the touch sensor is deviated from an actual position, resulting in inaccurate position output. For example, the output position of the touch sensor is deviated to the left, the right, the upper side or the lower side compared with the actual touch position.As illustrated in , in order to solve the problem of inaccurate position output caused by the deviation between the output position of the touch sensor and the actual position when the touch blind area is pressed, the touch substrate provided by an embodiment of the present disclosure further includes a touch position fitting unit . The touch position fitting unit is configured to obtain an actual touch position by a fitting method according to the touch position outputted by the touch sensor when the touch blind area of a visible area is pressed. For example, on this basis, the force signal compensation unit can also be adopted for compensation. As the actual touch position is obtained, the force signal output can be more accurate.According to the touch substrate provided by an embodiment of the present disclosure, as illustrated in , the force signal compensation unit and the touch position fitting unit can be respectively connected with a system terminal , so as to realize signal transmission. For example, the first detection chip and the second detection chip can also be respectively connected with the system terminal , so as to realize signal transmission. For example, the system terminal can include a processor .Of course, in the touch substrate provided by an embodiment of the present disclosure, the force signal compensation unit or the touch position fitting unit can also be not provided. No limitation will be given herein.At least one embodiment of the present disclosure provides a manufacturing method of a touch substrate, which includes:forming a force sensor on a base substrate , the force sensor including at least one force sensing unit , and the force sensing unit including a plurality of extension parts and at least one connection part , the plurality of extension parts extending along a first direction X, and the plurality of extension parts being sequentially connected by the at least one connection part .According to the manufacturing method of the touch substrate provided by an embodiment of the present disclosure, the connection parts adjacent to each other in a second direction Y are located on different sides of the base substrate and respectively connected with two ends of the same extension part , and the second direction Y is perpendicular to the first direction X.According to the manufacturing method of the touch substrate provided by an embodiment of the present disclosure, the force sensing unit further includes a protection part . The protection part is electrically connected with one of two adjacent connection parts located on the same side of the base substrate , and insulated from the other of the two adjacent connection parts located on the same side of the base substrate , and the protection part is located on a side of the force sensing unit away from a bonding area .The manufacturing method of the touch substrate provided by an embodiment of the present disclosure further includes forming a touch sensor on the base substrate . The touch sensor includes a plurality of touch sensing units . The touch sensor and the force sensor are located in the same layer. Each of the extension parts is located between adjacent touch sensing units .The manufacturing method of the touch substrate provided by an embodiment of the present disclosure further includes providing a first detection chip and a second detection chip . The first detection chip is configured to detect a change in resistance value or a change in voltage value of the force sensor , so as to detect a magnitude of a touch force. The second detection chip is configured to detect a change in capacitance value of the touch sensor , so as to detect a touch position.According to the manufacturing method of the touch substrate provided by an embodiment of the present disclosure, the first detection chip and the second detection chip are an integral structure, and wires of the plurality of touch sensing units and wires of the force sensing unit are connected with the same detection chip .The manufacturing method of the touch substrate provided by an embodiment of the present disclosure further includes providing a force signal compensation unit . The force signal compensation unit is configured to compensate a force signal when different positions are pressed, so as to output the same force touch signal when different positions of the force sensor are pressed by the same touch force.The manufacturing method of the touch substrate provided by an embodiment of the present disclosure further includes providing a touch position fitting unit . The touch position fitting unit is configured to obtain an actual touch position by a fit ting method according to the touch position outputted by the touch sensor when a touch blind area of a visible area is pressed.At least one embodiment of the present disclosure further provides a driving method of the touch substrate, which includes:providing a driving signal to the force sensor ; andoutputting a force signal according to a change in voltage difference on two ends of the force sensing unit to determine a magnitude of a touch force, the change in voltage difference on two ends of the force sensing unit caused by a change in resistance value of the force sensing unit under an action of an external force.According to the driving method of the touch substrate provided by an embodiment of the present disclosure, after acquiring the voltage difference change and before outputting the force signal, the driving method further includes compensating the force signal, wherein compensating the force signal comprises: compensating the force signal when different positions are pressed by outputting the same force signal when different positions of the force sensor are pressed by the same touch force.The driving method of the touch substrate provided by an embodiment of the present disclosure further includes providing a driving signal to the touch sensor , determining a touch position by detecting a change in capacitance value of the touch sensor .Before force signal compensation, the driving method of the touch substrate provided by an embodiment of the present disclosure further includes fitting the touch position, the touch substrate further includes a touch sensor which is configured to obtain the touch position; and fitting the touch position includes: obtaining an actual touch position by a fitting method according to the touch position outputted by the touch sensor when a touch blind area of a visible area is pressed.At least one embodiment of the present disclosure provides a touch display device, which includes any one of the foregoing touch substrates provided by the embodiments of the present disclosure.For example, the touch display device can be a liquid crystal display (LCD) device and can also be an organic light-emitting diode (OLED) display device. No limitation will be given herein.The places in the manufacturing method of the touch substrate and the driving method of the touch substrate, provided by the embodiment of the present disclosure, the same with or similar to those in the touch substrate provided by the embodiment of the present disclosure, can refer to each other. No further description will be given herein. In the embodiments of the present disclosure, the force sensing unit in the force sensor can be referred to as force electrode, and the touch sensing unit in the touch sensor can be referred to as touch electrode.In the embodiment of the present disclosure, “the same layer” refers to the forming of film layers with specific patterns by the same film forming process and the forming of layer structures by one patterning process via the same mask. According to different specific patterns, one patterning process can include multiple exposure, development or etching processes; the specific patterns in the formed layer structures can be continuous and can also be discontinuous; and these specific patterns can also have different heights or have different thicknesses.In the touch substrate and the manufacturing method thereof, provided by the embodiment of the present disclosure, if different structures formed in the same layer are overlapped, the electrical connection between two structures can be avoided by bridging means. That is to say, one structure is continuously formed in the layer and the other structure is broken at an overlap position, and broken parts are electrically connected with each other by a bridging part on the other layer. For example, as illustrated in , a wire of the touch sensing unit is divided into a first part and a second part at an overlap position with the connection part ; the connection part is insulated from a wire of the touch sensing unit by an insulating layer ; and the first part and the second part are electrically connected with each other by a conductive part . The conductive part is made from a conductive material. is just illustrative description, and the design at the overlap position is not limited to the structure as illustrated in . For example, an overlap position of a wire of a second touch driving unit and a first touch sensing unit in can adopt the structure as illustrated in , so that the wire of the second touch driving unit can be insulated from the first touch sensing unit .For example, in the embodiment of the present disclosure, wires located in a display region can be made from a transparent conductive material, and wires located on the outside of the display region can be made from metal or alloy.The touch substrate and/or touch display device provided by the embodiment of the present disclosure may further include one or more processors and one or more memories. The processor may process data signals and may include various computing architectures, for example, complex instruction set computer (CISC) architecture, reduced instruction set computer (RISC) architecture or one architecture for implementing multiple instruction set combinations. The memory may store instructions and/or data executed by the processor. The instructions and/or data may include codes and are configured to achieve some or all the functions of one or more portions (parts), units, or devices described in the embodiment of the present disclosure. For example, the memory includes a dynamic random access memory (DRAM), a static random access memory (SRAM), a flash memory, an optical memory or other memories known by those skilled in the art.In some embodiments of the present disclosure, the display device includes codes and programs stored in the memory. The processor may execute the codes and the programs so as to achieve some or all the functions of the portions (parts), units, or devices as described above.In some embodiments of the present disclosure, a unit such as force signal compensation unit or touch position fitting unit may be a hardware unit which is configured to achieve some or all the functions of the portions (parts), units, or devices as described above. For example, the portions (parts), or units may be a circuit board or a combination of a plurality of circuit boards and is configured to achieve the functions as described above. In the embodiments of the present disclosure, the one circuit board or the combination of the plurality of circuit boards may include: (1) one or more processors; (2) one or more non-transitory computer-readable memories connected with the processors; and (3) processor-executable firmware stored in the memories.For example, some or all of the functions of one or more units may be implemented in software, hardware, firmware, or any combination thereof.The following statements should be noted:(1) Unless otherwise defined, the same reference numeral refers to the same meaning in the embodiments of the disclosure and accompanying drawings.(2) The accompanying drawings involve only the structure(s) in connection with the embodiment(s) of the present disclosure, and other structure(s) can be referred to common design(s).(3) For the purpose of clarity only, in accompanying drawings for illustrating the embodiment(s) of the present disclosure, the thickness and size of a layer or a structure can be enlarged. However, it should understood that, in the case in which a component or element such as a layer, film, area, substrate or the like is referred to be “on” or “under” another component or element, it can be directly on or under the another component or element or a component or element is interposed there between.(4) In case of no conflict, features in one embodiment or in different embodiments can be combined.What have been described above are only specific implementations of the present disclosure, the protection scope of the present disclosure is not limited thereto. Any changes or substitutions easily occur to those skilled in the art within the technical scope of the present disclosure should be covered in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.