Rohrtarget

[...]"

[...]

[0001] The invention relates to a target for a Cathode sputtering system with a tubular target body.

[0002] EP 1,225,249 B1 discloses a tubular target for cathode sputtering systems. At the ends of a tubular target body is disposed in each case a carrier tube or a connection pipe. Average of the support tubes, the project out from the target body, the target is incorporated in an installation. In one implementation a carrier tube is inserted into an open end of the target body and then secured by means of a screw, by a flange of the carrier tube is screwed in a front edge of the target body. Alternatively, a union nut provided at the target body is an external thread for, by means of which a flange of the mounting tube to the front end of the target body can be pressed.

[0003] DE 10 2007,060,306 A1 discloses a tubular sputtering target comprising a supporting tube and a on the carrier tube arranged target material. Between the target material and the carrier tube is disposed a ferromagnetic material, so as to achieve a uniform ablation of the target material during sputtering. The ferromagnetic material can be sprayed on the carrier tube by means of plasma spraying, wherein the thickness of the material along a longitudinal axis of the mounting tube continuously changed.

[0004] The task of the invention is, to provide a tubular target with increased utilization of target and extended useful life.

[0005] This problem is solved with the features of claim 1.

[0006] Advantageous configurations are the object of the subclaims.

[0007] a target for cathode sputtering systems according to claim 1 is provided, e.g. for [...]. It target material is "atomized" and by means of plasma deposited on a substrate as a thin layer. The target comprises a tubular target body and at least one fitting or a flange of a sputtering material is on, the is connected to one end of the target body or respectively of the, order to connect the target body to a Cathode sputtering system. For example, a first fitting and a second fitting with a first end of the target body is with a second end of the target body connected. The ends of the target may, for example, differ in nature, wherein at least one end of the target is formed as hereinafter described. Alternatively, the two ends can be constructed symmetrically of the target, so that the connector (and the further elements described below) at a first end of the target said fitting at the opposite second end of the target (and the further elements) correspond to.

[0008] Preferably, the at least one fitting connected in an undetachable manner to the target body, e.g. integrally by means of soldering, gluing or a combination of screwing with gluing or soldering. Agent of the connecting piece or the connecting pieces can or said tubular target. Both vertically and horizontally are incorporated in a Tube target Cathode sputtering system.

[0009] (completely) from the sputtering material is or is target body The. Coating material made, i.e. it is provided a so-called monolithic target or the target has no continuous support tube to. Monolithic material yield of up to make it possible to target 80%. In target with the sputtering material is bonded to the carrier tube is soldered or engaging beneath them ("bonded target"), whereby this target due to the low melting point solder are temperature sensitive. Monolithic target are significantly less temperature sensitive, whereby particularly high power densities of up to 30 kW/m in sputtering are possible. This high deposition rates are possible and a higher throughput, whereby the layer properties are improved. Point [...] Between, for example, "

[...]

among other things, a higher electrical conductivity on layers generated.

[0010] Preferably, the metallically atomization materials used, such as molybdenum, copper, titanium, chromium, or alloys such as molybdenum niobium, molybdenum tantalum, molybdenum-sodium, molybdenum tungsten, copper-gallium or copper indium gallium.

[0011] The target has at least on a tubular target element is formed from one or the sputtering material is. The at the end of the target body is on the fitting or tubular target element on the outer circumference of said fitting secured or can be secured. For example, subsequent to the first end of the target body is a first tubular target element on the first fitting and a second tubular Target element to the second end of the target body is then secured or can be secured on the second fitting. The directly to the end of the target body closes on tubular Target element, so that the (axial) usable for sputtering (axial) length of the target element is the total length of the extended tube targets. It the connecting piece has two functions or respectively of the flange, on the one hand it serves or he for mounting of the target in an installation and, on the other hand, it forms the support for the target element or he.

[0012] a separate magnetic field is generated to support the coating process [...] In a inside the tube targets. During the sputtering operation or the coating process are continuously rotated tubular target, so as to ensure a uniform abrasion of the sputtering material is, wherein the actual target erosion dependent on material, process parameters and geometry of the target. The utilization of target is limited by the actual removal of material maximum. When electron struggle Rome depending on polarity and direction of the the so-called magnetron sputtering enters Cross-Corner-effect on. It it is at the ends of a tube targets to a local increase of the plasma density and higher ionization and thus to an increased sputtering rate, so that to the form target endserosion ditches.

[0013] That is to say at the ends of a tube targets is more material removed as along the tube targets, so that the useful life of the target or to the removal of material due to the elevated utilization of targettarget endserosion ditches is limited or the depth of the.

[0014] As described above is arranged in at least one end region of the tube targets the target element. In particular extends the target element in the axial direction over a region of the tube targets in the in the use of the target in the range in which an increased removal of material occurs or erosion ditches form reinforced. That is to say by means of the target element the elevated removal of material at the end of the can, or the Cross-Corner-effect are compensated tube targets, whereby the utilization of target is increased. For example, the outer shape can be adapted or contour of the target element that thereby the increased removal of material is compensated for. The Target element can have a larger outer diameter compared to the target body, so that at the end of the tube targets more target material is provided (in the radial direction). So of the increased removal of material can be compensated for at the target end compared to the region lying between them.

[0015] (monolithic) of the above-described agent in an especially simple manner the tubular can utilization of target increased the useful life and target be extended. Up to several metres long tubular or cylindrical target body can in particular independently of the (short) target elements are produced. If, for example, the area of the reinforced over a length of 15 cm to 20 cm from the end of the target erosion the target element can have a length of up to 30 cm for example extends. That is compared to the target body and the can and independently of the central target body machined simply handier target elements constitute short to different device and their process parameters are adapted. This utilization of target and thus extended useful life is provided with increased a tube target, the easily and quickly manufactured and can be adapted to the specific requirements of a Sputter in a simple way.

[...]"

[...]

[0016] Preferably, detachably connected with the connection port is the target element, so that the target element is replaceable as needed. As soon as the removal of material can be replaced, for example, target elements constitute target end a critical region achieved at the. The at least one target element can be screwed, for example with the fitting. For example, the target element has an internal thread and a corresponding external thread on the connecting piece.

[0017] Preferably, the outer diameter larger than the outer diameter of the target body at least in a partial area of the target element, in particular in the end regions or larger than the outer diameter at the ends of the target body. For example, the target element can be a constant outside diameter or cylindrical design, whereby easy manufacture of the target element is possible. Alternatively, the outer diameter is adapted to the expected removal of material of the target element, so that by means of a correspondingly embodied erosion ditch or respectively of the outer section of the target element at the end of the tube targets or the raised removal of material is compensated at the target element. The target elements are machined or formed, for example, at least a portion of a so-called "dog-bone" that they or structure. The form of a forming tube targets.

[0018] preferably, the outer diameter of the target element on the target body from a first end adjacent to a second end remote from the target body at least over a partial section to. The target elements have conical shaped outer diameter on, for example. Over at least a partial section of the target element Increased of the outer diameter, also includes configurations or profiles that for the outer end of the target element toward the outer diameter of the target element decreases again. The outer diameter of the target element (constant) outer diameter of the adjoining the corresponding to Preferably, end of the target body, so that a continuous or seamless transition between target body (s) is provided and target element.

[0019] in accordance with one preferred embodiment is a first portion or region of the fitting and a second portion formed from a non-magnetic material of the connecting piece of a magnetic material. At least a portion of the non-magnetic first portion projects out from the target, and/or at least a part of the magnetic second portion is disposed within of the target (in the target body and/or target element). Is particularly preferred in an end region of the target body at least a part of the magnetic second portion and in the subsequent target element arranged. By the magnetic material of the connecting piece is a magnetic field locally attenuated (during magnetron sputtering), so that in this region the removal rate of the target material is lowered is at least partially compensated for. That is to say the Cross-Corner- erosion ditches be reduced and the depth of the effect. Agent of a connection piece, the has a magnetic region, so the removal of material is effected at the end of the target can be influenced in a simple way that a higher target yield is possible. In particular, in addition to the magnetic material of the connecting piece, as described above, target elements are used, in order to compensate for completely or nearly completely the Cross-Corner-effect. The magnetic and non-magnetic portions of the terminal can e.g. via friction welding, soldering, gluing or by means of a thread are connected with each other. Especially advantageous is the magnetic field of a ferromagnetic material formed, for example nickel, iron or cobalt or a ferromagnetic alloy on the basis of at least one of these elements.

[0020] The first portion and the second portion of the fitting in the axial direction (in the direction of the longitudinal axis of the target) may arranged side by side or be joined together. For example, the end faces are two tubular elements (e.g. having the same diameter) axially by means of friction welding connected to each other. Alternatively, the first portion and the second portion of the fitting can be arranged radially with respect to each other or be joined together. For example, the magnetic second [...] is "

[...]

Portion on an outer periphery of the non-magnetic first portion arranged or fixed. Alternatively, on an outer periphery of the magnetic second portion of the non-magnetic first portion can be fixed or arranged. The sections located radially with respect to one another, e.g. by means of gluing may, soldering and additionally or alternatively be connected by means of a screw connection.

[0021] particularly is preferably the outer region of said fitting, the comes in contact with a/is connected directly with a Sputter Sputter, not-magnetically. In particular lies on the outer side of the tube targets (after a mounting in a Sputter) no magnetic material freely. This a negative influence is prevented of the magnetic material to a Sputter or a sputtering process.

[0022] In a screw connection of axially abutting sections connected at the end face can e.g. the ends of the first/second portion adapted to be screwed together or the ends of the sections having corresponding inside/external thread be on.

[0023] In a screw connection can have an external thread by radially arranged sections for example the first portion and the second portion a corresponding internal thread. The interconnected sections of the fitting are preferably connected in an undetachable manner to the target body as described above, so that a secure connection of the tube targets in a Sputter can serve as a support for the connecting piece is ensured and a corresponding target element.

[0024] Preferably, a female thread on the target element, wherein the first portion of the fitting and at least a portion of the (axially) adjoining the first portion, second portion of said fitting has a corresponding external thread. Agent screwing on to the nipple of the target element to the second portion the first portion of the connecting piece can then be connected of said fitting. Simultaneously, fixed to the connection piece by the screwing on the target element. In of this configuration, both the target element and the first portion of the fitting can be easily replaced.

[0025] particularly the magnetic second portion preferably has a constant or substantially constant cross-section in the axial direction of said fitting on, both in radially and axially disposed first/second portions. Non-uniform removal of material at the end or at the ends of the target can in particular, despite the use of the magnetic material occurs the, as described above by means of suitably matched target elements constitute compensated, e.g. by larger and/or varying outer diameter of the target elements.

[0026] Preferably the for target body facing end surface and the end face of the target body of the target element a profile counter or an appropriately fitting. Mating profile on, so that in one extreme position of the target element abuts the connecting piece to the target element centered at the target body. Profile and counter are so designed that the two end faces bear against each other in an end position of the target element. For example, the profile are-and counter conical design, so that in a simple way the connecting piece to Target element for target body is centered, e.g. upon screwing on the target element. Addition to or alternatively to a circumferential depression on the end face of the target body (is annularly) (target element) provided, in which a respective projection or a nose on the end face of the target element engages (target body).

[0027] Preferably, not detachable and/or substance-locking to the target body is connected the connecting piece, in particular vacuum-tight connected. For example, the connecting piece is integrally by means of soldering, gluing, or a combination of the preceding methods and other methods such as screws connected to each other not via the material, e.g. by means of screws and adhesive bonding. In particular, a seal or a sealing material between and joining piece arranged additional can be target body, such as an O-ring, about a [...]"

[...]

provide vacuum-tight connection.

[0028] On the basis of the Figures embodiments be closer explained of the invention. It show:

[0029] a schematic representation of an end of a tube targets in sliced side view 1 Fig. according to a first embodiment,

[0030] 2 Fig. a schematic representation of a side view according to a second embodiment in cut end of a tube targets,

[0031] 3 Fig. a schematic representation of a side view of a third configuration with a cut end of a tube targets in fitting, the two mutually axially arranged portions,

[0032] Fig. a-d schematic representations of an end of a tube targets in sliced side view of further embodiments with a two-part fitting, wherein a magnetic first portion to a non-magnetic second portion is arranged radially on the outside, and

[0033] Fig. 5, a schematic representation of a side view of an additional embodiment in cut end of a tube targets with a two-part fitting, wherein a magnetic first portion is disposed radially inward relative to a non-magnetic second portion.

[0034] 5 each show schematic representations of an end of a tube targets 1a Fig. Fig. 2a-hours in cut according to various implementations side view. The described tube targets 2a-h may, for example, be symmetrically constructed, so that the described elements of the shown end of the tube targets (not shown) at the opposite end 2a-h the elements 2a-h correspond to the tube targets. Alternatively, the ends can comprise the described tube targets differently configured ends. A first end 2a-hours such as, for example, can of the target in one of Figures 2a-h be constructed and a second end of the target represented a differing therefrom in shape such as a lid. Continue alternatively a first end 2a-h, in accordance with one of the methods mentioned in Fig. can a tubular sputtering target 5 represented 1a (for example according to 3 Fig.) Fig. be constructed designs and a second end of said tube targets 2a-h according to a other of said in Fig. 1-5 (for example according to Fig. 4a) be constructed configuration shown.

[0035] first of all elements and characteristics described are described below, in the various configurations of the 5 have represented the 2a-h tube targets 1a Fig. Fig. together.

[0036] The tube targets [...] 2a-h can be used such as in sputtering device. As described in detail below, can with the tube targets 2a-h the target yield or the useful life of a target be improved. Sputtering targets in the course of a coating process as the tube targets 2a-h form an irregular sputtering or from erosion profile. During still much coating material is present at some points of the target, there are also strongly sputtered areas. Reason for this is above the target due to the different plasma densities Cross-Corner-effect. Sputtering targets must be exchanged because of the irregular erosion profile at an early stage. Particularly on itself at the ends of the target tube targets erosion ditches from annular form. As hereinafter described, by means of the schematically represented tube targets 2a-h this irregular removal of material can be compensated, so that the targets have to be significantly increased utilization of target 2a-h a longer useful life or the.

[0037] Each 2a -4a-h the target comprises a tubular target body 8a and tubular target elements constitute hr-hr on, are formed (the same or different) sputtering material is from. With the use of tube targets 2a-h is the sputtering material is removed, to produce a coating on a substrate (not) represented.

[...]"

[...]

[0038] Preferably, the metallically atomization materials used, e.g. molybdenum, copper, titanium, chromium, or alloys such as molybdenum niobium, molybdenum tantalum, molybdenum-sodium, molybdenum tungsten, copper-gallium or copper indium gallium.

[0039] The 2a-h are so-called monolithic target represented target, i.e. the target body 4a-h are completely from the sputtering material is produced. (Continuous) carrier tube does not pose a This, above all on, on which the sputtering material is e.g. is soldered ("bonded target").

[0040] At at least one end of the target body is a tubular fitting or a flange 4a -6a-h fixed h, so that a portion of the terminal protrudes from the target 2a -6a-hr hr. This portion of the joint 2a -6a-h is used for securing the target Sputter hours, in an. Another 6a-h is located in the interior of the target body portion of the joint and is connected non-detachably with him and 4a-h a vacuum-tight manner. For example, by means of adhesive bonding and joining piece 6a-h are-h target body 4a connected or soldering. This 4a -6a-h the connection between target body is vacuum-tight and joining piece hr, a sealing ring or can. O-ring 10 are arranged between the two elements. Preferably, the inner diameter corresponds to the inner diameter of the target body 4a -6a-h h of the connecting piece, so that a planar or stepless transition is provided between the two elements.

[0041] Then 4a -6a on the fitting at the target body is the tubular target element 8a-hr hr-hr fixed, in particular detachably secured. 6a -8a on to the nipple is, for example, the target element is-h h screwed, so that it is easily replaced. So the target element may-h 8a are changed slightly, as soon as a 2a-h erosion ditch at the end of the target reaches a critical depth. In the in the Figure. 1-5 (operating or working position) of the target elements constitute 8a-end positions represented lie the mutually facing end surfaces of the target elements constitute 8a-hr and hr the target body 4a-h each other at.

[0042] are described below with respect to the various configurations of the described in Figures 2a-h the individual elements shown (and their differences) tube targets closer.

[0043] Fig. 1 a first embodiment shows a tubular sputtering target 2a, the provides an increased target yield. As shown schematically, the target element 4a 8a has a larger outer diameter compared to the target body 2a is provided in the end region of the target on. That is to say more sputtering material is. In this way the increased removal of material is compensated for in use of the target at the ends 2a, 2a so that the target despite erosion ditch at the ends or in the region of the target elements of forming a longer has to be replaced prematurely 8a can be used or not. In Fig. 1 8a has a rectangular cross-section on the target element. Alternatively, the outer diameter or can be adapted to the expected erosion profile 8a the external profile of the target element. For example, the target element can be formed conically 8a at least a part of a so-called "dog-bone" comprise or profile of the tube targets 2a.

[0044] 2 shows a second embodiment of a tube targets 2 b Fig.. Unless otherwise noted, with respect to the above-described elements and characteristics of the tube targets can 1 2a also for the Fig. Fig. 2b are used in 2 represented Tube target.

[0045] Unlike the first embodiment according to Fig. 1, the mutually facing end faces 8b and 4b are conical design target body of the target element, so that the end faces in the shown end position of the target element 8b abut one another over the entire surface. Agent of the conical end faces can, for example, the connector 4b are centred in the target body 6b better serves additionally as a centering aid 8b the target element or 6b with the target body 4 b in the connection of the fitting. Alternatively to the illustrated conical end faces can in one of the end faces at least one step or at least a circumferential notch or other profile be provided that in a corresponding [...]"

[...]

Mating profile or counter engages the other end face. The outer diameter or the external profile of the target element for compensating the Cross-Corner -8b can effect as above described are formed with respect to 1 Fig..

[0046] 3 shows a third embodiment of a tube targets 2 c Fig.. Unless otherwise noted, the above-described elements 1 and 2 can with respect to tube targets and characteristics of the 2a-Fig. also be used for the 2c 3 represented in Fig. b Tube target.

[0047] 1 and 2 with respect to Unlike the described implementations Fig. is from two different materials or 6c 2c the connecting piece in this Tube target two-part design. A first portion is 6c ' of a non-magnetic material and a second portion 6c " is formed of a magnetic material. The fitting 4c and 6c is non-detachably connected in a vacuum-tight manner with the target body as described above.

[0048] The two portions 6c ', 6c " in the axial direction or are A. 2c interconnected longitudinal direction of the target, e.g. by means of friction welding. Alternatively, the two sections 6c can ', 6c "together are screwed, wherein to the abutting end faces of the sections 6c', 6c" corresponding internal and external thread are provided. As a further alternative can for joining the two portions 8c the target element 6c ', 6c " are used. For example, the sections 6c be provided ', 6c " with an external thread and with a corresponding or mating internal thread 8c the target element. Zum connecting the two portions 6c ', 6c "(and for securing the target element 8c at the fitting 6c) the target element on the two sections 8c is 6c', 6c" screwed to the target element 4c rests 8c as represented at the target body. In this configuration can, for example, the external thread on said second portion 6c " in addition to the (non-detachable) connecting the connector 4c 6c are used with the target body.

[0049] The magnetic material, in particular ferromagnetic material, of the second portion 6c " the magnetic field weakens in use of the tube targets in this area 2c in a locally [...] the removal rate is lowered. is to say. D of the target material is such that the formation of the above-described at least partially compensates for erosion ditches. Agent of the two-piece fitting can be increased thus in a simple manner the 6c target yield. A as described above can comprise, in addition the target element 8c outer diameter or outer profile, so as to optimize a compensation of the Cross-Corner-effect.

[0050] As in 3 shown schematically Fig., extends the magnetic second portion 6c " from the target body 8 c 4c partially into the target element. Alternatively, extends the magnetic second portion 6c " over the entire axial length of the target element 8c, 8c so that a magnetic field over the entire length of the target element is attenuated (not) represented.

[0051] Fig. 4a-d and 2d show a tubular sputtering target 5 Fig. with a two-part fitting additional implementations 6d-hr-hr, wherein a magnetic first portion 6d "-h" radially to a non-magnetic second portion 6d '-h' is arranged. Unless otherwise noted, with respect to the abovementioned can Fig. 1 to 3 and for the elements described in Figure 2a-c and characteristics of the tube targets. 4a-d and 2d-h are used 5 Fig. tube targets represented. In in Figure. 4a-d represented 6d-g-g is the connector 2d tube targets implementations of the two-part design, wherein on an outer circumference of a non-magnetic first portion 6d '-g' 6d 6d of the terminal "-g"-g a magnetic second portion is attached or arranged.

[0052] As in Fig. 4a-b represented, the magnetic portion 6d "-e"-e can at least partially within the target element within the target body 4d and 8d-e be arranged, so as to weaken the magnetic field locally described, as above with respect to the 2c Tube target. As 6d the magnetic portion 4a is represented in Fig. extends " over the entire length of the target element 8d. 6e the magnetic portion 4b extends in the embodiment according to Fig. "only over a part of the target element 8e, so that on the external [...]"

[...]

2e no magnetic material is exposed side of the tube targets. This a negative influence is prevented of the magnetic material to a Sputter or a sputtering process.

[0053] Fig. 4c-d 2f-g show additional implementations in which, in contrast to the a tubular sputtering target in Fig. 4a-b represented "-g" 6f the magnetic portion 2d-e tube targets not only in the target body 4f-g extends over at least a portion of the target element or 8f-g extends. As in Fig. 4c represented, 6f the magnetic portion can extend itself " over the entire length of the target element 8f. As in Fig. 4d represented is alternatively the magnetic portion can extend 6g " only over a part of said target member 8g, so that no magnetic material is exposed at the end of the 2g tube targets, as described with respect to Fig. 4b.

[0054] The two in Fig. 4a-d represented sections 6d '-g', 6d "-g" may, for example, with each other (and the target body) glued and additionally or alternatively be screwed together.

[0055] Fig. 2h 5 shows a schematic representation of a side view of an additional embodiment in cut end of a tube targets. Unless otherwise noted, with respect to the abovementioned 1a Fig Fig. can. 4a-d described elements and characteristics of the tube targets 2a-g 2h be used also for the 5 represented in Fig. Tube target.

[0056] 5 shows a tube target Fig. 2h, comprising 6h ' 6h a two-part fitting with a non-magnetic first portion and a magnetic portion lying radially thereto 6h ". Unlike in Figure. 4a-d represented in Fig. 6h the magnetic portion 5 constructions is " radially arranged inside said non-magnetic portion 6h ' arranged.

[0057] The 6h magnetic portion " in the target body and extends over a part of the target element 4h 8h generates the magnetic field and a local attenuation, such as with respect to 3 and Fig Fig.. 4a-d described.

[0058] As in 5 Fig. represented, the magnetic portion is 6h " in an inner fold of the non-magnetic portion 6h ' received. In particular flush with the inner diameter of the target body is an inner diameter of said fitting 6h 4h, so that a smooth transition is provided between the connection piece and the target body 4h 6h. Since 6h the magnetic portion " 8h extends only over a part of the target element, after fixing of the target lies on the external or exposed side of the target in a sputtering installation 2h 2h no magnetic material freely, 4b and 4d Fig. described as with respect to Fig..

[0059] As in Fig. 4a-d and Fig. represented 5, the target element can optionally have the same external diameter as the target body 8d-h 4d-h, provided that the magnetic second portion 6d "-h" a sufficient compensation of the 2d-h provides increased erosion rate at the end regions of the target.

[0060] The basic information to Fig. 3, Fig. 4a-d and the (outer) portions of the connecting pieces 5 described embodiments are Fig. 6c-h, are connected directly to a sputtering installation, preferably not-magnetically. This a negative influence is prevented of the magnetic material to a Sputter or a sputtering process.

2a-h Tube target

4a-h target body

6a -6c h fitting/flange '-6h' magnetic portion 6c "-6h" not-magnetic portion 8a-h Target element

10 O-ring

A Axis Tube Target