METHOD FOR DETECTING INTEGRITY OF INTEGRITY OF A SEMICONDUCTOR SUBSTRATE OF AN INTEGRATED CIRCUIT FROM THE BACK SIDE, AND CORRESPONDING DEVICE

09-08-2019 дата публикации

Номер:

FR3077678A1

Автор: Alexandre Sarafianos, Bruno Nicolas, Daniele Fronte

Принадлежит: STMICROELECTRONICS ROUSSET SAS

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G0 G01 G01R G01R3 G01R31 G01R31/G01R31/2 G01R31/28 G01R31/285 G01R31/2856 G01R31/289 G01R31/2898 G06 G06F G06F2 G06F21 G06F21/G06F21/7 G06F21/75 G06F21/77 G06K G06K1 G06K19 G06K19/G06K19/0 G06K19/07 G06K19/073 G06K19/0737 G06K19/07372 H H0 H01 H01L H01L2 H01L23 H01L23/H01L23/5 H01L23/57 H01L23/576

IPC - классификация

G G0 G06 G06F G06F2 G06F21 G06F21/G06F21/7 G06F21/75 G06F21/755 G06F21/77 G06F21/8 G06F21/87

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