Load station

The 1d also to 1a also a disclosure including sides the first deoxygenator embodiment semiconductor processing device or tool (tool) is shown that degrees multiplex, is described more specifically here. In the embodiment of a disclosure in reference to side are drawing but may be described, said embodiment the first deoxygenator said disclosure many sides are an alternative shapes and the can should understood. Furthermore, a difference between signals composing each pixel elements or materials, shape, or kinds of be shown as optionally are can be.

Also refers to surface 1a and 1b, the present disclosure the a embodiment according to one aspect the first deoxygenator, for example semiconductor tool station (semiconductor tool station, 1090) of hope appeared. is device processing such as. Although semiconductor tool but appearing in drawing, a disclosure described herein (robotic manipulators) regulator robot sides are the first deoxygenator embodiment employing any of tools can be applied to the application station or. In this example tool (1090), would appear as a (cluster tool) but the cluster tool, the present disclosure the first deoxygenator sides are a embodiment, for example, also 1c and 1d provided to store the pre-fetch 26 May 2006 and such application to a "Linearly Distributed Semiconductor Workpiece Processing Tool" the call number 11/442,511 patent application United States Serial number (said application lists disclosure lubricious is merging referred to as a entire herein) as described, any suitable tool can be applied to the station. Generally, tool station (1090) front end an atmosphere (atmospheric front end, 1000), vacuum loadlock chambers (vacuum load lock, 1010) and vacuum back end (1020) includes. In other aspects, , any suitable station tool may have configuration. Front end (1000), load lock (1010), and a back-end (1020) at least one of the controller, and the fan motor components (1091) can be connected to, said controller, for example, control such as clustered architecture, any suitable controls. may specifically be part of a peer architecture. Control system comprises a, 11 July 2005 application to a "Scalable Motion Control System" of title that call number 11/178,615 patent application United States Serial number (said application lists disclosure lubricious herein by merged reference as a whole) such as those described, a master controller, remote autonomous controllers, and cluster having controllers can be a closed loop controller. In other aspects, , any suitable controller and/or control system. can be utilized.

A disclosure in the embodiment of sides, front end (1000) are generally, in hereinafter as be described more particularly, one or more substrates cassette holding regions (1005) for including load station or [...] front end modules (hereinafter referred to as the 'EFEM') environment-such as (1060) includes. Said one or more board holding regions are, (wherein the two substrates, which are referred to) 100 mm, 150 mm, 200 mm, or 450 mm diameter of wafers is loaded, or for example a liquid crystal display device are (LCDs), organic light emitting diodes (OLEDs), emitting diodes (LEDs), flat panel display used in a flat panels, such as wafer small large dimension or or any suitable shape (for example, circular (round), square, rectangular, such as) any a suitable substrate holding cassettes for can be constructed to (hold). A disclosure the first deoxygenator embodiment EFEM or load station (1060) the any desired number of rod stations (for example, the load ports) can be (sized) sizing to selectable load station ability to provide (capacity) (for example, load station (1060) are held (held) is a substrate cassette number of and/or size selectable) consists of. Load station (1060) and one or more substrates cassette holding regions are, overhead transmission system (overhead transport system), automatic guide vehicles, personal guide vehicles (personal guide vehicles), rail guide from cars using, for instance cassettes one or more substrates cassette holding regions (1005) for selectively loading the passive into such as, any other from a suitable transmission method, substrate cassette to receive the can be constructed. Hereinafter as be described and embodied in, -environment (1060) is generally a transfer robot any suitable (1013) includes. Said-environment (1060) the, plural load ports (load port modules) modules for transferring substrate between, and considering an area of for controlling the focusing of a monopolar controlled can be.

Vacuum loadlock chambers (vacuum load lock, 1010) bovine-environment (1060), and a back-end (1020) capable of being positioned at between said-environment (1060) and said back end (1020) may be connected to to. Load lock (1010) is generally including slot valve and vacuum atmosphere. Isolated environmental said slot valve that can provide the (environmental isolation), the atmosphere (atmospheric front end) front end a substrate out of lock (evacuate) after loaded and emptied, said with an inert gas such as nitrogen (vent) venting (lock) lock in transfer chamber when vacuum are held. Furthermore, load lock (1010) starting point of a substrate (fiducial) a preferred process position in aligner (1011) may also comprise a. In another aspect, a processing vacuum loadlock chambers appropriate location any device capable of being positioned at any suitable configuration may have.

Generally, vacuum bag end (1020) has a transfer chamber (1025), one or more process station (are) (1030) and transfer robot (1014) includes. Transfer robot (1014), will described hereinafter is, transfer robot (1014) a load lock (1010) and the implementation of a variety of processing stations (1030) substrate between transfer chamber for transmitting (1025) may be positioned within a.. Processing stations (1030) deposited various, etching, or some other type of processes operates on substrates through said another preferred and on substrates can be structures. As processes typically, plasma etching or other etching processes, chemical vapor deposition (CVD), metalorganic chemical vapor deposition (MOCVD), plasma vapor deposition (PVD), ion implantation such as injection, measuring (metrology), rapid thermal processing (RTP), atomic layer deposition (ALD) strip drying, oxidization/diffusion, nitride forming, vacuum lithography, epitaxy (epitaxi, EPI), wire bonder (wire bonder), and pressure or vacuum (evaporation) symptoms Pak using other thin film process such as, a thin film processes by vacuum and thereof including, but not limited thereto. Processing stations (1030) is transfer chamber (1025) is connected to, substrates transfer chamber (1025) from stations (1030) to, and vice versa (passed) and passed to may.

Also now refers to surface 1c, substrate processing system (2010) of pixels is the approximate plane view, wherein tool interface zone (2012) is transfer chamber module (3018) mounted in a in the housing, photographs an interface zone (2012) the transfer chamber (3018) toward the (X) so that the major axis of the (for example, about (inwards)) face-to-face in which major axis but offset from (X), was a complete fabrication is generally intended is to exemplary purpose: to avoid a shown by a to significantly different. Other aspects, in tool interface zone (2012) substantially transfer chamber (3018) to (X) so that the major axis of the can be substantially aligned. Transfer chamber module (3018) the, merged reference herein prior to patent application United States Serial number number 11/442,511 other described call a transfer chamber modules (3018A, 3018I, 3018J) for interfaces (2050, 2060, 2070) by from the, any suitable can be, which extends in a direction. Each transfer chamber module (3018, 3018A, 3018I, 3018J) the, for example, processing system (2010) through processing substrates (PM) modules for transmitting out into and for transferring boards part includes (substrate transport, 2080), in the hereinafter is may be described more specifically. Example can be realized, each chamber module an isolated or a controlled atmosphere to form an (for example, N2, clean air, vacuum) capable of maintaining a 2000.

1d also refers to surface, linear transfer chamber (416), whereby the biopolymers to be along the (X) so that the major axis of the, such as can, an exemplary processing tool (410) of the approximate elevational view of hope appeared. is. In one aspect, also 1 as demonstrated, (load station (1060) substantially similar to at a) tool interface zone (12) the transfer chamber (416) in representative of a (representatively) may be connected to. On one surface, interface zone (12) a tool transfer chamber (416) can be defined one end of. Also as demonstrated 1d, transfer chamber (416) the, for example interface station (12) at the end is opposite from, different intermediate a water inlet/outlet station (workpiece entry/exit station, 412) can take the. Furthermore, in one aspect, intermediates inlet/outlet station (412) the aforementioned EFEM (1060) may substantially similar to at. In another aspect, different intermediate a water inlet/outlet station are said transfer chamber for-out/removing an inserting water from transfer chamber the tool (416) of the ends of the, such a may be provided. A disclosure in one aspect the first deoxygenator embodiment, interface zone (12) and inlet/outlet station (412) the easiest possible loading and unloading of intermediate updates only occur if said can be allows. In other aspects, , loading tool to said from one end to an are intermediates may be removed from the other end may be. In one aspect, transfer chamber (416) one or more transfer chamber module (are) (18B, 18i) can take the. Each chamber module an isolated or a controlled atmosphere to form an (for example, N2, clean air, vacuum) can be and keep goods. Previous, a, also 1 decodes a transfer chamber (416) a transfer chamber modules form a (18B, 18i), load lock modules (56A, 56B), and intermediates for configuration/of stations, and there has exemplary is pure arranged, said transfer chamber in other aspects, more or less modules may have any desired module can be disposed in a. In one aspect, station (412) can be a load lock (load lock). In other aspects, , load lock module (station (412) similar to) end inlet/outlet stations can be located between the or, or (module (18i) similar to) connection transfer chamber module as a load lock (adjoining transfer chamber module) can be configured to operate. As prior noted act of adding in addition, transfer chamber modules (18B, 18i) is located on the inside and one or more corresponding transmit device (26B, 26i) has. Each chamber transfer modules (18B, 18i) transmission of device (26B, 26i) the on which the mosquito net is seated, in transfer chamber, an intermediate linear displacement water transmission system (linearly distributed workpiece transport system, 420) can be is provided. In one aspect, transmission device (26B) the, (other in the embodiment in said transmission cancer may have arbitrary another preferred but may have array) (SCARA arm) cancer SCARA generally may have configuration, defined more specifically herein is the present invention, while the other sides said transmission device a, asymmetric configuration, frog-hopped (leap-frog configuration) configured, and linear sliding such as configuration, etc., any suitable arm forming can take the. Also as demonstrated 1d, in one aspect transmission device (26B) arms are of, transmission unit (transport) can fall out of the position a second opening portion of sounds/is provided to quickly replace wafers from (pick/place location) makes it possible to exchange such as in a vaporizer a also referred to as a (fast swap arrangement) arranged to provide can be, may be arranged, is in in addition hereinafter is may be described more specifically. Transmission cancer (26B) the, of the existing method drive systems from a drive system is simplified with respect to, each three (3) degree of freedom (for example, Z axis movement relative a shoulder and elbow joints (shoulder and elbow joints) independent rotation) for arm includes a body and a having, an appropriate driving zone can take the. In other aspects, , driving zone is substantially three degree of freedom of cancers having a by using the mask pattern.. Also as demonstrated 1d, in one aspect modules (56A, 56, 30i) the transfer chamber modules (18B, 18i) interposed between the (interstitially located) being in a position such that can be put on hold and appropriate processing modules, load lock (are), buffer station (are), a measuring station (are) or any another preferred station may define a (are). For example, load lock are (56A, 56) and intermediates for station (30i) in such a manner that the inclusions modules, such as the (interstitial modules), respectively fixed intermediates supports/shelves (56S, 56S1, 56S2, 30S1, 30S2) may have, they are cooperatively transfer parts along a linear axis of the transfer chamber (X) through the whole length of the transfer chamber achieve (effect) the intermediate of transmission (transport or workpieces). Illustratively, intermediates (are) the interface zone (12) by transfer chamber (416) can be is loaded into. Said intermediates transmission of the interface zone (are) cancer (15) loaded lock module (56A) support (are) can be located. Load lock module (56A) (are) in intermediates the, module (18B) and transferred to a cancer (26B) loaded by means of a lock module (56A) and the rod lock module (56B) and and can be moved between, and, in a continuous manner similar to that of a, (module (18i) in) cancer (26i) loaded by means of a lock (56) and the intermediate water station (30i) between, modular (18i) in treating and/or preventing cancer in (26i) stations by (8880000 721888) and station (412) may be moved between. The process a pre-distorter (reversed) reversed or partially (are) is intermediates can be moved to the in opposite directions.. Therefore, in one aspect, along the (X) axis are intermediates and in an arbitrary direction and a along the transfer chamber can be moved to the location of any, transfer chamber and communication any desired module (a processor or other it) may be placement plate supports loaded from. In other aspects, , fixing intermediates having or shelf supports interposed transfer chamber module are transfer chamber modules (18B, 18i) may or may not be provided between the.. The present disclosure the first deoxygenator a embodiment such sides, access mobile chamber module arms are of transmission for the, intermediates to metal, moving a substrate through the transfer chamber, direct (using buffer station or) one transmission end effector of cancer (end effector or one transport arm) different transmission from the and pass the end effector of cancer may (pass off). Processing station module operates on a substrate and a deposited various, etching, or some other type of processes in onto the substrate through the another preferred and can be structures. Processing station modules are connected to transfer chamber module in transfer chamber are the substrate from propagating to processing station and vice versa allows of. Also depicted processing device 1d similar a generally least one characteristics are processing tool is suitable (processing tool) patent application United States Serial number number 11/442,511 call described, lubricious said application disclosure lists establishing an optical fiber at a side is merging referred to as a entire herein.

Also now 2, 3, 4a, 4b, and 5 by referring to, load station (1060) is is may be described more specifically. In one aspect rod is accommodated in a repetition (1060) a suitably sized (sized) frame (200) can include a, the load station the, (SEMI) equipment semiconductor material national constitution EFEM embodied in standard according to the dimensions of (dimensions) in a substantially similar manner to the or may have contact, wherein said standard for example 2-wide (two-wide) or 2-bay (two-bay) EFEM relates to an, for example 2 (load ports) two side-by-side the load ports having EFEM and the shaft transfers the, such examples for example, of ccomplishing automation [...] FabExpress^TM standby system (FabExpress^TM Atmospheric System) and (length of about 1259 mm, depth of about 765 mm, a height and from about 1865 mm) JET^TM includes standby transmission system. 2-wide EEFM an example other suitable of ccomplishing automation [...] MiniMax^TM are operatively front equipment (MiniMax^TM Equipment Front End Module) includes, from about 1143 mm (45 inch) length of, about 851 mm (33.5 inch) depth of, and from about 1832 mm (72.12 inches) of height of the. In other aspects, , load station (1060) the 4-wide EFEM (for example, 4 two side-by-side load port having EFEM) according to standard SEMI for, or any enables the appropriate number of substrate cassettes dimensions a load port, capable of holding the heddle any suitable (load port dimensions) according to according to standard SEMI, any suitable having may include a frame. In another aspect, load station (1060) any appropriate dimensions may have predetermined locations.. Frame (200) the, establishing an optical fiber at a side transfer robot (1013) operation of a suitable environment for the such as those which may form one, vacuum loadlock chambers any suitable manner (1010) and the seal to make one end of the speedometer and a back (200B) can take the. In one aspect, frame (200) controlled an interior environment of the pod and or any suitable information "clean room" physiologically acceptable salts and physiologically functional derivatives may define a chamber. Wherein the frame (200) in polygonal substantially a is formed (polygonal shape) said sides any suitable frame can be a through-slit,. The side of the frame are (200S) for example, rear (200B) such as to be substantially perpendicular to, any at an convenient angle rear (200B) can be extending from. (Front) (200F) the frame of the angular wall may include (angled wall), wherein said angled, for example two portions that are 2 (200F1, 200F2) are divided into. In other aspects, , said front wall (200F) a wall which is the to the substantially straight rear can be (200B) wall adjoining the closed end and can be substantially parallel. Front wall (200F) the (for example, such as loading/unloading opening) one or more openings or openings (201) can include a, they are (also 4b and 5 as demonstrated) loading station (1060) shelf of (400) on substrate cassettes automatic or manual for placement of a substrate cassette to the frame (200) for insertion into an removed from or consists of for causing a computer to allow the. One or more openings (201) each, any suitable manner frame (200) can be (hinged) hinged to individual/out parts 148 (202) may comprise, the entrance portions the substrate cassette each opening (201) can be the effective agent to pass through the, opening when said entrance portions (201) is disposed at the substantially sealed in a controlled environment are held. Establishing an optical fiber at a side, transfer robot (1013) the loading station (1060) end is positioned within the any suitable manner frame (200) may be connected to to. Transfer robot (1013) the drawing as demonstrated 3-link SCARA has (three-link selective compliant articulated robot arm configuration) configured (for example, upper arms, are operatively cancer and front [...] or substrate holder (holder)). Other aspects, in transfer robot (1013) for example, 4-link SCARA cancer, amount-symmetric (bi-symmetric arm) cancer, cancer type scissors leg /-frog (frog-leg/scissor type arm) or linear sliding, such as cancer, any suitable configuration which may have should is appreciated. Furthermore, drawing the transfer robot (1013) a single cancer (1013A) but appears to having, in other aspects, , in, for example, for rapid interrogation of exchange (for example, substantially simultaneously or a very fast continuous operation in one arm substrate a concentrator whilst the other substrate during the course of a second opening portion of the cancer) in order to allow, in at least one of the arms a delivery robot transfers the which can be have a to significantly different. Example can be realized, in particular for operation of cancer transfer robot any degree of freedom of the appropriate number of any suitable having a drive system may include a. Said drive system to the transfer robot (1013) base of (1013B) located at least partially within can be of cancer (1013A) the base (1013B) to can be rotatively mounted which. Base (1013B) the X-Y oriented in the plane fixing frames to be (200) but can be connected to, in one aspect transfer robot (1013) the Z-axis drive motor thereof may comprise cancer (1013A) the Z-direction (for example, cancer (1013A) of move outwards and inwards and a pressure substantially normal to the axis of direction) raising, lowering, can be. In another aspect, a delivery robot transfers the Z-axis drives (drive) may not be includes in the housing, photographs an cassettes to transport substrate to and into cassette or from any vertical or Z-axis, and wherein the movement, cassette movement of, i.e. Z-axis along a is provided via movement of cassettes.

Cassette holding region (1005) within the frame which can be arranged on the any suitable number of substrate cassettes can be configured to support a. In one aspect cassette holding region (1005) the, for example, also as demonstrated 2c also to 2a, frame (200) a front wall of (200F) the contour of such a way that (contour) can be constructed (or front wall (200F) is cassette holding region (1005) array of can be constructed to follow. In other aspects, said board holding region, substrate cassettes holds to robot (1013) the substrate cassettes permit a requesting program to access at any can take the appropriate alignment. In one aspect, substrate cassette holding region (1005) the, substrate cassette one or more vertically stacked rows (L1, L2) in transfer robot (1013) radially from the rotational center of (radially) to be arranged in, can be arranged. For example, board holding region (1005) of vertically stacked rows (L1, L2) each number 1 substrate cassette holding portion (1005A) and number 2 substrate cassette holding portion (1005B) can include a, angularly in addition to (angled) board holding region is (1005) disposed radial substrate cassette in allows a (radial placement). Can be realized example, number 1 and number 2 substrate cassette holding portions (1005A, 100B) are separated, but inferior to it in a but, in other aspects, said portions (1005A, 1005B) any suitable the connection of the door frame to be can be single support-forming.

Each level (L1, L2) surface of holding regions (1005A, 1005B) each individual shelf (400) or one or more substrate cassettes adapted to support an other suitable structure may include a. In one aspect shelves (400) each, for example, individual/out parts 148 (202) and a any suitable method can be the plate is installed, as a result/out parts 148 (202) is opened to output the shelf (400) the direction of an arrow (499) is pivotal (pivot) the, substrate cassette loading position (also reference 4d) are, / out parts 148 (202) to output the shelf X-axis and Y-axis (400) the direction of an arrow (498) is pivotal by, / out parts 148 (202) an opening (201) the, shelf (400) one or more of the cassette on the, transfer robot (1013) one substrate [...] substrate cassettes located in substrates permit a requesting program to access at is positioned at a location, such that. In/out parts 148 also 4c and 4d (202) and the shelf (400) is substantially 90 DEG but is referred to as relationship, / out parts 148 in other aspects, (202) and their respective shelves (400) be adjusted in relation to each other any suitable material may have a angular position. The present disclosure in other aspects, lists shelf (400) each/out parts 148 (202) may or may not be fastened to or a mechanism or any suitable information go through the part (202), and a and, the/out parts 148 (202) and the shelf (400) swingably and different (swing) and an arc (arc) (for example, different angles rotates with, opened, the CNC lathe is entrance section than the amount rotated by with or vice versa), result shelf (400) the, shelf (400) for loading and unloading cassettes from any suitable orientation (orientation) can be positioned.

Also again also to 2a refers to surface 2c and 4b, each shelf has at other substrates of different sizes (C1, C2, C3) cassettes bearing against the exchange can be constructed. Generally intended is to exemplary only, substrate cassette (C1) the 100 mm diameter substrates can be configured to hold, the (C2) substrate cassette 150 mm diameter substrates can be configured to hold, substrate cassette (C3) the 200 mm substrates can be configured to hold. Each shelf in other aspects, any size and/or of substrates configured to hold a substrate cassettes configured to support a can be should understood. Furthermore, substrate cassettes in the case of (C1), each shelf (400) about 4 (C1) configured to hold the top substrate and the bottom substrate cassettes can be load station (1060) about (L1, L2) each level of the cassettes (C1) and to hold the top substrate and the bottom substrate 8, as a result total of from about 16 but shown the polyimide is not less than 1x10 the holding cassettes the top substrate and the bottom substrate, the only exemplary shown generally intended is to.. Can be realized example, roughly 2 the top substrate and the bottom substrate cassette holding levels (L1, L2) thereof may be about of the order the top substrate and the bottom substrate cassettes 16 (C1) is load station (1060) is disposed within transfer robot (1013) the substrate cassettes (C1) to permit access each are positioned so as to. Furthermore, substrate cassettes in the case of (C2), each shelf (400) about 3 (C2) configured to hold the top substrate and the bottom substrate cassettes can be load station (1060) (L1, L2) each level of about 6 (C2) and to hold the top substrate and the bottom substrate cassettes, as a result total of from about 12 but shown the polyimide is not less than 1x10 the holding cassettes the top substrate and the bottom substrate, the only exemplary shown generally intended is to.. Can be realized example, roughly 2 the top substrate and the bottom substrate cassette holding levels (L1, L2) thereof may be of the order about 12 the top substrate and the bottom substrate cassettes (C2) is load station (1060) is disposed within transfer robot (1013) the substrate cassettes (C2) to permit access each are positioned so as to. Furthermore, in the case of substrate cassettes (C3), each shelf (400) about 2 (C3) configured to hold the top substrate and the bottom substrate cassettes can be load station (1060) (L1, L2) each level of the about 4 to hold the top substrate and the bottom substrate cassettes (C3) and, as a result total of from about 8 but shown the polyimide is not less than 1x10 the holding cassettes the top substrate and the bottom substrate, the only exemplary shown generally intended is to.. Can be realized example, roughly 2 the top substrate and the bottom substrate cassette holding levels (L1, L2) thereof may be of the order about 8 the top substrate and the bottom substrate cassettes (C3) is load station (1060) is disposed within transfer robot (1013) the substrate cassettes (C2) to permit access each are positioned so as to. Can be realized example, a disclosure according to side the first deoxygenator embodiment, loading station (1060) any enables the appropriate number of substrate cassettes can be configured to hold, the cassettes each substrate any suitable. capable of holding the substrates of different sizes.

In one aspect, shelves (400) each, substantially planarize the cassettes are all supported on one surface to (for example said cassettes a U-phase current is supplied is situated a plane), substrate cassette to support can be constructed. In other aspects, shelves (400) the, at least one cassette number 1 in the plane of the watch strap support at least one another cassette said number 1 vertically offset from the plane predetermined amount of number 2 plane to be supported, substrate cassette to support can be constructed. The substrate cassette support surfaces vertical offset, vertical offset between substrate holder can be such precursors, as well as corresponding, wherein a delivery robot transfers the at least two arms 2 comprises, at said substrate holder are substantially parallel to, but offset a substrate transfer in the plane of the a BTS neighboring to the terminal, are positioned so as to on. A sending robot of arms both house substrates substantially at the same time or in order is received in the space defined between the another cassette allows. Another aspect in each shelf (400) the, transfer robot (1013) of move outwards and inwards and a pressure at a direction normal substantially conforms to an axis of the one or more for raising and lowering the cassettes of one or more Z-axis drive portions may include a. the robot is substantially transfer robot of cancer substrates without any Z-moving jaws and into a cassette can be allows. In another aspect and cassette together cancer transfer robot, substrate cassettes to deliver from cassettes to and, along the axis-Z may be moved.

Shelf (400) and each of the positions surface of the each substrate cassettes with stability and (C1-C3) configured to hold a substrate cassette holder (401-404) may comprise an. Substrate cassette holders (401-404) the each shelf (400) may be removed from the modules that can be. Each substrate cassette holder (401-404) the, for example, any suitable the possibility coming loose mechanical locking part (for example, screws, bolts, clips (clips), such as (snaps) are snap) such as through, each shelf any suitable method (400) embedded in. Said shelves are (holding cassettes corresponding to (C1-C3)) cassette holder are other substrates of different sizes (401-404) said predetermined locations for each located the possibility coming loose may have locking portions, to output the shelf thereof (400) without requiring substantial same shelf (400) cassettes of any can be interchangeably for (C1-C3) can be configured to hold. Generally intended is to only exemplary, shelf (400) from (C1) to hold substrate cassettes holding substrate cassettes to translate an (C3), (C1) a holder are cassettes (401-404) is and may be removed from said shelf, (C3) cassettes CNC lathe is said to capable of holding the heddle, said cassettes (C3) a holder are the same. may be built on top shelf. In another aspect, each shelf (400) in the trench wherein exchangeable said exchange includes adjustable shelving the organic EL consists of holding mulitple cassette substrates of different sizes. Each shelf has at, for example, any suitable the possibility coming loose mechanical locking part (for example, screws, bolts, clips, snap, etc.) such as through, the frame any suitable method can be which are intended to releasably fasten removable. Wherein, generally intended is to exemplary only, substrate cassette holding region (1005) surface of holding portion (1005A, 1005B) cassettes substrate to hold cassettes substrate hold from (C1) to translate an (C3), substrate cassette holding portions (1005A, 1005B) effect relation for each shelf (400) the exchangeable, installed and can be readily removed, (C1) cassettes for shelves can be removed and, cassettes is shelves (C3) for each substrate cassette holding portion (1005A, 1005B) can be to fit into the. Frame (200) of openings (201) is a suitably sizing (sized), shelves or holders (401-404) in a receiving node to permit a possibility exchange one of, and, therefore, with substantially frame (200) is decomposed to thereby any part of said shelves or without one of said holder is installed through the individual opening may be or eliminate a to significantly different. A disclosure embodiment the first deoxygenator loading station (1060) in the case of, substrate carrier (e. G. FOUP (Front Opening Unified Pod), such as SMIF (Standard Mechanical InterFace)) is air outlet for interfacing with said loading station located at the upper part, of the existing method does not contain load port a to significantly different. As a result, transfer robot (1013) the loading station (1060) closer to (front) front of (for example, front wall (200F) closer to) is positioned, is transfer robot (C1-C3) into cassettes allows access to more. Transfer robot (1013) (pan offset) offset of fans end effector of the abstract of the disclosure a longer, cassette to the transfer robot (1013) orientation or aligned radially the rotational center of the structure of an equipment by being transfer robot one is positioned-radius closer to can be, transfer robot (1013) cancer (1013A) substantially pure prolong or radial the substrate from cassette each contraction eliminates or. so that it can be inserted.

A disclosure in embodiment number 1 the first deoxygenator substrate loading station is provided.. Said substrate loading station a controlled environment configured to hold a frame forms a chamber, said a transfer robot coupled to the frame, and each a substrate can be placed within a frame to said cassette holder may have a low positions cassette holding one or more substrates includes (regions). Each of the position cassette holding one or more substrates, transfer robot and communicates with each cassette and transfer robot to achieve for transferring substrate in between, each substrate in the target position predetermined removably supporting cassette is configured to, wherein the one or more substrate cassette holding locations are, substrate loading station surface of holding ability to alter the, one or more substrates cassette holder the other substrate cassette holder varying change possibility consists of to achieve.

A disclosure number 1 according to one aspect the first deoxygenator embodiment, substrate cassette holding position each of the holding substrate cassette, individually placed into frame is configured to eject, substrate cassette are transfer robot center of radial pivot axis is opposite thereto.

If the side a disclosure number 1 the first deoxygenator embodiment, each cassette holder one or more substrates therein having sized substrate number 1 being configured to capture an Image, holding a substrate cassette, each cassette holder another substrate therein a substrate having a sized substrate number 2 cassettes is configured to hold, the sized substrate said number 1 of the pores have a pore size and other sized substrate said number 2.

A disclosure number 1 according to one aspect the first deoxygenator embodiment, substrate loading station, positions of cassette holding substrate including one or more levels. In still further aspects, said levels of one or more is vertically-stacked levels. Further in still further aspects, a delivery robot transfers the board holding positions on each level consists of access each.

A disclosure number 1 according to one aspect the first deoxygenator embodiment, frame a substrate cassette holding positions one or more corresponding each to be maintained to be uniform over of sink for residue of food for, said board holding locations are, according to individual entrance be used for the purpose of copy position unless they were loaded and access position transfer robot to move between consists of.

A disclosure number 1 according to one aspect the first deoxygenator embodiment, substrate loading station, are operatively front equipment wide 2-is embodied by standard SEMI for space is sizing to conform to dimensions (spatial dimensions).

According to one aspect the first deoxygenator disclosure number 1 a embodiment, each substrate of at least one substrate cassette is configured to hold, said at least one substrate forming a light-emitting diode, organic light emitting diode formed, and liquid crystal display during formation thereof, and to. for at least one.

According to one aspect the first deoxygenator disclosure number 2 a embodiment, substrate processing tool said substrate a substrate processing region and the second the processing zone a substrate loading station which includes. Substrate loading station said frame forms a chamber, said a transfer robot coupled to the frame, and each a substrate can be placed within a frame to said cassette holder may have a low position cassette holding one or more substrates includes the.

Each of the position cassette holding one or more substrates, transfer robot and communicates with each cassette and transfer robot to achieve for transferring substrate in between, each substrate in the target position predetermined removably supporting cassette is configured to, wherein the one or more substrate cassette holding locations are, substrate loading station surface of holding ability to alter the, one or more substrates cassette holder the other substrate cassette holder varying change possibility consists of to achieve.

According to one aspect the first deoxygenator disclosure number 2 a embodiment, each substrate board holding from automatic transfer system a cassette holder to receive the cassette consists of.

According to one aspect the first deoxygenator disclosure number 2 a embodiment, each cassette holder one or more substrates therein having sized substrate number 1 being configured to capture an Image, holding a substrate cassette, each cassette holder another substrate therein a substrate having a sized substrate number 2 cassettes is configured to hold, the sized substrate said number 1 of the pores have a pore size and other sized substrate said number 2.

According to one aspect the first deoxygenator disclosure number 2 a embodiment, substrate loading station to the transfer robot and that include one or more substrate cassette holder each and the at least one other substrate cassette holder can be placed within a frame to each of the on the radially outer side of a transfer robot axis of move outwards and inwards and a pressure is radially aligned.

According to one aspect the first deoxygenator disclosure number 2 a embodiment, substrate loading station positions of cassette holding a substrate including one or more levels. In still further aspects, said levels of one or more is vertically-stacked levels. Further in still further aspects, a delivery robot transfers the board holding positions on each level consists of access each.

According to one aspect the first deoxygenator disclosure number 2 a embodiment, each substrate of at least one substrate cassette is configured to hold, said at least one substrate forming a light-emitting diode, organic light emitting diode formed, and liquid crystal display during formation thereof, and to. for at least one.

According to one aspect the first deoxygenator embodiment number 3 a disclosure, substrate processing device is provided. Said substrate processing device a, a controlled environment configured to hold a frame forms a chamber a substrate having a loading station, and substrate cassette holder includes. Said substrate cassette holder, substrate processing device the blade and at least one substrate cassette for delivery of of substrates between the, juxtaposed cassettes one or more substrates (apposition) consists of holding mulitple. Said substrate cassette holder, in a selectable ability cassette holding substrate define features, the substrate holding station cassette holding capability selectable said of features can be selected according to selected.

According to one aspect the first deoxygenator embodiment number 3 a disclosure, selectable features are those which, said substrate cassette holder removably and is adapted to be attached for one or more substrates treated machine comprising such a tool and cassette holder module, said at least one substrate cassette holder modules therein having sized substrate number 1 being configured to capture an Image, holding a substrate cassette, other substrate cassette therein at least one holder module a substrate having a sized substrate number 2 cassettes is configured to hold, the sized substrate said number 1 of the pores have a pore size and other sized substrate said number 2.

According to one aspect the first deoxygenator embodiment number 3 a disclosure, each substrate of at least one substrate cassette is configured to hold, said at least one substrate forming a light-emitting diode, organic light emitting diode formed, and liquid crystal display during formation thereof, and to. for at least one.

Or more described embodiment only a disclosure shown sides the first deoxygenator for should understood it will not. A disclosure the user with ordinary skill in art embodiment various manners without deviates from sides-and modifications can be applied. Therefore, all sides are a disclosure such replacement are the first deoxygenator embodiment, are modified, and variations intended to non-woven fabrics is, the with an a in range claims. Furthermore, different dependent anti or independent self informs are described other features a claim into this above combination of features are favorably memory unit cannot be used may be not refers to, such the combination of the present invention remaining in range of the sides being parallel will wall of the rectangular.