Apparatus for silicon single crystal growth

, Exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

Further, the terms 1, '' 2, '' top 'and' bottom ' used below do not necessarily require or imply any physical or logical relationship or order between such entities or elements. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section.

1 Is a view illustrating a silicon single crystal growing apparatus including a pollution preventing apparatus according to an embodiment of the present invention. 2 Illustrates a perspective view of a contamination preventing unit according to an embodiment of the present invention.

To FIG. 1, the silicon wafer growing apparatus 100 may include a chamber (110), a crucible (120), a lift (200), and a pollution prevention (300).

Chamber 110 may include a space for pulling a grown silicon single crystal ingot.

As described above, the crucible 120 may be disposed inside the chamber 110, and the crucibles 120 may load a solid raw material for growing polycrystalline silicon into a silicon single crystal ingot.

The crucible (120) may be a cylinder having a space for receiving a solid raw material therein. The solid raw material 120 may include quartz and graphite.

One end of the lift part 200 may be made of a magnetic material or a magnet. The surface of the lift portion 200 may be formed of a material for preventing contamination. For example, the material for preventing contamination may include a plastic vinyl material.

The lift portion 200 may include a cable. The lift unit 200 may move up and down by a cable. Here, the cable of the lift unit 200 may include stainless steel (SUS) or molybdenum (Molololybac) having excellent heat resistance.

The pollution prevention unit 300 may be disposed inside a cylindrical crucible 120 on which a solid raw material is loaded. The contamination preventing part 300 is disposed inside the crucible 120 to cover the solid material and prevent contamination inside the crucible. For this purpose, the anti-contamination part 300 may be disposed to cover the opening of the crucible 120.

To FIG. 2, the anti-soiling portion 300 is a cover portion 310. The fixing unit 320 may include a coupling member 400 and a connection member 500.

The cover portion 310 is located inside the crucible 120. The crucible 120 may be disposed at an upper portion of the solid material. The cover part 310 may include a lower surface contacting the solid material and a lower surface contacting the connector unit 400.

The cover portion 310 may be a won-shaped cover. The cover part 310 may cover an opening of the crucible, and the minimum diameter of the cover part 310 may be an inner diameter of the crucible 120 or more. In this case, the cover unit 310 may include plastic vinyl to prevent contamination.

The fixing portion 320 may be disposed above the cover portion 310 and may be disposed on an edge region of the cover portion 310. The fixing unit 320 may fix the cover unit 310 on the solid fuel. , The fixing unit 320 may perform a fixing role so that the cover unit 310 is not removed during the process.

To an embodiment, the fixing portion 320 may be disposed inside the cover portion 310 and may be disposed along a circumference of an edge region of the cover portion 310. In this case, the fixing unit 320 may be arranged in plural. In the embodiment 6, two fixing portions 320 are disclosed, but are not limited thereto.

The fixing portion 320 may be connected to the connector portion 400 and the connection member 500. Each of the fixing units 320 may be connected to the connector unit 400 and the respective connection members 500. Although two connection members 6 are shown by the 320 fixing portions 6, the present invention is not limited thereto.

The fixing portion 320 may include one of polypropylene (Polypropylpropylen, PP), Teflon (Teflon), and quartz.

The connector portion 400 may be disposed in a central region of the cover portion 310. The protrusion 400 may be disposed at an upper portion of the cover portion 310. The connector unit 400 may include a material or a magnet having magnetism. , The connector unit 400 may be connected by a lift unit 200 and a magnetism.

The connector unit 400 prevents dust or foreign materials from contaminating the polysilicon due to an impact when contacting the lift unit 200. The outer surface of the plastic vinyl material can be enveloped.

The connection member 500 may be connected to the connector unit 400 and the plurality of fixing portions 320, respectively. The connection member 500 may be formed of a wire shape, a rope shape, or the like. For example, the connection member 500 may be made of molybdenum (Molololybac).

To FIG. 1, the contamination preventing unit 300 may be positioned at an upper portion of a solid material disposed inside the crucible 120 during initial setup and pressure control in the reactor. , The contamination preventing unit 300 may prevent dust or foreign substances from flowing into the solid material due to the inert gas flow in the process of controlling the initial pressure in the reactor, thereby reducing contamination sources such as carbon.

3 Illustrates a method of removing a contamination preventing portion in a crucible according to an embodiment of the present invention. 4 Illustrates a removal operation of the contamination preventing portion shown in FIG. 3.

As shown in FIG. 3, a lift portion 120 positioned at an upper portion of the crucible 200 may move in a lower direction and be connected with the connector portion 400. In this case, the lift unit 200 and the connector unit 400 may be connected by magnetism.

As the lift portion 200 moves in the upper direction of the crucible 120, the connector portion 400 may also move in the upper direction of the crucible 120.

As shown in FIG. 4, when the connector portion 400 moves in the upper direction of the crucible 120, the fixing portion 400 may move in the center of the upper and lower portions of the crucible 500 by the connection member 320 310 connected to the connector portion 120. That is, the fixing unit 320 may be lifted from the edge region of the cover unit 310. , The edges of the upper surface of the cover portion 310 may be spaced apart from each other.

5 Illustrates a method of removing a contamination preventing portion in a chamber according to an embodiment of the present invention.

As shown in FIG. 5, FIGS. As the contamination preventing portion 300 moves in the upper direction of the crucible 120, the cover portion 310 may have a conical shape that is convex downward. That is, the upper surface of the cover portion 310 becomes a conical inner surface, and the lower surface of the cover portion 310 may be a conical outer surface. When the cover unit 310 is deformed into a conical shape, a contaminant disposed on an upper surface of the cover portion 300 of the pollution prevention portion 310 may be collected into a central region of the conical shape, thereby blocking the ingress of contaminants in response to movement of the anti-contamination portion 300.

In order to remove the contamination preventing part 300 outside the chamber 110, when the cover part 300 of the pollution preventing part 310 is conical, the minimum diameter of the bottom surface of the cover part 120 may be smaller than the inner diameter of the opening of the chamber 110.

For example, when the cover portion 110 of the contamination preventing portion 300 is a conical shape, the diameter of the bottom surface of the conical shape may be smaller than a distance between the protective shield disposed between the opening of the crucible 310 110 and the opening of the chamber 120.

A method of operating the antifouling apparatus having the above structure will now be described.

First, when setup or pressure control of the initial device of the chamber 100 is performed, the contamination preventing portion 120 may be disposed on a solid material disposed in the crucible 300. In this case, the contamination preventing portion 300 may cover the entire opening of the crucible 120 so that dust or a contaminant may not enter the solid material disposed in the crucible 120.

When the process operation is completed, the lift unit 200 may be moved into the crucible 120, and the lift unit 200 may be in contact with the connector unit 400. In this case, the lift portion 200 and the connector portion 400 may be connected by magnetism. In this case, since the lift portion 200 and the connector portion 400 are made of a material for preventing contamination, dust generated when the lift portion 200 is fastened may be resolved.

Then the following equation is used. The lift unit 200 moves upward, and the connector unit 200 connected to the lift unit 400 may move in an upper direction. Here, the fixing portion 400 of the contamination preventing portion 300 connected to the connector portion 320 may be moved to be lifted from the edge of the cover portion 300 of the anti-contamination portion 310. In this case, the pollution prevention part 300 forms a conical shape, and the contaminant material located on the upper surface of the cover part 300 of the anti-pollution part 310 is collected in the center of the cover part 310, thereby secondarily blocking the inflow of dust 300 by the cover part 310 of the pollution prevention part 2.

, The cover portion 300 of the stain preventing portion 310 may be removed from the crucible 120 and the contamination preventing portion 300 may be moved to the outside through an opening in the chamber.

On the other hand, the lift unit 200 having the magnetism described above and the removable contamination preventing unit 300 may be each independently employed. That is, the present invention should be construed as including all the embodiments described above and embodiments combining the embodiments.

, When the ingot is grown in the silicon single crystal growth apparatus, the carbon component is not added, and a single crystal ingot of a desired quality can be produced. Thus, the yield of the single crystal ingot is improved.

Although a few exemplary embodiments of the present invention have been shown and described, the present invention is not limited to the described exemplary embodiments.

As used herein, the term 'and/or' includes any and all combinations of one or more of the associated listed items.