Holding apparatus and substrate breaking apparatus

01-04-2012 дата публикации
Номер:
TW0201214617A
Принадлежит: Mitsuboshi Diamond Ind Co Ltd
Контакты:
Номер заявки: 35-18-10018
Дата заявки: 25-05-2011



The present invention provides a holding apparatus capable of excellently holding a tabular workpiece in a standing gesture and a substrate breaking apparatus having the holding apparatus. The substrate breaking apparatus (1) mainly comprises a conveying unit (50), a non-contact holding unit (80), and a breaking unit (85). The immobilizing mechanism (60) of the conveying unit (50) is in contact with and the outer edge of a workpiece. The non-contact holding unit (80) is not in contact with the main surface of the workpiece. Accordingly, even if the main surface of the held workpiece is unable to be in contact with, it can also hold the workpiece very well and break the workpiece along the ruled line on the substrate at a brittle material substrate.