OZONE GAS GENERATION UNIT AND OZONE GAS SUPPLY SYSTEM
This application is a continuation of U.S. patent application Ser. No. 13/508,233, which is the National Stage of the International Patent Application No. PCT/JP2010/065210, filed Sep. 6, 2010, the disclosures of which are incorporated herein by reference in their entireties. This application claims priority to International Application No. PCT/JP2009/069952, filed Nov. 26, 2009, the disclosure of which is incorporated herein by reference in its entirety. The present invention relates to an ozone gas supply system capable of increasing the quality of a raw gas supplied thereto, increasing the quality of an ozone gas outputted therefrom, and supplying a stable ozone gas to a plurality of ozone treatment apparatuses by controlling the flow rate and the concentration of the gas. In a case of supplying an ozone gas to a multiple ozone treatment apparatus including a plurality of ozone treatment apparatuses, it is generally conceivable to build an ozone gas supply system in which a plurality of ozone generation mechanisms (means) each including an ozone power source, a flow rate controller (MFC), and the like, are provided corresponding to the plurality of ozone treatment apparatuses, respectively, so that the ozone generation mechanisms independently supply an ozone gas to the corresponding ozone treatment apparatuses. A raw gas such as a high-purity oxygen gas having a purity of 99.99% and a dew point of −70° C. or lower is supplied to an ozone generator of each ozone generation mechanism. More specifically, in the ozone gas supply system, an ozone power source, a raw gas pipe system line, an output gas pipe system line, and the like, are provided, and the number of each of them is equal to the number of system lines included in the multiple ozone treatment apparatus. The raw gas pipe system line supplies a raw gas such as a high-purity oxygen gas having a purity of 99.99% and a dew point of −70° C. or lower to the ozone generator via flow rate adjusting means such as an MFC for controlling a flow rate of the ozone gas or the raw gas. The output gas pipe system line includes pressure adjusting means such as an automatic pressure controller (APC) for controlling gas atmosphere pressure in the ozone generator, an ozone concentration detector for detecting a concentration of the ozone gas outputted from the ozone generator, and an ozone flow meter. In a case of supplying an ozone gas to a multiple ozone treatment apparatus including a plurality of ozone treatment apparatuses, it is generally conceivable to build an ozone gas supply system in which a plurality of ozone generation mechanisms each including an ozone power source, a flow rate controller (MFC), and the like, are provided corresponding to the plurality of ozone treatment apparatuses, respectively, so that the ozone generation mechanisms independently supply an ozone gas to the corresponding ozone treatment apparatuses. More specifically, in the ozone gas supply system, an ozone generator, an ozone power source, a raw gas pipe system line, an output gas pipe system line, and the like, are provided, and the number of each of them is equal to the number of system lines included in the multiple ozone treatment apparatus. The raw gas pipe system line supplies a raw gas to the ozone generator via an MFC or the like for controlling a flow rate of the raw gas. The output gas pipe system line includes an ozone concentration detector for detecting a concentration of the ozone gas outputted from the ozone generator, and an ozone flow meter. A very large space is required for building an ozone generation system compatible with such a multiple ozone treatment apparatus, and moreover, a still larger system configuration is required for building a system that supplies an ozone gas while coordinately controlling the multiple ozone treatment apparatus. Thus, there are problems of costs, an installation space, and the like, to cause many disadvantages in a practical use. Therefore, in a conventional method for ozone supply to a multiple ozone treatment apparatus, an ozone gas supply system is adopted in which the capacity of a single-type ozone generator is increased and a pipe system line for outputting an ozone gas is divided into a plurality of pipes, so that an ozone gas having a predetermined flow rate and a predetermined concentration is stepwise outputted to a multiple ozone treatment apparatus, as disclosed in Patent Document 1, for example. The conventional ozone gas supply system for the ozone supply to a multiple ozone treatment apparatus is configured as described above. In the configuration, the raw gas is supplied to the ozone generator, and an ozone gas is outputted from a single ozone generator 71, and an outputting pipe system line is divided into distribution pipes. Therefore, it is necessary that the ozone gas is supplied to the multiple ozone treatment apparatus (ozone treatment apparatuses 12-1 to 12- Additionally, the ozone gas is supplied from the single ozone generator to the multiple ozone treatment apparatus. Accordingly, if the ozone generator breaks down, the ozone gas supply to all the ozone treatment apparatuses is stopped. Thus, there is a problem that the reliability of the ozone gas supply is low. Moreover, as shown in The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a downsized ozone generation unit and an ozone gas supply system including a plurality of such ozone generation units, the ozone generation unit including various functions concerning a raw gas supply and an ozone generation, such as an ozone generator, an ozone power source, and a gas pipe system, and a function for outputting a generated ozone gas An ozone generation unit according to the present invention is an ozone generation unit for supplying, to an ozone treatment apparatus, an ozone gas having been set to a predetermined supply flow rate and a predetermined concentration. The ozone generation unit includes: an ozone generator for generating an ozone gas; an ozone power source for controlling power to be supplied to the ozone generator; and control means associated with the ozone generator. The control means includes at least two means among: flow-rate-detection/flow-rate-adjustment means including a mass flow controller for controlling a flow rate of a raw gas that is inputted to the ozone generator; gas filter means for processing the ozone gas outputted from the ozone generator so as to remove an impurity and a foreign substance therefrom; pressure-detection/pressure-adjustment means including an automatic pressure controller for automatically controlling internal pressure that is pressure in the ozone generator; and ozone concentration detection means including an ozone concentration meter for detecting an ozone concentration value of the ozone gas outputted from the ozone generator. The ozone generation unit further includes: a raw gas supply port for supplying the raw gas from the outside to the ozone generator; an ozone gas output port for outputting, to the outside, the ozone gas obtained from the ozone generator through at least part of the control means; and cooling water inlet/outlet ports for supplying and discharging a cooling water obtained from the outside to the ozone generator. The ozone generation unit is formed as an integrated structure in which the ozone generator, the ozone power source, the control means, the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports are assembled together. In the ozone generation unit of the present invention, the ozone generator, the ozone power source, the control means (at least two means among the flow-rate-detection/flow-rate-adjustment means, the gas filter means, the pressure-detection/pressure-adjustment means, and the ozone concentration detection means), the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports are assembled together into an integrated structure. This can achieve considerable downsizing as compared with a conventional, similar configuration. These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. Hereinafter, an embodiment 1 of the present invention will be described with reference to (Overall Configuration) As shown in The interior of an ozone generator 1 is filled with a gas containing an oxygen gas. An ozone power source 2 included in the ozone gas supply system 10 applies high frequency high voltages HV and LV across electrodes in the ozone generator 1, thus causing dielectric-barrier discharge (silent discharge) between these electrodes. Thereby, a gas existing in a discharge space generates an ozone gas due to the discharging. The ozone power source 2 includes a converter 2 In this embodiment, as a structure of the ozone generator 1, an ozone generator structured to employ the silent discharge is described as a representative. Here, for an ozone generation function, there may be adopted an ozone generator structured to employ creeping discharge or glow discharge, an ozone generator structured to employ super-high frequency or microwave discharge, or an ozone generator employing electrolytic medium. These ozone generators may be adopted. A raw gas having a predetermined raw gas flow rate Q is obtained through a raw gas supply port 14 of the ozone gas supply system 10 and a raw gas supply port 14-2 of the ozone generation unit 7-2, and supplied to the ozone generator 1 with a constant flow rate through a gas flow rate controller (MFC) 3. An ozone generator system is equipped with, as means for keeping the pressure in the ozone generator 1 constant, means for detecting a gas pressure in the generator and a function for finely adjusting the amount of ozone gas outputted by the generator thus detected and thereby keeping the pressure in the ozone generator 1 constant. One of methods therefor is implemented by an automatic pressure adjuster (APC) 4 for automatically adjusting the pressure in the generator to a predetermined pressure. The automatic pressure adjuster (APC) 4 is provided in an ozone gas output pipe gas line of the ozone generator. A specific configuration of the ozone gas output pipe gas line is as follows. An ozone gas generated in the ozone generator 1 passes through a gas filter 51 for removing impurities and foreign substances therefrom, and then through an ozone concentration meter 5 and the automatic pressure adjuster (APC) 4 for automatically adjusting the pressure in the generator to a predetermined pressure. Thereby, the ozone (ozonized oxygen) gas having a predetermined ozone concentration C is continuously outputted from the ozone gas output port 15-2 to the outside of the ozone generation unit 7-2. Sometimes, an ozone-gas flow rate controller (MFC) for keeping the flow rate of the output ozone gas constant is provided in the ozone gas output pipe gas line. In this embodiment, no ozone-gas flow rate controller (MFC) is provided. Accordingly, a flow rate Qx of the output ozone gas is the sum of an ozone flow rate Qc and an flow rate Qn. The ozone flow rate Qc is for the ozone obtained as a result of conversion from the raw gas having the flow rate Q. The flow rate Qn is for a raw material oxygen that has not been converted from the raw gas having the flow rate Q. That is, the flow rate Qx of the ozone (ozonized oxygen) gas is determined by the formula (A): {Qx=F(Q,C) . . . (A)} which is based on the flow rate Q and the ozone concentration C of a raw material (oxygen) gas. By the gas flow rate controller (MFC) 3, the flow rate of the raw gas supplied to the ozone generator is controlled to a constant value. The APC 4 controls the pressure of the ozone gas flowing in an output pipe path for the ozone gas of the ozone generator 1, and thereby automatically controls the gas pressure of the ozone generator 1 to a constant value. The ozone generation unit 7-2 is configured as a package unit as one unit in which a plurality of function means are assembled together, such as the ozone generator 1 having means for generating the ozone gas, the ozone power source 2 having means for supplying predetermined power to the ozone gas, the MFC 3 having means for controlling the flow rate of the supplied raw gas to a constant value, the APC 4 having means for controlling a pressure value of the pressure in the ozone generator 1 to a constant value, the gas filter 51 having means for trapping the impurity gas of the output ozone gas, and the ozone concentration meter 5 having means for detecting an output ozone concentration value. All the ozone generation units 7-1 to 7- Each of the ozone generation units 7 (ozone generation units 7-1 to 7- The system collective management unit 8 provided in the ozone gas supply system 10 receives detection information from each of an exhaust gas sensor 23 and an ozone leak sensor 24. The exhaust gas sensor 23 monitors and keeps a negative pressure state of the interior of the apparatus by vacuuming the interior through an exhaust duct 11. When the system collective management unit 8 receives an abnormal exhaust or an abnormal leakage from the exhaust gas sensor 23 or the ozone leak sensor 24, the system collective management unit 8 causes the system management control part 84 to supply ozone generation unit control signals 86-1 to 86- Also, the system management control part 84 provided in the system collective management unit 8 receives process ozone gas event signals 16-1 to 16- Based on instructions indicated by the process ozone gas event signals 16-1 to 16- As a result, the flow rate and the concentration of an ozone gas outputted from each of the ozone generation units 7-1 to 7- The system collective management unit 8 includes the EMO circuit 81 for stopping the apparatus in emergency, an unit information I/F 82, the user information I/F 83, the system management control part 84, and a main control panel 85. As described above, the EMO circuit 81 is a circuit for monitoring a system error signal obtained from the water leakage sensor 6 of each ozone generation unit 7. To be more specific, when the EMO circuit 81 receives detection information indicating detection of abnormal water leakage from the water leakage sensor 6, the EMO circuit 81 transmits this information to the system management control part 84. Then, the system management control part 84 supplies the ozone generation unit control signal 86 (any one of the ozone generation unit control signals 86-1 to 86- The unit information I/F 82 receives unit information signals 17-1 to 17- As described above, the user information I/F 83 receives the process ozone gas event signals 16-1 to 16- The system management control part 84 outputs the control signal S8 which is a command for controlling the opening/closing of the ozone gas control valves (9 As shown in The ozone gas supply system 10 has the raw gas supply port 14. The raw gas is introduced from the outside into the ozone generation units 7-1 to 7- The ozone gas output ports 15-1 to 15- The process ozone gas event signals 16-1 to 16- The ozone generation units 7-1 to 7- The operation information Y included in the process ozone gas event signal 16 corresponds to a user information signal indicating the breakdown and an operating/stopping state of each ozone treatment apparatus 12 (12-1 to 12- Each of the ozone generation units 7-1 to 7- (Control of Ozone Gas Output Flow Rate Management Unit) As shown in The ozone gas output flow rate management unit 9 is provided therein with the ozone gas control valves 9 The ozone gas control valves 9 An open state and a closed state of each of the ozone gas control valves 9 In The system management control part 84 provided in the system collective management unit 8 controls, by the ozone generation unit control signals 86-1 to 86- Further, the system management control part 84 controls, by the control signal S8, the open and closed states of each of the ozone gas control valves 9 As mentioned above, among the ozone gas on/off valves 22-1 to 22- In this manner, the system management control part 84 causes each of the ozone generation units 7-1 to 7- (Main Control Panel) As shown in In an example shown in Thereby, each of the ozone generation units 7-1 to 7- (Ozone Control Part) As shown in The ozone power source 2 includes a converter 2 In order to control the ozone gas generation (the gas flow rate Q and the ozone concentration C) in the ozone generator 1, the ozone control part 19 applies the high frequency high voltages HV and LV, which are outputted by the high voltage circuit part 2 The ozone control part 19 includes a raw gas flow rate setter 1S1, a selector 1S2, an ozone concentration setter 1S3, analog switches 1S4-A to 1S4-F for controlling ON/OFF of the respective control signals, and inverter devices 1S5-1, 1S5-2 for inverting the respective control signals. The ozone control part 19 further includes a data memory 1S6 and a current signal converter 1S7. The data memory 1S6 stores a set power Ws necessary for generating an optimum amount of ozone in response to the raw gas set flow rate Qs, the set concentration Cs, and a signal including a set pressure Ps of the ozone generator 1. The current signal converter 1S7 converts the set power Ws into a current signal for applying a necessary current to the ozone power source. Additionally, the ozone control part 19 includes a timer 1S8 and a PID control circuit 1S9. The timer 1S8 drives the inverter 2 Moreover, the ozone control part 19 includes an event adjuster 1S10 for receiving the ozone generation unit control signal 86 from the system management control part 84 and adjusting the signal including the set flow rate Qs and the set ozone concentration Cs based on the request ozone flow rate Qs8, the request ozone concentration Cs8, and the operation information Y8 indicated by the ozone generation unit control signal 86. Furthermore, the ozone control part 19 includes a pressure setter 1S11, an initial pulse width setter 1S12, and a current converter 1S13. The initial pulse width setter 1S12 sets, based on the output current of the current signal converter 1S7, an initial pulse width in which the inverter 2 (Data Memory 1S6) As shown in As shown in The data memory 1S6 receives the signal including the set flow rate Qs and the set concentration Cs functioning as the address in the horizontal axis (X-axis) and the vertical axis (Y-axis). In the data memory 1S6, a set power amount W (A11 to A17, . . . , A61 to A67) required for generating a predetermined amount of ozone is written into a memory address which is determined by the address in the X-axis and the Y-axis. The data memory 1S6 outputs the set power amount Ws to the current signal converter 1S7 provided in the ozone control part 19. As a result, the current signal converter 1S7 converts the set power amount Ws into the current signal. The current signal is supplied through the analog switch 1S4-E to the initial pulse width setter 1S12. The initial pulse width setter 1S12 outputs a pulse signal Tw to the inverter 2 As shown in After the elapse of the set time period To, the timer 1S8 performs a time control so that the control is switched to the PID control by the PID control circuit 1S9. The PID control circuit 1S9 slightly varies a pulse width ΔTw of the pulse signal Tw based on the current signal (the signal determined based on the result of comparison between the ozone gas concentration C (detected by the ozone concentration meter 5) and the gas set concentration Cs) supplied from the current converter 1S13. Thereby, the PID control circuit 1S9 performs the PID control of the power applied to the inverter 2 Hereinafter, a concentration control shown in Triggered by an input of an operation command (not shown), the event adjuster 1S10 activates the timer 1S8. At this time, the event adjuster 1S10 controls the selector 1S2 so as to select the raw gas set flow rate Qs of the raw gas flow rate setter 1S1, and brings the analog switches 1S4-A and 1S4-D into the ON state while bringing the analog switches 1S4-B and 1S4-C into the OFF state. On the other hand, the timer 1S8, immediately after being activated, brings the analog switch 1S4-E into the ON state while bringing the analog switch 1S4-F into the OFF state. Thus, the data memory 1S6 obtains the set pressure Ps from the pressure setter 1S11, the raw gas set flow rate Qs from the raw gas flow rate setter 1S1, and the raw gas set concentration Cs from the ozone concentration setter 1S3. Consequently, as described above, the data memory 1S6 outputs the set power amount Ws to the current signal converter 1S7. As a result, the initial pulse width setter 1S12 generates the pulse signal Tw having the initial pulse width. The ON/OFF of the inverter 2 In this manner, within the set time period To for which the timer 1S8 is in an operation state, an initial control is performed based on the set power amount Ws supplied from the data memory 1S6. Then, if the set time period To has elapsed after the timer 1S8 is activated, the initial state ends, and the analog switch 1S4-E is switched to the OFF state while the analog switch 1S4-F is switched to the ON state. Thus, the PID control circuit 1S9 performs the PID control on the ozone power source 2. The PID control is mainly for, based on the current signal supplied from the current converter 1S13, causing a slight displacement (ΔTw) of the pulse width of the pulse signal Tw so as to reflect the result of comparison between the ozone concentration C obtained by the ozone concentration meter 5 and the gas set concentration Cs. Here, also based on a current I detected by the current sensor 2 Next, a description will be given to an operation of only the ozone generation unit 7, which is based on the ozone generation unit control signal 86. Triggered by an input of the ozone generation unit control signal 86 indicating the request ozone flow rate Qs8, the request ozone concentration Cs8, and the operation information Y8, the event adjuster 1S10 activates the timer 1S8. At this time, the analog switches 1S4-A and 1S4-D are brought into the OFF state, and the analog switches 1S4-B and 1S4-C are brought into the ON state. On the other hand, the timer 1S8, immediately after being activated, brings the analog switch 1S4-E into the ON state while bringing the analog switch 1S4-F into the OFF state. The request ozone flow rate Qs8 and the request ozone concentration Cs8 are determined by the system management control part 84 based on the request ozone flow rate Qs12 and the request ozone concentration Cs12 that are indicated by the process ozone gas event signals 16-1 to 16- Thus, the data memory 1S6 obtains the set pressure Ps from the pressure setter 1S11, and the request ozone flow rate Qs8 and the request ozone concentration Cs8 indicated by the ozone generation unit control signal 86 which serve as the set flow rate Qs and the set concentration Cs. Consequently, as described above, the data memory 1S6 outputs the set power amount Ws to the current signal converter 1S7. As a result, the initial pulse width setter 1S12 generates the pulse signal Tw having the initial pulse width. In this manner, also by the input of the ozone generation unit control signal 86, the initial control is performed based on the set power amount Ws supplied from the data memory 1S6 within the set time period To for which the timer 1S8 is in the operation state. Then, if the set time period To has elapsed after the timer 1S8 is activated, the initial state ends, and the analog switch 1S4-E is switched to the OFF state while the analog switch 1S4-F is switched to the ON state. Thus, the PID control circuit 1S9 performs the PID control on the ozone power source 2. The PID control is mainly for, based on the current signal supplied from the current converter 1S13, causing a slight displacement (ΔTw) of the pulse width of the pulse signal Tw. As thus far described, the ozone control part 19 performs the initial control and the PID control on the ozone power source 2. In In the same manner, ozone concentration characteristics L12 represent the ozone concentration characteristics obtained when the flow rate Q of the ozone gas supply is 2.5 SLM. In this case, by making the received power variable in a range of 100 W to 2.0 kW, the ozone concentration can be variably set in a range of about 0 g/m3to 360 g/m3. Ozone concentration characteristics L13 represent the ozone concentration characteristics obtained with the flow rate Q of the ozone gas supply is 5.0 SLM. Ozone concentration characteristics L14 represent the ozone concentration characteristics obtained when the flow rate Q of the ozone gas supply is 7.5 SLM. Ozone concentration characteristics L15 represent the ozone concentration characteristics obtained with the flow rate Q of the ozone gas supply is 10 SLM. Ozone concentration characteristics L16 represent the ozone concentration characteristics obtained when the flow rate Q of the ozone gas supply is 20 SLM. Ozone concentration characteristics L17 represent the ozone concentration characteristics obtained when the flow rate Q of the ozone gas supply is 30 SLM. In a case where the ozone gas is supplied from one ozone generation unit 7 with a flow rate Q of 5 SLM, the maximum ozone concentration generated by the received power 2.5 kW is 350 g/m3(see the ozone concentration characteristics L13). In a case where the ozone gas is supplied with a flow rate Q of 7.5 SLM, the maximum ozone concentration generated by the received power 2.5 kW is 300 g/m3(see the ozone concentration characteristics L14). In a case where the ozone gas is supplied with a flow rate Q of 10 SLM, the maximum ozone concentration generated by the received power 2.5 kW is only 280 g/m3(see the ozone concentration characteristics L15). In a case where the ozone gas is supplied with a flow rate Q of 20 SLM, the maximum ozone concentration generated by the received power 2.5 kW is only 180 g/m3(see the ozone concentration characteristics L16). In a case where the ozone gas is supplied with a flow rate Q of 30 SLM, the maximum ozone concentration generated by the received power 2.5 kW is only 140 g/m3(see the ozone concentration characteristics L17). In order to maintain an ozone concentration of 280 g/m3in the ozone generation unit 7 including the ozone power source 2 with a received power of 2.5 kW, the highest possible flow rate of the supply by one ozone generator 1 is 10 SLM. In other words, in order to satisfy an ozone concentration of 280 g/m3by using one ozone generator 1, the ozone gas cannot be supplied with a flow rate equal to or higher than 10 SLM. On the other hand, the ozone gas supply system 10 of this embodiment adopts an output ozone gas output control method in which the ozone gas output flow rate management unit 9 can selectively output one or more of n ozone gas outputs supplied from the n ozone generation units 7-1 to 7- Therefore, in the ozone gas supply system 10 of the embodiment 1, by controlling the opening/closing of the ozone gas control valves 9 Additionally, if the flow rate of the raw gas is 10 SLM in the ozone generation unit 7, the maximum outputtable ozone concentration is 280 g/m3. However, the ozone concentration can be increased by using the control of opening/closing of the ozone gas control valves 9 For example, if the opening/closing of the ozone gas control valves 9 In the ozone gas supply system 10 of this embodiment that adopts the output ozone gas output control method in which the n ozone generation units 7 are mounted and the ozone gas output flow rate management unit 9 is formed, breakdown of any of the ozone generation units 7-1 to 7- For example, in a case where the ozone generation unit 7-2 corresponding to the ozone treatment apparatus 12-2 is broken down, the ozone gas supplied from the ozone generation unit 7-1 can be supplied to the ozone treatment apparatus 12-2 by bringing the ozone gas control valves 9 Furthermore, even though any of the n ozone treatment apparatuses 12-1 to 12- (Effects, etc.) In the embodiment 1 described above, one ozone gas supply system 10 includes the plurality of ozone generation units 7-1 to 7- In the ozone gas supply system 10, the ozone gas output flow rate management unit 9 is provided in which the on/off valve (ozone gas control valves 9 The ozone gas supply system 10 of the embodiment 1 includes the system collective management unit 8 (ozone gas output flow rate management unit) that can control the ozone gas output flow rate so that one or a combination of two or more of the plurality of ozone gas outputs from the ozone generation units 7-1 to 7- Accordingly, by bringing the ozone gas control valves 9 Additionally, as shown in Moreover, even if trouble occurs in a part of the ozone generation units 7-1 to 7- In this manner, the ozone gas supply system 10 controls the ozone gas output flow rate management unit 9 based on the control signal S8 supplied from the system management control part 84, to perform a combination/selection process for combining and selecting ozone gas outputs from the ozone generation units 7-1 to 7- In the ozone gas supply system 10 of the embodiment 1, the ozone gas control valves 9 The system collective management unit 8 includes the water leakage sensor 6, the EMO circuit 81, the unit information I/F 82, the system management control part 84, and the like. Thereby, in a case where an emergency stop or water leakage is detected in any of the ozone generation units 7-1 to 7- Furthermore, the exhaust gas sensor 23, the ozone leak sensor 24, the system management control part 84, and the like, are provided. Thereby, in a case where an abnormal exhaust or ozone abnormal leakage is detected in the system as a whole, all the ozone generation units 7-1 to 7- In this manner, the ozone gas supply system 10 of the embodiment 1 has a safety shutdown function in case of trouble of each ozone generation unit 7, trouble of the entire ozone gas supply system 10, and the like. Thus, a system with a high security can be achieved. An embodiment 2 is characterized by focusing on the ozone generation unit 7 as one unit corresponding to each of the ozone generation units 7-1 to 7- Hereinafter, downsizing of the ozone generation unit 7X will be described with reference to In the ozone generation unit 7X shown in Additionally, a raw gas pipe (raw gas supply port 14) and an output gas pipe system (ozone gas output port 15) are integrated into a gas pipe integrated block 30 as a gas pipe integrated block structure. Thereby, the ozone generator 1, the ozone power source 2, and the gas pipe system can be packaged, and thus the ozone generation unit 7X can be further downsized. Therefore, even if, as in the ozone gas supply system 10 of the embodiment 1, a plurality of ozone generation units 7X are mounted as the ozone generation units 7-1 to 7- (Compactification of Ozone Power Source 2) In order to obtains a desired amount of ozone generation, the ozone generator 1 requires a necessary area as a discharge area for generation of ozone. Therefore, to reduce an occupied area of the generator, a thin electrode cell is formed and moreover a cross-sectional area of one electrode cell is reduced. Thereby, the ozone generator 1 of multi-layered electrode cell type is formed. This can achieve the ozone generator 1 with a very small occupied area. The ozone power source 2 includes the converter 2 The converter 2 To be specific, the rectifier circuit 2 The chopper circuit part 2 The high voltage circuit part 2 Furthermore, the high voltage transformer Tr is adapted to a high frequency of several tens of kHz. Thereby, the transformer can be formed using a ferrite core having a light weight and good high frequency characteristics. To reduce an installation area of the transformer Tr and to ensure a predetermined capacity of the transformer, a plurality of small transformers are connected in parallel. The plurality of (in the drawing, three) transformers are vertically installed, thus achieving the very small high voltage circuit part 2 (Combined Structure of Ozone Generation Unit) In As shown in The gas supply pipe system including the MFC 3 for supplying the raw gas, the ozone gas output pipe system for outputting the ozone gas to the outside via the gas filter 51, the ozone concentration meter 5, and the APC 4, and a cooling pipe system (the cooling water inlet port 13A, the cooling water outlet port 13B) for cooling the electrodes of the ozone generator 1 are necessary for the ozone generator 1. These pipe systems have to be arranged three-dimensionally. Therefore, if the components are connected by existing gas pipes, cooling pipes, and the like, the number of connection joints for connecting the pipes and the components is increased. It is necessary to ensure a connection space for connecting the joints. Thus, in order to connecting these pipe systems, a very large space is required. Conventionally, a pipe unit separate from the ozone generation unit (ozone generator) is provided, for example, at the rear side, and the generator unit and the pipes are connected at the rear side. Therefore, it has been difficult to integrate the ozone generation unit with the gas supply pipe system, the ozone gas output pipe system, and the cooling pipe system 13A, 13B. In the embodiment 2, these pipe systems are assembled together into the single gas pipe integrated block 30, and pipe paths for the gas supply pipe, the ozone gas output pipe, and the cooling pipe are incorporated in the gas pipe integrated block 30. This gas pipe integrated block 30 has a three-dimensional structure, and at respective surfaces thereof, the ozone generator 1, the MFC 3, the gas filter 51, the ozone concentration meter 5, and the APC 4 (hereinafter, these may be collectively referred to as “ozone generator 1 and the like”) are adjacently arranged. A connecting portion between the ozone generator 1 and the like and the gas pipe integrated block 30 is, for example, screwed via an O-ring, thereby keeping air-tightness to ensure highly accurate pipe paths. As a result, the ozone generator 1 and the like can be arranged integrally with the gas pipe integrated block 30. Additionally, the components of the ozone generator 1 and the like can be mounted and dismounted easily, thus improving maintainability. In this manner, in the ozone generation unit 7X of the embodiment 2, the ozone generator 1 and the like are mounted in close contact with the gas pipe integrated block 30. In the following, a description will be given to the pipe paths in the ozone generation unit 7X which utilizes the gas pipe integrated block 30 shown in The MFC 3 is interposed between MFC mounting blocks 33, 33 and thereby mounted to the gas pipe integrated block 30. The APC 4 is interposed between APC mounting blocks 34, 34 and thereby mounted to the gas pipe integrated block 30. The ozone concentration meter 5 is interposed between ozone concentration meter mounting blocks 35, 35 and thereby mounted. In these mounting blocks 33 to 35, in-block passages B3 to B5 for ensuring the pipe paths are formed. The gas filter 51 is mounted to the gas pipe integrated block 30 by using a gas filter mounting block 31. A raw gas input pipe path for a raw gas Gm to be supplied from the raw gas supply port 14 through the MFC 3 to an ozone generator input part ET1 of the ozone generator 1 is a path formed by the raw gas supply port 14, the pipe path R30 An ozone gas output pipe for an ozone gas outputted from the ozone generator 1 and received by the ozone generator output part EX1 to be outputted from the ozone gas output port 15 through the gas filter 51, the ozone concentration meter 5, and the APC 4 is a path formed by the ozone generator output part EX1, the pipe path R30 The gas control unit 400 is provided therein with an MFC 73, an APC 74, an ozone concentration meter 75, and a gas filter 91. The inverter control unit 500 is provided therein with a converter 2 The inside of the converter 2 In a conventional ozone gas supply system or a conventional ozone generation apparatus, as shown in As shown in In this manner, each of the ozone generation units 7-1 to 7- As a result, as in the embodiment 1, a plurality of the ozone generation units 7X can be installed within the ozone gas supply system 10, and by connecting the output pipes of the ozone generation units 7X by the gas control valve 9, the supply of the ozone gas can be distributed among the respective ozone treatment apparatuses 12 including the ozone treatment apparatuses 12-1 to 12- Thus, the ozone generation unit 7X of the embodiment 2 is formed as an integrated structure in which the ozone generator 1, the ozone power source 2, the MFC 3, the gas filter 51, the APC 4, the ozone concentration meter 5, the raw gas supply port 14, the ozone gas output port 15, the cooling water inlet port 13A, and the cooling water outlet port 13B are assembled together. This can achieve considerable downsizing as compared with the similar, conventional configuration. Additionally, the gas pipe integrated block 30 of the ozone generation unit 7X has the pipe paths R30 In this manner, by downsizing each of the ozone generation units 7-1 to 7- As a result, as in the embodiment 1, a plurality of the ozone generation units 7X can be installed within the ozone gas supply system 10, and by connecting the output pipes of the ozone generation units 7X by the gas control valve 9, the supply of the ozone gas can be distributed among the respective ozone treatment apparatuses 12 including the ozone treatment apparatuses 12-1 to 12- Similarly to the embodiment 2, an embodiment 3 is characterized by focusing on the ozone generation unit 7 as one unit, and achieving downsizing of the ozone generation unit 7 in combination with the ozone gas output flow rate management unit 9. (Control Ozone Gas Output Flow Rate Management Unit) As shown in The ozone gas control valves 9 The ozone gas control valve 9 Furthermore, the output is made from output parts (at the right side in Accordingly, the ozone gas output flow rate management unit 9Y has the ozone gas control valves 9 The ozone gas on/off valves 22-1 to 22- In the ozone gas control valves 9 A control signal S8 In this manner, the open state and the closed state of the ozone gas control valves 9 In In other words, based on the ozone generation unit control signals 86-1 to 86- On the other hand, among the ozone gas on/off valves 22-1 to 22- In this manner, the ozone generation units 7-1 to 7- (Combined Structure of Ozone Generation Unit) As shown in In the ozone gas control valve accommodation part 931, an ozone gas control valve 90 In the embodiment 3, similarly to the embodiment 2, all of the gas supply pipe system, the ozone gas output pipe system, and the cooling pipe systems 13A and 13B are assembled together into the single gas pipe integrated block 30. The component parts of the ozone gas output flow rate management unit 9Y are combined so that pipe paths for a gas supply pipe, an ozone gas output pipe, and a cooling pipe are incorporated in the gas pipe integrated block 30. Substantially in the same manner as in the ozone generation unit 7X of the embodiment 2, a raw gas input pipe path for a raw gas Gm to be supplied from the raw gas supply port 14 through the MFC 3 to an ozone generator input part ET1 of the ozone generator 1 is a path formed by the raw gas supply port 14, the pipe path R30 The ozone gas output pipe extending from the ozone generator output part EX1 of the ozone generator 1 through the gas filter 51, the ozone concentration meter 5, and the APC 4 to the block main body 930 In the block main body 930 The other parts, pipe paths, and the like, of the configuration are identical to those of the ozone generation unit 7X shown in In the ozone gas supply system 20 of the embodiment 3, the plurality of ozone gas control valve accommodation parts 931 and 932 accommodating the ozone gas control valves 90 This exerts an effect that, in the ozone gas supply system 20, the combined structure of the ozone gas output flow rate management unit 9Y and the ozone generation units 7-1 to 7- In this manner, in the ozone generation unit 7Y of the embodiment 3 has, in addition to the features of the ozone generation unit 7X of the embodiment 2, most part of the component parts of the ozone gas output flow rate management unit 9 and the gas pipe integrated block 30 are integrated to thereby achieve further downsizing as compared with a case where the ozone generation unit 7X and the ozone gas output flow rate management unit 9 of the embodiment 2 are separately provided. (Overall Configuration) As shown in In the following, among the ozone generation units 7-1 to 7- The raw gas is supplied from the raw gas supply port 14 of the ozone gas supply system 101 through the moisture removal filter 59, the raw gas supply port 14-2, and the MFC 3, to the ozone generator 1 in the ozone generation unit 7-2. The interior of the ozone generator 1 is filled with a high-purity gas (raw material gas) containing an oxygen gas. The ozone power source 2 included in the ozone gas supply system 101 applies high frequency high voltages HV and LV across electrodes in the ozone generator 1, thus causing dielectric-barrier discharge (silent discharge) between these electrodes. Thereby, due to the discharging, the oxygen gas is dissociated from a gas existing in a discharge space to cause an oxygen atom. A chemical bond between this oxygen atom and the oxygen gas (oxygen molecule) causes an ozone gas as shown in the following formulas (1) and (2). The ozone power source 2 includes a converter 2 The oxygen gas (O2) of the raw gas and the silent discharge causes a chemical reaction as shown in the above-mentioned formulas (1) and (2), to generate an ozone gas (O3). The raw gas contains not only the oxygen gas but also about 1 to 2 PPM (1014/cm3) impurities such as a nitrogen gas (N2). A moisture content in the raw gas is about 1 PPM (1014/cm3) to 10 PPM (1015/cm3) as shown in From these compound gases, an active gas is generated through particularly a process as shown in the following formulas (3) to (7). The active gas is very active so that a corrosion chemical reaction on a metal surface occurs at portions, in contact with the ozone gas, of the pipe path for extracting the ozone gas, the APC 4, the MFC 3, the gas opening/closing valve (valve), and the like. Thus, heat generation and metal corrosion occurs in the components, which causes breakdown of the above-mentioned components and the like. Moreover, the outputted ozone gas itself becomes a gas containing a large amount of metal contamination caused as a result of the metal corrosion. Thus, the quality of the ozone gas is deteriorated. As described above, through the chemical reaction shown in the formulas (3) and (4), a nitric acid cluster gas (HNO3) is generated by a water-splitting reaction, and through the chemical reaction shown in the formulas (5) to (7), an OH radical gas is generated. Due to the moisture contained in the raw gas, the nitric acid cluster gas, the OH radical, the OH radical ion, and the like, that are shown in the chemical formulas (3) to (7) mentioned above are very active, a relatively long-lived gas is generated in the ozone generator 1, and outputted together with the generated ozone gas. It has become apparent from an experiment and the like, that this causes a corrosion chemical reaction on a metal surface to occur at portions, in contact with the ozone gas, of the pipe path, the APC 4, the MFC 3, the gas opening/closing valve, and the like, to consequently cause heat generation and metal corrosion of the components so that breakdown of the above-mentioned components and the like occurs. Therefore, it has become apparent that reducing the moisture content in the raw gas supplied to the ozone gas is important in order to reduce the amount of these active gases generated. The impurities such as the nitrogen gas contained in the raw gas and the moisture content therein are, in a normal state, determined by the amount of ingredients in the gas. However, in an apparatus actually running, a nitrogen gas and a moisture is adhering also to a pipe of a gas supply part or the like at a time of starting the operation of the apparatus or at a transition time for a maintenance or the like. If these adhering nitrogen gas and moisture discharged together with the raw gas, an amount of impurities and moisture content exceeding 1 to 2 PPM enters the ozone generator 1. As a result, the gases having the adverse effects described above are contained in the ozone gas and outputted. In view of the above-described points, it has been found that it is very effective to provide the moisture removal filter 59 for removing, by adsorption or the like, a moisture in the raw gas supply near the raw gas supply port 14 in the ozone gas supply system 101, in order to remove the moisture contained in the raw gas that is supplied to the ozone generator 1. The moisture removal filter 59 is achieved by using a silica gel or heating of a heater for the adsorption. As the capability of the moisture removal filter 59, the moisture removal filter 59 capable of reducing the moisture content in the raw gas to less than 300 PPB produced a preferable result. In this embodiment, as a structure of the ozone generator 1, an ozone generator structured to employ the silent discharge is described as a representative. Here, for an ozone generation function, there may be adopted an ozone generator structured to employ creeping discharge or glow discharge, an ozone generator structured to employ super-high frequency or microwave discharge, or an ozone generator employing electrolytic medium. These ozone generators may be adopted. In order to obtain a stable output of the ozone, it is important to limit gas types of the raw gas supplied to the ozone generator 1, and particularly to suppress a moisture content in the raw gas, and also it is important to provide a function for constantly adjusting environmental conditions such as a flow rate value, the gas pressure in the ozone generator, the temperature of water for cooling the electrodes, the amount of water, and the like. To be specific, the moisture removal filter 59 is used to suppress the moisture content in the raw gas. The MFC 3 is used to adjust the flow rate value. The APC 3 is used to adjust the gas pressure in the ozone generator 1. The cooling function exerted by the cooling water supplied from the cooling water inlet ports 13 The raw gas having a predetermined raw gas flow rate Q is obtained from the raw gas supply port 14 of the ozone gas supply system 101, the moisture removal filter 59, and the raw gas supply port 14-2 of the ozone generation unit 7-2, and supplied to the ozone generator 1 with a constant flow rate through the gas flow rate controller (MFC) 3. An ozone generator system is equipped with, as means for keeping the pressure in the ozone generator 1 constant, means for detecting a gas pressure in the generator and a function for finely adjusting the amount of ozone gas to be outputted to the generator thus detected and thereby keeping the pressure in the ozone generator 1 constant. One of methods therefor is implemented by an automatic pressure adjuster (APC) 4 for automatically adjusting the pressure in the generator to a predetermined pressure. The automatic pressure adjuster (APC) 4 is provided in an ozone gas output pipe gas line of the ozone generator. A specific configuration of the ozone gas output pipe gas line is as follows. An ozone gas generated in the ozone generator 1 passes through a gas filter 51 for removing impurities and foreign substances therefrom, and then through an ozone concentration meter 5 and the automatic pressure adjuster (APC) 4 for automatically adjusting the pressure in the generator to a predetermined pressure. Thereby, the ozone (ozonized oxygen) gas having a predetermined ozone concentration C is continuously outputted from the ozone gas output port 15-2 to the outside of the ozone generation unit 7-2. Sometimes, an ozone-gas flow rate controller (MFC) for keeping the flow rate of the output ozone gas constant is provided in the ozone gas output pipe gas line. In this embodiment, no ozone-gas flow rate controller (MFC) is provided. Accordingly, a flow rate Qx of the output ozone gas is the sum of an ozone flow rate Qc and an flow rate Qn. The ozone flow rate Qc is for the ozone obtained as a result of conversion from the raw gas flow rate Q. The flow rate Qn is for a raw material oxygen that has not been converted from the raw gas flow rate Q. That is, the flow rate Qx of the ozone (ozonized oxygen) gas is determined by the formula (A): {Qx=F(Q,C) . . . (A)} which is based on the flow rate Q and the ozone concentration C of a raw material (oxygen) gas. By the gas flow rate controller (MFC) 3, the flow rate of the raw gas supplied to the ozone generator is controlled to a constant value. The APC 4 controls the pressure of the ozone gas flowing in an output pipe path for the ozone gas of the ozone generator 1, and thereby automatically controls the gas pressure of the ozone generator 1 to a constant value. The ozone generation unit 7-2 is configured as a package unit as one unit in which a plurality of function means are assembled together, such as the ozone generator 1 having means for generating the ozone gas, the ozone power source 2 having means for supplying predetermined power to the ozone gas, the MFC 3 having means for controlling the flow rate of the supplied raw gas to a constant value, the APC 4 having means for controlling a pressure value of the pressure in the ozone generator 1 to a constant value, the gas filter 51 having means for trapping the impurity gas of the output ozone gas, and the ozone concentration meter 5 having means for detecting an output ozone concentration value. All the ozone generation units 7-1 to 7- The MFC 3, the APC 4, the ozone concentration meter 5, and the gas filter 51 constitute the control means associated with the ozone generator 1. In terms of supplying a stable ozone gas, it is desirable the control means includes at least two means among the MFC 3, the APC 4, the ozone concentration meter 5, and the gas filter 51. Each of the ozone generation units 7 (ozone generation units 7-1 to 7- The system collective management unit 8 provided in the ozone gas supply system 101 receives detection information from each of an exhaust gas sensor 23 and an ozone leak sensor 24. The exhaust gas sensor 23 monitors and keeps a negative pressure state of the interior of the apparatus by vacuuming the interior through an exhaust duct 11. When the system collective management unit 8 receives an abnormal exhaust or an abnormal leakage from the exhaust gas sensor 23 or the ozone leak sensor 24, respectively, the system collective management unit 8 causes the system management control part 84 to supply ozone generation unit control signals 86-1 to 86- Also, the system management control part 84 provided in the system collective management unit 8 receives process ozone gas event signals 16-1 to 16- Based on instructions indicated by the process ozone gas event signals 16-1 to 16- As a result, the flow rate and the concentration of an ozone gas outputted from each of the ozone generation units 7-1 to 7- The system collective management unit 8 includes the EMO circuit 81 for stopping the apparatus in emergency, an unit information I/F 82, the user information I/F 83, the system management control part 84, and a main control panel 85. As described above, the EMO circuit 81 is a circuit for monitoring a system error signal obtained from the water leakage sensor 6 of each ozone generation unit 7. To be more specific, when the EMO circuit 81 receives detection information indicating detection of abnormal water leakage from the water leakage sensor 6, the EMO circuit 81 transmits this information to the system management control part 84. Then, the system management control part 84 supplies the ozone generation unit control signal 86 (any one of the ozone generation unit control signals 86-1 to 86- The unit information I/F 82 has a function for receiving unit information signals 17-1 to 17- As described above, the user information I/F 83 has a function for receiving the process ozone gas event signals 16-1 to 16- The system management control part 84 outputs the control signal S8 which is a command for controlling the opening/closing of the ozone gas control valves (9 As shown in The amount and the temperature of the cooling water supplied from the external cooling system are controlled to constant values, though details thereof will not be described here. The ozone gas supply system 101 has the raw gas supply port 14. The raw gas is introduced from the outside into the ozone generation units 7-1 to 7- The ozone gas output ports 15-1 to 15- The process ozone gas event signals 16-1 to 16- The ozone generation units 7-1 to 7- The operation information Y included in the process ozone gas event signal 16 corresponds to a user information signal indicating the breakdown and an operating/stopping state of each ozone treatment apparatus 12 (12-1 to 12- Each of the ozone generation units 7-1 to 7- (Control of Ozone Gas Output Flow Rate Management Unit) The configuration and the operation of the ozone gas output flow rate management unit 9 of the ozone gas supply system 101 are the same as those of the ozone gas output flow rate management unit 9 of the ozone gas supply system 10 according to the embodiment 1 shown in (Main Control Panel) The main control panel 85 of the ozone gas supply system 101 is the same as the main control panel 85 of the ozone gas supply system 10 according to the embodiment 1 shown in (Ozone Control Part (Data Memory 1S6)) The configuration and the operation of the ozone control part 19 of the ozone gas supply system 101, including the data memory 1S6, are the same as those of the ozone control part 19 and the data memory 1S6 of the ozone gas supply system 10 according to the embodiment 1 shown in (Effects, etc.) In the embodiment 4 described above, the moisture removal filter 59 is mounted to the raw gas supply port 14, and one ozone gas supply system 101 includes the plurality of ozone generation units 7-1 to 7- In the ozone gas supply system 101, the ozone gas output flow rate management unit 9 is provided in which the on/off valve (ozone gas control valves 9 The ozone gas supply system 101 of the embodiment 4 includes the system collective management unit 8 (ozone gas output flow rate management unit) that can control the ozone gas output flow rate so that one or a combination of two or more of the plurality of ozone gas outputs from the ozone generation units 7-1 to 7- Accordingly, due to the moisture removal filter 59 provided in the ozone gas supply system 101, the moisture content in the raw gas supplied from the raw gas supply port 14 can be reduced from about 1 to 10 PPM to about 10 to 100 PPB. This can reduce the active gases generated together with the ozone generation due to the moisture, the impurities, and the silent discharge, such as the nitric acid cluster (HNO3) gas, the OH radical gas, the OH radical ion gas, and the HO3+ ion gas. This can consequently suppress wear or breakdown of the APC 4, the MFC 3, and the ozone concentration meter 5 (ozone monitor) provided at the ozone gas output part of the ozone generator 1, the gas opening/closing valve (valve), and the ozone treatment apparatuses 12-1 to 12- Moreover, a high-quality ozone gas containing a small amount of the nitric acid cluster (HNO3), the OH radical gas, and the metal contamination can be provided as the outputted ozone gas. In this manner, in the ozone gas supply system 101 of the embodiment 4, the moisture removal filter 59 is provided having the function capable of trapping a small amount of moisture contained in the raw gas that is supplied to the raw gas supply port 14. This exerts an effect that the moisture content in the raw gas supplied to the ozone generator 1 is reduced to less than 300 PPB by the moisture removal filter 59 to thereby achieve a supply of a high-quality ozone gas. As described above, in the ozone gas supply system 101 of the embodiment 5, the moisture removal filter 59 is mounted. As a result, the ozone gas having a higher dew point is provided, and additionally, the mounted moisture removal filter 59 can remove the moisture content. This exerts an effect that a time for flowing a purge gas prior to the ozone gas generation can be considerably shortened so that a time for the start up of the apparatus can be considerably shortened. Moreover, by bringing the ozone gas control valves 9 In the ozone gas supply system 101 of the embodiment 4, similarly to the embodiment 1, as shown in Moreover, even if trouble occurs in a part of the ozone generation units 7-1 to 7- In this manner, the ozone gas supply system 101 of the embodiment 4, similarly to the ozone gas supply system 10 of the embodiment 1, controls the ozone gas output flow rate management unit 9 based on the control signal S8 supplied from the system management control part 84, to perform a combination/selection process for combining and selecting ozone gas outputs from the ozone generation units 7-1 to 7- In the ozone gas supply system 101 of the embodiment 4, the ozone gas control valves 9 The system collective management unit 8 includes the water leakage sensor 6, the EMO circuit 81, the unit information I/F 82, the system management control part 84, and the like. Thereby, in a case where an emergency stop or water leakage is detected in any of the ozone generation units 7-1 to 7- Furthermore, the exhaust gas sensor 23, the ozone leak sensor 24, the system management control part 84, and the like, are provided. Thereby, in a case where an abnormal exhaust or ozone abnormal leakage is detected in the system as a whole, all the ozone generation units 7-1 to 7- In this manner, the ozone gas supply system 101 (first aspect) of the embodiment 4 has a safety shutdown function in case of trouble of each ozone generation unit 7, trouble of the entire ozone gas supply system 101, and the like. Thus, a system with a high security can be achieved. In a second aspect of the embodiment 4, similarly to the embodiment 2 shown in (Compactification of Ozone Power Source 2) In the embodiment 4, too, by adopting the circuit configuration of the embodiment 1 shown in (Combined Structure of Ozone Generation Unit) In the embodiment 4, similarly to the embodiment 1 shown in In a conventional ozone gas supply system or a conventional ozone generation apparatus, as shown in Moreover, since the raw gas included in an installed utility is directly supplied to the ozone gas supply system, there is no means for suppressing the moisture content in the raw gas that is supplied to the ozone generator, which cause a high rate of breakdown of a gas control equipment provided in the ozone gas output part. In the second aspect of the embodiment 4, similarly to the embodiment 1, as shown in In this manner, similarly to the embodiment 1, each of the ozone generation units 7-1 to 7- As a result, as in the embodiment 4, a plurality of the ozone generation units 7X can be installed within the ozone gas supply system 10, and by connecting the output pipes of the ozone generation units 7X by the gas control valve 9, the supply of the ozone gas can be distributed among the respective ozone treatment apparatuses 12 including the ozone treatment apparatuses 12-1 to 12- In a third aspect of the embodiment 4, similarly to the embodiment 3 shown in (Control of Ozone Gas Output Flow Rate Management Unit) The third aspect of the embodiment 4 can be achieved by adopting the ozone gas supply system 20 of the embodiment 3 shown in (Combined Structure of Ozone Generation Unit) The third aspect of the embodiment 4 can be achieved by configuring each of the ozone generation units 7-1 to 7- In an ozone gas supply system 102 of the embodiment 5, similarly to the ozone gas supply system 101 of the embodiment 4, moisture removal filters 59-1 to 59- Particularly, in the ozone generation units 7-1 to 7- (Raw Gas Purity Management) As shown in The moisture is contained in the air, too. Therefore, when a part of the pipes in the raw gas pipe path is opened to the air, a moisture immediately adsorbs to a pipe surface. If the raw gas flows in the raw gas pipe to which the moisture adsorbs, not only the moisture contained in the high-purity raw gas but also the moisture adhering to the pipe are separated by the gas flow, so that the dew point of the supplied raw gas rises as shown in If a moisture or an impurity gas such as a nitrogen-based gas, a carbon-based gas, or a sulfide gas is contained in the raw gas, not only the ozone gas but also N radical and OH radical gases are generated by discharging. These radical gases are combined with the moisture, thus outputting the ozone gas that contains cluster molecule gases of nitric acid and OH radical. Since these cluster molecule gases of nitric acid and OH radical are very active gases, a chemical reaction occurs on a metal surface of the ozone-gas output gas pipe, the valve, or the like, to cause corrosion of the pipe surface. This may cause a corroded-metal impurity (metal contamination) to be contained in the output ozone gas. Increase in the amount of the metal impurity (metal contamination) contained in the output ozone gas deteriorates the performance of an oxide film that is formed on a semiconductor by an oxide film process using the ozone gas. From the above, it has been confirmed from tests that the quality of an output ozone gas is deteriorated if a large amount of moisture is contained in the raw gas. Accordingly, the moisture removal filters 59-1 to 59- Moreover, even if trouble occurs in a part of the moisture removal filters 59-1 to 59- In this configuration, the moisture removal filters 59-1 to 59- The other parts, pipe paths, and the like, of the configuration are substantially identical to those of the ozone generation unit 7X of the embodiment 2 shown in As shown in A raw gas input pipe path for a raw gas Gm to be supplied from the raw gas supply port 14 through the MFC 3 to an ozone generator input part ET1 of the ozone generator 1 is a path formed by the raw gas supply port 14, the moisture removal filter 59, the pipe path R30 Similarly to the embodiment 5, the moisture removal filter 59 (moisture removal filters 59-1 to 59- The embodiment 6 is “focusing on the ozone generation unit 7 as one unit corresponding to each of the ozone generation units 7-1 to 7- (Ozone-Gas Flow-Rate Control) An ozone gas supply system 103 of the embodiment 6 shown in As shown in In this manner, in an ozone generation unit 7X3 of the embodiment 6, the ozone generator 1 and the like are mounted in close contact with the gas pipe integrated block 30. In the following, a description will be given to the pipe paths in the ozone generation unit 7X3 which utilizes the gas pipe integrated block 30 shown in The APC 4 is interposed between APC mounting blocks 34, 34 and thereby mounted to the gas pipe integrated block 30. The MFC 53 is interposed between an APC mounting block 34 and an MFC mounting block 153 and thereby mounted to the gas pipe integrated block 30. The ozone concentration meter 5 is interposed between ozone concentration meter mounting blocks 35, 35 and thereby mounted. In these mounting blocks 33, 34, 153, and 35, in-block passages B3, B4, B53, and B5 for ensuring the pipe paths are formed. The gas filter 51 is mounted to the gas pipe integrated block 30 by using a gas filter mounting block 31. The raw gas supply port 14 to which the raw gas Gm is supplied is directly provided to an ozone generator input part ET1 of the ozone generator 1, and an input pipe path is a path formed by the raw gas supply port 14 and the ozone generator input part ET1 in the mentioned order. At this time, a region of the ozone generator 1 around the ozone generator input part ET1 is mounted to the gas pipe integrated block 30 by the ozone generator mounting bolt Bt1. In this manner, the input pipe path for the raw gas Gm is formed using the gas pipe integrated block 30. An ozone gas output pipe for an ozone gas outputted from the ozone generator 1 and received by the ozone generator output part EX1 to be outputted from the ozone gas output port 15 through the gas filter 51, the ozone concentration meter 5, the MFC 53, and the APC 4 is a path formed by the ozone generator output part EX1, the pipe path R30 In the embodiment 6, the amount of the generated output ozone gas itself is controlled by the MFC 53. This exerts an effect that the ozone-gas flow rate can be controlled so as to achieve an accurate output so that the amount of output ozone is accurately controlled. It suffices that the raw gas supply port 14 is directly piped to the raw gas (input) pipe system, without the need of any pipe peripheral component. In the ozone gas output pipe part, the gas filter 51, the MFC 53, the ozone concentration meter 5, and the APC 4 are collectively mounted to the gas pipe component. Therefore, an integrated pipe configuration is allowed only in the output gas pipe system. As a result, the pipe is more compactified, and the number of components of the integrated pipe configuration can be reduced, which makes it easier to replace components. (Other Aspects) In another aspect of the ozone gas supply system according to the embodiment 6, similarly to the embodiment 4, the moisture removal filter 59 having a function capable of trapping a small amount of moisture contained in the raw gas that is supplied from the raw gas supply port 14 may be added as shown in Additionally, similarly to the embodiment 5 shown in In this case, as shown in (Overall Configuration) As shown in The ozone gas supply system 104 has the raw gas supply port 14. The raw gas is introduced from the outside into the ozone generation units 7-1 to 7- (Effects, etc.) Accordingly, due to the gas filter 52 provided in the ozone gas supply system 104 of the embodiment 7, the impurities and the impurity gas contained in the raw gas supplied from the raw gas supply port 14 can be reduced. This can reduce the active gases generated together with the ozone generation due to the moisture, the impurities, and the silent discharge, such as the nitric acid cluster (HNO3) gas, the OH radical gas, the OH radical ion gas, and the HO3+ ion gas. This can consequently suppress wear or breakdown of the APC 4, the MFC 3, and the ozone concentration meter 5 provided at the ozone gas output part of the ozone generator 1, the gas opening/closing valve, and the ozone treatment apparatuses 12-1 to 12- Moreover, a high-quality ozone gas containing a small amount of the nitric acid cluster (HNO3), the OH radical gas, and the metal contamination can be provided as the outputted ozone gas. In this manner, in the ozone gas supply system 104 of the embodiment 7, the gas filter 52 is provided having the function capable of trapping impurities and an impurity gas contained in the raw gas that is supplied to the raw gas supply port 14. This exerts an effect that the impurity gas and the like contained in the raw gas supplied to the ozone generator 1 is reduced by the gas filter 52 to thereby achieve a supply of a high-quality ozone gas. In a second aspect of the embodiment 7, similarly to the embodiment 2 shown in (Compactification of Ozone Power Source 2) In the embodiment 7, too, by adopting the circuit configuration of the embodiment 1 shown in (Combined Structure of Ozone Generation Unit) In the embodiment 7, similarly to the embodiment 1 shown in In a third aspect of the embodiment 7, similarly to the embodiment 3 shown in (Control of Ozone Gas Output Flow Rate Management Unit) The third aspect of the embodiment 7 can be achieved by adopting the ozone gas supply system 20 of the embodiment 3 shown in (Combined Structure of Ozone Generation Unit) The third aspect of the embodiment 7 can be achieved by configuring each of the ozone generation units 7-1 to 7- In an ozone gas supply system 105 of the embodiment 8, similarly to the ozone gas supply system 104 of the embodiment 7, gas filters 52-1 to 52- Particularly, in the ozone generation units 7-1 to 7- (Raw Gas Purity Management) As shown in As the raw gas supplied to the ozone gas supply system 105, in general, a raw gas having a high purity of 99.99% or more is used. This high-purity raw gas contains an impurity gas of about 0.1 to a few PPM, other than the raw gas, such as a nitrogen-based gas, a carbon-based gas, and a sulfide gas. The high-purity raw gas also contains a moisture of one to a few PPM. Additionally, these impurity gas and moisture are contained in the air, too. Therefore, when a part of the pipes in the raw gas pipe path is opened to the air, a moisture and an impurity gas such as a nitrogen gas immediately adsorb to a pipe surface. If the raw gas flows in the raw gas pipe to which the impurity gas adsorbs, not only the impurity gas and the moisture contained in the high-purity raw gas but also the impurity gas adhering to the pipe are separated by the gas flow, which may lower the purity of the supplied raw gas. If a moisture or an impurity gas such as a nitrogen-based gas, a carbon-based gas, or a sulfide gas is contained in the raw gas, not only the ozone gas but also N radical and OH radical gases are generated by discharging. These radical gases are combined with the moisture, thus outputting the ozone gas that contains cluster molecule gases of nitric acid and hydrogen peroxide water. Since these cluster molecule gases of nitric acid and hydrogen peroxide water are very active gases, a chemical reaction occurs on a metal surface of the ozone-gas output gas pipe, the valve, or the like, to cause corrosion of the pipe surface. This may cause a corroded-metal impurity (metal contamination) to be contained in the output ozone gas. Increase in the amount of the metal impurity (metal contamination) contained in the output ozone gas deteriorates the performance of an oxide film that is formed on a semiconductor by an oxide film process using the ozone gas. From the above, it has been confirmed from tests that the quality of an output ozone gas is deteriorated if an impurity gas or a moisture is contained in the raw gas. Accordingly, the gas filter for the purpose of trapping the impurity gas is mounted to a raw gas supply portion. Particularly, in the embodiment 8, at the raw gas supply ports 14-1 to 14- In this configuration, one gas filter 52-1 to 52- The other parts, pipe paths, and the like, of the configuration are identical to those of the ozone generation unit 7X2 shown in As shown in Similarly to the embodiment 8, at the raw gas supply port 14 provided at a rear surface of the ozone generation units 7-1 to 7- In another aspect of the ozone gas supply system according to the embodiment 6, similarly to the embodiment 7, the gas filter 52 having a function capable of trapping impurities contained in the raw gas that is supplied from the raw gas supply port 14 may be added as shown in Additionally, similarly to the embodiment 8 shown in In this case, as shown in <Others> In the embodiments 1 to 8 above, the description has been give to the system for supplying the ozone gas with a predetermined ozone flow rate and a predetermined ozone concentration in an ozone-gas multi-processing apparatus for use in a semiconductor manufacturing apparatus that requires an ozone treatment apparatus capable of generating about several tens to 500 g/h ozone. Instead of the ozone treatment apparatus 12 described above, an ozone-bleaching apparatus for pulp, an ozone treatment apparatus for pool water, an ozone treatment apparatus for clean and sewage water, and an ozone treatment apparatus for a chemical plant, which require a larger amount of ozone gas, may be adopted. For example, in a case of a processing apparatus that requires one to several kg/h ozone gas, a plurality of ozone generation units 7-1 to 7- While the invention has been described in detail, the foregoing description is in all aspects illustrative and not restrictive. It will be appreciated that numerous modifications unillustrated herein can be made without departing from the scope of the present invention. The present invention relates to an ozone generation unit with a function having a plurality of means for supplying an ozone gas, and an ozone gas supply system for supplying the ozone gas to a plurality of ozone treatment apparatuses. An object of the present invention is to achieve downsizing of the ozone generation unit with a function having a plurality of means for outputting an ozone gas. However, also in a gas generation unit for a gas other than the ozone gas and a gas supply system for supplying the generated gas other than the ozone gas to a plurality of gas processing apparatuses, the quality of the gas generated by a generator can be improved at a time of outputting the gas, by mounting the moisture removal filter 59 for removing a moisture contained in a raw gas or the gas filter 52 for removing an impurity gas contained in the raw gas. Further, it is preferable to integrate and downsize a gas generator unit with a function having a plurality of means for outputting a gas, and build a gas generation system having a plurality of gas generation units installed therein. In the present invention, a gas pipe integrated block has a plurality of internal pipe paths. The plurality of internal pipe paths are connected to an ozone generator, control means, a raw gas supply port, an ozone gas output port, and cooling water inlet/outlet ports, to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through an automatic pressure controller to the ozone generator. The ozone gas output pipe path extends from the ozone generator through a gas filter, an ozone concentration meter, and a flow rate controller, to the ozone gas output port. 1-9. (canceled) 10. An ozone generation unit for supplying, to an ozone treatment apparatus, an ozone gas having been set to a predetermined supply flow rate and a predetermined concentration, the ozone generation unit comprising:
an ozone generator for generating an ozone gas; an ozone power source for controlling power to be supplied to the ozone generator; control means associated with the ozone generator; a raw gas supply port for supplying the raw gas from the outside to the ozone generator; an ozone gas output port for outputting, to the outside, the ozone gas obtained from the ozone generator through at least part of the control means; cooling water inlet/outlet ports for supplying and discharging a cooling water obtained from the outside to the ozone generator; and a gas pipe integrated block, wherein the ozone generation unit is formed as an integrated structure in which the ozone generator, the ozone power source, the control means, the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports are assembled together, the control means comprises: flow-rate-detection/flow-rate-adjustment means including a mass flow controller (MFC) for controlling a flow rate of a raw gas that is inputted to the ozone generator; gas filter means for processing the ozone gas outputted from the ozone generator so as to remove an impurity and a foreign substance therefrom; pressure-detection/pressure-adjustment means including an automatic pressure controller (APC) for automatically controlling internal pressure that is pressure in the ozone generator; and ozone concentration detection means including an ozone concentration meter for detecting an ozone concentration value of the ozone gas outputted from the ozone generator, each of the ozone generator, the flow-rate-detection/flow-rate-adjustment means, the gas filter means, the pressure-detection/pressure-adjustment means, the ozone concentration detection means, the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports is mounted to the gas pipe integrated block in close contact, the gas pipe integrated block has a plurality of internal pipe paths, the plurality of internal pipe paths are connected to the ozone generator, the flow-rate-detection/flow-rate-adjustment means, the gas filter means, the pressure-detection/pressure-adjustment means, the ozone concentration detection means, the raw gas supply port, and the ozone gas output port, to thereby form a raw gas input pipe path and an ozone gas output pipe path, the raw gas input pipe path extends from the raw gas supply port through the flow-rate-detection/flow-rate-adjustment means to the ozone gas generator, and the ozone gas output pipe path extends from the ozone generator through the gas filter means, the ozone concentration detection means, and the pressure-detection/pressure-adjustment means, to the ozone gas output port. 11. The ozone generation unit according to an ozone control part for performing an initial operation of the ozone power source in which the ozone power source is driven with a predetermined set power amount, and after the elapse of a predetermined time period, performing a PID control on the power supplied by the ozone power source based on comparison between an ozone concentration detected by the ozone concentration meter and an ozone concentration that has been set. 12. An ozone gas supply system for supplying, to a plurality of ozone treatment apparatuses, an ozone gas having been set to a predetermined supply flow rate and a predetermined concentration, wherein the ozone gas supply system comprises:
a plurality of ozone generation units, each of the plurality of ozone generation units comprises the ozone generation unit according to an ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of the ozone generators in the plurality of ozone generation units, and be capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of the plurality of ozone treatment apparatuses by means of an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit; and an ozone gas output flow rate management unit control part for, based on a process ozone gas event signal supplied from the plurality of ozone treatment apparatuses, controlling the ozone gas output of each of the plurality of ozone generation units and causing the ozone gas output flow rate management unit to control the ozone gas output flow rate. 13. The ozone gas supply system according to the plurality of ozone gas control valves include an electrically-operated valve or a pneumatic valve that is openable and closable by means of electricity or air pressure, and the ozone gas output flow rate management unit control part outputs the control signal such that an ozone flow rate and an ozone concentration of the ozone gas supplied to each of the plurality of ozone treatment apparatuses have desired values. 14. The ozone gas supply system according to the ozone gas output flow rate management unit further comprises a plurality of ozone gas control valve accommodation parts corresponding to the plurality of ozone gas control valves, respectively, each of the plurality of ozone gas control valves is provided in each corresponding one of the ozone gas control valve accommodation parts, and each of the plurality of ozone gas control valve accommodation parts is mounted in tight contact with the gas pipe integrated block of each corresponding one of the ozone generation units, and is interposed on the ozone gas output pipe path. 15. An ozone generation unit for supplying, to an ozone treatment apparatus, an ozone gas having been set to a predetermined supply flow rate and a predetermined concentration, the ozone generation unit comprising:
an ozone generator for generating an ozone gas; an ozone power source for controlling power to be supplied to the ozone generator; control means associated with the ozone generator; a raw gas supply port for supplying the raw gas from the outside to the ozone generator; an ozone gas output port for outputting, to the outside, the ozone gas obtained from the ozone generator through at least part of the control means; cooling water inlet/outlet ports for supplying and discharging a cooling water obtained from the outside to the ozone generator; and a gas pipe integrated block, wherein the ozone generation unit is formed as an integrated structure in which the ozone generator, the ozone power source, the control means, the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports are assembled together, the control means comprises: flow-rate-detection/flow-rate-adjustment means including a mass flow controller (MFC) for controlling a flow rate of the ozone gas that is outputted from the ozone generator; gas filter means for processing the ozone gas outputted from the ozone generator so as to remove an impurity and a foreign substance therefrom; pressure-detection/pressure-adjustment means including an automatic pressure controller (APC) for automatically controlling internal pressure that is pressure in the ozone generator; and ozone concentration detection means including an ozone concentration meter for detecting an ozone concentration value of the ozone gas outputted from the ozone generator, each of the ozone generator, the flow-rate-detection/flow-rate-adjustment means, the gas filter means, the pressure-detection/pressure-adjustment means, the ozone concentration detection means, the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports is mounted to the gas pipe integrated block in close contact, the gas pipe integrated block has a plurality of internal pipe paths, the plurality of internal pipe paths are connected to the ozone generator, the flow-rate-detection/flow-rate-adjustment means, the gas filter means, the pressure-detection/pressure-adjustment means, the ozone concentration detection means, the raw gas supply port, and the ozone gas output port, to thereby form a raw gas input pipe path and an ozone gas output pipe path, the raw gas input pipe path extends from the raw gas supply port to the ozone gas generator, the ozone gas output pipe path extends from the ozone generator through the gas filter means, the ozone concentration detection means, the flow-rate-detection/flow-rate-adjustment means, and the pressure-detection/pressure-adjustment means, to the ozone gas output port.CROSS-REFERENCES TO RELATED APPLICATIONS
TECHNICAL FIELD
BACKGROUND ART
PRIOR-ART DOCUMENTS
Patent Documents
SUMMARY OF THE INVENTION
Problems to be Solved by the Invention
Means for Solving the Problems
Effects of the Invention
BRIEF DESCRIPTION OF THE DRAWINGS
EMBODIMENT FOR CARRYING OUT THE INVENTION
Embodiment 1
Embodiment 2
Embodiment 3
Embodiment 4
Basic Configuration: First Aspect
[Chemical Formula 1]
O2+(silent discharge)O+O (1)
[Chemical Formula 2]
O+O2+MO3 (2)
[Chemical Formula 3]
H2O+(silent discharge)2H++O2− (3)
[Chemical Formula 4]
2H++O2+NO−+(silent discharge)HNO3(nitric acid cluster) (4)
[Chemical Formula 5]
O2+O3+(silent discharge)O(1D)+2O2 (5)
[Chemical Formula 6]
O(1D)+H2O+(silent discharge)2OH(OH radical) (6)
[Chemical Formula 7]
O3+H2O+(silent discharge)HO3+OH−(OH radical ion) (7)Second Aspect of Embodiment 4
Third Aspect of Embodiment 4
Embodiment 5
Embodiment 6
Embodiment 7
Basic Configuration: First Aspect
Second Aspect of Embodiment 7
Third Aspect of Embodiment 7
Embodiment 8
Other Aspects of Embodiment 6
Relating to Embodiments 7 and 8
Industrial Applicability

























