Resist topcoat composition, and method of forming patterns using the composition

26-01-2023 дата публикации

Номер:

US20230024422A1

Автор: Daeseok Song, Hyeon Park, Hyun-Ji SONG, Hyun-Woo Kim, Jun Soo Kim, Minki CHON, Minsoo Kim, Ran Namgung, Suk-Koo Hong, Young Joo CHOI

Принадлежит: Samsung Electronics Co Ltd, Samsung SDI Co Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C07 C07C C07C3 C07C30 C07C309 C07C309/C07C309/8 C07C309/80 C07C5 C07C53 C07C53/C07C53/1 C07C53/18 C07C53/2 C07C53/21 C07C53/23 C07C6 C07C63 C07C63/C07C63/7 C07C63/70 C08 C08F C08F2 C08F2/C08F2/4 C08F2/44 C08F20 C08F20/C08F20/2 C08F20/22 C08F22 C08F220 C08F220/C08F220/2 C08F220/24 C08F220/28 C08F220/283 C08K C08K5 C08K5/C08K5/0 C08K5/09 C08K5/095 C08K5/4 C08K5/42 C08K5/43 C08K5/435 C08K5/46 C08L C08L3 C08L33 C08L33/C08L33/1 C08L33/16 C09 C09D C09D1 C09D13 C09D133 C09D133/C09D133/0 C09D133/08 C09D133/1 C09D133/16 G G0 G03 G03F G03F7 G03F7/G03F7/4 G03F7/40 G03F7/405 G03F7/42 G03F7/426 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/308 H01L21/3088

IPC - классификация

B B4 B41 B41M B41M5 B41M5/B41M5/3 B41M5/38 B41M5/382 B41M5/3821 B41M5/38214 C C0 C08 C08K C08K5 C08K5/C08K5/0 C08K5/09 C08K5/095 C09 C09D C09D1 C09D13 C09D133 C09D133/C09D133/1 C09D133/16

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