Planarization films for advanced microelectronic applications and devices and methods of production thereof

22-03-2011 дата публикации

Номер:

US7910223B2

Автор: Joseph Kennedy, Ronald Katsanes, Wei Huang

Принадлежит: Honeywell International Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C04 C04B C04B2 C04B21 C04B211 C04B2111 C04B2111/C04B2111/0 C04B2111/00 C04B2111/004 C04B2111/0048 C04B2111/00482 C04B26 C04B26/C04B26/1 C04B26/12 C08 C08J C08J2 C08J23 C08J236 C08J2361 C08J2361/C08J2361/0 C08J2361/00 C08J7 C08J7/C08J7/0 C08J7/02 C2 C23 C23F C23F1 C23F1/C23F1/1 C23F1/10 C23F1/4 C23F1/44 C23F3 C23F3/C23F3/0 C23F3/00 C23F3/04 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0211 H01L21/02118 H01L21/3 H01L21/31 H01L21/310 H01L21/3105 H01L21/31051 H01L21/312 Y Y1 Y10 Y10T Y10T4 Y10T42 Y10T428 Y10T428/Y10T428/3 Y10T428/31 Y10T428/319 Y10T428/3194 Y10T428/31942

IPC - классификация

C C2 C23 C23F C23F1 C23F1/C23F1/4 C23F1/44 C23F3 C23F3/C23F3/0 C23F3/00 C23F3/04

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