Verfahren zum Herstellen einer Membran mit Membranlöchern und nach diesem Verfahren hergestellte Mikro-/Nanomembran

Verfahren zum Herstellen einer Membran mit Membranlöchern (8, 9, 10), die Durchmesser im Mikro/Nanometerbereich aufweisen, wobei eine Metallfolie (1) mittels Ätzverfahren oder Laserlochverfahren mit einem Durchtrittsöffnungsraster versehen wird, in einem ersten Beschichtungsschritt die mit dem Durchtrittsraster versehene Metallfolie (1) mit einer metallischen oder nicht metallischen Beschichtung (5) versehen wird, um die Durchtrittslöcher (2, 3, 4) definiert in ihrem Durchmesser zu verringern, in einem zweiten Beschichtungsschritt hierauf eine zweite, organische oder anorganische Schicht (6) aufgebracht wird um die Oberflächeneigenschaften der mit dem ersten Beschichtungsschritt versehenen Membran definiert so einzustellen, dass eine aus dem betreffenden Membranloch (8, 9, 10) austretende Flüssigkeit Tropfen (11) mit einem möglichst großen Kontaktwinkel (δ) zwischen Oberfläche (7) und der Tropfenkontur an der Austrittsstelle aus dem Membranloch bildet, wobei Durchmesser der Membranlöcher ...

Isotachophoresis for purification of nucleic acids

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.

METHOD AND APPARATUS FOR CONTROLLED MANUFACTURING OF NANOMETER-SCALE APERTURES

The invention relates to a method for manufacturing nanometer-scale apertures, wherein, in an object, in a conventional manner, at least one aperture is provided with a nanometer-scale surface area, after which, by means of an electron beam, energy is supplied to at least the edge of said at least one aperture, such that the surface area of the respective aperture is adjusted, wherein the surface area of the aperture is controlled during adjustment and the supply of energy is regulated on the basis of the surface area change.

A METHOD OF PROCESSING A SILICON WAFER WITH A DESIGN HAVING A THROUGH CAVITY

La présente invention décrit un procédé de traitement d’une plaquette de silicium avec une structure à cavité traversante. Le procédé est appliqué selon les exigences suivantes, successivement : en effectuant une implantation d’ions sur une plaquette de silicium ou une plaquette gravée ; en implantant un substrat factice ; en liant la plaquette de silicium à la plaquette gravée ; en effectuant un meulage et un polissage, et en amincissant la plaquette gravée à une profondeur d’exposition du motif ; en effectuant une liaison ; et en décollant le substrat factice. En comparaison avec l'art antérieur, la présente invention peut être utilisée de manière standard, et la qualité du produit peut être efficacement garantie. Le produit présente une rentabilité élevée et un excellent effet technique. La présente invention présente des valeurs économiques et sociales prévisibles relativement élevées. Figure à publier avec l’abrégé : Fig. 1 The present invention describes a method of treating a silicon wafer with a through cavity structure. The process is applied according to the following requirements, successively: by ion implantation on a silicon wafer or etched wafer; implanting a dummy substrate; bonding the silicon wafer to the etched wafer; by grinding and polishing, and slimming the engraved wafer to a depth of exposure of the pattern; by making a connection; and detaching the dummy substrate. In comparison with the prior art, the present invention can be used in a standard manner, and the quality of the product can be effectively guaranteed. The product has a high profitability and an excellent technical effect. The present invention has relatively high predictable economic and social values. Figure to be published with the abstract: Fig. 1

SIDEWALL STOPPER FOR MEMS DEVICE

The present disclosure relates to a method of manufacturing a MEMS device. In some embodiments, a first interlayer dielectric layer is formed over a substrate, and a diaphragm is formed over the first interlayer dielectric layer. Then, a second interlayer dielectric layer is formed over the diaphragm. A first etch is performed to form an opening through the second interlayer dielectric layer and the diaphragm and reaching into an upper portion of the first interlayer dielectric layer. A second etch is performed to the first interlayer dielectric layer and the second interlayer dielectric layer to form recesses above and below the diaphragm and to respectively expose a portion of a top surface and a portion of a bottom surface of the diaphragm. A sidewall stopper is formed along a sidewall of the diaphragm into the recesses of the first interlayer dielectric layer and the second interlayer dielectric layer. 1. A method of manufacturing a MEMS device , the method comprising:forming a first interlayer dielectric layer over a substrate;forming a diaphragm over the first interlayer dielectric layer;forming a second interlayer dielectric layer over the diaphragm;performing a first etch to form an opening through the second interlayer dielectric layer and the diaphragm and reaching into an upper portion of the first interlayer dielectric layer;performing a second etch to the first interlayer dielectric layer and the second interlayer dielectric layer to form recesses above and below the diaphragm and to respectively expose a portion of a top surface and a portion of a bottom surface of the diaphragm; andforming a sidewall stopper along a sidewall of the diaphragm into the recesses of the first interlayer dielectric layer and the second interlayer dielectric layer.2. The method of claim 1 , wherein the first etch is performed according to a masking layer formed on the second interlayer dielectric layer prior to the first etch.3. The method of claim 2 , wherein the second ...

ANALYSIS AN OPENING COATED BY MOLECULES THROUGH TRANSLOKATION BY

Molecular diagnostics platform

A method of mixing a droplet, the method comprising providing a droplet on a surface, forming the droplet into a first "U" shape having a bottom region and two terminal ends, and simultaneously merging the terminal ends and splitting the droplet at the bottom region to form a second "U" shape which is substantially opposite the first "U" shape.

MOLECULAR DIAGNOSTICS PLATFORM

A method of mixing a droplet, the method comprising providing a droplet on a surface, forming the droplet into a first "U" shape having a bottom region and two terminal ends, and simultaneously merging the terminal ends and splitting the droplet at the bottom region to form a second "U" shape which is substantially opposite the first "U" shape.

MICROPAD

본 발명은 중공채널을 이용한 마이크로패드에 관한 것으로서, 보다 상세하게는 중공채널이 형성되어 검사대상물질에 자중에 의한 압력이 가해짐으로써 검사대상물질의 이송을 빠르게 함으로써, 보다 신속한 검사를 가능하게 하는 중공채널을 이용한 마이크로패드에 관한 것으로서, 검사대상물질이 채워지는 수용채널(210)이 형성된 제1필름(200); 상기 제1필름(200) 위에 적층되며, 상기 수용채널(210)의 형상에 대응하는 형상의 관통채널(310)을 가진 제2필름(300); 및 상기 제2필름(300) 위에 적층되며, 상기 검사대상물질의 투입을 위해 상기 관통채널(310)의 일부와 중첩 배치된 투입공(411);을 포함하는 마이크로필름을 제공하여, 중공채널을 갖는 단순 적층구조이기 때문에 제작이 용이하며, 중공채널을 포함하기 때문에 검사대상물질의 자중에 의한 압력만으로도 검사대상물질의 이송이 신속하게 이루어져 매우 적은 양의 샘플(검사대상물질) 만으로도 외부 전원 없이도 빠른 치료가 요구되는 현장 진단장치에 유용하게 사용될 수 있는 장점이 있다.

MICRO-MACHINED NOZZLES

A micro-machined nozzle includes a substrate (12) having a hole (14) formed on a first side (12a) that extends partially through a thickness dimension of the substrate (12) and a nozzle orifice (16) formed on a second opposite side (12b) that communicates with the hole (14). The nozzle orifice (16) has at least a portion of its interior wall serrated. A method of fabricating a micro-machined nozzle includes the steps of etching a first side (12a) of a silicon substrate (12) to form a hole (14) that extends partially through a thickness dimension of the substrate (12) and etching a second opposite side (12b) of the silicon substrate (12) to form a serrated nozzle orifice (16) that communicates with the hole (14).

Microfabricated capsules for immunological isolation of cell transplants

The present invention provides a capsule made of a biologically compatible material with sufficient mechanical strength to form a very thin membrane shell having at least a region with approximately uniformly sized and spaced holes or pores that are large enough to let a desired biologically active molecular product through, while blocking the passage of all larger immunological molecules. The present invention thus provides an immunological isolation of cell transplants contained therein. The present invention also provides a free standing thin film structure that may be used as a component of such a capsule and method for the fabrication of such component and capsules.

Method for producing a micromechanical component, and micromechanical component

A method for producing a micromechanical component, and a micromechanical component, includes providing a substrate having first and second outer surfaces, the second surface facing away from the first surface; forming a through-hole through the substrate from the first outer surface up to the second outer surface; attaching an optical functional layer, on the second outer surface, to cover the through-hole; removing a first segment of the substrate on the first surface of the substrate so that there arises a third outer surface inclined relative to the second surface, the third surface facing away from the second surface, the inclined surface enclosing the through-hole; and separating the micromechanical component by separating a first part of the substrate, having the through-hole, and a second part, attached to the first part, of the optical functional layer from a remaining part of the substrate and a remaining part of the optical functional layer.

Isotachophoresis for purification of nucleic acids

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.

Verfahren zum Herstellen eines mikromechanischen Bauteils und mikromechanisches Bauteil

Die Erfindung schafft ein Verfahren zum Herstellen eines mikromechanischen Bauteils sowie ein mikromechanisches Bauteil. Das Verfahren umfasst die Schritte: Bereitstellen (S01) eines Substrats (10) mit einer ersten Außenfläche (10-f) und mit einer zweiten Außenfläche (10-b), welche von der ersten Außenfläche (10-f) abgewandt ist; Ausbilden (S02) eines Durchgangslochs (12-ij) durch das Substrat (10) von der ersten Außenfläche (10-f) bis zu der zweiten Außenfläche (10-b); Anbringen (S03) einer optischen Funktionsschicht (14) auf der zweiten Außenfläche (10-b), wobei die optische Funktionsschicht (14) das Durchgangsloch (12-ij) bedeckt; Entfernen (S04) eines ersten Segments (18-2) des Substrats (10) an der ersten Außenfläche (10-f) des Substrats (10) derart, dass eine in Bezug auf die zweite Außenfläche (10-b) des Substrats (10) geneigte dritte Außenfläche (16-i) entsteht, welche von der zweiten Außenfläche (10-b) des Substrats (10) abgewandt ist, wobei die geneigte dritte Außenfläche (16- ...

ISOTACHOPHORESIS FOR PURIFICATION OF NUCLEIC ACIDS

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.

Nanopore flow cells and methods of fabrication

此處提供奈米孔流動槽及其製造方法。在一個實施例中，一種形成流動槽之方法包括：在將多層堆疊傳送至例如玻璃基板的第二基板之前，於例如單晶矽基板的第一基板上形成多層堆疊。此處，多層堆疊的特徵為膜層，具有穿過其形成的第一開口，其中膜層佈置於第一基板上，且材料層佈置於膜層上。方法進一步包括圖案化第二基板，以在其中形成第二開口，且將第二基板的圖案化的表面結合至多層堆疊的表面。方法進一步包括薄化第一基板且薄化第二基板。此處，薄化第二基板至第二開口穿過其佈置。方法進一步包括移除薄化的第一基板及材料層之至少部分，以暴露膜層的相對表面。

Tillverkning av inlopps- och utloppsanslutningar för mikrofluidala chip

MOLECULAR DIAGNOSTICS PLATFORM

A method of mixing a droplet, the method comprising providing a droplet on a surface, forming the droplet into a first "U" shape having a bottom region and two terminal ends, and simultaneously merging the terminal ends and splitting the droplet at the bottom region to form a second "U" shape which is substantially opposite the first "U" shape.

METHOD AND APPARATUS FOR CONTROLLED MANUFACTURING OF NANOMETER-SCALE APERTURES

The invention relates to a method for manufacturing nanometer-scale apertures, wherein, in an object, in a conventional manner, at least one aperture is provided with a nanometer-scale surface area, after which, by means of an electron beam, energy is supplied to at least the edge of said at least one aperture, such that the surface area of the respective aperture is adjusted, wherein the surface area of the aperture is controlled during adjustment and the supply of energy is regulated on the basis of the surface area change.

HIGH VERTICAL ASPECT RATIO THIN FILM STRUCTURES

The invention relates to the area of microelectromechanical systems in which electronic circuits and mechanical devices are integrated on the same silicon chip. The method taught herein allows the fabrication of thin film structures (20) in excess of 150 micrometers in height (y) using thin film deposition processes. Wafers (60, 52) may be employed as reusable molds for efficient production of such structures.

Method of forming an assembly to house one or more micro components

Formation of a structure with through-holes includes attaching two sub-structures to one another. The resulting structure may be used in a sub-assembly for various types of micro components and may serve as a lid or base of a housing that encapsulates one or more micro components. The techniques may provide greater flexibility in the shape of the through-holes and may reduce costs compared with other known techniques.

DNA sequencing with stacked nanopores

A method for fabricating a stacked nanopore includes forming a stack of layers having alternating conductive lines and dielectric layers on a substrate, and patterning the stack to form a staircase structure with the conductive lines having a length gradually changing at each level in the stack. The method also includes depositing and planarizing a dielectric material over the staircase structure, forming contacts through the dielectric material to the conductive lines for each level of conductive lines, etching a nanopore through the stack of layers to form pairs of opposing electrodes across the nanopore using the conductive lines; and opening up the substrate to expose the nanopore.

Verfahren zur Bearbeitung eines Siliziumwafers mit einer den Wafer durchziehenden Hohlraumstruktur

Verfahren zum Herstellen eines Siliziumwafers mit einer den Wafer durchziehenden Hohlraumstruktur, dadurch gekennzeichnet, dass nacheinander die folgenden Schritte ausgeführt werden:1) Bereitstellen eines strukturierten Siliziumwafers, der einen nicht-exponierten Hohlraum aufweist, und eines weiteren als Dummy-Substrat dienenden Siliziumwafers und Ionenimplantation von Wasserstoffionen oder Heliumatomen an einer zur Verbindung dienenden Seite des den nicht-exponierten Hohlraum aufweisenden strukturierten Siliziumwafers, wobei die Implantationstiefe in Bezug auf die Oberfläche in einem Bereich von 1 µm bis 0,001 µm liegt,2) Aufeinanderlegen einer zur Verbindung dienenden Seite des als Dummy-Substrat dienenden Siliziumwafers und der implantierten Seite des den nicht-exponierten Hohlraum aufweisenden strukturierten Siliziumwafers, und Bonden des als Dummy-Substrat dienenden Siliziumwafers mit dem den nicht-exponierten Hohlraum aufweisenden strukturierten Siliziumwafer,3) Schleifen und Polieren ...

AIRCRAFT AIR CONTAMINANT ANALYZER AND METHOD OF USE

SOLID STATE MEMBRANE CHANNEL DEVICE FOR THE MEASUREMENT AND CHARACTERIZATION OF ATOMIC AND MOLECULAR SIZED SAMPLES

A solid state device is formed through thin film deposition techniques which results in a self-supporting thin film layer that can have a precisely defined channel bored therethrough. The device is useful in the chacterization of polymer molecules by measuring changes in various electrical characteristics as molecules pass through the channel. To form the device, a thin film layer having various patterns of electrically conductive leads are formed on a silicon substrate. Using standard lithography techniques, a relatively large or micro-scale aperture is bored through the silicon substrate which in turn exposes a portion of the thin film layer. This process does not affect the thin film. Subsequently, a high precision material removal process is used (such as a TEM) to bore a precise nano-scale aperture through the thin film layer that coincides with the removed section of the silicon substrate.

Method and apparatus for reproducible sample injection on microfabricated devices

Fixed volumes of samples are metered into the reaction channel of a microfluidic device using one or more slidable blocks having at least one fixed-length sample metering channel. In another aspect of the present invention, fixed volumes of samples are metered into the reaction channel using one or more slidable blocks having at least one fixed-length sample metering channel. In another aspect of the present invention, a sample injection scheme based on injection time is implemented using relatively sliding blocks of separation channels and sample channels. In a further aspect of the present invention, separation channels are configured in relation to the slidable block in a manner that enables separations to be conducted continuously for high-throughput assays.

Method and apparatus for sample injection in microfabricated devices

3D stack configuration for 6-axis motion sensor

A method includes fusion bonding a first side of a MEMS wafer to a second side of a first handle wafer. A TSV is formed from a first side of the first handle wafer to the second side of the first handle wafer and into the first MEMS wafer. A dielectric layer is formed on the first side of the first handle wafer. A tungsten via is formed in the dielectric layer. Electrodes are formed on the dielectric layer. A second MEMS wafer is eutecticly bonded with a first eutectic bond to the electrodes, wherein the TSV electrically connects the first MEMS wafer to the second MEMS wafer. Standoffs are formed on a second side of the first MEMS wafer. A CMOS wafer is eutecticly bonded with a second eutectic bond to the standoffs, wherein the second eutectic bond includes different materials than the first eutectic bond.

LAYERED SILICON AND STACKING OF MICROFLUIDIC CHIPS

An apparatus for sorting macromolecules includes a first chip including a channel formed in a first side of the first chip and having at least one monolithic sorting structure for sorting macromolecules from the sample fluid. A first set of vias formed in the first chip has openings in a second side of the first chip, the sample fluid being provided to the sorting structure through the first set of vias. A second set of vias formed in the first chip has openings in the second side for receiving macromolecules in the sample fluid greater than or equal to a prescribed dimension sorted by the sorting structure. A third set of vias formed in the first chip has openings in the second side for receiving macromolecules in the sample fluid less than the prescribed dimension. The apparatus includes first and second seals covering the first and second sides, respectively. 1. An apparatus for sorting of macromolecules in a sample fluid , the apparatus comprising:a first chip having a front side and a backside, the first chip comprising at least first, second and third reservoirs formed in the front side of the first chip, the first reservoir being configured to hold the sample fluid;a second chip supported on the first chip, the second chip comprising a channel having at least one monolithic sorting structure configured to sort macromolecules from the sample fluid;a first set of vias formed in the second chip and configured to couple the channel to the first reservoir, the first set of vias providing the sample fluid from the first reservoir to the monolithic sorting structure for sorting;a second set of vias formed in the second chip and configured to couple the channel to the second reservoir;a third set of vias formed in the second chip and configured to couple the channel to the third reservoir;a fourth set of vias formed in the first chip, the fourth set of vias having respective openings in the backside of the first chip and being configured as an inlet to the first ...

METHOD AND APPARATUS FOR CONTROLLED MANUFACTURING OF NANOMETER-SCALE APERTURES

The invention relates to a method for manufacturing nanometer-scale apertures, wherein, in an object, in a conventional manner, at least one aperture is provided with a nanometer-scale surface area, after which, by means of an electron beam, energy is supplied to at least the edge of said at least one aperture, such that the surface area of the respective aperture is adjusted, wherein the surface area of the aperture is controlled during adjustment and the supply of energy is regulated on the basis of the surface area change.

Method and apparatus for reproducible sample injection on microfabricated devices

Fixed volumes of samples are metered into the reaction channel of a microfluidic device using one or more slidable blocks having at least one fixed-length sample metering channel. In another aspect of the present invention, fixed volumes of samples are metered into the reaction channel using one or more slidable blocks having at least one fixed-length sample metering channel. In another aspect of the present invention, a sample injection scheme based on injection time is implemented using relatively sliding blocks of separation channels and sample channels. In a further aspect of the present invention, separation channels are configured in relation to the slidable block in a manner that enables separations to be conducted continuously for high-throughput assays.

ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECULAR TRANSPORT

Devices and methods for controlling molecular transport are disclosed herein. The devices include a membrane having a plurality of nanochannels extending therethrough. The membrane has an inner electrically conductive layer and an outer dielectric layer. The outer dielectric layer creates an insulative barrier between the electrically conductive layer and the contents of the nanochannels. At least one electrical contact region is positioned on a surface of the membrane. The electrical contact region exposes the electrically conductive layer of the membrane for electrical coupling to external electronics. When the membrane is at a first voltage, molecules flow through the nanochannels at a first release rate. When the membrane is at a second voltage, charge accumulation within the nanochannels modulates the flow of molecules through the nanochannels to a second release rate that is different than the first release rate. Methods of fabricating devices for controlling molecular transport are ...

Structure

High vertical aspect ratio thin film structures

Nerve electrode based on porous silicon and polymer as well as preparation process and application thereof

MEMS 압력 센서 및 그 제조 방법

MEMS(micro-electro mechanical system) 압력 센서는, 제1 기판, 제2 기판 및 감지 구조체를 포함한다. 제2 기판은 제1 기판과 실질적으로 평행하다. 감지 구조체는 제1 기판과 제2 기판 사이에 있고, 상기 제 기판의 일부와 상기 제2 기판의 일부에 접합되며, 여기서 제1 기판과 감지 구조체 사이의 제1 공간은 외부와 소통되며, 제2 기판과 감지 구조체 사이의 제2 공간은 외부와 소통되거나 또는 외부로부터 격리된다.

METHOD FOR FABRICATION OF A MOLECULAR FILTER AND APPARATUS FORMED BY THE SAME

The invention is a method for fabricating molecular filters which can separate objects approximately 1-5 nm in range, where the filtration size is controlled by using thin films of materials and technologies to form a filtration channel or pore in a middle thin film layer in a multilayered structure. Lithography is used to define two offset arrays of blind holes into the opposing sides of a multi-layer membrane. The blind holes extend across a thin central filtration layer. A selective etch is used to attack the filtration layer to form a communicating channel between the two holes. The only connection between one side of the filter and the other is through the channel in the filter layer, whose thickness, d, determines the largest size object which can traverse the filter.

Nanopore flow cells and methods of fabrication

Nanopore flow cells and methods of manufacturing thereof are provided herein. In one embodiment a method of forming a flow cell includes forming a multi-layer stack on a first substrate, e.g., a monocrystalline silicon substrate, before transferring the multi-layer stack to a second substrate, e.g., a glass substrate. Here, the multi-layer stack features a membrane layer, having a first opening formed therethrough, where the membrane layer is disposed on the first substrate, and a material layer is disposed on the membrane layer. The method further includes patterning the second substrate to form a second opening therein and bonding the patterned surface of the second substrate to a surface of the multi-layer stack. The method further includes thinning the first substrate and thinning the second substrate. Here, the second substrate is thinned to where the second opening is disposed therethrough. The method further includes removing the thinned first substrate and at least portions of the ...

Method and apparatus for controlled manufacturing of nanometer-scale apertures

The invention relates to a method for manufacturing nanometer-scale apertures, wherein, in an object, in a conventional manner, at least one aperture is provided with a nanometer-scale surface area, after which, by means of an electron beam, energy is supplied to at least the edge of said at least one aperture, such that the surface area of the respective aperture is adjusted, wherein the surface area of the aperture is controlled during adjustment and the supply of energy is regulated on the basis of the surface area change.

Sidewall stopper for MEMS device

The present disclosure relates to a microphone. In some embodiments, the microphone may comprise a diaphragm, a backplate, and a sidewall stopper. The diaphragm has a venting hole disposed therethrough. The backplate is disposed over and spaced apart from the diaphragm. The sidewall stopper is disposed along a sidewall of the diaphragm exposing to the venting hole. Thus, the sidewall stopper is not limited by a distance between the movable part and the stable part of the microphone. Also, the sidewall stopper does not alternate the shape of movable part, and thus will less likely introduce crack to the movable part. In some embodiments, the sidewall stopper may be formed like a sidewall stopper by a self-alignment process, such that no extra mask is needed.

Through substrate vias and device

Method of making through-substrate-vias in glass substrates includes providing a first substrate on which a plurality of needles protruding vertically from the substrate are made; providing a second substrate made of glass; locating the substrates adjacent each other such that the needles on the first substrate face the second substrate; applying heat to a temperature where the glass softens, by heating the glass or the needle substrate or both; applying a force such that the needles on the first substrate penetrate into the glass to provide impressions in the glass; and finally, removing the first substrate and providing material filling the impressions in the second substrate made of glass. A device includes a silicon substrate having a cavity in which a MEMS component is accommodated, and a cap wafer made of a material having a low dielectric constant, and through substrate vias of metal, is bonded to the silicon substrate.

Method and apparatus for sample injection in microfabricated devices

An off-column sample injection scheme for introducing samples into micro-reaction channels in microfabricated devices. In one aspect of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir provided on the substrate of the microfabricated device into a reaction channel via a constricted channel or opening interface, e.g., a narrow connection-channel and/or a pinhole. In another embodiment of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir that is provided outside the substrate of the microfabricated device. A through-hole is provided in the substrate to facilitate sample introduction into the reaction channel. In a further aspect of the present invention, the free-end of a capillary tube connected to the sample-channel is moved alternatively to a sample and an auxiliary solution to bring multiple samples in series to the vicinity of a reaction channel for convenient sample ...

AIRCRAFT AIR CONTAMINANT ANALYZER AND METHOD OF USE

Methods for determining and classifying by type aircraft air contaminants, and aircraft air contaminant analyzers, are disclosed. 1. A method for determining and classifying by type aircraft air contaminants , the method comprising: (i) a microporous medium comprising microporous flow-through channels, the microporous medium having a chemoselective coating; and,', '(ii) a thin film resistive heater, capable of heating to a temperature that vaporizes captured air contaminants comprising one or more of the following: turbine engine oil, hydraulic fluid and deicing fluid, wherein the heater is in contact with the microporous medium;, '(a) passing aircraft air through an aircraft air contaminant analyzer comprising at least one aircraft air contaminant collector comprising(b) capturing air contaminants comprising one or more of the following: turbine engine oil, hydraulic fluid and deicing fluid by the microporous medium;(c) discontinuing passing aircraft air through the at least one aircraft air contaminant collector;(d) heating the microporous medium to a temperature sufficient to vaporize the captured air contaminants and desorb the captured air contaminants;(e) receiving the desorbed air contaminants on a gravimetric sensor arranged to generate a proportionate resonant frequency response when air contaminant mass is added to or removed from the gravimetric sensor;(f) measuring the proportionate resonant frequency response generated by the gravimetric sensor as the air contaminant is added to and removed from the gravimetric sensor;(g) executing an air contaminant recognition program stored upon a computer-readable medium, including calculating air contaminant concentration and determining air contaminant type; and,(h) outputting the determined air contaminant concentration and air contaminant type.2. The method of claim 1 , wherein the air contaminants comprise aerosols.3. The method of claim 1 , wherein the air contaminants comprise particulates.4. The method of ...

Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples

A solid state device is formed through thin film deposition techniques which results in a self-supporting thin film layer that can have a precisely defined channel bored therethrough. The device is useful in the chacterization of polymer molecules by measuring changes in various electrical characteristics as molecules pass through the channel. To form the device, a thin film layer having various patterns of electrically conductive leads are formed on a silicon substrate. Using standard lithography techniques, a relatively large or micro-scale aperture is bored through the silicon substrate which in turn exposes a portion of the thin film layer. This process does not affect the thin film. Subsequently, a high precision material removal process is used (such as a TEM) to bore a precise nano-scale aperture through the thin film layer that coincides with the removed section of the silicon substrate.

MEMS-DRUCKSENSOR UND VERFAHREN FÜR DESSEN HERSTELLUNG

Ein Miko-Elektro Mechanisches System(MEMS)-Drucksensor enthält ein erstes Substrat, ein zweites Substrat und eine Sensorstruktur. Das zweite Substrat ist im Wesentlichen parallel zu dem ersten Substrat. Die Sensorstruktur befindet sich zwischen dem ersten Substrat und dem zweiten Substrat und ist an einen Abschnitt des ersten Substrats und einen Abschnitt des zweiten Substrats gebondet, wobei ein erster Raum zwischen dem ersten Substrat und der Sensorstruktur mit der Außenseite in Strömungsverbindung steht und ein zweiter Raum zwischen dem zweiten Substrat und der Sensorstruktur mit der Außenseite in Strömungsverbindung steht oder davon isoliert ist.

For manufacturing a micro-mechanical component method and micromechanical part

Method Of Manufacturing A Plurality Of Through-Holes In A Layer Of Material

A method of manufacturing a plurality of through-holes ( 132 ) in a layer of material by subjecting the layer to directional dry etching to provide through-holes ( 132 ) in the layer of material; For batch-wise production, the method comprises after a step of providing a layer of first material ( 220 ) on base material and before the step of directional dry etching, providing a plurality of holes at the central locations of pits ( 210 ), etching base material at the central locations of the pits ( 210 ) so as to form a cavity ( 280 ) with an aperture ( 281 ), depositing a second layer of material ( 240 ) on the base material in the cavity ( 280 ), and subjecting the second layer of material ( 240 ) in the cavity ( 280 ) to said step of directional dry etching using the aperture ( 281 ) as the opening ( 141 ) of a shadow mask.

SOLID STATE MEMBRANE CHANNEL DEVICE FOR THE MEASUREMENT AND CHARACTERIZATION OF ATOMIC AND MOLECULAR SIZED SAMPLES

Method for fabrication of a molecular filter and apparatus formed by the same

Compact gas sensor including a MEMS element having capillaries to facilitate gas diffusion

Apparatus and associated methods relate to a compact gas sensor (CGS) including a housing with a central stepped cavity with one or more first lead contact(s) forming a portion of a base plane in a bottom of the cavity and one or more second lead contact(s) forming a portion of a stepped plane higher than the base plane, the cavity sized to receive a chemically based stack of material made up of a bottom diffusion electrode layer, a middle electrolyte gel layer, and a top diffusion electrode layer. The bottom diffusion electrode layer is in electrical contact with the first lead contact(s). The top diffusion electrode layer electrically couples to the second lead contact(s) via an overlaying micro electromechanical system (MEMS) element layer with conductive coating. In an illustrative example, the CGS may provide gas sensing in small spaces.

Sidewall stopper for MEMS device

The present disclosure relates to a microphone. In some embodiments, the microphone may comprise a substrate, a diaphragm, a backplate, and a sidewall stopper. The substrate has an opening disposed through the substrate. The diaphragm is disposed over the substrate and facing the opening of the substrate. The diaphragm has a venting hole overlying the opening of the substrate. A backplate is disposed over and spaced apart from the diaphragm. A sidewall stopper is disposed along a sidewall of the venting hole of the diaphragm and thus is not limited by a distance between the movable part and the stable part. Also, the sidewall stopper does not alternate the shape of movable part, and thus will less likely introduce crack to the movable part. In some embodiments, the sidewall stopper may be formed like a sidewall stopper by a self-alignment process, such that no extra mask is needed.

Method for fabrication of a molecular filter and apparatus formed by the same

The invention is a method for fabricating molecular filters which can separate objects approximately 1-5 nm in range, where the filtration size is controlled by using thin films of materials and technologies to form a filtration channel or pore in a middle thin film layer in a multilayered structure. Lithography is used to define two offset arrays of blind holes into the opposing sides of a multi-layer membrane. The blind holes extend across a thin central filtration layer. A selective etch is used to attack the filtration layer to form a communicating channel between the two holes. The only connection between one side of the filter and the other is through the channel in the filter layer, whose thickness, d, determines the largest size object which can traverse the filter.

Isotachophoresis for purification of nucleic acids

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.

Sensor for selective detection of different physical quantities with a nanopore field useful for space detection, anti-terrorist applications, 3-D reconstruction technology has each nanopore at specific angle in dielectric

Sensor for selective detection of different physical quantities with a nanopore field in a dielectric and nanopore (NP) contacting layers for producing an electronic detection signal. Each nanopore is arranged in the dielectric (D) at a specific angle of inclination and to obtain its own site in the field (A) an assignable detection signal is contacted individually. An independent claim is included for production of the sensor as described above.

Verfahren zum Herstellen einer Sequenziereinheit zum Sequenzieren eines biochemischen Materials und Sequenziereinheit

Die Erfindung betrifft ein Verfahren zum Herstellen einer Sequenziereinheit (100) zum Sequenzieren eines biochemischen Materials. Dabei wird in einem thermischen Lithografieverfahren zumindest eine Sequenzierpore (104, 114) zum Sequenzieren des biochemischen Materials in einer Vorläuferschicht erstellt, um eine vorstrukturierte Schicht zu erzeugen. Anschließend wird die vorstrukturierte Schicht durch Erwärmen auf eine Umwandlungstemperatur in eine Graphenschicht (102) umgewandelt, um die Sequenziereinheit (100) herzustellen. Dabei wird die Sequenzierpore (104, 114) abhängig von der Umwandlungstemperatur auf ein zum Sequenzieren geeignetes Maß verkleinert.

Molecular diagnostics platform

A method of mixing a droplet, the method comprising providing a droplet on a surface, forming the droplet into a first "U" shape having a bottom region and two terminal ends, and simultaneously merging the terminal ends and splitting the droplet at the bottom region to form a second "U" shape which is substantially opposite the first "U" shape.

Silicon etching process for making microchannel plates

SILICON ETCHING PROCESS FOR MAKING MICROCHANNEL PLATES

An element with elongated, high aspect ratio channels (30) such as microchannel plate is fabricated by electrochemical etching of a p-type silicon element (10) in a electrolyte (26) to form channels extending through the element. The electrolyte may be an aqueous electrolyte. For use as a microchannel plate, the silicon surfaces of the channels can be converted to insulating silicon dioxide (28), and a dynode material (32) with a high electron emissivity can be deposited onto the insulating surfaces of the channels. New dynode materials are also disclosed.

Verfahren zum Herstellen eines mikromechanischen Bauelements

Verfahren zum Herstellen eines mikromechanischen Bauelements (100), aufweisend die Schritte: Ausbilden einer Zugangsöffnung (7) in einem MEMS-Element (5) oder in einem Kappenelement (6) des Bauelements (100); Verbinden des MEMS-Elements (5) mit dem Kappenelement (6), wobei zwischen dem MEMS-Element (5) und dem Kappenelement (6) wenigstens eine Kaverne (8a, 8b) ausgebildet wird; und Verschließen der Zugangsöffnung (7) zur wenigstens einen Kaverne (8a, 8b) unter einer definierten Atmosphäre mittels eines Lasers (9).

Substrate structure, semiconductor structure and method for fabricating the same

película ou espuma reforçada, estrutura em multicamada e artigo

película ou espuma reforçada, estrutura em multicamada e artigo a presente invenção provê películas e/ou espumas rerorçadas. a película e/ou espuma reforçada inventiva tem uma primeira extremidade e uma segunda extremidade, e compreende: a) uma matriz compreendendo um material termoplástico, b) pelo menos um ou mais canais dispostos em paralelo na dita matriz da primeira extremidade para a segunda extremidade da película ou espuma, sendo que os ditos um ou mais canais estão espaçados de pelo menos 1 um um do outro, sendo que cada um dos ditos um ou mais canais tem um diâmetro na faixa de pelo menos 1 um; e c) um segundo material termoplástico disposto nos ditos um ou mais canais; sendo que o dito segundo material termoplástico tem uma espessura na faixa de 2 um a 2000 um. Reinforced film or foam, multilayer structure and article the present invention provides rerorised foams and / or foams. the inventive reinforced film and / or foam has a first end and a second end, and comprises: a) a matrix comprising a thermoplastic material, b) at least one or more channels disposed in parallel on said first end matrix to the second end of the film or foam, said one or more channels being spaced at least 1 from each other, each said one or more channels having a diameter in the range of at least 1 µm; and c) a second thermoplastic material disposed in said one or more channels; said second thermoplastic material having a thickness in the range of 2 µm to 2000 µm.

ISOTACHOPHORESIS FOR PURIFICATION OF NUCLEIC ACIDS

METHOD AND APPARATUS FOR SAMPLE INJECTION IN MICROFABRICATED DEVICES

An off-column sample injection scheme for introducing samples into micro-reaction channels in microfabricated devices. In one aspect of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir provided on the substrate of the microfabricated device into a reaction channel via a constricted channel or opening interface, e.g., a narrow connection-channel and/or a pinhole. In another embodiment of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir that is provided outside the substrate of the microfabricated device. A through-hole is provided in the substrate to facilitate sample introduction into the reaction channel. In a further aspect of the present invention, the free-end of a capillary tube connected to the sample-channel is moved alternatively to a sample and an auxiliary solution to bring multiple samples in series to the vicinity of a reaction channel for convenient sample ...

밀봉형 마이크로기계 부품의 제조 방법

... 본 발명은 마이크로기계 부품(100)을 제조하기 위한 방법에 관한 것으로, 상기 방법은, 부품(100)의 MEMS 요소(5) 내에, 또는 캡 요소(6) 내에 접근 개구부(7)를 형성하는 단계와, MEMS 요소(5)와 캡 요소(6) 사이에 하나 이상의 공동(8a, 8b)을 형성하면서 상기 캡 요소(6)와 MEMS 요소(5)를 연결하는 단계와, 규정된 분위기에서 레이저(9)를 이용하여 하나 이상의 공동(8a, 8b)으로의 접근 개구부(7)를 밀폐하는 단계를 포함한다.

Method for processing silicon wafer with through cavity structure

一種貫穿空腔結構矽片的加工方法，其特徵在於：其依次按照下述要求進行操作：對矽片或圖形片進行離子注入；植入假底，使用矽片與圖形片鍵合；磨拋，減薄圖形片至露出圖形的深度；鍵合； 剝離假底。相對於現有技術而言，本發明操作規範，產品質量能夠得到有效保證；且產品的性價比高，綜合技術效果優良；其具有可預期的較為巨大的經濟價值和社會價值。

Multi-layer microfluidic devices

The present invention provides multi-layer microfluidic systems, by providing additional substrate layers, e.g., third, fourth, fifth and more substrate layers, mated with the typically described first and second layers. Microfabricated elements, e.g., grooves, wells and the like, are manufactured into the surfaces between the various substrate layers. These microfabricated elements define the various microfluidic aspects or structures of the overall device, e.g., channels, chambers and the like. In preferred aspects, a separate microscale channel network is provided between each of the substrate layers.

Membranes for production of emulsions, useful in food, pharmaceutical, cosmetics or chemical industries, have reduced diameter micro- or nano-pores produced by coating film with etched or laser-produced openings

Membrane has pores of micro/nano-metric diameter, formed by providing at least the walls of openings (2,3,4) in a film (1) with a coating (5), thus reducing the diameter (within given tolerances) to a predetermined pore diameter. An independent claim is included for a process of forming the above membrane, in which (1) the openings are provided with sequential coatings (5,6); (2) the film and openings are coated with a number of coatings of different materials to reduce the diameter of the openings; or (3) a metal film (micro- or nano-membrane) is etched or laser-perforated to give a pattern of openings, the membrane then being coated with metal ions by physical or chemical vapor deposition such that the opening diameters are reduced and then the film being coated with a second thin (in)organic layer (6), such that the film surface properties of the membrane are such that liquid drops form the largest possible contact angle (delta ) between the surface (7) and the droplet contour at the point of exit from the pores.

Glass nanopore with diameter less than 10nm, preparation method and application thereof for detecting DNA

本发明提供了一种直径小于10nm的玻璃纳米孔、制备方法及其用于检测DNA的应用，直接优化激光拉制器的拉制参数和拉制过程，缩小圆锥形玻璃毛细管纳米孔的直径。通过这种方法，可以容易地获得直径小于10nm的玻璃微孔纳米孔。该方法简单，直接，且对环境无害，而不依赖昂贵的真空设备。本发明制备的玻璃毛细管纳米孔的收缩不仅降低了可检测DNA的浓度，而且显著提高了DNA转运信号和信噪比，使得该方法和玻璃纳米孔有望用于DNA转运研究。

Process to produce a micromechanical component

HIGH VERTICAL ASPECT RATIO THIN FILM STRUCTURES

The invention relates to the area of microelectromechanical systems in which electronic circuits and mechanical devices are integrated on the same silicon chip. The method taught herein allows the fabrication of thin film structures (20) in excess of 150 micrometers in height (y) using thin film deposition processes. Wafers (60, 52) may be employed as reusable molds for efficient production of such structures.

Verfahren zur Bearbeitung eines Siliziumwafers mit einer den Wafer durchziehenden Hohlraumstruktur

Es wird ein Verfahren zur Herstellung eines Siliziumwafers mit einer den Wafer durchziehenden Hohlraumstruktur bereitgestellt ist, welches dadurch gekennzeichnet ist, dass nacheinander die folgenden Schritte ausgeführt werden: Ionenimplantation für einen als Dummy-Substrat dienenden Siliziumwafer oder einen strukturierten Wafer, der einen Hohlraum aufweist, Auflegen des Dummy-Substrats auf den strukturierten Wafer und Bonden des als Dummy-Substrat dienenden Siliziumwafers mit dem strukturierten Wafer, Schleifen und Polieren, um den strukturierten Wafer bis zu einer Tiefe abzuschleifen, bei der dessen Hohlraumstrukturen freiliegen, , Bonden von zwei nach den vorstehenden Schritten bearbeiteten Waferstrukturen und Abtragen der Dummy-Substrate. Gegenüber dem Stand der Technik zeichnet sich die vorliegende Erfindung durch ordnungsgemäße Vorgänge, eine effektiv gewährleistete Produktqualität, ein hervorragendes Preis-Leistungsverhältnis, eine ausgezeichnete umfassende technische Wirkung und ...

MOLECULAR DIAGNOSTICS PLATFORM

A method of mixing a droplet, the method comprising providing a droplet on a surface, forming the droplet into a first "U" shape having a bottom region and two terminal ends, and simultaneously merging the terminal ends and splitting the droplet at the bottom region to form a second "U" shape which is substantially opposite the first "U" shape.

COMPACT GAS SENSOR INCLUDING A MEMS ELEMENT HAVING CAPILLARIES TO FACILITATE GAS DIFFUSION

Apparatus and associated methods relate to a compact gas sensor (CGS) including a housing with a central stepped cavity with one or more first lead contact(s) forming a portion of a base plane in a bottom of the cavity and one or more second lead contact(s) forming a portion of a stepped plane higher than the base plane, the cavity sized to receive a chemically based stack of material made up of a bottom diffusion electrode layer, a middle electrolyte gel layer, and a top diffusion electrode layer. The bottom diffusion electrode layer is in electrical contact with the first lead contact(s). The top diffusion electrode layer electrically couples to the second lead contact(s) via an overlaying micro electromechanical system (MEMS) element layer with conductive coating. In an illustrative example, the CGS may provide gas sensing in small spaces. 1. A gas sensor assembly comprising:a sensor housing comprising a cavity configured to receive an electrolyte subassembly;a lid configured to mechanically couple with the sensor housing, the lid comprising a gas inlet aperture configured to permit fluid communication between ambient gasses around the gas sensor assembly and the cavity of the sensor housing; a top diffusion electrode layer,', 'a bottom diffusion electrode layer, and,', 'a gel electrolyte sandwiched between the top diffusion electrode layer and the bottom diffusion electrode layer;, 'the electrolyte subassembly disposed in the cavity of the sensor housing, the electrolyte subassembly comprisinga micro electromechanical system (MEMS) element lying between the sensor housing and the lid, the MEMS element comprising an array of capillaries configured to permit fluid communication between ambient gasses around the gas sensor assembly and the cavity via the gas inlet aperture; and,a compliant media seal lying between the sensor housing and the lid, wherein the MEMS element is forcibly held in place by the compliant media seal and the lid.2. The gas sensor assembly of ...

METHOD AND APPARATUS FOR SAMPLE INJECTION IN MICROFABRICATED DEVICES

An off-column sample injection scheme for introducing samples into micro-reaction channels in microfabricated devices. In one aspect of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir provided on the substrate of the microfabricated device into a reaction channel via a constricted channel or opening interface, e.g., a narrow connection-channel and/or a pinhole. In another embodiment of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir that is provided outside the substrate of the microfabricated device. A through-hole is provided in the substrate to facilitate sample introduction into the reaction channel. In a further aspect of the present invention, the free-end of a capillary tube connected to the sample-channel is moved alternatively to a sample and an auxiliary solution to bring multiple samples in series to the vicinity of a reaction channel for convenient sample ...

MEMS pressure sensor and method of manufacturing the same

A micro-electro mechanical system (MEMS) pressure sensor includes a first substrate, a second substrate and a sensing structure. The second substrate is substantially parallel to the first substrate. The sensing structure is between the first substrate and the second substrate, and bonded to a portion of the first substrate and a portion of the second substrate, in which a first space between the first substrate and the sensing structure is communicated with outside, and a second space between the second substrate and the sensing structure is communicated with or isolated from the outside.

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

A micro-device structure comprises a source substrate having a sacrificial layer comprising a sacrificial portion adjacent to an anchor portion, a micro-device disposed completely over the sacrificial portion, the micro-device having a top side opposite the sacrificial portion and a bottom side adjacent to the sacrificial portion and comprising an etch hole that extends through the micro-device from the top side to the bottom side, and a tether that physically connects the micro-device to the anchor portion. A micro-device structure comprises a micro-device disposed on a target substrate. Micro-devices can be any one or more of an antenna, a micro-heater, a power device, a MEMs device, and a micro-fluidic reservoir.

ANALYSIS OF MOLECULES BY TRANSLOCATION THROUGH A COATED APERTURE

The invention provides a method for molecular analysis. In the method, sidewalls (516) are formed extending through a structure (512) between two structure surfaces (518), to define an aperture (500). A layer (514, 520) of material is deposited on the aperture sidewalls and the two structure surfaces (518). The aperture (500) with the deposited material layer (520) is then configured in a liquid solution with a gradient in a chemical potential, between the two structure surfaces (518) defining the aperture (500), that is sufficient to cause molecular translocation through the aperture (500).

Micro-machined nozzles

A micro-machined nozzle includes a substrate having a hole formed on a first side that extends partially through a thickness dimension of the substrate and a nozzle orifice formed on a second opposite side that communicates with the hole. The nozzle orifice has at least a portion of its interior wall serrated. A method of fabricating a micro-machined nozzle includes the steps of etching a first side of a silicon substrate to form a hole that extends partially through a thickness dimension of the substrate and etching a second opposite side of the silicon substrate to form a serrated nozzle orifice that communicates with the hole.

High vertical aspect ratio thin film structures

This invention relates to the area of microelectromechanical systems in which electronic circuits and mechanical devices are integrated on the same silicon chip. The method taught herein allows the fabrication of thin film structures in excess of 150 microns in height using thin film deposition processes. Wafers may be employed as reusable molds for efficient production of such structures.

ANALYSIS OF MOLECULES BY TRANSLOCATION THROUGH A COATED APERTURE

REINFORCED MICROCAPILLARY FILMS AND FOAMS

Nozzle substrate, ink-jet print head, and method for producing nozzle substrate

There is provided a nozzle substrate including a nozzle hole penetrating in a thickness direction. The nozzle substrate includes a main substrate including a first surface and a second surface, an oxidation film formed on the second surface of the main substrate, and a water repellent film formed on a surface at an opposite side to the main substrate side of the oxidation film. The nozzle hole includes a first through hole penetrating the main substrate in a thickness direction, a second through hole penetrating the oxidation film and being connected to the first through hole, and a third through hole penetrating the water repellent film and being connected to the second through hole. An inner circumference surface of the second through hole and an inner circumference surface of the third through hole are approximately flush.

METHOD FOR FABRICATION OF A MOLECULAR FILTER AND APPARATUS FORMED BY THE SAME

The invention is a method for fabricating molecular filters (20) which can separate objects approximately 1-5 nm in range, where the filtration size is controlled by using thin films of materials and technologies to form a filtration channel or pore (22) in a middle thin film layer in a multilayered structure. Lithography is used to define two offset arrays of blind holes into the opposing sides of a multi-layer membrane. The blind holes extend across a thin central filtration layer. A selective etch is used to attack the filtration to form a communicating channel between the two holes (10, 12). The only connection between one side of the filter and the other is through the channel in the filter layer, whose thickness, d, determines the largest size object which can traverse the filter.

Electro-fluidic flow probe

An apparatus for an electro-fluidic flow probe includes a body portion including an electro-fluidic bias tee for receiving (i) a fluid electrolyte and (ii) an electrical connection for providing an electrical potential to the fluid electrolyte; a first inlet including a tube extending from the first inlet to an outlet through the electro-fluidic bias tee; and a second inlet including the electrical connection having a wire that extends from the second inlet to the outlet through the electro-fluidic bias tee to transfer the electrical potential to a device under test.

SOLID STATE NANOPORE DEVICES AND METHODS OF MANUFACTURE

Solid state nanopore devices for nanopore applications and methods of manufacture are disclosed herein. The method includes forming a membrane layer on an underlying substrate. The method further includes forming a hole in the membrane layer. The method further comprises plugging the hole with a sacrificial material. The method further includes forming a membrane over the sacrificial material. The method further includes removing the sacrificial material within the hole and portions of the underlying substrate. The method further includes drilling an opening in the membrane, aligned with the hole.

ISOTACHOPHORESIS FOR PURIFICATION OF NUCLEIC ACIDS

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing. 1. A method for simultaneously purifying nucleic acids from at least two different samples comprising:(a) loading into a first channel of a microfluidic chip (i) a first sample comprising first nucleic acids and a first contaminant, (ii) a first trailing electrolyte buffer comprising first trailing ions, wherein a magnitude of an effective mobility of said first trailing ions is less than a magnitude of an effective mobility of said first nucleic acids, and (iii) a first leading electrolyte buffer comprising first leading ions, wherein a magnitude of an effective mobility of said first leading ions is greater than said magnitude of said effective mobility of said first nucleic acids;(b) loading into a second channel of said microfluidic chip (i) a second sample comprising second nucleic acids and a second contaminant, (ii) a second trailing electrolyte buffer comprising second trailing ions, wherein a magnitude of said second trailing ions is less than a magnitude of an effective mobility of said second nucleic acids, and (iii) a second leading electrolyte buffer comprising second leading ions, wherein a magnitude of an effective mobility of said second leading ions is greater than said magnitude of said effective mobility of said second nucleic acids; and(c) independently controlling a first electric circuit connected to said microfluidic chip to conduct isotachophoresis in said first channel with said first trailing ions, said first nucleic acids, and said first leading ...

Apparatus and methods for high throughput and high-resolution assays

An apparatus integrates one dimensional separation to another dimensional separation and automates the operation of the two dimensional separation. The first dimensional separation is performed in one column while the second dimensional separation is performed in multiple separation columns. The integration is achieved using a one-piece, a two-piece, or a three-piece interface.

Microphone, micro-electro-mechanical system device and method for manufacturing MEMS device

Microphone, MEMS device and method of manufacturing MEMS device

The present disclosure relates to a microphone. In some embodiments, the microphone may comprise a substrate, a diaphragm, a backplate, and a sidewall stopper. The substrate has an opening disposed through the substrate. The diaphragm is disposed over the substrate and facing the opening of the substrate. The diaphragm has a venting hole overlying the opening of the substrate. A backplate is disposed over and spaced apart from the diaphragm. A sidewall stopper is disposed along a sidewall of the venting hole of the diaphragm and thus is not limited by a distance between the movable part and the stable part. Also, the sidewall stopper does not alternate the shape of movable part, and thus will less likely introduce crack to the movable part. In some embodiments, the sidewall stopper may be formed like a sidewall stopper by a self-alignment process, such that no extra mask is needed.

Apparatus and methods for high-resolution and high-sensitivity assays

An apparatus allows separation, fractionation isolation and fraction collection simultaneously. The device consists of two major pieces, with one piece slides relatively to the other to facilitate the switching between separation and fractionation.

NOZZLE SUBSTRATE, INK-JET PRINT HEAD, AND METHOD FOR PRODUCING NOZZLE SUBSTRATE

There is provided a nozzle substrate including a nozzle hole penetrating in a thickness direction. The nozzle substrate includes a main substrate including a first surface and a second surface, an oxidation film formed on the second surface of the main substrate, and a water repellent film formed on a surface at an opposite side to the main substrate side of the oxidation film. The nozzle hole includes a first through hole penetrating the main substrate in a thickness direction, a second through hole penetrating the oxidation film and being connected to the first through hole, and a third through hole penetrating the water repellent film and being connected to the second through hole. An inner circumference surface of the second through hole and an inner circumference surface of the third through hole are approximately flush. 1. A nozzle substrate including a nozzle hole penetrating in a thickness direction , the nozzle substrate comprising:a main substrate including a first surface and a second surface;an oxidation film formed on the second surface of the main substrate; anda water repellent film formed on a surface at an opposite side to the main substrate side of the oxidation film,wherein the nozzle hole includes a first through hole penetrating the main substrate in a thickness direction, a second through hole penetrating the oxidation film and being connected to the first through hole, and a third through hole penetrating the water repellent film and being connected to the second through hole, andan inner circumference surface of the second through hole and an inner circumference surface of the third through hole are approximately flush.2. The nozzle substrate according to claim 1 ,wherein transverse sections of the second through hole and the third through hole are circular, and{'b': 2', '1', '1', '1', '2', '1, 'percentage of a ratio (D−D)/D of a value, in which a diameter D of the second through hole is subtracted from a diameter D of the third through hole, ...

ISOTACHOPHORESIS FOR PURIFICATION OF NUCLEIC ACIDS

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.

ISOTACHOPHORESIS FOR PURIFICATION OF NUCLEIC ACIDS

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing. 1. A method for sample purification , comprising: (i) a tissue sample comprising lysed solid tissue, wherein said lysed solid tissue comprises nucleic acids and a contaminant,', '(ii) a trailing electrolyte buffer comprising first trailing electrolyte ions with an effective mobility having a magnitude lower than a magnitude of an effective mobility of said nucleic acids, and', '(iii) a leading electrolyte buffer comprising first leading electrolyte ions, with a second effective mobility, wherein said second effective mobility has a magnitude greater than said magnitude of said effective mobility of said nucleic acids; and, '(a) loading into a fluidic device'}(b) applying an electric field within said fluidic device to conduct isotachophoresis with said first trailing electrolyte ions, said nucleic acids, and said first leading electrolyte ions, thereby purifying said nucleic acids from said contaminant in said tissue sample.2. The method of claim 1 , wherein said effective mobility of said first trailing electrolyte ions has a magnitude greater than a magnitude of an effective mobility of said contaminant.3. (canceled)4. The method of claim 1 , further comprising in a first zone of said microfluidic chip claim 1 , conducting on said tissue sample at least one sample preparation procedure selected from the group consisting of (1) removing embedding material claim 1 , (2) disrupting tissue claim 1 , (3) lysing cells claim 1 , (4) de-crosslinking said nucleic acids claim 1 , (5 ...

MICRO-MACHINED NOZZLES

Reinforced microcapillary films and foams

The instant invention provides reinforced microcapillary films and/or foams. The inventive reinforced film and/or foam have a first end and a second end, wherein the film and/or foam comprises: (a) a matrix comprising a first thermoplastic material, (b) at least one or more channels disposed in parallel in said matrix from the first end to the second end of the film or foam, wherein said one or more channels are at least 1 [mu]m apart from each other, and wherein each said one or more channels have a diameter in the range of at least 1 [mu]m; and (c) a second thermoplastic material disposed in said one or more channels, wherein said second thermoplastic material is different than the first thermoplastic material; wherein said film has a thickness in the range of from 2 [mu]m to 2000 [mu]m.

REINFORCED MICROCAPILLARY FILMS AND FOAMS

The instant invention provides reinforced microcapillary films and/or foams. The inventive reinforced film and/or foam have a first end and a second end, wherein the film and/or foam comprises: (a) a matrix comprising a first thermoplastic material, (b) at least one or more channels disposed in parallel in said matrix from the first end to the second end of the film or foam, wherein said one or more channels are at least 1 µm apart from each other, and wherein each said one or more channels have a diameter in the range of at least 1 µm; and (c) a second thermoplastic material disposed in said one or more channels, wherein said second thermoplastic material is different than the first thermoplastic material; wherein said film has a thickness in the range of from 2 µm to 2000 µm.

Reinforced microcapillary films and foams

The instant invention provides reinforced microcapillary films and/or foams. The inventive reinforced film and/or foam have a first end and a second end, wherein the film and/or foam comprises: (a) a matrix comprising a first thermoplastic material, (b) at least one or more channels disposed in parallel in said matrix from the first end to the second end of the film or foam, wherein said one or more channels are at least 1 μm apart from each other, and wherein each said one or more channels have a diameter in the range of at least 1 μm; and (c) a second thermoplastic material disposed in said one or more channels, wherein said second thermoplastic material is different than the first thermoplastic material; wherein said film has a thickness in the range of from 2 μm to 2000 μm.

NANOPORE FLOW CELLS AND METHODS OF FABRICATION

Nanopore flow cells and methods of manufacturing thereof are provided herein. In one embodiment a method of forming a flow cell includes forming a multilayer stack on a first substrate, e.g., a monocrystalline silicon substrate, before transferring the multilayer stack to a second substrate, e.g., a glass substrate. Here, the multilayer stack features a membrane layer, having a first opening formed therethrough, where the membrane layer is disposed on the first substrate, and a material layer is disposed on the membrane layer. The method further includes patterning the second substrate to form a second opening therein and bonding the patterned surface of the second substrate to a surface of the multilayer stack. The method further includes thinning the first substrate and thinning the second substrate. Here, the second substrate is thinned to where the second opening is disposed therethrough. The method further includes removing the thinned first substrate and at least portions of the material ...

Aircraft air contaminant analyzer and method of use

Disclosed are methods for determining and classifying aircraft air contaminants using contaminant analyzers comprising a contaminant collector comprising a membrane and a heater vaporizing captured contaminants; a gravimetric sensor generating a proportionate response when contaminant mass is added to or removed from the sensor, the sensor arranged to receive contaminants desorbed from the membrane when the membrane is heated; a frequency measurement device, measuring the response generated by the sensor as the contaminant is added to and removed from the sensor; a computer readable medium bearing a contaminant recognition program and calibration data; a processor executing the recognition program, the program including a module classifying contaminants by type, and a module using the calibration data for comparison with magnitude of the response generated by the sensor to calculate contaminant concentration; and, a pump, generating flow of aircraft air through the contaminant collector ...

TECHNIQUES FOR PROVIDING A STRUCTURE WITH THROUGH-HOLES THAT MAY BE USED IN A SUB-ASSEMBLY FOR MICRO-COMPONENTS

Formation of a structure with through-holes includes attaching two sub-structures to one another. The resulting structure may be used in a sub-assembly for various types of micro components and may serve as a lid or base of a housing that encapsulates one or more micro components. The techniques may provide greater flexibility in the shape of the through-holes and may reduce costs compared with other known techniques.

REINFORCED MICROCAPILLARY FILMS AND FOAMS

The instant invention provides reinforced microcapillary films and/or foams. The inventive reinforced film and/or foam have a first end and a second end, wherein the film and/or foam comprises: (a) a matrix comprising a first thermoplastic material, (b) at least one or more channels disposed in parallel in said matrix from the first end to the second end of the film or foam, wherein said one or more channels are at least 1 μm apart from each other, and wherein each said one or more channels have a diameter in the range of at least 1 μm; and (c) a second thermoplastic material disposed in said one or more channels, wherein said second thermoplastic material is different than the first thermoplastic material; wherein said film has a thickness in the range of from 2 μm to 2000 μm. 1. A reinforced film or foam having a first end and a second end , wherein said film comprises:(a) a matrix comprising a first thermoplastic material,(b) at least one or more channels disposed in parallel in said matrix from the first end to the second end of said film, wherein said one or more channels are at least 1 μm apart from each other, and wherein each said one or more channels have a diameter in the range of at least 1 μm; and(c) a second thermoplastic material disposed in said one or more channels, wherein said second thermoplastic material is different than the first thermoplastic material;wherein said film has a thickness in the range of from 2 μm to 2000 μm.2. The film or foam of claim 1 , wherein said first thermoplastic material is selected from the group consisting of polyolefin; polyamide; polyvinylidene chloride; polyvinylidene fluoride; polycarbonate; polystyrene; polyethylene vinylalcohol (PVOH) claim 1 , polyvinyl chloride claim 1 , polylactic acid (PLA) and polyethylene terephthalate.3. The film or foam of claim 2 , wherein said polyolefin is polyethylene or polypropylene.4. The film or foam of claim 2 , wherein said polyamide is nylon 6.5. The film or foam of claim 1 , ...

Method for producing at least one recess in a material by means of electromagnetic radiation and subsequent etching process

A method for creating at least one recess, in particular an aperture, in a transparent or transmissive material, includes: selectively modifying the material along a beam axis by electromagnetic radiation; and creating the at least one recess by one or more etching steps, using different etching rates in a modified region and in non-modified regions. The electromagnetic radiation produces modifications having different characteristics in the material along the beam axis such that the etching process in the material is heterogeneous and the etching rates differ from one another in regions modified with different characteristics under unchanged etching conditions.

MEMS DEVICE AND FABRICATION METHOD THEREOF

A method for fabricating an MEMS device includes providing a first substrate with a central region and a peripheral region, and forming a plurality of first openings in the peripheral region and a plurality of third openings in the central region by etching the first substrate from a front side. The depth of the first openings is larger than the depth of the third openings. The method further includes forming a photosensitive layer on the surfaces of the first openings and the third openings, bonding a second substrate to the front side of the first substrate, and forming a trench by etching the first substrate from a back side using a patterned mask layer as an etch mask. The trench has a concave bottom surface and exposes a portion of the photosensitive layer formed on the bottom surfaces of the first openings and the third openings. 1. A method for fabricating a micro-electro mechanical system (MEMS) device , comprising:providing a first substrate with an open region, wherein the first substrate includes a front side and, opposite to the front side, a back side, and the open region includes a central region and a peripheral region surrounding the central region;forming a plurality of first openings in the first substrate in the peripheral region and a plurality of third openings in the first substrate in the central region by etching the first substrate in the open region from the front side to the back side, wherein a depth of the first openings in the first substrate is larger than a depth of the third openings in the first substrate, while the depth of the first openings and the depth of the third openings are both smaller than a thickness of the first substrate;forming a photosensitive layer on bottom and sidewall surfaces of the first openings and also on bottom and sidewall surfaces of the third openings;providing a second substrate;bonding the second substrate to the front side of the first substrate;forming a patterned mask layer on the back side of the ...

Molecular diagnostics platform

A method of mixing a droplet, the method comprising providing a droplet on a surface, forming the droplet into a first “U” shape having a bottom region and two terminal ends, and simultaneously merging the terminal ends and splitting the droplet at the bottom region to form a second “U” shape which is substantially opposite the first “U” shape.

3d stack configuration for 6-axis motion sensor

A method includes fusion bonding a first side of a MEMS wafer to a second side of a first handle wafer. A TSV is formed from a first side of the first handle wafer to the second side of the first handle wafer and into the first MEMS wafer. A dielectric layer is formed on the first side of the first handle wafer. A tungsten via is formed in the dielectric layer. Electrodes are formed on the dielectric layer. A second MEMS wafer is eutecticly bonded with a first eutectic bond to the electrodes, wherein the TSV electrically connects the first MEMS wafer to the second MEMS wafer. Standoffs are formed on a second side of the first MEMS wafer. A CMOS wafer is eutecticly bonded with a second eutectic bond to the standoffs, wherein the second eutectic bond includes different materials than the first eutectic bond.

METHOD FOR FORMING FILM AND METHOD FOR MANUFACTURING INKJET PRINT HEAD

A method for forming a film that covers a side wall of a through hole in a substrate having the through hole, the method including, in the following order, the steps of providing a substrate having a through hole that passes therethrough from a first surface to a second surface, which is a surface opposite to the first surface, forming, on the first surface, a lid member that blocks an opening of the through hole open on the first surface, recessing, in a direction away from the first surface, a surface of the lid member that blocks the opening by removing part of the lid member through the opening, and forming a film that covers the side wall of the through hole. 1. A method for forming a film that covers a side wall of a through hole in a substrate having the through hole , the method comprising , in order , the steps of:providing a substrate having a through hole that passes therethrough from a first surface to a second surface, the second surface being a surface opposite to the first surface;forming, on the first surface, a lid member that blocks an opening of the through hole open on the first surface;recessing, in a direction away from the first surface, a surface of the lid member that blocks the opening by removing part of the lid member through the opening; andforming a film that covers the side wall of the through hole.2. The method for forming a film according to claim 1 , wherein the lid member is removed from the substrate after the film that covers the side wall of the through hole is formed.3. The method for forming a film according to claim 2 , wherein a space is located inside the lid member in the recessing claim 2 , in a direction away from the first surface claim 2 , of a surface of the lid member that blocks the opening.4. The method for forming a film according to claim 2 , wherein a through hole is formed in the lid member in the recessing claim 2 , in a direction away from the first surface claim 2 , of a surface of the lid member that blocks ...

MICRO POWER GENERATION DEVICE AND ELECTRONIC APPARATUS WITH THE SAME

The present disclosure proposes a micro power generation device including a plurality of generators stacked one above the other. Each of the plurality of generators includes: an upper electrode and a lower electrode spaced up and down; a spacer provided between peripheral edges of the upper electrode and the lower electrode; an upper friction material layer provided on a side of the upper electrode facing the lower electrode; and a lower friction material layer provided on a side of the lower electrode facing the upper electrode. The upper friction material layer, the lower friction material layer and the spacer together form a cavity. An intermediate spacer is provided between each adjacent two generators, each adjacent two generators and the intermediate spacer together form an intermediate cavity, and the intermediate cavity is filled with gas. A cavity of an upper one of any two adjacent generators communicates with the intermediate cavity between the two adjacent generators. 1. A micro power generation device , comprising a plurality of generators stacked one above the other , wherein each of the plurality of generators comprises:an upper electrode and a lower electrode spaced up and down;a spacer provided between peripheral edges of the upper electrode and the lower electrode;an upper friction material layer provided on a side of the upper electrode facing the lower electrode; anda lower friction material layer provided on a side of the lower electrode facing the upper electrode,wherein the upper friction material layer, the lower friction material layer, and the spacer together form an internal cavity, and an intermediate spacer is provided between any two adjacent generators among the plurality of generators, wherein any two adjacent generators and the intermediate spacer together form an intermediate cavity, and the intermediate cavity is filled with gas; and the internal cavity of an upper generator of any two adjacent generators communicates with the ...

Mems pressure sensor and method of manufacturing the same

A micro-electro mechanical system (MEMS) pressure sensor includes a first substrate, a second substrate and a sensing structure. The second substrate is substantially parallel to the first substrate. The sensing structure is between the first substrate and the second substrate, and bonded to a portion of the first substrate and a portion of the second substrate, in which a first space between the first substrate and the sensing structure is communicated with outside, and a second space between the second substrate and the sensing structure is communicated with or isolated from the outside.

Method for Producing a Sequencing Unit for Sequencing a Biochemical Material and Sequencing Unit

The disclosure relates to a method for producing a sequencing unit for sequencing a biochemical material. In this case, at least one sequencing pore for sequencing the biochemical material in a precursor layer is created in a thermal lithography process in order to produce a pre-structured layer. The pre-structured layer is then converted into a graphene layer by heating to a conversion temperature in order to produce the sequencing unit. The sequencing pore is reduced to a size suitable for sequencing, depending on the transformation temperature. 1. A method for producing a sequencing unit for sequencing a biochemical material , the method comprising:creating at least one sequencing pore in a precursor layer by generating a prestructured layer using thermal lithography; andconverting the prestructured layer into a graphene layer by heating the prestructured layer to a conversion temperature thereby configuring the at least one sequencing pore for sequencing the biochemical material.2. The method as claimed in claim 1 , wherein:a diameter of the created at least one sequencing pore is reduced in size to a predetermined diameter by converting the prestructured layer into the graphene layer; andthe conversion temperature is set depending on the predetermined diameter.3. The method as claimed in claim 1 , wherein creating the at least one sequencing pore comprises:creating the at least one sequencing pore in the form of a nanopoint.41. The method as claimed inclaim claim 1 , wherein creating the at least one sequencing pore comprises:creating the at least one sequencing pore with a diameter between 10 and 20 nanometers.5. The method as claimed in claim 1 , wherein converting the prestructured layer comprises:reducing the created at least one sequencing pore in size to a diameter between 1 and 5 nanometers.6. The method as claimed in claim 1 , wherein converting the prestructured layer comprises:forming the graphene layer as a monolayer at least in an edge region of the ...

Method for producing a micromechanical component, and micromechanical component

A method for producing a micromechanical component, and a micromechanical component, includes providing a substrate having first and second outer surfaces, the second surface facing away from the first surface; forming a through-hole through the substrate from the first outer surface up to the second outer surface; attaching an optical functional layer, on the second outer surface, to cover the through-hole; removing a first segment of the substrate on the first surface of the substrate so that there arises a third outer surface inclined relative to the second surface, the third surface facing away from the second surface, the inclined surface enclosing the through-hole; and separating the micromechanical component by separating a first part of the substrate, having the through-hole, and a second part, attached to the first part, of the optical functional layer from a remaining part of the substrate and a remaining part of the optical functional layer. 1. A method for producing a micromechanical component , the method comprising:providing a substrate having a first outer surface and a second outer surface, which faces away from the first outer surface;forming a through-hole through the substrate from the first outer surface of the substrate up to the second outer surface of the substrate;attaching an optical functional layer on the second outer surface of the substrate, wherein the optical functional layer covers the through-hole;removing a first segment of the substrate on the first outer surface of the substrate so that there arises a third outer surface that is inclined relative to the second outer surface of the substrate, the third surface facing away from the second outer surface of the substrate, the inclined third outer surface enclosing the through-hole; andseparating the micromechanical component by separating a first part of the substrate, having the through-hole, and a second part, attached to the first part, of the optical functional layer from a ...

Manufacturing Design and Fabrication for Microfluidic Busses, Valve Arrays, Pumps, and Other Microfluidic Systems Employing Interlaminate-Spanning Structures

The present application addresses manufacturing design and fabrication techniques for active conduit-based microfluidic and micro-scale gas-flow systems comprising valves and/or pumps of arbitrary complexity, and in particular comprising complex structures such as valve arrays, bus structures, and intricate or high-replication microfluidic and micro-scale gas-flow arrangements and configurations. Of special value in implementing such complex flow-network topologies in compact volumes is the use of stack of specifically-configured laminate layers linked by electrically-operated, pneumatically operated or fluidicly-operated interlaminate-spanning flow-valve structures and pumps comprising interlaminate-spanning structure. 1a first laminate layer;a second laminate layer; anda plurality of openings and structures located within least a plurality of additional laminates layers, the plurality of additional laminates layers sandwiched between the first laminate layer and second laminate layer,wherein an example on/off valve links a T-joint tap on a first channel in the first laminate layer with a T-joint tap on a second channel in the second laminate layer.. A system for active conduit-based microfluidic and micro-scale gas-flow comprising: This application relies upon and claims the benefit of priority of U.S. Provisional Application Ser. No. 62/113,325, filed Feb. 6, 2015, which is incorporated by reference herein.A portion of the disclosure of this patent document may contain material, which is subject to copyright protection. Certain marks referenced herein may be common law or registered trademarks of the applicant, the assignee or third parties affiliated or unaffiliated with the applicant or the assignee. Use of these marks is for providing an enabling disclosure by way of example and shall not be construed to exclusively limit the scope of the disclosed subject matter to material associated with such marks.1. Field of the InventionThis patent application generally ...

Molecular diagnostics platform that uses digital microfluidics and multiplexed bead detection

A droplet actuator for manipulating a fluid using an electrical field includes a droplet arranged on or over an electrode. The droplet includes a set of beads arranged substantially in a monolayer on or over a surface of the droplet actuator.

METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE

A method for processing a silicon wafer with a through cavity structure. The method is operated in accordance with the following sequence: performing ion implantation on a silicon wafer or pattern wafer; implanting a dummy substrate; bonding the silicon wafer to the pattern wafer; performing grinding and polishing, and thinning the pattern wafer to a depth exposing the pattern; bonding; and peeling the dummy substrate. Compared with the prior art, the present invention is standard in operation, and the product quality can be effectively guaranteed. The product has high cost performance and excellent comprehensive technical effect. The present invention has expectable relatively large economic values and social values. 1. A method for processing a silicon wafer with a through cavity structure , comprising:(1) performing ion implantation on a silicon wafer or a pattern wafer;(2) implanting a dummy substrate, and bonding the silicon wafer to the pattern wafer;(3) grinding and polishing by a mechanical grinding or/and chemical polishing method, using the dummy substrate as a substrate, thinning the pattern wafer, grinding the pattern wafer to a depth of exposing the pattern, and exposing a cavity which is not originally exposed;(4) performing pattern-to-pattern bonding on the two silicon wafers subjected to the steps (1) and (2); and(5) peeling the dummy substrate playing a protective role by low-temperature annealing and microwave splitting operation to realize the silicon wafer of a through structure.2. The method for processing a silicon wafer with a through cavity structure according to claim 1 , further comprising:an implantation depth is in a range of 1 μm to 0.001 μm from the surface; and the hydrogen ion implantation are the energy of 10 to 120 KeV, the dose of 1E15 to 9E16, and the beam of 1-20 mA; andwherein for bonding the silicon wafer to the pattern wafer, a roughness of the silicon wafer is less than or equal to 5 nm; and the silicon wafer and the pattern ...

VERTICALLY STACKED NANOFLUIDIC CHANNEL ARRAY

Techniques regarding a vertical nanofluidic channel array are provided. For example, one or more embodiments described herein can regard an apparatus that can comprise a semiconductor substrate and a dielectric layer adjacent to the semiconductor substrate. The dielectric layer can comprise a first nanofluidic channel and a second nanofluidic channel. The second nanofluidic channel can be located between the first nanofluidic channel and the semiconductor substrate. 1. An apparatus , comprising:a semiconductor substrate; anda dielectric layer adjacent to the semiconductor substrate, the dielectric layer comprising a first nanofluidic channel and a second nanofluidic channel, wherein the second nanofluidic channel is located between the first nanofluidic channel and the semiconductor substrate.2. The apparatus of claim 1 , wherein the dielectric layer is a silicon dioxide layer.3. The apparatus of claim 1 , further comprising:a first reservoir having a first parameter defined by the dielectric layer; anda second reservoir having a second parameter defined by the dielectric layer, wherein the first nanofluidic channel extends from the first reservoir to the second reservoir, and wherein the second nanofluidic channel extends the first reservoir to the second reservoir.4. The apparatus of claim 1 , wherein the semiconductor substrate forms a first side of the second nanofluidic channel.5. The apparatus of claim 1 , wherein the dielectric layer forms a first side of the first nanofluidic channel and a second side of the first nanofluidic channel claim 1 , and wherein the dielectric layer further forms a first side of the second nanofluidic channel and a second side of the second nanofluidic channel.6. The apparatus of claim 5 , further comprising:a first silicon layer that forms a third side of the second nanofluidic channel, wherein the third side of the second nanofluidic channel is parallel with the semiconductor substrate, and wherein the dielectric layer is ...

BONDED SUBSTRATE BODY, METHOD FOR MANUFACTURING BONDED SUBSTRATE BODY, LIQUID DISCHARGE HEAD, AND METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD

A method for manufacturing a bonded substrate body in which an end portion of an adhesive is located at a position retreated in a direction to the inside of the bonded substrate body from an end surface of a bonding region of a first substrate and a second substrate includes forming a film on the end portion of the adhesive. 1. A method for manufacturing a bonded substrate body in which a first substrate and a second substrate are bonded through an adhesive and which has a film formed on the bonded substrate body over the first substrate , the second substrate , and a bonding region of the first substrate and the second substrate , the method comprising:forming the film to the bonding region in which an end portion of the adhesive is located at a position retreated in a direction to an inside of the bonded substrate body from an end surface of the bonding region.2. The method for manufacturing a bonded substrate body according to claim 1 , whereinthe film is formed so as to close a gap between the first substrate and the second substrate.3. The method for manufacturing a bonded substrate body according to claim 2 , whereinspace is formed between a portion closing the gap of the film and the end portion of the adhesive.4. The method for manufacturing a bonded substrate body according to claim 1 , whereinthe film is formed so as to cross the gap between the first substrate and the second substrate.5. The method for manufacturing a bonded substrate body according to claim 1 , whereinthe first substrate and the second substrate each successively have a first bonding surface and a second bonding surface in a direction to the inside of the bonded substrate body from a side of the end surface of the bonding region,a level difference is provided between the first bonding surface and the second bonding surface, andthe first substrate and the second substrate are engaged with each other with the level differences.6. The method for manufacturing a bonded substrate body ...

METHOD FOR FABRICATING THERMOPLASTIC FLUIDIC DEVICES BY OROGENIC GROWTH AND FLUIDIC DEVICES MANUFACTURED THEREBY

A new process enabling rapid and efficient desktop manufacturing of microfluidic devices fabricated from thermoplastic substrates utilizing the selective irreversible swelling of thermoplastic polymer when exposed to suitable solvent makes it possible to produce micro- or nano-fluidic devices with outstanding bonding and collapse free micro- or nano-structures. 1. A method for manufacturing devices , comprising:masking a first substrate comprising a thermoplastic polymer;exposing the masked first substrate to a solvent so that the thermoplastic polymer exposed to the solvent swells and grows in height; andbonding the first substrate with a second substrate.2. The method for manufacturing devices according to claim 1 , wherein the thermoplastic polymer comprises a cyclic olefin polymer and/or a cyclic olefin copolymer.3. The method for manufacturing devices according to claim 2 , whereinthe cyclic olefin copolymer comprises a product of chain copolymerization of one or more cyclic hydrocarbon monomers with an alkene.4. The method for manufacturing devices according to claim 3 , whereinat least one cyclic hydrocarbon monomer contains at least one ring, has 3-25 carbon atoms, and optionally has one or more side chains.5. The method for manufacturing devices according to claim 4 , whereinthe cyclic hydrocarbon monomer is at least one of norbornene or tetracyclododecane.6. The method for manufacturing devices according to claim 3 , whereinthe alkene has a branched or straight chain and contains 2-12 carbon atoms.7. The method for manufacturing devices according to claim 6 , whereinthe alkene comprises ethene.8. The method for manufacturing devices according to claim 1 , whereinthe solvent has a solubility parameter that differs from a solubility parameter of the thermoplastic polymer by more than 1% and no more than 8%.9. The method for manufacturing devices according to claim 8 , whereinthe solvent has a solubility parameter that differs from a solubility parameter of ...

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

A method for manufacturing a micromechanical component including forming an access opening in an MEMS element or in a cap element of the component; connecting the MEMS element to the cap element, at least one cavity being formed between the MEMS element and the cap element; and closing off the access opening with respect to the at least one cavity under a defined atmosphere, using a laser. 19-. (canceled)10. A method for manufacturing a micromechanical component , comprising:forming an access opening in a MEMS element or in a cap element of the component;connecting the MEMS element to the cap element, at least one cavity being formed between the MEMS element and the cap element; andclosing off the access opening with respect to the at least one cavity under a defined atmosphere, using a laser.11. The method as recited in claim 10 , further comprising:establishing a defined internal pressure in the cavity before closing the access opening.12. The method as recited in claim 10 , further comprising:conditioning a surface of MEMS structures of the MEMS element through the access opening.13. The method as recited in claim 12 , wherein the conditioning includes at least one of: i) roughening of the surface of the MEMS structures of the MEMS element claim 12 , ii) depositing a thin oxide layer onto the surface of the MEMS structures of the MEMS element claim 12 , and iii) depositing an anti-adhesion layer onto the surface of the MEMS structures of the MEMS element.14. The method as recited in claim 10 , wherein the formation of the access opening provides for a formation of a partition wall with respect to the cavity claim 10 , a connecting channel to the cavity being generated.15. The method as recited in claim 10 , wherein the closing of the cavity is carried out one of: i) by way of a pulsed laser claim 10 , or ii) by way of an IR laser.16. The method as recited in claim 10 , wherein the connecting of the MEMS element to the cap element is carried out one of: i) by way ...

SIDEWALL STOPPER FOR MEMS DEVICE

The present disclosure relates to a microphone. In some embodiments, the microphone may comprise a diaphragm, a backplate, and a sidewall stopper. The diaphragm has a venting hole disposed therethrough. The backplate is disposed over and spaced apart from the diaphragm. The sidewall stopper is disposed along a sidewall of the diaphragm exposing to the venting hole. Thus, the sidewall stopper is not limited by a distance between the movable part and the stable part of the microphone. Also, the sidewall stopper does not alternate the shape of movable part, and thus will less likely introduce crack to the movable part. In some embodiments, the sidewall stopper may be formed like a sidewall stopper by a self-alignment process, such that no extra mask is needed. 1. A microphone , comprising:a diaphragm having a venting hole disposed therethrough;a backplate disposed over and spaced apart from the diaphragm; anda sidewall stopper disposed along a sidewall of the diaphragm exposing to the venting hole.2. The microphone of claim 1 ,wherein the sidewall stopper laterally extends across an edge of the venting hole and includes an upper portion contacting a top surface of the diaphragm and a lower portion contacting a bottom surface of the diaphragm; andwherein the upper portion and the lower portion of the sidewall stopper clamp a middle portion of the diaphragm therebetween.3. The microphone of claim 2 , wherein the upper portion and the lower portion of the sidewall stopper have curved sidewalls.4. The microphone of claim 1 , wherein the sidewall stopper has an upper portion higher than a top surface of the diaphragm and a lower portion lower than a bottom surface of the diaphragm.5. The microphone of claim 1 , further comprising a substrate having an opening disposed through the substrate claim 1 , wherein the diaphragm is disposed over the substrate and facing the opening of the substrate.6. The microphone of claim 1 , wherein a height of the sidewall stopper is greater ...

分子诊断平台

一种混合微滴的方法，所述方法包括：在表面上提供微滴，使所述微滴形成具有底部区域和两个端部的第一“U”形状，且同时合并所述端部并使所述微滴在所述底部区域处分离，以形成与所述第一“U”形状实质上相反的第二“U”形状。

기판에서의 포어 형성

잘 제어된 고체 상태 나노포어들 및 그의 어레이들을 제조하기 위한 방법들이 제공된다. 일 양상에서, 나노포어들 및 그의 어레이들을 제조하기 위한 방법들은 물리적 이음부를 활용한다. 하나 이상의 식각 피트는 기판의 상면측에 형성되고, 하나 이상의 식각 피트와 정렬되는 하나 이상의 트렌치는 기판의 후면측에 형성된다. 하나 이상의 식각 피트와 하나 이상의 트렌치 사이에 개구부가 형성된다. 그 다음, 개구부를 채우기 위해 기판 위에 유전체 물질이 형성된다. 그 다음, 접촉부들이 기판의 상면측 및 후면측 상에 배치되며, 나노포어를 형성하기 위해 유전체 물질을 통해 상면측으로부터 후면측으로 또는 그 반대로 전압이 인가된다. 다른 양상에서, 나노포어는 개구부의 중심에 또는 중심 근처에, 유전체 물질에 형성된 이음부에 형성된다.

Method for producing at least one recess in a material by means of electromagnetic radiation and subsequent etching process

A method for creating at least one recess, in particular an aperture, in a transparent or transmissive material, includes: selectively modifying the material along a beam axis by electromagnetic radiation; and creating the at least one recess by one or more etching steps, using different etching rates in a modified region and in non-modified regions. The electromagnetic radiation produces modifications having different characteristics in the material along the beam axis such that the etching process in the material is heterogeneous and the etching rates differ from one another in regions modified with different characteristics under unchanged etching conditions.

Fluidic channel, fluidic channel system, method for fabricating a fine structure, and method for conveying a fine structure

본 발명은 에너지 경화성 물질을 이용한 미세구조물 생성 및 처리 시스템으로서, 보다 구체적으로 다양한 에너지 경화성 유체에 선택적으로 에너지를 공급하여 원하는 형상의 미세구조물을 생성한 후, 상기 미세구조물을 일정 패턴에 따라 이동, 배열 또는 결합하는 시스템에 관한 것이다. The present invention relates to a microstructure generation and processing system using an energy curable material, and more specifically, to selectively supply energy to various energy curable fluids to generate microstructures of a desired shape, and then move the microstructures according to a predetermined pattern, A system for arranging or combining. 본 발명의 제1 측면은 광원; 상기 광원에서 조사된 광을 선택된 특성을 갖는 광으로 변형하는 변형 수단; 내부에 광경화성 유체가 흐르며, 상기 변형 수단에서 제공된 광에 따라 상기 광경화성 유체를 선택적으로 경화하여 미세구조물을 생성하는 유체관; 및 상기 유체관에 배치되어 상기 미세구조물을 일정 패턴에 따라 이동, 배열 또는 결합하는 처리수단 등으로 구성되는 것을 특징으로 하는 미세구조물 생성 및 처리 시스템을 제공하는 것이다. A first aspect of the invention is a light source; Modification means for transforming the light irradiated from the light source into light having a selected characteristic; A fluid tube in which a photocurable fluid flows and selectively cures the photocurable fluid according to light provided by the deforming means to generate a microstructure; And disposed in the fluid tube is to provide a microstructure generation and processing system comprising a processing means for moving, arranging or combining the microstructures according to a predetermined pattern.

Method for fabrication of high vertical aspect ratio thin film structures

This invention relates to the area of microelectromechanical systems in which electronic circuits and mechanical devices are integrated on the same silicon chip. The method taught herein allows the fabrication of thin film structures in excess of 150 microns in height using thin film deposition processes. Wafers may be employed as reusable molds for efficient production of such structures.

For at least one recessed to be spaced apart the method being set in material by electromagnetic radiation and subsequent etching process

本发明涉及一种用于将至少一个穿孔(1)开设到透明的或者可透射的玻璃基底(2)中的方法，其中，借助电磁射线、尤其是激光沿着射线轴(s)选择性地使玻璃基底(2)改性。由于沿着射线轴(s)通过电磁射线以不同的特性、例如通过不同的脉冲能量在玻璃基底(2)中产生改性，因此在玻璃基底(2)中的蚀刻过程不均匀地以不同的蚀刻率进行。由此形成了以下可能性，即在透明的或者可透射的材料中有针对性地并且选择性地通过不同的改性特性来形成由于蚀刻处理而产生的穿孔(1)并且例如改变穿孔(1)的锥角(α、β)。

Processing method of silicon wafer with through cavity structure

一种贯穿空腔结构硅片的加工方法，其特征在于：其依次按照下述要求进行操作：对硅片或图形片进行离子注入；植入假底，使用硅片与图形片键合；磨抛，减薄图形片至露出图形的深度；键合；剥离假底。相对于现有技术而言，本发明操作规范，产品质量能够得到有效保证；且产品的性价比高，综合技术效果优良；其具有可预期的较为巨大的经济价值和社会价值。

Nanopore flow cells and methods of fabrication

此處提供奈米孔流動槽及其製造方法。在一個實施例中，一種形成流動槽之方法包括：在將多層堆疊傳送至例如玻璃基板的第二基板之前，於例如單晶矽基板的第一基板上形成多層堆疊。此處，多層堆疊的特徵為膜層，具有穿過其形成的第一開口，其中膜層佈置於第一基板上，且材料層佈置於膜層上。方法進一步包括圖案化第二基板，以在其中形成第二開口，且將第二基板的圖案化的表面結合至多層堆疊的表面。方法進一步包括薄化第一基板且薄化第二基板。此處，薄化第二基板至第二開口穿過其佈置。方法進一步包括移除薄化的第一基板及材料層之至少部分，以暴露膜層的相對表面。

Microphone, micro-electro-mechanical system device and method for manufacturing micro-electro-mechanical system device

一种麦克风。在一些实施例中，麦克风可包括衬底、隔板、背板及侧壁停止件。衬底具有设置成穿过衬底的开口。隔板设置在衬底之上且面向衬底的开口。隔板具有上覆于衬底的开口的通气孔。背板设置在隔板之上且与隔板间隔开。侧壁停止件设置成沿着隔板的通气孔的侧壁，且因此不受可移动部分与稳定部分之间的距离限制。此外，侧壁停止件不会使可移动部分的形状发生替换，且因此将不太可能致使可移动部分出现裂缝。在一些实施例中，可如同通过自对齐工艺形成的侧壁停止件一样来形成侧壁停止件，因此不需要额外的掩模。

Aircraft air pollutant analyzer and usage

Silicon etching process for making microchannel plates

An element with elongated, high aspect ratio channels such as microchannel plate is fabricated by electrochemical etching of a p-type silicon element in a electrolyte to form channels extending through the element. The electrolyte may be an aqueous electrolyte. For use as a microchannel plate, the; the silicon surfaces of the channels can be converted to insulating silicon dioxide, and a dynode material with a high electron emissivity can be deposited onto the insulating surfaces of the channels. New dynode materials are also disclosed.

Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples

A solid state device is formed through thin film deposition techniques which results in a self-supporting thin film layer that can have a precisely defined channel bored therethrough. The device is useful in the chacterization of polymer molecules by measuring changes in various electrical characteristics as molecules pass through the channel. To form the device, a thin film layer having various patterns of electrically conductive leads are formed on a silicon substrate. Using standard lithography techniques, a relatively large or micro-scale aperture is bored through the silicon substrate which in turn exposes a portion of the thin film layer. This process does not affect the thin film. Subsequently, a high precision material removal process is used (such as a TEM) to bore a precise nano-scale aperture through the thin film layer that coincides with the removed section of the silicon substrate.

Molecular diagnostics platform

A method of mixing a droplet, the method comprising providing a droplet on a surface, forming the droplet into a first "U" shape having a bottom region and two terminal ends, and simultaneously merging the terminal ends and splitting the droplet at the bottom region to form a second "U" shape which is substantially opposite the first "U" shape.

Method and apparatus for sample injection in microfabricated devices

An off-column sample injection scheme for introducing samples into micro-reaction channels in microfabricated devices. In one aspect of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir provided on the substrate of the microfabricated device into a reaction channel via a constricted channel or opening interface, e.g., a narrow connection-channel and/or a pinhole. In another embodiment of the present invention, off-column sample injection is effected by introducing sample from a sample reservoir that is provided outside the substrate of the microfabricated device. A through-hole is provided in the substrate to facilitate sample introduction into the reaction channel. In a further aspect of the present invention, the free-end of a capillary tube connected to the sample-channel is moved alternatively to a sample and an auxiliary solution to bring multiple samples in series to the vicinity of a reaction channel for convenient sample introduction and high-throughput assays. In another aspect of the present invention, fixed volumes of samples are metered into the reaction channel using one or more slidable blocks having at least one fixed-length sample metering channel. In another aspect of the present invention, a sample injection scheme based on injection time is implemented using relatively sliding blocks of separation channels and sample channels. In a further aspect of the present invention, separation channels are configured in relation to the slidable block in a manner that enables separations to be conducted continuously for high-throughput assays.

MEMS device package

본 발명의 일 실시예에 따른 멤스 디바이스 패키지는 하부 구조체; 하부 구조체에서 상방 이격되되 각각은 좌우로 서로 이격되어 어레이 배치된, 복수의 볼로미터 멤스 구조체; 하부 구조체와 볼로미터 멤스 구조체를 전기적으로 연결하는 적어도 하나 이상의 전기적 연결부; 하부 구조체 상에 배치되되, 볼로미터 멤스 구조체와 전기적 연결부를 하우징하는, 상부 구조체; 및 하부 구조체로부터 상방으로 신장하여 상부 구조체를 구조적으로 지지하도록 구성된 적어도 하나 이상의 비아 구조체; 를 포함하되, 상부 구조체와 하부 구조체 사이의 공간은 복수의 볼로미터 멤스 구조체 사이에서 분리되지 않고 복수의 볼로미터 멤스 구조체를 가로질러 서로 연결된 단일한 공간이다. A MEMS device package according to an embodiment of the present invention includes a lower structure; A plurality of bolometer MEMS structures spaced apart from each other and arranged in an array spaced apart from each other from left to right; At least one electrical connection for electrically connecting the lower structure and the bolometer MEMS structure; An upper structure disposed on the lower structure and housing the bolometer MEMS structure and the electrical connection; And at least one via structure configured to extend upward from the lower structure to structurally support the upper structure. Including, the space between the upper structure and the lower structure is a single space that is not separated between the plurality of bolometer MEMS structures and is connected to each other across the plurality of bolometer MEMS structures.

Manufacturing method of nozzle substrate, inkjet print head and nozzle substrate

Method for producing a sealed micromechanical component

一种用于制造微机械结构元件(100)的方法，该方法具有以下步骤：‑在结构元件(100)的MEMS元件(5)中或盖元件(6)中构造进入开口(7)；‑连接MEMS元件(5)与盖元件(6)，其中，在MEMS元件(5)和盖元件(6)之间构造至少一个空腔(8a、8b)；‑以及，借助于激光(9)在一个限定的气氛下封闭通到所述至少一个空腔(8a、8b)中的进入开口(7)。

Microfluidic film and method for fabricating the microfluidic film

본 발명은 베이스 필름, 상기 베이스 필름 상에 형성되어 있으며, 유체가 유동되는 미세 채널 및 상기 베이스 필름을 관통하도록 형성되어 있으며, 상기 베이스 필름의 상부 또는 하부에 적층되는 베이스 필름과 유체가 연통되기 위한 관통 유로를 포함하는, 미세 유체 필름을 제공한다. 따라서 베이스 필름에 미세 채널 및 베이스 필름의 상부 또는 하부에 적층되는 다른 베이스 필름과 유체가 연통되기 위한 관통 유로가 모두 형성되어 있어서 적층되는 베이스 필름 간의 유체 이동이 가능한 장점이 있다.

Formation of holes in a substrate

提供了用于制造受良好地控制的固态纳米孔及固态纳米孔阵列的方法。一方面，用于制造纳米孔及纳米孔阵列的方法利用物理接缝。在衬底的顶侧中形成一个或多个蚀坑，并且在衬底的背侧中形成与所述一个或多个蚀坑对准的一个或多个沟槽。在所述一个或多个蚀坑与所述一个或多个沟槽之间形成开口。然后，在所述衬底上方形成介电材料以填充所述开口。然后，在所述衬底的所述顶侧和所述背侧上设置触点，并且从所述顶侧穿过所述介电材料向所述背侧施加电压，反之亦然，从而形成纳米孔。另一方面，在形成在所述介电材料中的接缝处的所述开口的所述中心处或附近形成所述纳米孔。

Miniature power generation device and electronic equipment with same

本公开提出一种微型发电装置，其包括上下贯序叠置的多个发电机，每个发电机包括上电极和下电极，上电极和下电极通过隔垫物间隔布置并定义腔室，上电极和下电极各相对一侧分别设有上摩擦材料层和下摩擦材料层。每相邻两个发电机通过中间隔垫上下间隔布置并定义中间腔室，中间腔室填充有气体。任意相邻两个发电机中位于上方的一个发电机的下电极和下摩擦材料层开设有通孔，通孔连通发电机的腔室和中间腔室。

A method of manufacturing a plurality of through-holes in a layer of material

A method of manufacturing a plurality of through-holes (132) in a layer of material by subjecting the layer to directional dry etching to provide through-holes (132) in the layer of material; For batch-wise production, the method comprises - after a step of providing a layer of first material (220) on base material and before the step of directional dry etching, providing a plurality of holes at the central locations of pits (210), - etching base material at the central locations of the pits (210) so as to form a cavity (280) with an aperture (281), - depositing a second layer of material (240) on the base material in the cavity (280), and - subjecting the second layer of material (240) in the cavity (280) to said step of directional dry etching using the aperture (281) as the opening (141) of a shadow mask.

Aircraft air contaminant analyzer and method of use

Methods for determining and classifying by type aircraft air contaminants, and aircraft air contaminant analyzers, are disclosed.

Stepped micro-nano-scale channel model and preparation method thereof

本发明公开了一种阶梯型微纳米尺度槽道模型及其制备方法，具体涉及微纳米尺度槽道技术领域，包括基板，所述基板底部表面设有进入孔，所述进入孔一侧设有出口孔，所述基板表面设有第一微槽道滞留腔，所述进入孔贯穿基板且延伸至第一微槽道滞留腔内部，所述第一微槽道滞留腔顶部设有开口，所述第一微槽道滞留腔一侧设有微槽道区别区。本发明通过对第一纳米分割槽道和第二纳米分割槽道内部的物料流动速度进行分类测量，从而形成对比，同时采用控制少量的物料通过调节孔排出，最终得出在物料泄露的情况下第一微槽道测量区和第二微槽道测量区监测到的流动速度，提升对微纳米尺度孔隙内流动特性的检测力度，提高流动速度测量的多样性。

Analysis of molecules by translocation through a coated aperture

A kind of metal micro structure and preparation method thereof

本发明提供了一种金属微结构及其制作方法，其中方法首先在一平整的基片的表面涂覆一层光刻胶，并对光刻胶进行曝光、显影，以在基片的表面形成光刻胶图形，然后令基片发生形变，以使得所述光刻胶图形随所述基片一同发生形变，接着在基片表面上的非光刻胶图形处，进行金属镀膜，最后去除光刻胶和基片，得到金属微结构。本发明实现了具有不同轴线方向通孔的金属微结构，其在光学成像领域有重要应用价值。

A kind of processing method through cavity structure silicon wafer

一种贯穿空腔结构硅片的加工方法，其特征在于：其依次按照下述要求进行操作：对硅片或图形片进行离子注入；植入假底，使用硅片与图形片键合；磨抛，减薄图形片至露出图形的深度；键合；剥离假底。相对于现有技术而言，本发明操作规范，产品质量能够得到有效保证；且产品的性价比高，综合技术效果优良；其具有可预期的较为巨大的经济价值和社会价值。

Method for manufacturing a microfluidic device

A method for manufacturing a microfluidic device comprising:a. Providing a first substrate (5) having a first layer (1) thereon, and a second layer (2) on the first layer (1),b. Forming a first nanopore (6) in the second layer (2), in such a way that a part (10) of the first layer (1) coincides with a bottom (61) of the first nanopore (6),c. Exposing said part of the first layer (1) to a liquid etchant, thereby forming a cavity (7) under the first nanopore (6), the cavity (7) having a larger width than a width of the bottom (61) of the first nanopore (6),d. Filling the first nanopore (6) and the cavity (7) with a filling material, thereby forming a first plug (8),e. Forming a bottom fluidic access (91) for the nanopore (6) by removing part of the first substrate (5) and part of the first layer (1) so as to expose the plug (8),f. Removing the plug (8), thereby fluidly connecting the bottom fluidic access (91) to the nanopore (6).

Electro-fluidic flow probe

An apparatus for an electro-fluidic flow probe includes a body portion including an electro-fluidic bias tee for receiving (i) a fluid electrolyte and (ii) an electrical connection for providing an electrical potential to the fluid electrolyte; a first inlet including a tube extending from the first inlet to an outlet through the electro-fluidic bias tee; and a second inlet including the electrical connection having a wire that extends from the second inlet to the outlet through the electro-fluidic bias tee to transfer the electrical potential to a device under test.

Method for forming film and method for manufacturing inkjet print head

A method for forming a film that covers a side wall of a through hole in a substrate having the through hole, the method including, in the following order, the steps of providing a substrate having a through hole that passes therethrough from a first surface to a second surface, which is a surface opposite to the first surface, forming, on the first surface, a lid member that blocks an opening of the through hole open on the first surface, recessing, in a direction away from the first surface, a surface of the lid member that blocks the opening by removing part of the lid member through the opening, and forming a film that covers the side wall of the through hole.

Substrate assembly, substrate assembly manufacturing method, liquid ejection head, and liquid ejection head manufacturing method

A microfluidic chip and a method for the manufacture of a microfluidic chip

A novel microfluidic chip is proposed for performing a chemical or biochemical test in a metered reaction volume (32). The microfluidic chip (100) has a body (200) which defines an inner flow volume. An inlet (10) has been provided to the body (200) for connecting the inner flow volume to the ambient space. A waste channel (20) forms part of the inner flow volume and is in fluid communication with the inlet (10). A sample channel (30) also forms part of the inner flow volume and is in fluid communication with the inlet (10). The sample channel (30) includes a first hydrophobic stop (61) and a second hydrophobic stop (62) at a distance from the first hydrophobic stop (61) so as to provide a metered reaction volume (32) there between. An expelling channel (40) is in fluid communication with the metered reaction volume (32) of the sample channel (30) through the first hydrophobic stop (61). A sample reservoir (51) is in fluid communication with the metered reaction volume (32) of the sample channel (30) through the second hydrophobic stop (62).

Method for producing a sealed micromechanical component

Verfahren zum Herstellen eines mikromechanischen Bauelements (100), aufweisend die Schritte: - Ausbilden einer Zugangsöffnung (7) in einem MEMS-Element (5) oder in einem Kappenelement (6) des Bauelements (100); - Verbinden des MEMS-Elements (5) mit dem Kappenelement (6), wobei zwischen dem MEMS-Element (5) und dem Kappenelement (6) wenigstens eine Kaverne (8a, 8b) ausgebildet wird; und - Verschließen der Zugangsöffnung (7) zur wenigstens einen Kaverne (8a, 8b) unter einer definierten Atmosphäre mittels eines Lasers (9).

Through substrate vias and device

The invention relates to a method of making through-substrate-vias in glass substrates. A first substrate (10) is provided on which a plurality of needles (11) protruding vertically from the substrate are made. A second substrate (14) made of glass is then provided. The substrates are located adjacent each other such that the needles on the first substrate face the second substrate. Heat is applied to a temperature where the glass softens, by heating the glass or the needle substrate or both. A force (F) is applied such that the needles on the first substrate penetrate into the glass to provide impressions in the glass. Finally, the first substrate is removed and material filling the impressions in the second substrate made of glass is provided. There is also provided a device, comprising a silicon substrate (100; 200). There is a cavity (102) in which a MEMS component (104) is accommodated, and a cap wafer (300) made of a material having a low dielectric constant, preferably glass. The cap wafer has through substrate vias of metal, and is bonded to the silicon substrate.

平面光学装置用のエアスペースカプセル化誘電体ナノピラー

ここに記載の実施形態は、平坦な光学装置及び平坦な光学装置を形成する方法に関する。一実施形態は、その上に形成された第１の複数のピラーの第１の構成を有する基板を含む。第１の複数のピラーの第１の構成は、高さｈ及び横方向の距離ｄを有するピラーと、第１の複数のピラーの隣接するピラーとの間の距離に対応する間隙ｇとを含む。高さｈに対する間隙ｇのアスペクト比は、約１：１と約１：２０との間である。第１のカプセル化層は、第１の複数のピラーの第１の構成の上に配置される。第１のカプセル化層は、約１．０～約１．５の屈折率を有する。第１のカプセル化層、基板、及び第１の構成のピラーの各々は、それらの間の第１の空間を画定する。第１の空間の屈折率は約１．０～約１．５である。【選択図】図１Ａ

Isotachophoresis for Purification of Nucleic Acids

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.

微孔制备方法

本发明实施例公开了一种微孔制备方法，其具体包括提供待制孔的基材，且基材具有供印刷的印刷面，在印刷面上印刷耐腐蚀的第一保护层，且第一保护层上留有多个孔位，在印刷面上喷淋腐蚀液，以使腐蚀液穿过孔位腐蚀基材；采用本发明提供的微孔制备方法制备微孔，可精准控制微孔与其它微孔之间的距离，进而提高基材的合格率，降低生产成本。

用于微通道板的电子倍增材料、其制备、由其制备得到的微通道板及微通道板的制备方法

本发明公开一种用于微通道板的电子倍增材料、其制备、由其制备得到的微通道板及微通道板的制备方法。以解决现有微通道板技术中，电子倍增层用的氧化物材料二次电子发射系数普遍不高，以及如何更好的将电子倍增层材料(尤其是金刚石类材料)结合在微通道板的大深宽比孔微孔中等问题。

用于制造微机械部件的方法和微机械部件

本发明涉及一种用于制造微机械部件的方法以及一种微机械部件。方法包括以下步骤：提供具有第一外表面和第二外表面的衬底，第二外表面背离第一外表面；构造穿过衬底从衬底的第一外表面直到衬底的第二外表面的通孔；在衬底的第二外表面上安装光学功能层，其中，光学功能层遮盖通孔；在衬底的第一外表面处如此移除衬底的第一区段，使得形成相对于衬底的第二外表面倾斜的第三外表面，第三外表面背离衬底的第二外表面，其中，倾斜的第三外表面包围通孔；通过分离衬底的具有通孔的第一部分和光学功能层的安装在第一部分处的第二部分与衬底的剩余部和光学功能层的剩余部来分离微机械部件。

扁平光學元件及其形成方法

本文描述的實施例涉及扁平光學元件和形成扁平光學元件的方法。一個實施例包括基板，該基板具有在其上形成的第一複數個支柱的第一佈置。第一複數個支柱的第一佈置包括具有高度h和橫向距離d的支柱，以及與第一複數個支柱中的相鄰支柱之間的距離相對應的間隙g。間隙g與高度h的深寬比在大約1：1和大約1：20之間。第一封裝層配置在第一複數個支柱的第一佈置上。第一封裝層的折射率為約1.0至約1.5。第一封裝層、基板與第一佈置的每個支柱在它們之間界定第一空間。第一空間的折射率為約1.0至約1.5。

A method of manufacturing a plurality of through-holes in a layer of material

A method of manufacturing a plurality of through-holes in a layer of material

微機電系統結構及其形成方法

本揭示之各種實施例係指向一微機電系統(MEMS)裝置，於其中，在MEMS裝置之一可移動塊之一狹縫具有一頂部凹口狹縫輪廓。MEMS裝置例如可為一揚聲器、一致動器、或類似者。狹縫從頂部至底部延伸通過可移動塊，且具有一寬度，其從可移動塊之底部至緊鄰可移動塊之頂部係一致的或實質上一致的。再者，依據頂部凹口狹縫輪廓，MEMS基體之頂部角落部分於狹縫中係凹口的，使得狹縫之一寬度在可移動塊之頂部凸起。頂部凹口狹縫輪廓例如可增加用於在形成MEMS裝置時從狹縫移除一黏著劑的製程窗口。

Oberes kerbschlitzprofil für mems-vorrichtung

Verschiedene Ausführungsformen dieser Offenbarung sind auf eine mikroelektromechanische Systemvorrichtung (MEMS-Vorrichtung) gerichtet, bei der ein Schlitz an einer beweglichen Masse der MEMS-Vorrichtung ein oberes Kerbschlitzprofil aufweist. Bei der MEMS-Vorrichtung kann es sich beispielsweise um einen Lautsprecher, einen Aktor oder dergleichen handeln. Der Schlitz erstreckt sich durch die bewegliche Masse von oben nach unten und weist eine gleichmäßige oder im Wesentlichen gleichmäßige Breite vom Boden der beweglichen Masse bis in die Nähe der Oberseite der beweglichen Masse auf. Ferner sind die oberen Eckabschnitte des MEMS-Substrats im Schlitz dem oberen Kerbschlitzprofil entsprechend eingekerbt, sodass sich eine Breite des Schlitzes an der Oberseite der beweglichen Masse ausbuchtet. Das obere Kerbschlitzprofil kann beispielsweise das Prozessfenster zum Entfernen eines Klebstoffs vom Schlitz während des Bildens der MEMS-Vorrichtung vergrößern.

Verfahren zum einbringen zumindest einer ausnehmung in ein material mittels elektromagnetischer strahlung und anschliessendem ätzprozess

Analyse von molekülen durch translokation durch eine beschichtete öffnung

核酸の精製のための等速電気泳動

【課題】核酸の精製のための等速電気泳動の提供。【解決手段】本開示は、１つまたは複数の分析対象を処理、抽出または精製するための、流体システムおよびデバイスに関する。これらのシステムおよびデバイスは、例えば、等速電気泳動により、試料を処理するため、および核酸を抽出するために使用することができる。特に、本システムおよび関連方法は、組織または細胞などの試料から、非架橋化核酸を含めた核酸の抽出が可能となり得る。本システムおよびデバイスはまた、多重並列試料処理に使用することができる。【選択図】なし

一种圆形微纳通道的制备方法及其产品

本发明涉及微纳通道制备领域，具体涉及一种圆形微纳通道的制备方法及其产品。所述圆形微纳通道的制备方法包括：(1)将可溶性聚合物熔体经过纺丝喷头进行近场静电纺丝，得到熔体纺丝；(2)用柔性基底接收所述熔体纺丝，待所述熔体纺丝部分沉入所述柔性基底时再涂抹相同柔性基底材料直至完全覆盖所述熔体纺丝；(3)冷却固化所述柔性基底并置于可溶解所述熔体纺丝的溶剂中，待其完全溶解即得圆形微纳通道。本发明采用半固态柔性基底，利用熔体纺丝下沉形成再叠加柔性基底材料，待柔性基底固化溶解熔体纺丝，得到圆形的微纳通道。本发明克服了静电纺丝近场直写的形成的扁平通道，能够形成高分辨率的圆形微纳通道。

微機電系統壓力感測器及製造微機電系統壓力感測器的方法

一種微機電系統(micro-electro mechanical system,MEMS)壓力感測器，包含第一基板、第二基板及感測結構。第二基板與第一基板大致平行。感測結構介於第一基板與第二基板之間，並接合第一基板的一部分及第二基板的一部分，其中介於第一基板與感測結構之間的第一空間與外部連通，且介於第二基板與感測結構之間的第二空間與外部連通或隔離。亦提供一種製造微機電系統壓力感測器的方法。

미세 유체 모듈 및 그 미세 유체 모듈 제작방법

본 발명은 제1베이스 필름, 상기 제1베이스 필름 상에 형성되어 있으며, 유체가 유동되는 제1미세 채널, 상기 제1베이스 필름을 관통하도록 형성되어 있는 제1관통 유로를 포함하는 제1미세 유체 필름 및 상기 제1베이스 필름 상에 적층되는 제2베이스 필름, 및 상기 제2베이스 필름을 관통하도록 형성되어 있으며, 상기 제1관통 유로와 연통되는 제2관통 유로를 포함하는 제2미세 유체 필름을 포함하는, 미세 유체 모듈을 제공한다. 따라서 베이스 필름에 미세 채널 및 베이스 필름의 상부 또는 하부에 적층되는 다른 베이스 필름과 유체가 연통되기 위한 관통 유로가 모두 형성되어 있어서 적층되는 베이스 필름 간의 유체 이동이 가능한 장점이 있다.

미세 유체 필름 및 그 미세 유체 필름 제작방법

본 발명은 베이스 필름, 상기 베이스 필름 상에 형성되어 있으며, 유체가 유동되는 미세 채널 및 상기 베이스 필름을 관통하도록 형성되어 있으며, 상기 베이스 필름의 상부 또는 하부에 적층되는 베이스 필름과 유체가 연통되기 위한 관통 유로를 포함하는, 미세 유체 필름을 제공한다. 따라서 베이스 필름에 미세 채널 및 베이스 필름의 상부 또는 하부에 적층되는 다른 베이스 필름과 유체가 연통되기 위한 관통 유로가 모두 형성되어 있어서 적층되는 베이스 필름 간의 유체 이동이 가능한 장점이 있다.

一种微通道毛细结构的超薄微热管及其制备方法

本发明涉及散热设备技术领域，尤其是一种微通道毛细结构的超薄微热管，超薄微热管包括从下往上依次设置的氮化硅基底、底层石墨、中间层石墨烯和顶层石墨，所述中间层石墨烯为长条状且等间距设置，氮化硅基底、底层石墨和中间层石墨烯上具有微米级的矩形通道，其中，矩形通道为截面宽3～5μm、高18～22μm的长方形，中间层石墨烯的间距为120～130nm。本发明构成的微通道结构在微米或纳米级别，具有高的毛细管压力和大的滑移长度使得热管内工质液体的流速明显增加，能够让热管中冷凝段的液体很快的回流到蒸发段。

나노-세공 유동 셀들 및 제조 방법들

나노-세공 유동 셀들 및 그의 제조 방법들이 본원에서 제공된다. 일 실시예에서, 유동 셀을 형성하는 방법은, 제1 기판 상에 다층 적층체를 형성하는 단계를 포함한다. 다층 적층체는, 제1 기판 상에 배치되는 멤브레인 층, 및 멤브레인 층 상에 배치되는 물질 층을 특징으로 하고, 멤브레인 층은 자신을 통해 형성되는 제1 개구를 갖는다. 방법은, 제2 기판에 제2 개구를 형성하기 위해 제2 기판의 표면을 패터닝하는 단계, 제2 기판의 패터닝된 표면을 다층 적층체의 표면에 접합하는 단계, 제1 기판을 박형화하는 단계, 및 멤브레인 층의 반대쪽 표면들을 노출시키기 위해, 박형화된 제1 기판, 및 물질 층의 적어도 부분들을 제거하는 단계를 더 포함한다.

一种双衬底气化芯片及其制造方法

本发明公开了一种双衬底气化芯片，包括：基础衬底和硅衬底，基础衬底上设置有自顶面向内凹陷形成的空腔，待气化液体设置在空腔内，空腔的底面上设置有液态源通道，基础衬底的顶面上设置有接触电极板，硅衬底底部设置有加热电极板，加热电极板通过键合金属层与接触电极板电连接，硅衬底上设置有第一气化通道结构，第一气化通道结构包括阵列排布的若干个第一气化通道单元，第一气化通道单元连通至空腔。本发明还公开了一种双衬底气化芯片的制造方法。本发明相较于现有技术，将陶瓷衬底或玻璃衬底与硅衬底组合形成双衬底结构，气化芯片上气化孔的孔径均匀，将气化芯片的加热区域和外围固定结构进行热隔离，降低热导，提升电加热气化效率。

Verfahren zum einbringen zumindest einer ausnehmung in ein material mittels elektromagnetischer strahlung und anschliessendem ätzprozess

Air-spaced encapsulated dielectric nanopillars for flat optical devices

电极及其制备方法和锂电池

本发明公开了一种电极及其制备方法和锂电池。所述电极包括集流体和结合在所述集流体表面的活性材料层，在所述活性材料层上开设有离子扩散通道，所述离子扩散通道由所述活性材料层表面向所述集流体方向延伸，且所述离子扩散通道的直径为微米级。本发明电极通过在所述活性材料层表面开设的离子扩散通道有效增大了所述电极与电解质的接触面积，提高了锂离子扩散速率，从而提高了所述电极的倍率性能和具有快速充电特性。所述电极制备方法能够有效保证制备的电极结构和电化学性能稳定，而且效率高，且刻蚀形成的锂离子扩散通道尺寸可控。含有本发明电极的锂电池具有高倍率性能和超高速充电性能。