一种贯穿空腔结构硅片的加工方法

05-11-2021 дата публикации

Номер:

CN110078017B

Автор: 李响

Принадлежит: SHENYANG SILICON TECHNOLOGY CO LTD

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B08 B08B B08B3 B08B3/B08B3/0 B08B3/08 B3 B32 B32B B32B2 B32B20 B32B203 B32B2038 B32B2038/B32B2038/0 B32B2038/00 B32B2038/001 B32B2038/0016 B32B23 B32B231 B32B2310 B32B2310/B32B2310/1 B32B2310/14 B32B2313 B32B2313/B32B2313/0 B32B2313/00 B32B24 B32B245 B32B2457 B32B2457/B32B2457/1 B32B2457/14 B32B3 B32B37 B32B37/B32B37/0 B32B37/06 B32B38 B32B38/B32B38/0 B32B38/00 B32B38/000 B32B38/0008 B32B4 B32B43 B32B43/B32B43/0 B32B43/00 B32B43/006 B8 B81 B81B B81B1 B81B1/B81B1/0 B81B1/00 B81B1/004 B81B2 B81B22 B81B220 B81B2203 B81B2203/B81B2203/0 B81B2203/03 B81B2203/031 B81B2203/0315 B81B2203/035 B81B2203/0353 B81C B81C1 B81C1/B81C1/0 B81C1/00 B81C1/000 B81C1/0004 B81C1/00047 B81C1/0008 B81C1/00087 B81C1/002 B81C1/0021 B81C1/00214 B81C1/003 B81C1/0035 B81C1/00357 B81C1/005 B81C1/0050 B81C1/00507 B81C1/008 B81C1/0084 B81C1/00849 B81C2 B81C22 B81C220 B81C2201 B81C2201/B81C2201/0 B81C2201/01 B81C2201/011 B81C2201/0116 B81C2201/012 B81C2201/0125 B81C2201/017 B81C2201/0178 B81C2201/019 B81C2201/0192 B81C2201/0194 B81C3 B81C3/B81C3/0 B81C3/00 B81C3/001

IPC - классификация

B B0 B08 B08B B08B3 B08B3/B08B3/0 B08B3/08 B3 B32 B32B B32B3 B32B37 B32B37/B32B37/0 B32B37/06 B32B4 B32B43 B32B43/B32B43/0 B32B43/00 B32B43/006

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