08-12-2020 дата публикации
Номер: CA0003062895C
Structures and methods of fabricating semiconductor water assemblies (100) that encapsulate at least one die (108, 202, 402) in a cavity (110, 204, 404) etched into an oxide bonded semiconductor wafer stack (102+104, 206+208, 406+408). The methods generally include the steps of position-ing the die (108, 202, 402) in the cavity (110, 204, 404), mechanically and electrically mounting the die (108, 202, 402) to the wafer stack (102+104, 206+208, 406+408), and encapsulating the die (108, 202, 402) within the cavity (110, 204, 404) by bonding a lid wafer (106, 210, 410) to the wafer stack (102+104, 206+208, 406+408) in one of multiple ways. Semiconductor processing steps are applied to construct the assemblies (e.g., deposition, annealing, chemical and mechanical polishing, etching, etc.) and connecting the die (e.g., bump bonding, wire interconnecting, ultrasonic bonding, oxide bonding, etc.) according to the embodiments described above. The cavity (110, 404) may be hermetically sealed to ...
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