УСТРОЙСТВО ДЛЯ ПЛАЗМЕННОЙ ОЧИСТКИ ГАЗОВ, ОБРАЗУЮЩИХСЯ ПРИ СГОРАНИИ ТОПЛИВА

Изобретение относится к экологии, а точнее к устройствам для уничтожения несгоревших остатков топлива и удаления токсичных продуктов неполного сгорания из выхлопных и топочных газов, и может быть использовано в любой отрасли деятельности. Настоящее изобретение направлено на повышение степени очистки, а также надежности и ресурса работы с одновременным снижением энергоемкости процесса очистки. Технический результат достигается за счет того, что ионизатор выполнен в виде одного или нескольких реакторов, установленных последовательно по движению газового потока, каждый из которых содержит по крайней мере одну газоразрядную камеру с комбинированными электродами, металлическая часть которых выполнена в виде секций, отделенных друг от друга диэлектриком. Газоразрядные камеры установлены по газовому потоку, а размещенные в них секционные электроды образуют систему конденсаторов, подключенных к источнику питания - генератору переменного напряжения через индивидуальные токоограничители, представляющие собой также конденсаторы. 12 з.п.ф-лы, 4 ил. ОбУДСКс ПЧ Го РОССИЙСКОЕ АГЕНТСТВО ПО ПАТЕНТАМ И ТОВАРНЫМ ЗНАКАМ (19) (51) МПК ВИ” 2 127 400 ' 13) СЛ Е 23 С 11/00, Е 01 М 3/08 12) ОПИСАНИЕ ИЗОБРЕТЕНИЯ К ПАТЕНТУ РОССИЙСКОЙ ФЕДЕРАЦИИ (21), (22) Заявка: 98104037/06, 18.03.1998 (46) Дата публикации: 10.03.1999 (56) Ссылки: ЗЧ 9778424 А, 21.04.78. ЗИ 1808096 АЗ, 07.04.93. Методика определения концентраций оксидов азота фотокалориметрическим методом с использованием реактива Грисса-Илосвал. Сборник методик по определению концентраций загрязняющих веществ в промышленных выбросах. - Л.: Гидрометеоиздат, 1987, с. Сборник докладов советских ученых на 1 Международной конференции по термоэмиссионному преобразованию энергии. - М.: ВНИИТ, 1969, с.299, 320. (98) Адрес для переписки: 192288, Санкт-Петербург, ул.Дмитрова, д.3З1И, кв.322 Зеленову Борису Александровичу 33. (71) Заявитель: Акционерное общество закрытого типа "Карбид" (72) Изобретатель: Зеленов Б.А., Кадыков Л.В., Смирнов С.Н., Гудков ...

Verfahren zum Reduzieren von NOx in Dieselmotorenabgas

Verfahren zum Reduzieren von Stickstoffoxiden einschließlich NO in einem ebenfalls Sauerstoff, Kohlenmonoxid und Kohlenwasserstoffe enthaltenden Abgasstrom bei einer Temperatur oberhalb von 150°C, wobei das Verfahren umfasst: Durchströmen von Luft durch einen nicht thermischen Plasmareaktor, um ein Ozon enthaltendes Plasma zu erzeugen, sowie Zuführen des Plasmas zu dem Abgasstrom für die Oxidation von NO zu NO2, Zuführen von Ethanol zu dem Abgasstrom getrennt von der Zuführung des Plasmas für die Reduktion der Stickstoffoxide und daran anschließend Kontaktieren des Abgasstroms mit einem Zweibettreduktionskatalysator enthaltend in dem ersten Bett NaY Zeolith und/oder BaY Zeolith und in dem zweiten Bett CuY Zeolith, um die Stickstoffoxide zu N2 zu reduzieren.

Apparatus for treating a gas stream

In an apparatus 10 for treating a gas stream 12, a plasma generator 14 comprises an electrode 22 for energising a source gas to generate a plasma flare by application of a high voltage. An inlet 24 allows the gas stream into the apparatus and directs it into the generated plasma. A scraper 26 is fitted for reciprocating movement from a first position withdrawn from the electrode to a second position for scraping a surface 28 of the electrode to remove solid deposits accumulated on the surface.

Vehicle emissions plasma/corona generation unit

A vehicle emissions control device is a device designed to reduce carbon emissions from Internal Combustion engines burning fossil fuels and is fitted as part of the exhaust system. The system comprises of two main components: a high voltage generator and a Plasma/Corona generation device. Exhaust gases are directed through the device, while in the device, a proportion of the gases are neutralised using the high temperatures produced in the Plasma/Corona, the remaining gases are passed out of the system. The plasma/corona generation unit comprises a swirl device 1 situated by the inlet 4 to direct the gases in a circular motion. The anode 6 is in the form of pointed teeth 8, or needles, in order to provide a greater contact for ionizing the gases.

PROCEDURE AND DEVICE FOR THE CLEANING OF STICKOXIDHALTIGEN EXHAUST GASES

A NON-EQUILIBRIUM PLASMA SYSTEM AND METHOD OF REFINING SYNGAS

An object of the present invention is to provide a non-equilibrium plasma (NEP) system and method of refining syngas. In accordance with an aspect of the present invention, there is provided a non-equilibrium plasma system for refining syngas, the system comprising a reactor with a hollow chamber, having one or more inlet manifolds configured to promote an axially symmetric and swirling flow pattern, into which syngas and one or more gasifying agents are introduced for processing within the reactor, a high voltage electrode; and a ground electrode, wherein the system is configured to create a non-equilibrium plasma producing electric arc upon application of a high voltage potential across an arc initiating gap between the high voltage electrode and the ground electrode and wherein the system is configured such that the syngas, the one or more gasifying agent(s) and plasma producing electric arc come together concurrently in the reactor. In one embodiment of the invention, the non-equilibrium plasma system comprises two eccentric cylindrical manifolds configured to form a single inlet manifold, wherein the two eccentric cylindrical manifolds comprise a first eccentric cylindrical manifold for gasifying agent input and a second eccentric cylindrical manifold for syngas input. The invention also comprises a method for refining syngas wherein the non-equilibrium plasma system of the present invention combines the syngas, the air and the plasma-producing electric arc in the same region, which will co-exist in the same location.

Nonthermal plasma systems and methods for natural gas and heavy hydrocarbon co-conversion

A reactor for reactive co-conversion of heavy hydrocarbons and hydrocarbon gases and includes a dielectric barrier discharge plasma cell having a pair of electrodes separated by a dielectric material and passageway therebetween. An inlet is provided for feeding heavy hydrocarbons and other reactive materials to the passageway of the discharge plasma cell, and an outlet is provided for discharging reaction products from the reactor. A packed bed catalyst may optionally be used in the reactor to increase efficiency of conversion. The reactor can be modified to allow use of a variety of light sources for providing ultraviolet light within the discharge plasma cell. Methods for upgrading heavy hydrocarbons are also disclosed.

Method of reducing NOx in diesel engine exhaust

A sidestream located hyper-plasma reactor having an axially discrete pattern of alternating regions of active and passive electric field along the axial direction. The hyper-plasma reactor has great efficacy in terms of ultra low power consumption and copious production of NO_x converting aldehydes in the absence of NO by applying plasma power only to an air and hydrocarbon mix sidestream gas flow. Only a small fraction (1% to 2%) of plasma power is required as compared to that for a conventional plasma reactor to treat the full exhaust gas stream. The hyper-plasma reactor produces ozone which reacts subsequently with hydrocarbons to produce aldehydes ("ozonolysis"). The sidestream location of the hyper-plasma reactor allows for the full exhaust stream to bypass it, without significantly affecting the overall NO_x conversion performance in the catalytic converter.

Gas purification

TREATMENT OF EXHAUST GASES

Apparatus for treating an exhaust gas in a foreline

Non-equilibrium plasma system and method of refining syngas

An object of the present invention is to provide a non-equilibrium plasma (NEP) system and method of refining syngas. In accordance with an aspect of the present invention, there is provided a non-equilibrium plasma system for refining syngas, the system comprising a reactor with a hollow chamber, having one or more inlet manifolds configured to promote an axially symmetric and swirling flow pattern, into which syngas and one or more gasifying agents are introduced for processing within the reactor, a high voltage electrode; and a ground electrode, wherein the system is configured to create a non-equilibrium plasma producing electric arc upon application of a high voltage potential across an arc initiating gap between the high voltage electrode and the ground electrode and wherein the system is configured such that the syngas, the one or more gasifying agent(s) and plasma producing electric arc come together concurrently in the reactor. In one embodiment of the invention, the non-equilibrium ...

PLASMA-SUPPORTED GAS TREATMENT

TREATMENT OF GASEOUS EMISSIONS

A reactor chamber (2) forms part of an exhaust system of an internal combustion engine. Within the chamber (2) are electrodes (3 and 4) between which there is disposed a bed of active material (5) through which, in use, the exhaust gases pass. In the presence of an electrical discharge, driven by an electrical voltage applied across the electrodes (3 and 4), the active material (5) has a catalytic action in the reduction of nitrogenous oxides in the exhaust and also acts to remove hydrocarbons from the exhaust gases.

METHOD AND APPARATUS FOR CLEANING HARMFUL GAS BY IRRADIATIONWITH GAS LASER AND ELECTRON BEAMS

An apparatus for reducing harmful ingredients in gas by irradiating the gas with an electron beam. The apparatus comprising a voltage generating unit adapted to generate a high-frequency and high voltage signal, and a reaction unit coupled to the voltage generating unit to receive the high-frequency and high voltage signal, the reaction unit including an electron beam pole having a plurality of openings along the surface of the electron beam pole, and a plurality of discharge cells for each opening, the discharge cells being disposed to face the corresponding opening for generation of the electron beam therebetween, the region between the discharge cells and the openings defining a reaction region through which the gas travels.

Plasma reactor for abatement of hazardous material

Calibrated non-thermal plasma systems for control of engine emissions

The instant invention is based on techniques for using non-thermal plasma reactors in both the main exhaust pipe and in the exhaust gas recirculation feed pipe to reduce particulate matter sufficiently to meet EPA limits for PM and enhanced exhaust gas recirculation to meet NOx limits. More specifically, it is based upon the use of a non-thermal plasma device in which a high voltage charge in the plasma reactor causes extremely rapid oxidation of soot particles in the exhaust stream of an engine and further chemical reactions that aid in the reduction of NOx. The primary benefit of this technology is that it can be calibrated to optimize both soot and NOx reduction.

Vorrichtung und Verfahren zur selektiven katalytischen Reduktion der in einem Abgas einer Brennkraftmaschine enthaltenen Stickoxide

Eine Vorrichtung zur selektiven katalytischen Reduktion der in einem Abgas einer Brennkraftmaschine enthaltenen Stickoxide umfasst eine Stickstoffmonoxid-Erzeugungseinrichtung, die einen Plasmagenerator (34) umfasst. Eine Ammoniak-Erzeugungseinrichtung verwendet das erzeugte Stickstoffmonoxid, und eine Abgas-Reduktionseinrichtung reduziert die im Abgas enthaltenen Stickoxide mittels des erzeugten Ammoniaks. Es wird vorgeschlagen, dass der Plasmagenerator (34) der Stickstoffmonoxid-Erzeugungseinrichtung einen Luft- oder Abgaskanal mit einem Reaktionsbereich (38) umfasst, der auf einer Schmalseite mindestens eine Elektrode (40) und auf einer gegenüberliegenden Schmalseite mindestens eine Gegenelektrode (42) aufweist, wobei die Elektroden (40, 42) so ausgebildet sind, dass bei Anlegen einer entsprechenden elektrischen Spannung zwischen den Elektroden (40, 42) eine koronastabilisierte Funkenentladung stattfindet.

REACTOR

A reactor includes a reaction vessel having an inlet for to-be-reformed gas and an outlet for reformed gas, a pair of electrodes for plasma generation, disposed in the internal space of the reactor vessel so as to face each other, a power source for applying a voltage to the pair of electrodes, and a catalyst for promoting the reforming reaction of to-be-reformed gas, wherein one of the pair of electrodes is a linear electrode, the other of the pair of electrodes is a honeycomb electrode made of a conductive ceramics, the catalyst is loaded on the partition walls of the honeycomb electrode, and the ratio of the maximum outer diameter d1 of each cell-opening end face of the honeycomb electrode to the length L1 of the honeycomb electrode in the cell-extending direction is in a range of 0.50 to 1.2.

Isolated Plasma Array Treatment Systems

Systems, methods, and apparatus are contemplated in which a tube cell that produces a dielectric barrier discharge (DBD) is individually configured to minimize the mixing of unwanted byproducts of the generated plasma with an exhaust air stream. The tube cell generates a DBD within a tube cell, such that oxidants or radicals are generated in an environment substantially separated from the exhaust stream. The generated oxidants are directed to intersect with the exhaust stream to minimize the generation of unwanted byproducts. The tube cells are further shaped and arranged in tube cell arrays to alter the flow dynamics of the exhaust stream and the oxidant or radical streams, including mixing of the streams.

EXHAUST GAS TREATING APPARATUS

ELECTRODE FOR PLASMA GENERATION

An electrode for plasma generation according to the present invention includes a plurality of collecting portions having a plurality of through holes, the plurality of collecting portions facing a gas flow in a direction where gas to be treated flows and provided spaced apart from each other. The electrode is applied to a plasma reactor of a treatment device to be provided for a device which discharges the smoke including PM, for example, an exhaust gas purifying device for automobile, or a smoke treatment device used in a facility where the smoke is discharged such as a plant.

Method and apparatus utilizing ethanol in non-thermal plasma treatment of effluent gas

An improved non-thermal plasma treatment method and apparatus for the pretreatment of nitric oxide-bearing exhaust gas with ethanol, either by vapor absorption or direct vapor injection, is described. Advantageously, the high vapor pressure of ethanol permits a significant portion of the ethanol to be absorbed. Moreover, the solubility of ethanol permits the ethanol to be readily scrubbed from the exhaust gas, along with the nitrogen dioxides converted from the nitric oxides. The non-thermal plasma apparatus comprises a non-thermal plasma reactor having a chamber which provides a plurality of electrodes. The apparatus further comprises an inlet and an outlet connected to the reaction chamber, permitting the exhaust gas to enter and leave the chamber. In one embodiment, the inlet is further connected to a diverter equipped with an injector, which diverts a portion of the gas stream through the ethanol bath before reinjecting the ethanol-bearing gas stream into the inlet.

Electric discharge device and method for treatment of fluids

The present disclosure relates to an electric discharge device and associated method for molecular restructuring of a fluid. The electric discharge device comprises a discharge cell including a first dielectric layer and a second dielectric layer that are spaced apart by a gap constituting a flow channel for a feed fluid to be molecularly restructured. The dielectric layers and the flow channel are arranged between a first electrode and a second electrode for generating electric discharge in the flow channel when voltage is applied between the electrodes. The discharge cell comprises a double-walled dielectric tube having an inner wall and an outer wall that come together at both ends of the tube to form a double-walled dielectric tube made in one piece, the inner and outer walls of the double-walled dielectric tube constituting the first and second dielectric layers of the discharge cell.

Dielectric barrier discharge system and method for decomposing hazardous compounds in fluids

Method of manufacture of a plasma reactor with curved shape for treating auto emissions

A method for preparing a non-thermal plasma reactor reactor characterized by multiple concentric exhaust channels and multiple concentric conductor channels having alternating polarity, each connected to its respective polarity via bus paths is provided. The method comprises forming a substrate having a curved, swept shape comprising a thick outer wall surrounding a plurality of channels separated by dielectric barriers, coating selected channels with a conductive material to form conductor channels capable of forming an electric field around uncoated exhaust channels. Masking is employed to effect selective coating of conductive material while preventing the conductive material from being applied to non-value added areas. A first mask is employed to apply conductive material forming conductor channels and bus paths. An additional mask may be employed to cover the conductor channels and bus paths with a sealant. The method minimizes manufacturing steps as compared to prior methods. For ...

ABGASBEHANDLUNGSVORRICHTUNG

Treatment of gaseous emissions

Method and apparatuses for plasma treatment

METHOD AND APPARATUS FOR CLEANING HARMFUL GAS BY IRRADIATION WITH GAS LASER AND ELECTRON BEAMS

An apparatus for reducing harmful ingredients in gas by irradiating the gas with an electron beam. The apparatus comprising a voltage generating unit adapted to generate a high-frequency and high voltage signal, and a reaction unit coupled to the voltage generating unit to receive the high-frequency and high voltage signal, the reaction unit including an electron beam pole having a plurality of openings along the surface of the electron beam pole, and a plurality of discharge cells for each opening, the discharge cells being disposed to face the corresponding opening for generation of the electron beam therebetween, the region between the discharge cells and the openings defining a reaction region through which the gas travels.

Verfahren zum Reduzieren von NO¶x¶ in Dieselmotorenabgas

Verfahren und Vorrichrung zur Reduzierung von Gasen bestehend aus Perfluoroverbindungen in Abgasen von einer Substrat-Bearbeitungsvorrichtung

Treatment of gaseous emissions

BEHANDLUNG VON ABGASEN

Verfahren und Vorrichtung zur plasmachemischen Zersetzung und/oder Vernichtung von Schadstoffen

Different processes have been proposed particularly for exhaust gas purification of pollutants, particularly from internal combustion engines or other machines operated with fossil fuels. According to the invention, the exhaust gas (GF) containing the pollutants flows through a reactor volume charged with non-thermal gas emissions and is thereby brought into contact- at least one time, preferably several times- with a solid reducing (RM). This reducing agent can particularly consist of carbon fibers. A suitable device for combining dialectrically-inhibited discharges with the reduction of the gas emissions has means (10) for field magnification in the reactor which are at largely periodic intervals.

Plasma-assisted processing of gaseous media

Reinigungsvorrichtung für Vakuumleitung in einer Substrat-Bearbeitungsvorrichtung

Industrieller Wärmetauscher

Die Erfindung betrifft eine Vorrichtung zur Reinigung eines industriellen Wärmetauschers, insbesondere eines wassergekühlten Kraftwerkskondensators, der auch als Plasmareaktor nutzbar ist. Durch diese Erfindung ist es erstmals möglich, kosteneffektiv die inneren Oberflächen von industriellen Wärmetauschern unmittelbar vor ihrer Beschichtung optimal für die Beschichtung vorzubereiten, insbesondere zu reinigen, da ein Plasma ohne Precursor zur Reinigung eingesetzt wird.

Plasma reactor

A non-equilibrium plasma system and method of refining syngas

An object of the present invention is to provide a non-equilibrium plasma (NEP) system and method of refining syngas. In accordance with an aspect of the present invention, there is provided a non-equilibrium plasma system for refining syngas, the system comprising a reactor with a hollow chamber, having one or more inlet manifolds configured to promote an axially symmetric and swirling flow pattern, into which syngas and one or more gasifying agents are introduced for processing within the reactor, a high voltage electrode; and a ground electrode, wherein the system is configured to create a non-equilibrium plasma producing electric arc upon application of a high voltage potential across an arc initiating gap between the high voltage electrode and the ground electrode and wherein the system is configured such that the syngas, the one or more gasifying agent(s) and plasma producing electric arc come together concurrently in the reactor. In one embodiment of the invention, the non-equilibrium ...

Method and device for cleaning combustion exhaust gas using plasma

Plasma reactor

The present invention provides a plasma reactor which can suppress deactivation of components (active components) activated by plasma when causing exhaust gas to flow through a plasma generating space to ensure efficient reaction between the active components and particulate matter, whereby the particulate matter can be efficiently purified via reaction. The plasma reactor includes a plasma reactor main body 1 , a positive electrode 11 disposed on an inlet side 2 of the plasma reactor main body 1 , a conductive honeycomb filter 21 disposed so that a filter inlet side 22 faces an outlet side 3 of the plasma reactor main body 1 , and a pulse power supply 31 which is connected with the positive electrode 11 and the honeycomb filter 21 and is capable of applying a pulse voltage between the positive electrode 11 and the honeycomb filter 21 as plasma generating electrodes to generate plasma.

Exhaust gas reactor

Plasma generator

A plasma generator 10 for generating a plasma stream from a gas stream comprises a housing 50 configured to receive the gas stream and a coil 20 located within the housing and operable to generate the plasma stream from the gas stream. Locating the coil within the housing both improves the generation of the plasma stream (which improves the operation of the plasma generator in the treatment of any effluent stream since both capacitively-induced and inductively-induced plasmas are generated) and increases the range of materials from which the housing may be made since the coil is no longer placed outside of the housing, such as materials which are less damaged by reactive gas etching, which results in increased operating life for the chamber. Containment shrouds may be included to guide the gas around the housing both through the coil and around the coil. The shrouds may comprise a plurality of shroud sections.

Particulate reduction

Organic halogen compound decomposing device and operation control method therefor, and organic halogen compound decomposing method

Method and apparatus for cleaning harmful gas by irradiation with gas laser and electron beams

Carbon dioxide converts to useful organic products by using plasma technology

PLASMA PROCESSING APPARATUS

A plasma processing apparatus includes a main body that has an inlet for a purification target gas and an outlet for a purified gas, an insulator honeycomb that includes a plurality of cells that are partitioned by a partition wall and serve as gas passages, a conductor honeycomb that is disposed to be able to transmit heat to the insulator honeycomb, a discharge electrode that is disposed opposite to the conductor honeycomb and forms a pair of electrodes with the conductor honeycomb, and a pulse power supply that applies a pulse voltage between the pair of electrodes, the insulator honeycomb, the conductor honeycomb, and the discharge electrode being disposed in an inner space of the main body. The plasma processing apparatus generates plasma by applying a pulse voltage to promote purification of the purification target gas in the insulator honeycomb by utilizing heat generated by plasma.

PLASMA DEVICE FOR TREATING EXHAUST GAS

The present invention relates to a device for treating an exhaust gas, and more particularly, to a plasma device capable of, even when connected to a vacuum pump, extending a lifetime of an electrode of a plasma torch. In the plasma device according to the present invention, since an orifice is installed in a connection unit for connection with a vacuum pump to prevent a decrease in pressure of the vacuum pump, a pressure of a plasma reaction unit including the plasma torch of the plasma device can be maintained similar to normal pressure, thereby reducing the wear of a tungsten electrode in the plasma torch to extend a lifetime of the electrode.

Reinigungsvorrichtung für Vakuumleitung in einer Substrat-Bearbeitungsvorrichtung

Vehicle emissions controller system

A non-equilibrium plasma system and method of refining syngas

Apparatus for treating a gas stream

Plasma generator

Organic halogen compound decomposing device and operation control method therefor, and organic halogen compound decomposing method

Plasma-assisted processing of gaseous media

Method and apparatus for cleaning harmful gas by irradiation with gas laser and electron beams

An apparatus for reducing harmful ingredients in gas by irradiating the gas with an electron beam. The apparatus comprising a voltage generating unit adapted to generate a high-frequency and high voltage signal, and a reaction unit coupled to the voltage generating unit to receive the high-frequency and high voltage signal, the reaction unit including an electron beam pole having a plurality of openings along the surface of the electron beam pole, and a plurality of discharge cells for each opening, the discharge cells being disposed to face the corresponding opening for generation of the electron beam therebetween, the region between the discharge cells and the openings defining a reaction region through which the gas travels.

METHOD AND SYSTEM FOR TREATING EMISSIONS USING A TRANSIENT PULSED PLASMA

A method and system to treat emissions (e.g., smoke, particulate, odor, grease) employs a nanosecond high voltage pulse generator, a transient pulsed plasma reactor, and a DC voltage source that supplies a DC bias voltage, preferably a negative DC bias voltage to a conductor of the transient pulsed plasma reactor. The system is used in a scheme that substantially reduces at least particulate matter in emissions streams, for example emissions streams produced during cooking, for instance in commercial charbroiling processes (e.g., cooking of hamburger meat), or from operation of internal combustion engines. Both a reduction in the size distribution and total particulate mass is achieved using the method and system described herein.

PLASMAUNTERSTÜTZTE GASBEHANDLUNG

Method and apparatus for cleaning harmful gas by irradiation with gas laser and electron beams

Método para a conversão de combustìveis de motor (mf) em gás sintético e conversor plasma catalìtico

Nitrogen oxide reduction apparatus and gas treating apparatus

The present disclosure provides a gas treating apparatus comprising a reaction chamber configured to process a gas supplied from an outside by a plasma, the processed gas containing a nitrogen oxide, and a nitrogen oxide reduction apparatus connected to the reaction chamber. The nitrogen oxide reduction apparatus includes a cooling unit configured to cool the processed gas to a temperature lower than a nitrogen oxide generation temperature.

Non-thermal plasma reactor substrate design-E-shape with low loss electrode pattern

A low-loss electrode-printed structural dielectric barrier for a non-thermal plasma reactor and non-thermal plasma multi-cell stacks having low-loss electrodes. The low-loss electrode-printed structural dielectric barriers include a structural dielectric barrier having a first side and a second opposite side; a low-loss electrode pattern disposed on the second side of the structural dielectric barrier; the low-loss electrode pattern comprising first and second major electrode sections that are offset from any ribs, supports, ligaments, spacers, tines, or other structure that serves as a structural dielectric connection between dielectric barriers in a multi-cell stack, a connector disposed between and electrically connecting the first and second major electrode sections and offset relative to a centerline perpendicular to the rib orientation, and a bus path connector electrically connected to one of the major electrode sections and offset relative to the centerline.

OXYGEN EXCITATION SYSTEM FOR INCREASING EFFICIENCY AND MINIMIZING POLLUTANTS OF COMBUSTION

An oxygen excitation system for increasing efficiency and minimizing pollutants of combustion is disclosed which comprises a power source, a radio frequency oscillator being in communication to the power source and configured to generate radio frequency, a radio frequency amplifier being in communication to the radio frequency oscillator and configured to amplify the radio frequency generated by said radio frequency oscillator, and an oxygen exciter being in communication to the radio frequency amplifier configured to convert a triplet oxygen into singlet oxygen to maximize fuel efficiency of internal or external combustion engines and minimizing pollutants from exhaust gases.

Creating or destroying chemical cpds. or bio-substances - by subjecting to electrical spark or discharge with gas flow used for small scale and compact synthesis or gas effluent cleaning

In a process to create or destroy chemical cpds. or bio-materials, the gaseous starting substances or the chemical cpds. which are to be destroyed are held in a gas flow within in a reactor chamber from which the prods. are subsequently removed. The substances are subjected to a brief electrical spark or discharge field which delivers the energy required for the conversion. The process is conducted at a pressure between 90 x 10 power 3 Pa to 110 x 10 power 3, pref.at 10 power 5 Pa, and a temp. of between 15 deg.C and 1200 deg.C pref. between 50 deg.C and 300 deg.C. USE/ADVANTAGE - The process creates or destroys chemical cpds. and destroys biological substances. It is suitable for the small scale synthesis or destruction of substances or the small scale cleansing of effluent process air. The process requires little space.

Verfahren und Vorrichrung zur Reduzierung von Gasen bestehend aus Perfluoroverbindungen in Abgasen von einer Substrat-Bearbeitungsvorrichtung

Carbon dioxide converts to useful organic products by using plasma technology

This invention provides a plasma method for conversion of carbon dioxide into useful organic products. In this method, carbon dioxide and counterpart molecules are mixed in a reaction chamber and the plasma excitation is utilized to trigger chemical reactions. Depending on the magnitude of the input power and molecular structures of counterparts, the final product may be polymers, oligomers, or low molecular weight small molecules. The conversion yields of carbon dioxide and chemical structures of the resulting products are strongly dependent on the selection of the counterpart molecules. Through this plasma technology, carbon dioxide is converted into useful materials such as plastics or fuels. This method is not only used to remedy the global warming but also to produce new materials and energy.

Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas

An improved non-thermal plasma apparatus for treating NOx bearing gas streams has a plasma reactor and an inlet and outlet. The plasma reactor is equipped with a plurality of dielectrically-coated electrodes between which a selected voltage is applied to generate a non-thermal plasma environment for driving selected electro-chemical reactions. A predefined voltage is applied across the electrodes to create microdischarges in the exhaust gas stream to convert nitric oxides into primarily nitrogen dioxides. The electrodes are constructed of metal plates, and a fluoropolymeric material, such as fluorocarbon, as the dielectrics. The electrodes are arranged in parallel formation and alternating between positive and negative charges. In one embodiment, fluoropolymeric spacers are positioned between adjacent electrodes and may be configured with selected thicknesses to provide a plurality of desired reaction zones or gaps therebetween. In another embodiment, the electrodes are supported on a specially ...

PLASMA GENERATING DEVICE

According to one embodiment of the present disclosure, there can be provided a plasma generating device for performing plasma discharge, the plasma generating device having multiple operation modes including a first mode and a second mode, and including: a first power supply capable of changing a frequency within a first frequency range; a second power supply capable of changing a frequency within a second frequency range that is at least partially different from the first frequency range; a dielectric tube; and an antenna module including a first unit coil wound around the dielectric tube at least one time, a second unit coil wound around the dielectric tube at least one time, and a first capacitor connected in series between the first unit coil and the second unit coil.

Device for the selective reduction of nitrogen oxides contained in I.C. engine exhaust gases comprises a nitrogen monoxide production unit having a plasma generator with an air or exhaust gas channel with a reaction region

Device for the selective reduction of nitrogen oxides contained in I.C. engine exhaust gases comprises a nitrogen monoxide production unit having a plasma generator (34) with an air or exhaust gas channel with a reaction region (38). The reaction region has an electrode (40) on one narrow side and a counter electrode (42) on an opposite-lying narrow side. The electrodes are structured so that a corona-stable spark discharge occurs when a voltage is applied between the electrodes. An independent claim is also included for a process for the selective reduction of nitrogen oxides contained in I.C. engine exhaust gases using the above device.

Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment

An apparatus for collecting particles discharged from a substrate processing chamber, the apparatus comprising: first and second electrodes having opposing surfaces that define a fluid conduit between them, the fluid conduit including an inlet, an outlet and a collection chamber between the inlet and the outlet, the collection chamber being structured and arranged to collect particulate matter flowing through the fluid conduit and to inhibit egress of the particulate matter from the collection chamber.

Plasma reactor

Slot discharge non-thermal plasma apparatus and process for promoting chemical reaction

A plasma reactor including a first dielectric having at least one slot defined therethrough, and a segmented electrode including a plurality of electrode segments, each electrode segment is disposed proximate an associated slot. Each electrode segment may be formed in different shapes, for example, a plate, bar, rim, or plug. The electrode segment may be hollow, solid, or made from a porous material. The reactor may include a second electrode and dielectric with the first and second dielectrics separated by a predetermined distance to form a channel therebetween into which the plasma exiting from the slots defined in the first dielectric is discharged. The fluid to be treated is passed through the channel and exposed to the plasma discharge. If the electrode segment is hollow or made of a porous material, then the fluid/gas to be treated may be fed into the slots defined in the first dielectric and exposed therein to the maximum plasma density. Thus, the fluid/gas to be treated may be exposed ...

VORRICHTUNG ZUR BEHANDLUNG VON GASEN MIITELS PLASMA

GAS TREATMENT DEVICE AND INTERNAL COMBUSTION ENGINE

A gas treatment device includes an electric discharger, an electromagnetic wave oscillator, an antenna, and a fan. The electric discharger ionizes gas in a target space. The electromagnetic wave oscillator oscillates an electromagnetic wave to be radiated to the target space. The electromagnetic wave is radiated by the antenna toward a gas ionization region in which gas ionized by the electric discharger is provided. The electric discharger ionizes gas and the antenna radiates the electromagnetic wave thereto to generate plasma. The fan moves at least a part of the electric discharger, thereby changing a location of the gas ionization region, thereby moving the location of the plasma.

ABGASBEHANDLUNGSVORRICHTUNG

Verfahren und Vorrichtung zur Behandlung von Abgas

The description relates to a process for treating exhaust gas in which said exhaust gas flows through a discharge chamber with an electric field in which dielectric discharges (barrier discharges) are generated. The invention is characterized in that the electric field has one or more spatially non-uniform regions. A device by which the process is implemented consists of at least one pair of flat electrodes (1, 2) arranged opposite each other so that they form a discharge chamber (6) between them and are connected to a voltage source so that an electric field is generated in the discharge chamber. Here, at least one electrode (1, 2) of each pair is coated with a dielectric (3, 4) on the side facing the discharge chamber and the exhaust gas flows through said discharge chamber. The device of the invention is characterized in that there are means for producing spatial inhomogeneities in the electric field, which may be, for example, thickenings in electrodes (1a) and/or dielectrics (3a).

Apparatus for treating an exhaust gas in a foreline

In some embodiments an apparatus for treating an exhaust gas in a foreline of a substrate processing system may include a dielectric tube configured to be coupled to the foreline of the substrate processing system to allow a flow of exhaust gases from the foreline through the dielectric tube; an RF coil wound about an outer surface of the dielectric tube, the RF coil having a first end to provide an RF input to the RF coil, the first end of the RF coil disposed proximate a first end of the dielectric tube and a second end disposed proximate a second end of the dielectric tube; a tap coupled to the RF coil to provide an RF return path, the tap disposed between the first end of the dielectric tube and a central portion of the dielectric tube.

Electrode for plasma generation

An electrode for plasma generation according to the present invention includes a plurality of collecting portions having a plurality of through holes, the plurality of collecting portions facing a gas flow in a direction where gas to be treated flows and provided spaced apart from each other. The electrode is applied to a plasma reactor of a treatment device to be provided for a device which discharges the smoke including PM, for example, an exhaust gas purifying device for automobile, or a smoke treatment device used in a facility where the smoke is discharged such as a plant.

PLASMA REACTOR

Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment

An apparatus for minimizing deposition in an exhaust line of a substrate processing chamber. The apparatus includes first and second electrodes having opposing surfaces that define a fluid conduit between them. The fluid conduit includes an inlet, an outlet and a collection chamber between the inlet and the outlet. The apparatus is connected at its inlet to receive the exhaust of the substrate processing chamber. The collection chamber is structured and arranged to collect particulate matter flowing through the fluid conduit and to inhibit egress of the particulate matter from the collection chamber. A plasma generation system supplies power to the electrodes to form a plasma from etchant gases within the fluid conduit. Constituents from the plasma react with the particulate matter collected in the collection chamber to form gaseous products that may be pumped out of the fluid conduit. The apparatus may further include an electrostatic collector to enhance particle collection in the collection chamber and to further inhibit egress of the particulate matter.

Apparatus for treating a gas stream

In an apparatus for treating a gas stream, a plasma generator comprises an electrode for energizing a source gas to generate a plasma flare by application of a high voltage. An inlet allows the gas stream into the apparatus and directs it into the generated plasma. A scraper is fitted for reciprocating movement from a first position to a second position for scraping a surface to remove solid deposits accumulated on the surface.

Method and apparatus for cleaning harmful gas by irradiation with gas laser and electron beams

An apparatus for reducing harmful ingredients in gas by irradiating the gas with an electron beam. The apparatus comprising a voltage generating unit adapted to generate a high-frequency and high voltage signal, and a reaction unit coupled to the voltage generating unit to receive the high-frequency and high voltage signal, the reaction unit including an electron beam pole having a plurality of openings along the surface of the electron beam pole, and a plurality of discharge cells for each opening, the discharge cells being disposed to face the corresponding opening for generation of the electron beam therebetween, the region between the discharge cells and the openings defining a reaction region through which the gas travels.

High-voltage plasma producing apparatus

A plasma generating apparatus includes a linear electrode for generating a high voltage by resonance caused when the linear electrode is supplied with an AC signal current, an grounded electrode for defining an internal space spaced from the linear electrode around the linear electrode, and a control device for controlling the power feed to the linear electrode. The control device has a field probe for measuring the electric field in the internal space, and a bandpass filter for filtering the measurement signal into a predetermined frequency band to output an AC signal, a variable phase shifter for shifting the phase of the AC signal so that the AC signal is synchronized with the resonance signal in the internal space when the AC signal is supplied to the linear electrode as a current, and an amplifier for amplifying the AC signal of which the phase is shifted.

PLASMAUNTERSTÜTZTE GASBEHANDLUNG

NON-THERMAL PLASMA/OZONE-ASSISTED CATALYTIC SYSTEM AND USE IN EXHAUST SYSTEMS

An engine assembly includes a diesel internal combustion engine and an aftertreatment system coupled to the diesel internal combustion engine. The aftertreatment system includes a diesel oxidation catalyst coupled to the diesel internal combustion engine such that the diesel oxidation catalyst receives exhaust gases from the diesel internal combustion engine. The aftertreatment system includes a plasma generator in fluid communication with the diesel oxidation catalyst, wherein the plasma generator is upstream of the diesel oxidation catalyst and downstream of the diesel internal combustion engine, and the plasma generator is configured to generate oxidizers to at least partially oxidize hydrocarbons in the exhaust gases exiting the diesel internal combustion engine.

Gas treatment device and internal combustion engine

A gas treatment device includes an electric discharger, an electromagnetic wave oscillator, an antenna, and a fan. The electric discharger ionizes gas in a target space. The electromagnetic wave oscillator oscillates an electromagnetic wave to be radiated to the target space. The electromagnetic wave is radiated by the antenna toward a gas ionization region in which gas ionized by the electric discharger is provided. The electric discharger ionizes gas and the antenna radiates the electromagnetic wave thereto to generate plasma. The fan moves at least a part of the electric discharger, thereby changing a location of the gas ionization region, thereby moving the location of the plasma.

VORRICHTUNG ZUR BEHANDLUNG VON GASEN MIITELS PLASMA

Verfahren und Vorrichtung zur Verminderung von Ablagerungen in einer Abgasleitung

Verfahren und Vorrichtung zur Reduzierung von Perfluorverbindungen enthaltenden Abgasen aus Substratbearbeitungsvorrichtungen.

Plasma reactor for purifying exhaust gas of the process facility

Provided is a plasma reactor disposed between a process chamber and a vacuum pump so as to decompose an exhaust gas discharged from the process chamber, the plasma reactor including: a conduit in which the exhaust gas flows; a plasma generation unit that is disposed on the conduit and causes plasma discharge so that the exhaust gas is decomposed; a housing which surrounds the conduit and in which a separation space is formed between the housing and an outer circumferential surface of the conduit; a detection unit that detects an environmental condition of the conduit or the separation space; and a controller that determines a state of the conduit or the separation space from information of the environmental condition received from the detection unit.

ENHANCED PERFORMANCE OF THE DEHYDROGENATION BY THE REDUCTION OF COKE FORMATION USING PRE-ACTIVATED CO2

The present disclosure addresses the deficiencies described above by providing systems and methods for enhancing the efficiency and yield of alkene production. The methods and systems provide for the use of activated CO 2 in a dehydrogenation reactor along with an alkane stream. Through the use of the methods and systems of the invention, catalyst deactivation by coke deposition is reduced and the selectivity and efficiency of the dehydrogenation reaction is improved.

Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions

An apparatus for converting PFC gases exhausted from semiconductor processing equipment to less harmful, non-PFC gases. One embodiment of the apparatus includes a silicon filter and a plasma generation system. The plasma generation system forms a plasma from the effluent PFC gases. Constituents from the plasma react with silicon and/or oxygen in the filter and convert the effluent PFC gases to less harmful, non-PFC gaseous products and byproducts. Another embodiment includes a plasma generation system and a particle trapping and collection system. The particle trapping and collection system traps silicon containing residue from deposition processes that produces such residue, and the plasma generation system forms a plasma from the effluent PFC gases. Constituents from the plasma react with the collected residue to convert the effluent PFC gases to less harmful, non-PFC gaseous products and byproducts.

Plasma reactor for purifying exhaust gas of the process facility

Provided is a plasma reactor for purifying an exhaust gas generated in a process facility, the plasma reactor disposed between a process chamber and a vacuum pump so as to decompose an exhaust gas discharged from the process chamber, the plasma reactor including: a conduit in which the exhaust gas flows and which is formed of a dielectric substance; first electrode portions that are installed on the conduit and covered from an inner space of the conduit; and second electrode portions that are disposed to be spaced apart from the first electrode portions and cause plasma discharge between the first electrode portions and the second electrode portions so that the exhaust gas is decomposed, wherein, in order to prevent damage of the conduit caused by plasma discharge, a thickness of a portion in which plasma discharge is concentrated, of the conduit is formed to be larger than a thickness of peripheral portions of the conduit.

Exhaust gas reactor

An exhaust gas reactor is disclosed which utilizes microwave energy to create a plasma whereby chemical reactions are promoted. Such reactions serve to reduce pollutant emission. The processor has a microwave-resonant cavity ( 6 ) formed either in an exhaust passage of a combustion chamber or in the combustion chamber itself, the cavity receiving in either case exhaust gases released by combustion in the chamber. Subjection of the exhaust gases to microwaves causes them to form a plasma in which chemical reactions take place.

Verfahren und Vorrichtung zur Verminderung von Ablagerungen in einer Abgasleitung

Plasma reactor having regions of active and passive electric field

A plasma reactor for automotive exhaust gas applications which efficiently promotes diffusion, mass transfer and chemical reaction processes of atoms, ions and radicals, in that the ground (outer) electrode has an axially discrete pattern which provides alternating regions of active and passive electric field along the axial direction of the plasma reactor. As the exhaust gas passes axially along the plasma reactor, each active region produces plasma atoms, ions and radicals, which then have time to react with the NO_x over the course of the adjacent passive region. In this manner, successive active regions produce copious atoms, radicals and ions, and the adjacent passive regions provide time for these radicals and ions to react with the NO_x and hydrocarbons before the next active region is encountered by the moving stream of exhaust gas, thereby enhancing the performance of the plasma reactor.

Method of reducing NOx in diesel engine exhaust

This invention provides a method of reducing nitrogen oxides in an oxygen containing exhaust stream using ethanol as a reductant for plasma-assisted selective catalytic reduction. The exhaust gas, generated from a diesel engine or other lean-burn power source, comprises nitrogen oxides, especially NO. Ozone generated from a plasma reactor is injected into the exhaust stream to convert NO to NO₂ and the plasma injection is followed by the addition of ethanol. The NO₂ is then reduced by contacting the exhaust stream with a dual-bed catalytic reactor comprising BaY (or NaY) and CuY zeolite catalysts in the presence of ethanol as the reductant. The plasma power density and the molar ratio of ethanol to NOx fed to the catalytic reactor are controlled as a function of the catalyst temperature for the best performance of the plasma-catalyst system. An average conversion of NO_x to N₂ of at least 90% is achieved over the temperature range of 200-400° C ...

Method and device for plasma reformation of fuel for engine applications

The invention relates to a method for plasma reformation of fuel, in particular kerosene, which method comprises the steps of: feeding fuel through a line to the inlet of an expansion nozzle; supplying energy from an energy source by way of a hollow waveguide to generate a plasma state in the expansion nozzle; injecting further fuel through nozzles into the arising plasma flame in order to decompose the fuel in the heat into components such as CO, C and H; and expanding the plasma flame at high speed into the combustion chamber.

ISOLATED PLASMA TUBE TREATMENT SYSTEMS

Systems, methods, and apparatus are contemplated in which a tube cell that produces a dielectric barrier discharge (DBD) is individually configured to minimize the mixing of unwanted byproducts of the generated plasma with an exhaust air stream. The tube cell generates a DBD within a tube cell, such that oxidants or radicals are generated in an environment substantially separated from the exhaust stream. The generated oxidants are directed to intersect with the exhaust stream to minimize the generation of unwanted byproducts. The tube cells are further shaped and arranged in tube cell arrays to alter the flow dynamics of the exhaust stream and the oxidant or radical streams, including mixing of the streams. 1. A system for treating a first stream , comprising: an oxidizing flow path for a second stream to flow through the tube and out a plurality of outlets,', 'an inner electrode extended through a length of the tube cell,', 'a dielectric layer insulating the inner electrode from the flow path, and', 'an outer electrode directing the flow path to the plurality of outlets formed in a shell of the outer electrode, wherein an outer surface of the outer electrode comprises micro-surface features that either accelerate or decelerate the outlet stream flowing around the outer surface of the outer electrode; and, 'a tube cell, comprisinga power generator coupled to the inner electrode and the outer electrode to generate a dielectric barrier discharge in the flow path to oxidize the second stream;wherein the first stream flows around the exterior of the tube cell to intersect with outlet stream from the plurality of outlets.2. The system of claim 1 , wherein the tube cell composes an array of substantially identical tube cells claim 1 , and wherein the first flow path flows around the array of substantially identical tube cells to intersect with outlet stream from outlets of the array of substantially identical tube cells.3. The system of claim 2 , wherein the array of ...

Electric discharge device and method for treatment of fluids

The present disclosure relates to an electric discharge device and associated method for molecular restructuring of a fluid. The electric discharge device comprises a discharge cell including a first dielectric layer and a second dielectric layer that are spaced apart by a gap constituting a flow channel for a feed fluid to be molecularly restructured. The dielectric layers and the flow channel are arranged between a first electrode and a second electrode for generating electric discharge in the flow channel when voltage is applied between the electrodes. The discharge cell comprises a double-walled dielectric tube having an inner wall and an outer wall that come together at both ends of the tube to form a double-walled dielectric tube made in one piece, the inner and outer walls of the double-walled dielectric tube constituting the first and second dielectric layers of the discharge cell.

Treatment apparatus for discharging fluid

본 발명은 반도체, 디스플레이 패널 및 태양광 전지 제조 장치의 공정 챔버에서 발생한 유체를 외부로 배기하는 배기 유체 처리 장치에 관한 것으로서, 상기 배기 유체 처리 장치는 상기 공정 챔버에 연결되어 상기 공정 챔버의 내부를 진공화하고, 상기 공정 챔버 내에서 발생한 유체를 외부로 배기하는 진공 펌프 및 플라즈마가 형성되어 상기 공정 챔버 내에서 발생한 유체의 분해 반응이 일어나는 플라즈마 반응기를 포함하며, 상기 플라즈마 반응기는 상기 공정 챔버와 상기 진공 펌프 사이에 마련되며, 상기 유체의 분해 반응이 일어나는 공간을 제공하는 절연성의 도관과, 상기 도관의 외주면에 마련되며, 플라즈마가 형성되도록 전압을 인가받는 적어도 하나 이상의 전극부와, 전기 전도성의 탄성체로 형성되고, 상기 도관 및 상기 전극부의 밀착시키도록 상기 내관과 상기 전극부 사이에 개재되는 완충부를 포함하여 구성된다. The present invention relates to an exhaust fluid processing apparatus for exhausting fluid generated in a process chamber of a semiconductor, a display panel, and a photovoltaic cell manufacturing apparatus to an outside, wherein the exhaust fluid processing apparatus is connected to the process chamber to provide an interior of the process chamber. A vacuum pump and a plasma reactor configured to evacuate, and exhaust the fluid generated in the process chamber to the outside, and a plasma reactor in which a decomposition reaction of the fluid generated in the process chamber occurs, wherein the plasma reactor includes the process chamber and the An insulating conduit provided between the vacuum pump and providing a space in which the decomposition reaction of the fluid occurs, at least one electrode part provided on an outer circumferential surface of the conduit and receiving a voltage to form a plasma, and an electrically conductive elastic body Formed in contact with the conduit and the electrode So that is configured to include a buffer which is interposed between the inner tube and the electrode portion.

Plasma reactor

플라즈마 반응기는 반응 챔버와 반응 챔버에 연결된 입구 헤드를 포함한다. 입구 헤드는 반응 챔버에 연결된 개방 단부와, 개방 단부에 대향하여 위치된 플라즈마 입구와, 개방 단부로부터 플라즈마 입구를 향해 테이퍼진 내측면과, 플라즈마 입구와 개방 단부 사이에 각각 위치된 제 1 및 제 2 가스 입구를 포함한다. 플라즈마 토치는 플라즈마 입구를 통해 반응 챔버 내로 플라즈마 스트림을 분사하며, 상기 플라즈마 입구는 플라즈마 스트림이 제 1 및 제 2 가스 입구를 향해 외측으로 방사되도록 형상 설정되어 있다. 입구 헤드 및 플라즈마 입구의 이러한 형상은 플라즈마 스트림 및 가스 스트림이 가스 입구로부터 빠져나갈 때 플라즈마 스트림이 가스 스트림 상에 충돌할 수 있도록 함으로써, 가스 스트림이 챔버 내에서 혼합되기 시작하기 전에 가스 스트림의 상당한 비율의 적어도 하나의 성분이 반응되도록 한다.

Plasma reactor for treating exhaust gas

본 발명에 의하면, 공정챔버로부터 배출되는 가스가 유동하는 배기관 상에 설치되어서 상기 가스에 포함된 타겟 성분을 방전에 의해 발생되는 플라즈마를 이용하여 분해하는 플라즈마 반응기에 있어서, 내부에 상기 가스가 유동하는 가스 유동 공간을 제공하는 튜브 형태의 가스 유동관 부재; 상기 가스 유동 공간에 위치하고 동일한 극성을 갖는 두 개의 제1 전극부들; 및 상기 가스 유동 공간에 위치하고 상기 방전을 위해 상기 두 개의 제1 전극부들 각각과 전위차를 갖는 두 개의 제2 전극부들을 포함하며, 상기 두 개의 제1 전극부들과 상기 두 개의 제2 전극부들은 상기 가스 유동 공간의 원주방향을 따라서 차례대로 이격되어서 교대로 배치되며, 상기 두 개의 제1 전극부들과 상기 두 개의 제2 전극부들은 상기 가스 유동관 부재의 길이방향을 따라서 연장되는 기둥 형상인, 배기가스 처리용 플라즈마 반응기가 제공된다.

Organic halogen compound decomposing device and operation control method therefor, and organic halogen compound decomposing method

The present invention is an organic halogen compound decomposition device which utilizes a plasma, wherein a stable and reliable ignition at operation commencement is possible, and where following ignition, a good plasma form can be maintained and stable operation is possible. The organic halogen compound decomposition device is equipped with a cylindrical waveguide 7 made up of an outer conductor 8 and an inner conductor 9, and a dual construction discharge tube 5 made up of an inner tube 11 and an outer tube 12 which is provided inside the cylindrical waveguide 7 and on an identical axis. Furthermore, a probe antenna 9a formed from an extension of the inner conductor 9 is positioned so as to encircle the discharge tube 5, and the tip of the inner tube 11 is positioned further inwards than the tip of the probe antenna 9a.

Method and device for cleaning the exhaust gases of a process plant

Um die Abgase einer Prozessanlage (1), in der ein Prozess mit einem Nichtmetallhalogenid durchgeführt wird, zu reinigen, wird das Abgas (3) mit enem Gas (7) versetzt, das die Rekombination von aus dem Nichtmetallfluorid gebildeten ionisierten Teilchen verhindert. Das Abgas (3, 7) wird dann in einem Gasentladungsraum (25) in ein Plasma übergeführt, in dem das in dem Abgas (3, 7) enthaltende Nichtmetallhalogenid ionisiert wird. Die ionisierten Teilchen, die mit dem ihre Rekombination verhindernden Gas abgesättigt worden sind, können dann aus dem Abgas entfernt werden. In order to purify the exhaust gases of a process plant (1) in which a process is carried out with a non-metal halide, the exhaust gas (3) is treated with a gas (7) which prevents the recombination of ionized particles formed from the non-metal fluoride. The exhaust gas (3, 7) is then converted into a plasma in a gas discharge space (25), in which the non-metal halide contained in the exhaust gas (3, 7) is ionized. The ionized particles that have been saturated with their recombination-preventing gas can then be removed from the exhaust gas.

Low-pressure plasma reactor for the increase in abatement efficiency of pollutions

오염 물질 제거율 향상을 위한 저압 플라즈마 반응기가 개시된다. 저압 플라즈마 반응기는 절연체, 제1 접지 전극, 고전압 전극, 제2 접지 전극, 및 자기장 발생부를 포함한다. 절연체는 공정 가스가 통과하는 관형으로 이루어지고, 제1 접지 전극은 절연체와 진공 펌프를 연결하는 관형으로 이루어진다. 고전압 전극은 제1 접지 전극과 거리를 두고 절연체의 외면에 위치하며, 교류 전원부와 연결되어 구동 전압을 인가받는다. 제2 접지 전극은 제1 접지 전극의 내부에 위치하며, 자기장 발생부는 제1 접지 전극의 외측에 설치되어 제2 접지 전극 주위로 자기장을 인가한다. A low pressure plasma reactor for improving contaminant removal rate is disclosed. The low pressure plasma reactor includes an insulator, a first ground electrode, a high voltage electrode, a second ground electrode, and a magnetic field generator. The insulator has a tubular shape through which the process gas passes, and the first ground electrode has a tubular shape connecting the insulator and the vacuum pump. The high voltage electrode is located on the outer surface of the insulator at a distance from the first ground electrode, and is connected to the AC power source to receive the driving voltage. The second ground electrode is located inside the first ground electrode, and the magnetic field generating unit is installed outside the first ground electrode to apply a magnetic field around the second ground electrode.

Plasma reactor for inductively coupled plasma and assembling method of the same

본 발명에 의하면, 적층된 복수개의 페라이트 코어들을 포함하고 제1 통로부와 제2 통로부가 나란하게 형성된 페라이트 코어 적층체와, 상기 페라이트 코어 적층체를 수용하는 페라이트 코어 수용 구조물을 구비하는 페라이트 코어 조립체; 내부에 제1 내부 공간을 제공하는 제1 기초부와, 상기 제1 기초부로부터 연장되고 상기 제1 내부 공간과 연통되며 상기 제1 통로부에 수용되는 제1A 연장관과, 상기 제1 기초부로부터 연장되고 상기 제1 내부 공간과 연통되며 상기 제2 통로부에 수용되는 제2A 연장관을 구비하는 제1 챔버 몸체; 내부에 제2 내부 공간을 제공하는 제2 기초부와, 상기 제2 기초부로부터 연장되고 상기 제2 내부 공간과 연통되며 상기 제1 통로부에 수용되어서 상기 제1A 연장관과 이어지는 제1B 연장관과, 상기 제2 기초부로부터 연장되고 상기 제2 내부 공간과 연통되며 상기 제2 통로부에 수용되어서 상기 제2A 연장관과 이어지는 제2B 연장관을 구비하는 제2 챔버 몸체; 및 상기 제1 챔버 몸체와 상기 제2 챔버 몸체를 결합하는 복수개의 결합 막대들을 포함하는, 유도결합 플라즈마용 플라즈마 반응기가 제공된다.

Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment

An apparatus for minimizing deposition in an exhaust line of a substrate processing chamber. The apparatus includes first and second members having opposing surfaces that define a fluid conduit between them. The fluid conduit includes an inlet, an outlet and a collection chamber between the inlet and the outlet. The apparatus is connected at its inlet to receive the exhaust of the substrate processing chamber, and the collection chamber is structured and arranged to collect particulate matter flowing through the fluid conduit and to inhibit egress of the particulate matter from the collection chamber. A microwave plasma generation system supplies microwave energy within the fluid conduit to form a plasma from etchant gases within the fluid conduit. Constituents from the plasma react with the particulate matter collected in the collection chamber to form gaseous products that may be pumped out of the fluid conduit. The apparatus may further include an electrostatic collector to enhance particle collection in the collection chamber and to further inhibit egress of the particulate matter.

Object processing apparatus and plasma facility comprising the same

A processing apparatus for subject of the present invention uses a high voltage electrode and a ground electrode, and generates plasma under atmospheric pressure in a reaction passage through which a to-be-processed subject passes. For example, even fluorocompound such as PFC including CF 4 can effectively be decomposed because the fluorocompound is brought into contact with plasma in a small space for sufficient time, and the apparatus has a small and simple structure. Therefore, the apparatus can be added to each process chamber.

Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions

Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment

본 발명은 기판 처리 챔버의 배기 라인내의 증착물을 최소화시키는 장치에 관한 것이다. 본 발명에 따른 장치는 그 사이에 유체도관을 형성하는 대향 표면을 가진 제 1 및 제 2 전극을 포함한다. 유체도관은 입구, 출구, 및 상기 입구와 상기 출구 사이에 수집 챔버를 포함한다. 본 발명에 따른 장치는 기판 처리 챔버의 배기물을 수용하기 위해 상기 기판 처리 챔버의 입구에 접속된다. 수집 챔버는 유체도관을 통해 흐르는 미립자 물질을 수집하여 상기 미립자 물질이 배기되는 것을 억제하도록 구성 및 배치된다. 플라즈마 발생 시스템은 유체도관내에 에천트 가스로부터 플라즈마를 형성하기 위해 전극에 전력을 공급한다. 플라즈마로부터의 성분은 유체도관으로부터 펌핑될 수 있는 가스 발생물을 형성하기 위해 수집 챔버내에 수집된 미립자 물질과 반응한다. 본 발명에 따른 장치는 수집 챔버내에 입자 수집을 개선하여, 상기 미립자 물질의 배기를 보다 억제하기 위해 정전기 수집기를 더 포함할 수 있다. The present invention relates to an apparatus for minimizing deposits in an exhaust line of a substrate processing chamber. The device according to the invention comprises first and second electrodes having opposing surfaces defining a fluid conduit therebetween. The fluid conduit includes an inlet, an outlet, and a collection chamber between the inlet and the outlet. The apparatus according to the invention is connected to the inlet of the substrate processing chamber to receive the exhaust of the substrate processing chamber. The collection chamber is configured and arranged to collect particulate material flowing through the fluid conduit to prevent the particulate matter from being evacuated. The plasma generation system powers the electrodes to form a plasma from an etchant gas in the fluid conduit. Components from the plasma react with particulate matter collected in the collection chamber to form a gaseous product that can be pumped from the fluid conduit. The apparatus according to the invention may further comprise an electrostatic collector to improve particle collection in the collection chamber, thereby further suppressing the evacuation of the particulate matter.

Method and apparatus for minimizing deposition in an exhaust line

Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emission

본 발명은 반도체 처리장치로부터 배출된 PFC 가스를 덜 해로운 비PFC 가스로 변환하는 장치에 관한 것이다. 한 실시예에 있어서, 이 장치는 실리콘 필터 및 플라즈마 생성 시스템을 포함한다. 플라즈마 생성 시스템은 유해 방출물 PFC 가스로 플라즈마를 생성한다. 플라즈마로부터의 성분은 필터에서 실리콘 및/또는 산소와 반응하며 유해 방출물 PFC 가스를 덜 해로운 비 PFC 가스 생성물 및 부산물로 변환시킨다. 다른 실시예에 있어서, 상기 장치는 플라즈마 생성시스템 및 입자 트래핑 및 수집 시스템을 포함한다. 입자 트래핑 및 수집 시스템은 잔류물을 생성하는 증착 공정으로부터 실리콘 함유 잔류물을 트래핑하며, 플라즈마 생성 시스템은 유해 방출물 PFC 가스로부터 플라즈마를 형성한다. 플라즈마로부터의 성분은 유해 방출물 PFC 가스를 덜 해로운 비 PFC 가스 생성물 및 부산물로 변환하기 위해 선택된 잔류물과 반응한다. The present invention relates to an apparatus for converting PFC gas discharged from a semiconductor processing device into a less harmful non-PFC gas. In one embodiment, the device includes a silicon filter and a plasma generation system. The plasma generation system generates a plasma with noxious emission PFC gas. The components from the plasma react with silicon and / or oxygen in the filter and convert harmful emissions PFC gases into less harmful non-PFC gas products and by-products. In another embodiment, the apparatus includes a plasma generation system and a particle trapping and collection system. The particle trapping and collection system traps the silicon-containing residue from the deposition process that produces the residue, and the plasma generation system forms a plasma from the hazardous emissions PFC gas. The components from the plasma react with the selected residues to convert the hazardous emissions PFC gas into less harmful non PFC gas products and by-products.

Systems and methods for ozone degradation for a plasma treatment system

本揭示內容描述了材料表面處理系統及方法，該些材料表面處理系統及方法採用副產品處理系統接收施加電漿時產生的副產品，該副產品處理系統用以降解副產品且自材料表面處理排出降解的副產品。所揭示的副產品處理系統在自材料處理系統排空之前改變副產品，以減少或消除副產品對周圍大氣的污染。

RF plasma device capable of continuous step-by-step treatment of toxic exhaust gas

본 발명은 알에프를 이용한 독성 배기가스 단계적 연속처리 알에프 플라즈마장치를 개시한다. 본 발명에 따른 알에프를 이용한 독성 배기가스 단계적 연속처리 알에프 플라즈마장치는, 내부에 독성 배기가스가 통과하는 메인관로; 상기 메인관로의 내부 일측에 설치되어 외면에는 내부에서 생성된 제1혼합기체를 배출하기 위한 복수의 제1배출홀이 형성된 제1반응관로 및 상기 메인관로의 일측에 설치되어 상기 제1반응관로의 내부에 수증기나 습증기 형태의 클러스터 단위의 수분을 공급하는 제1수분공급기 및 상기 제1반응관로의 내부로 알에프를 방사하여 클러스터 단위의 수분에 대한 유전가열과 플라즈마 방전 작용을 통해 단위 물분자와 함께 수소이온, 수산기이온, 수소라디칼, 수산기라디칼 중 적어도 어느 하나를 포함하는 이온ㅇ라디칼 물질로 이루어진 제1혼합기체를 생성하는 제1알에프공급기로 이루어진 전처리모듈; 상기 메인관로의 내부에 상기 전처리모듈과 간격을 두고 설치되어 제1혼합기체와 독성 배기가스가 혼합되면서 화학 반응을 일으킨 제1처리가스를 공급받는 것으로 외면에는 내부에서 생성된 제2혼합기체를 배출하기 위한 복수의 제2배출홀이 형성된 제2반응관로 및 상기 메인관로의 일측에 설치되어 상기 제2반응관로의 내부에 수증기나 습증기 형태의 클러스터 단위의 수분을 공급하는 제2수분공급기 및 상기 제2반응관로의 내부로 알에프를 방사하여 클러스터 단위의 수분에 대한 유전가열과 플라즈마 방전 작용을 통해 단위 물분자와 함께 수소이온, 수산기이온, 수소라디칼, 수산기라디칼 중 적어도 어느 하나를 포함하는 이온ㅇ라디칼 물질로 이루어진 제2혼합기체를 생성하는 제2알에프공급기로 이루어진 후처리모듈; 상기 후처리모듈을 통과한 메인관로의 일측에 설치되어 처리가스 중의 극성화합물을 제거하기 위한 스크러버모듈; 상기 제1,2수분공급기 및 제1,2알에프 공급기 중 어느 하나 또는 둘 모두에 제어신호를 인가하여 수증기나 습증기의 공급량과 알에프의 출력량을 제어하는 제어모듈로 구성된다. 이와 같이 구성되는 본 발명은, 알에프 에너지에 의한 유전가열 작용을 통해 클러스터 단위의 수증기나 습증기를 수 옹스트롬 크기의 단분자 형태의 초미세 물방울을 연속적으로 생성시킬 수 있으며, 또한 지속적으로 공급되어지는 알에프 에너지에 의해 플라즈마 방전을 발생시켜 이 과정에서, 수소이온, 수산기이온, 수소라디칼, 수산기라디칼 등의 독성 및 유해물질에 대한 화학적 결합을 통해 제거가 가능한 라디칼 물질을 형성시킬 수 있다. 즉, 단분자 형태의 초미세 물방울은 유전 쌍극자가 노출되어 있어 화학적 반응성이 대단히 우수할 뿐만 아니라 유해성이 없으며, 수소이온, 수산기이온, 수소라디칼, 수산기라디칼 등의 라디칼 물질은 배기가스에 포함된 독성 유해물질과 화학적으로 결합하여 제거가 가능하다.

Plasma torch

개시되는 플라즈마 토치는, 상·하부에 서로 이격되어 위치하는 제1 전극 및 제2 전극; 상기 제1 전극에 마주하는 상면과, 상기 제2 전극에 의해 형성되는 둘레 면과, 개방된 하면을 가지며, 플라즈마가 형성되는 공간으로 제공하는 플라즈마 챔버; 상기 플라즈마 챔버의 하부에 배치되며, 외부에서 공급되는 폐가스가 상기 플라즈마에 의해 처리되는 토치챔버; 상기 플라즈마 챔버를 형성하는 상기 제2 전극의 내면에 형성되며, 상기 플라즈마 챔버의 하면을 향하도록 구비되는 방전유지면; 및 상기 플라즈마 챔버의 하면을 향하는 방향으로 상기 방전유지면의 하류에 배치되며 플라즈마 형성을 위한 방전가스를 공급하는 제2 방전가스 공급부;를 포함한다. The plasma torch includes: a first electrode and a second electrode that are spaced apart from each other at upper and lower portions; A plasma chamber having a top surface facing the first electrode, a peripheral surface formed by the second electrode, an open bottom surface, and a space in which plasma is formed; A torch chamber disposed at a lower portion of the plasma chamber, wherein a waste gas supplied from the outside is processed by the plasma; A discharge sustaining surface formed on an inner surface of the second electrode forming the plasma chamber and facing the lower surface of the plasma chamber; And a second discharge gas supply unit disposed downstream of the discharge sustaining surface in a direction toward the lower surface of the plasma chamber and supplying a discharge gas for plasma formation.

Plasma reactor

SYSTEM AND METHOD FOR CAPTURING AND DESTRUCTION OF SOOT PARTICLES CONTAINED IN EXHAUST GASES OF A COMBUSTION ENGINE

Soot particle capturing and destructing system for oil engine of motor vehicle, has earth electrode including return part extended on plate's surface, and auxiliary electrodes arranged on plate and between high voltage and earth electrodes

The system has a high voltage electrode (3) arranged on a surface (1a) of a rectangular dielectric plate (1) and connected to a high voltage alternating power supply, where the electrode is in the form of rectangular metallic plate. An earth electrode (5) has a rectangular main part (5a) arranged on an edge (6) of the surface parallely and remote from the electrode (3). The electrode (5) has a return part that surrounds the edge and is extended on another surface of the plate. Auxiliary electrodes (7) are parallely arranged on the plate and arranged between the electrodes (3, 5). An independent claim is also included for a method of capturing and destructing a soot particle contained in an exhaust gas of an internal combustion engine.

Treatment for gas effluents from semiconductor manufacture consists of injecting into plasma source and injecting water vapour before or after source

L'invention concerne un procédé de traitement, par plasma, d'effluents gazeux à pression sensiblement atmosphérique, comportant- l'injection de l'effluent à traiter dans une torche à plasma,- l'injection de vapeur d'eau, en amont ou en aval du plasma.

For the oxygen activating system for improving efficiency of combustion and minimizing burning pollutant

公开了一种用于提高燃烧效率并使燃烧污染物最小化的氧激发系统，其包括：电源；射频振荡器，其与电源连通并且构造成生成射频；射频放大器，其与射频振荡器连通并且构造成放大由所述射频振荡器生成的射频；和氧激发器，其与射频放大器连通并且构造成将三线态氧转化成单线态氧，从而使内燃机和外燃机的燃料效率最大化并且使来自废气的污染物最小化。

Discharge ionizing detector which purifies the noble gas in use

Discharge ionizing detector with a discharge chamber (14), a discharge source (30) placed in the discharge chamber to discharge in a discharge zone to produce ionization components to be analyzed in the chamber, means (22) of introducing a gas flow into the chamber and means (68) of extracting the ionized contaminants present in the chamber. The means of extraction is placed near the discharge zone. An ionization chamber is attached to the discharge chamber, a flow guide directs the gas discharge flow from the discharge chamber to the adjacent ionization chamber, means of extraction empty the discharge chamber of ionized contaminants, there are means of introducing a sample flow of gas containing a gas to be analyzed into the ionization chamber and means of discharging the sample gas mixture and the discharge gas from the ionization chamber. An inlet in the extraction flow is designed to attract ionized contaminants from the discharge zone. A discharge cathode tube (30) and bore (26) in the cathode allows the extraction flow from the end (30T) of the discharge cathode, where the end of the cathode is next to the discharge. An annular restriction (68) is placed in the extraction flow near the cathode to direct a flow of ionized contaminants towards the inlet in the extraction flow. The detector body (12) defines a first, discharge chamber (14) and a second, ionizing chamber. These chambers are coaxial and have a common internal wall to guide the flow containing a number of parallel bores (24) close together. Each bore includes inlet and outlet openings.

Plasma device for treating exhaust gas

본 발명은 배기가스 처리 장치 관한 것으로, 보다 상세하게는 진공펌프에 연결시에도 플라즈마 토치의 전극 수명을 연장할 수 있는 플라즈마 장치에 관한 것이다. 본 발명에 따른 플라즈마 장치는 진공펌프와의 연결을 위한 연결부에 오리피스를 장착하여 진공펌프의 압력 강하를 차단함으로써, 플라즈마 장치의 플라즈마 토치를 포함하는 플라즈마 반응부의 압력을 상압과 유사하게 유지시킬 수 있기 때문에 플라즈마 토치 내의 텅스텐 전극 마모를 줄일 수 있어 전극 수명을 연장시킬 수 있다.

Gas processing apparatus and internal combustion engine

Plasma reactor

For the plasma reactor of the removing of pollutant

本发明涉及用于污染物的除去的等离子体反应器。提供了用于污染物的除去的等离子体反应器，其被安装在处理室和真空泵之间且除去从处理室放出的污染物。等离子体反应器包括：至少一个介电体，在该介电体中形成了等离子体产生空间；接地电极，其被连接到介电体的至少一端；及至少一个驱动电极，其被固定到介电体的外周表面，且被连接至AC电源单元以接收AC驱动电压。接地电极具有沿着等离子体反应器的纵向方向的非均一直径。

Plasma reactor for treating exhaust gas generated from processing facility

The present invention relates to a plasma reactor for treating exhaust gas generated form a processing facility, and more specifically, to a plasma reactor arranged between a process chamber and a vacuum pump so as to dissolve exhaust gas discharged from the process chamber, comprising: a tube made from a dielectric through which the exhaust gas flows; a first electrode portion which is installed on the tube and is shielded from the inner space of the tube; and a second electrode portion, which is arranged apart from the first electrode portion, for dissolving the exhaust gas by causing plasma electric discharge, wherein the thickness of the tube is formed so that an area where the plasma discharge is concentrated is thicker than the thickness of surrounding areas, so as to prevent damage to the tube due to the plasma electric discharge.

Method and apparatus for purifying harmful gas by irradiation with gas lasers and electron beams

Apparatus for processing exhaust fluid

本发明提供一种用于处理排放流体的装置，其将在用于制造半导体、显示面板或太阳能电池的装置的处理室中产生的流体排放到外部，用于处理排放流体的所述装置包括：真空泵，其连接到所述处理室，将所述处理室的内部抽成真空，并且将在所述处理室中产生的所述流体排放到外部；以及等离子体反应器，在其中形成等离子体并且将在所述处理室中产生的流体分解，其中所述等离子体反应器包括：绝缘导管，其设置在所述处理室与所述真空泵之间并且设有所述流体在其中分解的空间；至少一个电极单元，其设置在所述导管的外周边表面上并且接收形成等离子体的电压；以及缓冲单元，其由导电弹性物质形成并且布置在所述导管与所述电极单元之间，以将所述导管与所述电极单元紧密地附接在一起。

PROCESS FOR TREATMENT OF GASEOUS EFFLUENTS LOADED WITH VOLATILE POLLUTANT COMPOUNDS BY REACTION OF SAID POLLUTANT COMPOUNDS WITH A PLASMA OUT OF THERMODYNAMIC BALANCE, AND REACTOR IN WHICH THIS PROCESS IS USED

A method for producing a plasma in a heat carrier for stabilization of combustion and neutralization of toxic products and a device for the same

Present invention relates to a method for producing a plasma in a heat carrier for stabilization of combustion and neutralization of toxic products and a device for the same. According to the method part of heat energy of the heat carrier is converted into a particle beam (CPB&NPB) pulse, said particle beam is accelerated, polarized, focused and deflected back to the area of the heat carrier.

Oxygen excitation system for increasing efficiency and minimizing pollutants of combustion

An oxygen excitation system for increasing efficiency and minimizing pollutants of combustion is disclosed which comprises a power source, a radio frequency oscillator being in communication to the power source and configured to generate radio frequency, a radio frequency amplifier being in communication to the radio frequency oscillator and configured to amplify the radio frequency generated by said radio frequency oscillator, and an oxygen exciter being in communication to the radio frequency amplifier configured to convert a triplet oxygen into singlet oxygen to maximize fuel efficiency of internal or external combustion engines and minimizing pollutants from exhaust gases.

Organic halogen compound decomposing device and operation control method therefor, and organic halogen compound decomposing method

An organic halogen compound decomposing device using plasma and capable of a positive and stable ignition at operation start-up and a stable post-ignition operation with a satisfactory plasma shape maintained, the device comprising a cylindrical waveguide (7) consisting of an outer conductor (8) and an inner conductor (9), and a dual-structure discharge pipe (5) installed coaxially with and inside the waveguide (7) and consisting of an inner pipe (11) and outer pipe (12). A probe antenna (9a) formed by extending the inner conductor (9) is disposed to surround the discharge pipe (5), and the tip end of the inner pipe (11) is positioned on the inner side of the tip end of the probe antenna (9a).

POU scrubber plasma torch and semiconductor waste gas treatment apparatus comprising the same

The present invention relates to a POU scrubber plasma torch and a semiconductor waste gas treatment apparatus including the same, capable of improving plasma decomposition efficiency. The POU scrubber plasma torch of the present invention comprises: a torch tube body; an electrode unit provided to cause plasma discharge; a coolant supply unit for supplying a coolant to a central part of the electrode unit; a coolant discharge unit provided to discharge the coolant from the central part of the electrode unit; and a reaction water injection unit.

Apparatus for treating a gas stream

Method and apparatus for cleaning harmful gas by irradiation with gas lasers and electron beams

Det er beskrevet en anordning (10) for å redusere skadelige ingredienser i gass ved bestråling av gassen med en elektronstråle. Anordningen (10) omfatter en spenningsgenererende enhet tilpasset til å generere et høyfrekvens og høyspentsignal, og en reaksjonsenhet (100) koblet til den spenningsgenererende enheten for å motta høyfrekvens og høyspenningssignalet, hvor reaksjonsenheten (100) innbefatter en elektronstrålestolpe som har et mangfold åpninger langs overflaten av elektronstrålestolpen, og et mangfold av utladeceller for hver åpning, hvor utladecellene er anordnet slik at de vender mot den korresponderende åpningen for å generere elektronstrålen mellom seg, hvor området mellom utladecellene og åpningene definerer et reaksjonsområde som gassen forflyttes gjennom.

Treating waste gas containing volatile pollutants

A process for treating waste gases containing volatile polluting compounds involves reacting the compounds with a plasma in thermodynamic non-equilibrium by introduction between high alternating voltage electrodes (7) and passage across plasma curtains generated between each electrode and one or more earthed counter-electrodes (8, 9). Preferably, the compounds pass in surface contact and optionally bulk contact with the plasma curtains. Also claimed is a reactor for carrying out the above process.

Plasma processing apparatus

A plasma processing apparatus includes a main body that has an inlet for a purification target gas and an outlet for a purified gas, an insulator honeycomb that includes a plurality of cells that are partitioned by a partition wall and serve as gas passages, a conductor honeycomb that is disposed to be able to transmit heat to the insulator honeycomb, a discharge electrode that is disposed opposite to the conductor honeycomb and forms a pair of electrodes with the conductor honeycomb, and a pulse power supply that applies a pulse voltage between the pair of electrodes, the insulator honeycomb, the conductor honeycomb, and the discharge electrode being disposed in an inner space of the main body. The plasma processing apparatus generates plasma by applying a pulse voltage to promote purification of the purification target gas in the insulator honeycomb by utilizing heat generated by plasma.

Plasma reactor

Provided is a plasma reactor which is capable of reliably producing a plasma even in cases where water has flowed into the plasma reactor. A plasma reactor according to the present invention is provided with a plasma panel laminate 20, electrical conduction members 51, 54, a case and a mat 71. The plasma panel laminate 20 has a structure wherein electrode panels 30 are laminated, and produces a plasma when a voltage is applied between electrode panels 30 adjacent to each other. The electrical conduction members 51, 54 are electrically connected to discharge electrodes of the electrode panels 30. The plasma panel laminate 20 is contained within the case. The mat 71 is interposed between the case and the plasma panel laminate 20, and affixes the plasma panel laminate 20 to the case. In this connection, the mat 71 is arranged apart from the electrical conduction members 51, 54, so that spaces S1, S2 are present between itself and the electrical conduction members 51, 54.

Plasma reactor with a honeycomb electrode

A plasma reactor includes a honeycomb electrode in which a plurality of cells that function as gas passages are partitioned by a partition wall, and a discharge electrode. The honeycomb electrode includes a first gas circulation section that allows a first gas to pass through, and a second gas circulation section that allows a second gas to pass through. The plasma reactor causes the first gas introduced into the first gas circulation section of the honeycomb electrode through the space between the electrodes to undergo a reaction while causing a plasma discharge between the honeycomb electrode and the discharge electrode, and allows the second gas to be introduced into the second gas circulation section of the honeycomb electrode to transfer heat of the second gas to the first gas circulation section to promote the reaction of the first gas.

High-efficiency gliding arc reactor

본 발명은 글라이딩 아크 플라즈마를 통해 생성되는 플라즈마 활성입자를 통해 다양한 산업현장에서 발생되는 악취가스에 혼입된 악취물질을 실시간으로 산화/분해하여 제거하는 고효율 글라이딩 아크 반응기에 관한 것으로, 본 발명에서는 전방에 유입구가 형성되고 후방에 배기구가 형성된 방전관와; 상기 방전관의 중공에 경사면을 갖는 둘 이상의 방전극을 이격되게 배치한 아크 생성부와; 상기 방전관의 중공에 수용되게 설치되어 아크 생성부의 외측을 감싸는 유도부재를 포함하여 구성되고, 상기 유도부재는, 측벽에 복수의 주 배기공들이 형성된 망상관체로, 후방에는 방전관의 유입구와 연통하는 유입구가 형성되어서, 상기 유입구를 통해 아크 생성부의 전방으로 유입된 가스는 아크 생성부를 순환한 다음, 측벽에 형성된 주 배기공을 통해 진행 방향을 측부로 전환하여 배출되도록 구성한 것을 특징으로 하고 있다.

PROCESS FOR PLASMA TREATMENT OF GASEOUS EFFLUENTS

Device for treating a gaseous medium with plasma in a treatment chamber made of electrically conducting material containing a conical axle and connected to an acceleration chamber

The conical internal surface (8) of the envelope (6) converges downstream. A central conical rod runs along the longitudinal axis from a perforated plate (12) isolated from the envelope and earthed and is surrounded by a perforated cylinder connected to the envelope by radial dividers (15) forming at least four resonance cavities (16). The envelope is supplied with an alternating high voltage : The device has a first treatment chamber (2) of length L1 of which all the parts are made of an electrically conducting material. The chamber has a gas inlet (9a) of diameter D1 and a gas outlet (10a) of diameter D2. At least four radial dividers (15) diametrically opposed in pairs form at least four resonance cavities (16). These dividers are in electrical contact by their outside edges with the internal surface of the first chamber and support a first perforated cylinder (19) of length l1 by fixing to their inside edges. A first electrical phase delivering an alternating high voltage supplies the envelope of the first treatment chamber and the first perforated plate is connected to earth. An acceleration chamber (3) for the molecules and particles of length L2 is made of electrically isolating material with a cylindrical envelope (26) of internal diameter D3 coaxial with the first treatment chamber and fixed by its upstream end (3a) to the downstream end of the first treatment chamber. The acceleration chamber contains a transverse plate (27) with center O made in an electrically conducting material with at least one perforation placed in a circular central zone centered on O to allow gas flow through the plate. A second treatment chamber (4) of length L2 made of an electrically conducting material has a diverging internal conical surface (31) with an inlet (32a) of diameter D4 and an outlet (33a) of diameter D5. The second chamber is coaxial with the first and fixed at its upstream end to the downstream end of the acceleration chamber. A second central conical rod (34) ...

Plasma torch for proceeding waste gas having a long life of anode

애노드의 수명을 획기적으로 증가시킬 수 있는 플라즈마 토치가 개시된다. 본체의 하부에는 애노드의 단부면을 덮도록 차단부재가 결합되며, 차단부재는, 본체에 결합하는 플랜지와 플랜지에 결합하는 커버로 구성되고, 상기 플랜지와 상기 커버가 결합된 상태에서 상기 플랜지와 상기 커버 사이의 틈을 통하여 방출되는 N2 가스에 의해 에어 커튼이 형성되는 상기 폐가스의 분해 후 생성되는 부식성 가스를 차단한다. A plasma torch is disclosed that can dramatically increase the life of an anode. A blocking member is coupled to the lower portion of the body to cover the end surface of the anode, and the blocking member is composed of a flange coupled to the body and a cover coupled to the flange, and the flange and the cover are coupled to each other in a state where the flange and the cover are coupled. The corrosive gas generated after decomposition of the waste gas in which the air curtain is formed is blocked by the N2 gas discharged through the gap between the covers.

Methods and apparatus for decomposing constituent elements of fluids

Some embodiments are directed to a decomposing and collection apparatus for use with a fluid. The apparatus includes an assembly for generating ions via applying atmospheric pressure, low temperature plasma to the fluid and separating the generated ions. The assembly includes multiple plasma generator and separator units that are vertically stacked relative to each other. Each of the multiple plasma generator and separator units includes a plasma generator for generating the generating atmospheric pressure, low temperature plasma, and a separator disposed to receive the positively and negatively ions ejected from the plasma generator and configured to redirect the received positively charged ions in one direction and the received negatively charged ions are redirected to another direction different from the one direction. The apparatus also includes a collector configured to collect at least one of the redirected positively charged ions and the negatively charged ions.

Method and apparatus for cleaning harmful gas by irradiation with gas laser and electron beams

An apparatus for reducing harmful ingredients in gas by irradiating the gas with an electron beam. The apparatus comprising a voltage generating unit adapted to generate a high-frequency and high voltage signal, and a reaction unit coupled to the voltage generating unit to receive the high-frequency and high voltage signal, the reaction unit including an electron beam pole having a plurality of openings along the surface of the electron beam pole, and a plurality of discharge cells for each opening, the discharge cells being disposed to face the corresponding opening for generation of the electron beam therebetween, the region between the discharge cells and the openings defining a reaction region through which the gas travels.

METHOD OF REDUCING NOx IN DIESEL ENGINE EXHAUST

플라즈마가 이용된 선택적 촉매 환원을 위한 환원제로 에탄올(26)을 이용한 산소-함유 배기가스 스트림(12)내 질소산화물의 환원방법이다. 디젤엔진 또는 다른 린-번 파워 소스(10)로부터 발생된 배기가스(12)는 질소산화물, 특히 NO를 포함한다. 플라즈마 리액터(20)로부터 발생된 오존은 상기 배기가스 스트림(16)으로 주입되어 NO를 NO 2 로 변환시키고, 상기 플라즈마 주입 이후 에탄올(26)의 첨가가 뒤따른다. 이후 상기 배기가스 스트림(28)이 환원제로 에탄올이 존재하는 BaY(또는 NaY) 및 CuY 제올라이트 촉매를 포함하는 듀얼-베드 촉매 리액터(24)와 접촉함에 의하여 상기 NO x 가 환원된다. 상기 촉매 리액터(24)로 공급되는 에탄올 대 NO x 의 플라즈마 파워 밀도 및 몰비는 상기 플라즈마-촉매 시스템의 최적 성능을 위하여 촉매 온도의 함수로써 조절된다. 적어도 90%의 NO x 대 N 2 의 평균 변환이 200~400℃의 온도범위에서 달성된다. Reduction of nitrogen oxides in the oxygen-containing exhaust stream 12 using ethanol 26 as a reducing agent for selective catalytic reduction using plasma. Exhaust gas 12 generated from a diesel engine or other lean-burn power source 10 comprises nitrogen oxides, in particular NO. Ozone generated from the plasma reactor 20 is injected into the exhaust stream 16 to convert NO into NO 2 followed by the addition of ethanol 26 after the plasma injection. The NO x is then reduced by contacting the exhaust stream 28 with a dual-bed catalyst reactor 24 comprising BaY (or NaY) and CuY zeolite catalysts in which ethanol is present as the reducing agent. The plasma power density and molar ratio of ethanol to NO x fed to the catalytic reactor 24 is adjusted as a function of catalyst temperature for optimal performance of the plasma-catalyst system. An average conversion of NO x to N 2 of at least 90% is achieved in the temperature range of 200 to 400 ° C. 디젤엔진, 질소산화물, 환원, 에탄올, 촉매, 배기가스 Diesel Engine, Nitrogen Oxide, Reduction, Ethanol, Catalyst, Exhaust Gas

Plasma reactor

等离子体反应器包括反应室和连接到反应室的入口头。入口头包括连接到反应室的开口端，位于与开口端相对的等离子体入口，从开口端向等离子体入口逐渐变小的内表面，和各自位于等离子体入口和开口端之间的第一和第二气体入口。等离子炬通过等离子体入口将等离子体物流注入到反应室中，所述等离子体入口被成形为使得等离子体物流朝着第一和第二气体入口向外散布。入口头和等离子体入口的这种成形能够使得等离子体物流可以撞击到气体物流上，当它们从气体入口离开时，并且由此引起相当大比例的气体物流的至少一种组分在气体物流开始在室内混合前进行反应。

Desulfurization and Denitrification Method Using Low Temperature Plasma Reactor with Condenser

본 발명은 저온 플라즈마 반응기를 이용하여 아황산가스 및 질소산화물을 산화시켜 최종적으로 암모니아로 중성염을 생성시키는 저온 플라즈마 탈황탈질 방법에 있어서, 저온 플라즈마 반응기내부에 응축기를 설치하고, 배연가스에 포함된 수분을 응축기 표면에 응축시켜 염의 생성 및 중성화를 촉진하는 것을 특징으로 하는 저온 플라즈마 탈황탈질 방법에 관한 것이다. 본 발명에 의하면, 분무식 스프레이와 반응기 전단의 열교환기를 동시에 사용하는 종래의 저온 플라즈마 탈황탈질법에서의 문제점들, 즉 저온부식의 우려가 높고, 설비투자비용이 크며, 2차 폐수가 발생되는 등의 문제점들이 해결될 뿐아니라 탈황탈질율도 현저히 향상된다.

Plasma generator and internal combustion engine

Procedure and reactor for the reformation of fuels

The present invention relates to a procedure for the reformation of gaseous or liquid fuels in mixtures with water and/or CO2 in a dielectric barrier discharge (DBD) plasma reactor. It is differentiated from other reformation procedures based on plasma techniques in that the design and characteristics of the reactor are conducive to having virtually the entire process lead to the production of mixtures of carbon monoxide and hydrogen, with virtually no contribution from higher hydrocarbons. This process takes place at low temperatures and has low electrical power consumption requirements. Furthermore, the present invention relates to a barrier discharge plasma reactor for the reformation of fuels comprising a power supply source, a cylindrical electrode and a dielectric device.

Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions

Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions

An apparatus for converting PFC gases exhausted from semiconductor processing equipment to less harmful, non-PFC gases. One embodiment of the apparatus includes a silicon filter and a plasma generation system. The plasma generation system forms a plasma from the effluent PFC gases. Constituents from the plasma react with silicon and/or oxygen in the filter and convert the effluent PFC gases to less harmful, non-PFC gaseous products and byproducts. Another embodiment includes a plasma generation system and a particle trapping and collection system. The particle trapping and collection system traps silicon containing residue from deposition processes that produces such residue, and the plasma generation system forms a plasma from the effluent PFC gases. Constituents from the plasma react with the collected residue to convert the effluent PFC gases to less harmful, non-PFC gaseous products and byproducts.

Method of purifying emitted gaseous substances

Plasma reactor for abatement of hazardous material

A plasma reactor for abating hazardous materials included in process gases while being installed on an exhaust path of the process gases toward a vacuum pump is provided. The plasma reactor includes an insulator having a pipe shape through which process gases pass, a first ground electrode connected to a front end of the insulator facing the process chamber, a second ground electrode connected to a rear end of the insulator and provided with a facing part that faces a center of the inside of the insulator along the moving direction of process gases, and a driving electrode fixed to an external circumferential surface of the insulator and connected to a power supply applying an AC or RF voltage.

Apparatus for treating a gas stream

在用於處理一氣流12之一種裝置10中，一電漿產生器14包括一電極22，其用於對一源氣體供電，以藉由施加一高電壓產生一電漿閃焰。一入口24允許該氣流進入該裝置中且將該氣流引導至所產生之電漿中。安裝一擦拭器26以使得其在允許自該電極撤出之一第一位置與允許擦拭該電極之一表面28之一第二位置之間往復移動，以移除累積於該表面上之固態沈積物。

Method and apparatus utilizing ethanol in non-thermal plasma treatment of effluent gas

An improved non-thermal plasma treatment method and apparatus provide for the pretreatment of nitric oxide-bearing exhaust gas with ethanol, either by vapor absorption or direct vapor injection. Advantageously, the high vapor pressure of ethanol permits a significant portion of the ethanol to be absorbed. Moreover, the solubility of ethanol permits the ethanol to be readily scrubbed from the exhaust gas, along with the nitrogen dioxides converted from the nitric oxides. The non-thermal plasma apparatus comprises a non-thermal plasma reactor having a chamber which provides a plurality of electrodes. The apparatus further comprises an inlet and an outlet connected to the reaction chamber, permitting the exhaust gas to enter and leave the chamber. In one embodiment, the inlet is further connected to a diverter equipped with an injector, which diverts a portion of the gas stream through the ethanol bath before reinjecting the ethanol-bearing gas stream into the inlet. In another embodiment, the inlet is equipped with an injector which receives a supply of ethanol that is sprayed directly into the gas stream. A reservoir stores the ethanol which is delivered to the injector by a metered pump. The apparatus may also include a scrubber and a stack.

High-voltage plasma producing apparatus

A plasma generating apparatus includes a linear electrode for generating a high voltage by resonance caused when the linear electrode is supplied with an AC signal current, an grounded electrode for defining an internal space spaced from the linear electrode around the linear electrode, and a control device for controlling the power feed to the linear electrode. The control device has a field probe for measuring the electric field in the internal space, and a bandpass filter for filtering the measurement signal into a predetermined frequency band to output an AC signal, a variable phase shifter for shifting the phase of the AC signal so that the AC signal is synchronized with the resonance signal in the internal space when the AC signal is supplied to the linear electrode as a current, and an amplifier for amplifying the AC signal of which the phase is shifted.

Method of reducing NOx in diesel engine exhaust

本发明提供了一种使用乙醇作为用于等离子体辅助的选择性催化还原的还原剂将含氧废气流中的氮氧化物还原的方法。由柴油机或其他稀燃性动力源产生的废气包括氮氧化物，尤其是NO。将由等离子体反应器产生的臭氧注入废气流以使NO转化成NO 2 ，并且在注入等离子体后加入乙醇。然后通过在作为还原剂的乙醇存在下将废气流与包含BaY(或NaY)和CuY沸石催化剂的双床催化反应器接触而将NO 2 还原。为了实现该等离子体-催化剂体系的最佳性能，将送入催化反应器的等离子体能量密度和乙醇/NO x 摩尔比作为催化剂温度的函数进行控制。在200-400℃的温度范围内实现了至少90％的NO x 到N 2 的平均转化率。

Plasma reactor for pollutant removal and driving method

Electric discharge device and method for treatment fluid

本公开内容涉及一种用于流体的分子重组的放电装置(1)和相关方法。放电装置(1)包括放电单元(2)，放电单元(2)包括由构成用于要进行分子重组的馈给流体的流动通道(15)的间隙间隔开的第一介电层(14A)和第二介电层(14B)。介电层(14A，14B)和流动通道(15)被布置在第一电极(13A)与第二电极(13B)之间，以在电极(13A，13B)之间施加电压时在流动通道(15)中产生放电。放电单元(2)包括具有内壁(17A)和外壁(17B)的双壁介电管(17)，内壁(17A)和外壁(17B)在管的两端处聚在一起以形成被制成为一体的双壁介电管(17)，双壁介电管(17)的内壁和外壁(17A，17B)构成放电单元(2)的第一介电层(14A)和第二介电层(14B)。

Plasma source apparatus

A plasma source apparatus is disclosed. The plasma source apparatus comprises a first electrode, a second electrode, a voltage source, and a flow channel. The voltage source is coupled to at least one of the first electrode and the second electrode and configured to generate a potential difference between the first electrode and the second electrode. The flow channel is configured to accommodate a flow of gas therethrough, wherein the first electrode is at least partially disposed within the flow channel and the second electrode at least partially surrounds said first electrode, and wherein said flow of gas passes between said first electrode and said second electrode. The first electrode has a pin-like shape defining a longitudinal axis and the second electrode defines a helical shape, wherein the first electrode is at least partially disposed within the helical shape.

Plasma reactor

Electrode for plasma generation

Plasma reactor and plasma reaction apparatus

A plasma reactor includes a honeycomb electrode in which a plurality of cells that function as gas passages are partitioned by a partition wall, and a discharge electrode. The honeycomb electrode includes a first gas circulation section that allows a first gas to pass through, and a second gas circulation section that allows a second gas to pass through. The plasma reactor causes the first gas introduced into the first gas circulation section of the honeycomb electrode through the space between the electrodes to undergo a reaction while causing a plasma discharge between the honeycomb electrode and the discharge electrode, and allows the second gas to be introduced into the second gas circulation section of the honeycomb electrode to transfer heat of the second gas to the first gas circulation section to promote the reaction of the first gas.

For processing the device of exhaust fluid

本发明提供一种用于处理排放流体的装置，其将在用于制造半导体、显示面板或太阳能电池的装置的处理室中产生的流体排放到外部，用于处理排放流体的所述装置包括：真空泵，其连接到所述处理室，将所述处理室的内部抽成真空，并且将在所述处理室中产生的所述流体排放到外部；以及等离子体反应器，在其中形成等离子体并且将在所述处理室中产生的流体分解，其中所述等离子体反应器包括：绝缘导管，其设置在所述处理室与所述真空泵之间并且设有所述流体在其中分解的空间；至少一个电极单元，其设置在所述导管的外周边表面上并且接收形成等离子体的电压；以及缓冲单元，其由导电弹性物质形成并且布置在所述导管与所述电极单元之间，以将所述导管与所述电极单元紧密地附接在一起。

Nonthermal plasma-based exhaust gas particulate matter reduction apparatus for preventing arcing phenomenon

Disclosed is a nonthermal plasma-based exhaust gas particulate matter reduction apparatus for preventing an arcing phenomenon, the apparatus comprising: a chamber which is a tubular body having exhaust gas flowing therein and is connected to a ground power supply; a power supply device which is disposed outside the chamber and comprises a voltage generation unit for generating a steady-state voltage at which maximum efficiency of a nonthermal plasma phenomenon is generated; an emitter which is disposed inside the chamber and generates nonthermal plasma between the chamber by having the steady-state voltage applied thereto; a rod which applies the steady-state voltage to the emitter by electrically connecting the voltage generation unit and the emitter; and an arcing prevention unit which prevents an arcing phenomenon from occurring between the rod and the chamber by providing insulation between the rod and the chamber.

Torch module and combustion type exhaust gas treatment apparatus including the same

본 발명은 플라즈마를 발생시켜 처리 유체를 연소시키는 토치 모듈에 관한 것이다. 본 발명의 일 실시 예에 따른 토치 모듈은, 플라즈마 소스 가스가 유입되는 제1 유로가 관통되도록 형성되는 캐소드(cathode); 상기 제1 유로를 통해 유입되는 플라즈마 소스 가스에 의해 발생된 아크가 배출되는 제2 유로가 관통되도록 형성되는 애노드(Anode); 상기 캐소드 및 상기 애노드 사이에 제공되고, 상기 제1 유로 및 상기 제2 유로에 대향되는 방전홀이 형성되는 갭 부재; 및 내부에 처리 유체가 유입되어 상기 아크와 반응하는 반응 공간이 형성되는 반응 챔버를 포함하되, 상기 캐소드 및 상기 애노드 중 적어도 하나는 이동 가능하게 제공되고, 상기 제1 유로, 상기 제2 유로 및 상기 방전홀은, 상기 캐소드와 상기 애노드 중 적어도 하나가 상기 갭 부재를 따라 이동함에 따라 서로 연통되도록 일직선 상에 위치될 수 있다.

Exhaust piping device

【目的】プラズマ生成を均一な状態に近づけることが可能であり、真空ポンプ近くの排気配管内部に堆積する生成物を除去することが可能な排気配管装置を提供する。【構成】実施形態の排気配管装置１００は、プロセスチャンバと前記プロセスチャンバ内を排気する真空ポンプとの間に配置される排気配管の一部として用いられる排気配管装置１００であって、誘電体管（内管１９０）と、高周波電極１０４と、プラズマ生成回路１０６と、を備える。高周波電極１０４は、前記誘電体管の外周側に配置された金属薄板５０と前記金属薄板の外周側に配置された緩衝部材５２と前記緩衝部材の外周側に配置された導電性の中空構造体５４とを有し、高周波電圧が印加される。プラズマ生成回路１０６は、前記誘電体管の内側にプラズマを生成させる。【選択図】図２

Apparatus and method for cleaning of exahust gas with low temperature plasma

본 발명은 플라즈마를 이용하여 오염가스를 효과적으로 처리할 수 있는 저온 플라스마에 의한 배기가스 정화장치 및 정화방법에 관한 것으로, 배기가스의 온도를 검출하는 온도센서(30)와, 배기가스를 가열하는 히터(40)와, 히터(40)의 구동전류를 단속하는 히터구동부(42)와, 배기가스처리관(10)의 내측에 위치된 바이메탈 전극(20)(22)과, 저압전원을 바이메탈전극에 지속적으로 인가하기 위한 저압전원부(24)와, 히터(40)를 ON/OFF제어하고, 저압전원부(24)는 지속적으로 구동하기 위한 제어부(50)로 구성되어 오염가스가 바이메탈 전극사이에 형성되는 플라즈마를 통과하는 과정에서 무해한 가스로 전환하여 효과적인 처리를 수행할 수 있는 것이다. The present invention relates to an exhaust gas purifying apparatus and a purifying method using a low temperature plasma that can effectively treat polluted gases using plasma, comprising: a temperature sensor 30 for detecting the temperature of the exhaust gas and a heater for heating the exhaust gas; 40, a heater driver 42 for intermittent driving current of the heater 40, bimetal electrodes 20 and 22 located inside the exhaust gas treatment tube 10, and a low voltage power supply to the bimetal electrode. The low pressure power supply unit 24 for continuously applying, and the ON / OFF control of the heater 40, the low pressure power supply unit 24 is composed of a control unit 50 for driving continuously so that contaminated gas is formed between the bimetal electrode In the process of passing through the plasma can be converted to a harmless gas to perform an effective treatment.

Postcombustion removal of n2o in a pulsed corona reactor

A method for removing NO and N2O from a gas stream is provided. The method comprises providing flue gases having NO and/or N2O, introducing the flue gas stream into a pulsed corona reactor, and reacting the raw feed gases within the pulsed corona reactor with the following reactions: e + H2O --- H + OH, N2O + H --- N2 + OH, and N2O + OH --- N2 + HO2. An apparatus (10) for removing NO and NO2 is also provided.

Exhaust gas reactor

An exhaust gas reactor is disclosed which utilises microwave energy to create a plasma whereby chemical reactions are promoted. Such reactions serve to reduce pollutant emission. The processor has a microwave-resonant cavity (6) formed either in an exhaust passage of a combustion chamber or in the combustion chamber itself, the cavity receiving in either case exhaust gases released by combustion in the chamber. Subjection of the exhaust gases to microwaves causes them to form a plasma in which chemical reactions take place.

Method for destroying no 2 by microwave plasma at atmospheric pressure

The invention relates to a method for destroying the nitrogen dioxide contained in a gas to be processed, in which a gas containing nitrogen dioxide is submitted to a treatment in which it flows through an atmospheric-pressure plasma that is excited and sustained solely by the application of microwave power absorbed within said plasma. During said processing, the nitrogen dioxide is converted into nitrogen and oxygen. The method can be used for the destruction of nitrogen dioxide in a hospital environment.

Apparatus for generating low-temperature plasma at atmospheric pressure

【課題】低い放電開始及び保持電圧のもとで大気圧下で高密度の低温プラズマを発生させる装置の提供。 【解決手段】１つは電源に連結され、もう１つは接地され、互いに離隔して対向する一対の電極、前記電極の対向表面上に互いに対向するように配置された２５μｍ〜１０ｍｍ厚さの一対の誘電体（これらのうち１つは１つの放電間隙（discharge gap）を有する）；及び前記放電間隙内に位置する少なくとも１つの突起部を有する導体電極を含み、前記電極に電源を通じて５０Ｈｚ〜１０ＧＨｚ周波数帯域のパルス直流又は交流を用いて１〜１００ｋＶ／ｃｍの強さで電場を印加しながら前記電極間へ反応ガスを供給して中空陰極放電、キャピラリ放電又は放電間隙から電荷の高集積化を誘導する、大気圧下での低温プラズマの発生装置。本発明の装置は、プラズマがアークへ転移するのを抑制し、安定した低温プラズマを高密度で提供する。 【選択図】図１

Multi-layered Tubular Plasma Generator

본 발명은 아크 플라즈마 발생장치에 관한 것으로, 보다 상세하게는 전극관부 내부에 위치하는 전극봉부 상에 처리대상가스의 성상에 따라 다수개의 방전부를 최적 배치 간격을 가지도록 다층 구조로 위치시켜 안정적인 플라즈마 현상을 유도하면서도 아크가 외부로 튀는 것을 방지하여 전원연결부의 훼손을 방지함과 동시에 유입된 처리대상가스에 대한 내부 혼합 및 교반을 원활하게 하면서 반응시간을 충분히 유지시킴으로써 처리대상가스의 유해물질 제거효율을 극대화할 수 있도록 이루어진 다층 구조의 관형 아크 플라즈마 발생장치에 관한 것이다. 이를 위해, 본 발명은 전극관부, 전극봉부, 받침관부 및 다수개의 방전부와 스페이서를 포함한다. The present invention relates to an arc plasma generator, and more particularly, to a stable plasma phenomenon by locating a plurality of discharge units in a multi-layered structure to have an optimal arrangement interval according to the properties of a gas to be treated on an electrode rod located inside an electrode tube unit. While inducing the arc, it prevents damage to the power connection by preventing the arc from bouncing to the outside, and at the same time, it improves the removal efficiency of harmful substances in the target gas by maintaining a sufficient reaction time while smoothly internal mixing and stirring for the inflow target gas. It relates to a tubular arc plasma generator having a multi-layer structure made to maximize To this end, the present invention includes an electrode tube unit, an electrode rod unit, a support tube unit, a plurality of discharge units, and a spacer.

Object processing apparatus and plasma facility comprising the same

A processing apparatus for subject of the present invention uses a high voltage electrode and a ground electrode, and generates plasma under atmospheric pressure in a reaction passage through which a to-be-processed subject passes. For example, even fluorocompound such as PFC including CF 4 can effectively be decomposed because the fluorocompound is brought into contact with plasma in a small space for sufficient time, and the apparatus has a small and simple structure. Therefore, the apparatus can be added to each process chamber.

Device for reducing pollutants in indoor air, ambient air, or exhaust gas by using nonthermal plasma

A disclosed device for reducing pollutants in indoor air, ambient air, or exhaust gas by using nonthermal plasma comprises: a chamber which is a tubular body in which gas to be treated, composed of indoor air, ambient air, or exhaust gas including pollutants, flows, and to which a ground power source is connected; a power supply device arranged outside the chamber to continuously apply a voltage of a magnitude set as direct current or alternating current; an emitter, which is a hollow tubular body having, on the outer surface thereof, a plurality of cusps for generating plasma, is arranged inside the chamber to extend in the direction parallel to the flow of the gas to be treated, and is electrically connected to the power supply device to generate the nonthermal plasma; a rod which electrically connects the emitter to the power supply device and which supports the emitter to be arranged at the center inside the chamber; and an insulator, which electrically insulates the rod from the chamber to prevent arcing from occurring between the rod and the chamber.

Combustible gas scrubber using gliding plasma

본 발명은 가연성 폐가스를 제 1 연소 챔버 및 제 2 연소 챔버에서 글라이딩 플라즈마를 이용하여 재차 연소시킴으로써, 가연성 폐가스의 처리 효율 및 처리 안정성을 향상시킬 수 있고 소비 전력을 줄일 수 있는 글라이딩 플라즈마를 이용한 가연성 폐가스 처리 장치에 관한 것이다. According to the present invention, by combusting the flammable waste gas again by using the gliding plasma in the first combustion chamber and the second combustion chamber, the flammable waste gas using the gliding plasma can improve the processing efficiency and processing stability of the combustible waste gas and reduce the power consumption. It relates to a processing device. 본 발명에 따른 글라이딩 플라즈마를 이용한 가연성 폐가스 처리 장치는 상부로부터 가연성 폐가스가 유입되고, 측부로부터 제 1 연소 에어와 글라이딩 플라즈마가 공급될 수 있도록 형성되어, 상기 가연성 폐가스의 초기 점화 및 1차 연소가 이루어지는 공간을 제공하는 제 1 연소 챔버; 상기 제 1 연소 챔버의 일측면에 설치되고, 외부로부터 공급되는 점화 에어에 의해 상기 글라이딩 플라즈마를 상기 제 1 연소 챔버로 공급하는 글라이딩 점화 발생부; 및 상기 제 1 연소 챔버의 하부에 설치되며, 상부 또는 측부로부터 제 2 연소 에어가 공급될 수 있도록 형성되어, 상기 가연성 폐가스의 2차 연소가 이루어지는 공간을 제공하는 제 2 연소 챔버를 포함하는 것을 특징으로 한다. The flammable waste gas treating apparatus using the gliding plasma according to the present invention is formed such that the combustible waste gas is introduced from the upper side, and the first combustion air and the gliding plasma can be supplied from the side, so that the initial ignition and the first combustion of the combustible waste gas are performed. A first combustion chamber providing a space; A gliding ignition generator installed on one side of the first combustion chamber and supplying the gliding plasma to the first combustion chamber by ignition air supplied from the outside; And a second combustion chamber installed below the first combustion chamber and configured to supply second combustion air from an upper side or a side thereof to provide a space in which secondary combustion of the combustible waste gas occurs. It is done. 글라이딩 플라즈마, 가연성 폐가스, 점화, 연소 Gliding plasma, flammable waste gas, ignition, combustion

Electrode for plasma generation

Behandlung von abgasen

Nitrogen oxide reduction apparatus and gas treating apparatus

A gas treating apparatus may include a reaction chamber configured to process a gas supplied from an outside by a plasma, the processed gas containing a nitrogen oxide, and a nitrogen oxide reduction apparatus connected to the reaction chamber. The nitrogen oxide reduction apparatus includes a cooling unit configured to cool the processed gas to a temperature lower than a nitrogen oxide generation temperature.

배기가스 처리를 위한 플라즈마 장치

본 발명은 배기가스 처리 장치 관한 것으로, 보다 상세하게는 진공펌프에 연결시에도 플라즈마 토치의 전극 수명을 연장할 수 있는 플라즈마 장치에 관한 것이다. 본 발명에 따른 플라즈마 장치는 진공펌프와의 연결을 위한 연결부에 오리피스를 장착하여 진공펌프의 압력 강하를 차단함으로써, 플라즈마 장치의 플라즈마 토치를 포함하는 플라즈마 반응부의 압력을 상압과 유사하게 유지시킬 수 있기 때문에 플라즈마 토치 내의 텅스텐 전극 마모를 줄일 수 있어 전극 수명을 연장시킬 수 있다.

Plasma electrode configuration for a high-voltage non-thermal plasma system and a non-thermal plasma-based gas-treatment system comprising such plasma electrode configuration

用于等离子体处理系统的臭氧降解的系统和方法

本公开内容描述了材料表面处理系统和方法，该系统采用副产品处理系统来接收由于等离子体的施加而产生的副产品，该副产品处理系统配置为降解副产品并将降解的副产品从材料表面处理中排出。所披露的副产品处理系统在从材料处理系统排出之前对副产品改性，以减少或消除副产品对周围大气的污染。

プラズマ処理システムのためのオゾン分解のためのシステム及び方法

本開示は、プラズマの印加によって生成された副生成物を受け取る副生成物処理システムを採用する材料表面処理システム及び方法を説明し、副生成物処理システムは、副生成物を分解し、分解された副生成物を材料表面処理から排出するように構成される。開示された副生成物処理システムは、周囲雰囲気への副生成物汚染を低減又は排除するために、材料処理システムからの排気の前に副生成物を改質する。【選択図】図１

Systems and methods for ozone degradation for a plasma treatment system

The present disclosure describes material surface treatment systems and methods that employ a byproduct treatment system to receive a byproduct generated by application of a plasma, the byproduct treatment system configured to degrade the byproduct and exhaust the degraded byproduct from the material surface treatment. The disclosed byproduct treatment system modifies the byproduct prior to evacuation from the material treatment system in order to reduce or eliminate byproduct contamination into the surrounding atmosphere.