Plasma reactor for abatement of hazardous material

11-01-2019 дата публикации

Номер:

TWI647004B

Автор: 許民, 姜宇石, 李載玉, HUR MIN, KANG WOO SEOK, LEE JAE OK, HUR, MIN, KANG, WOO SEOK, LEE, JAE OK

Принадлежит: 南韓商韓國機械研究院, KOREA INST MACH & MATERIALS, KOREA INSTITUTE OF MACHINERY & MATERIALS

Контакты:

Номер заявки: 50-13-10414

Дата заявки: 28-04-2015

CPC - классификация

B B0 B01 B01D B01D2 B01D22 B01D225 B01D2259 B01D2259/B01D2259/8 B01D2259/81 B01D2259/818 B01D5 B01D53 B01D53/B01D53/3 B01D53/32 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/320 H01J37/3209 H01J37/32091 H01J37/328 H01J37/3283 H01J37/32834 H01J37/3284 H01J37/32844 H05 H05H H05H1 H05H1/H05H1/4 H05H1/46 H05H1/465 H05H1/4652 H05H2 H05H22 H05H224 H05H2245 H05H2245/H05H2245/1 H05H2245/17 Y Y0 Y02 Y02C Y02C2 Y02C20 Y02C20/Y02C20/3 Y02C20/30 Y02P Y02P7 Y02P70 Y02P70/Y02P70/5 Y02P70/50

IPC - классификация

B B0 B01 B01D B01D5 B01D53 B01D53/B01D53/3 B01D53/32 B01J B01J1 B01J19 B01J19/B01J19/0 B01J19/08 C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/44 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/306 H01L21/3065

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