08-08-2019 дата публикации
Номер: US20190240787A1
Автор:
Thomas Beck,
Oliver Katzurke,
Jens Dietrich,
BECK THOMAS,
KATZURKE OLIVER,
DIETRICH JENS,
Beck, Thomas,
Katzurke, Oliver,
Dietrich, Jens
Принадлежит:
Through_holes having a high contour accuracy are produced by the multiple use of a nanosecond laser without that the interface between the ceramic layer and the substrate is damaged. 1. A method for producing a through-hole in a ceramic layer system ,which comprises at least:{'b': '4', 'a substrate (),'}andat least one outer ceramic layer,the through-hole having an inner partwhich is symmetrical,in a cross section,and a diffusor,which represents a widening of the inner part on the outer surface of the ceramic layer,wherein a part of a final geometry of the diffusor is produced first at least in the outermost ceramic layer as far as the substrate by a nanosecond laser by nanosecond pulses,wherein a millisecond laser is then used,to fully produce the inner part in the final geometry of the through-hole by millisecond pulses in the substrate, andin a final working step, the diffusor is produced in its final geometry at least in the ceramic layer by the nanosecond laser by nanosecond pulses.2. The method as claimed in claim 1 ,wherein, for the nanosecond laser, at least one ofa pulse duration is 50 ns-100 ns,a power is 50 kW-150 kW,an energy is 8 mJ-27 mJ,anda frequency is between 10 kHz-40 kHz.3. The method as claimed in claim 2 , wherein at least one of a pulse duration is 100 ns claim 2 ,a power is 100 kWan energy is 10 mJ,anda frequency is 10 kHz.4. The method as claimed in claim 2 , wherein the pulse pauses are 100 μs.5. The method as claimed in claim 1 ,wherein, for the millisecond laser a least one of,a pulse duration is 0.5 ms-1.5 ms,a power is 8 kW-30 kW,an energy is 4 J-50 J,anda frequency is between 4 kHz-25 kHz.6. The method as claimed in claim 1 ,wherein, for the millisecond laser at least one of,a pulse duration is 0.6 ms,a power is 15 kW,an energy is 9 J,anda frequency is 10 Hz.7. The method as claimed in claim 5 , wherein the pulse pauses are 0.1 s.8. The method as claimed in claim 1 ,wherein the part of the diffusor is produced with an oversize in cross ...
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