31-01-2013 дата публикации
Номер: US20130031518A1
Принадлежит:
Aspects of the invention relate to hybrid hotspot detection techniques. The hybrid hotspot detection techniques combine machine learning classification, pattern matching and process simulation. A machine learning model, along with false hotspots and false non-hotspots for pattern matching, is determined based on training patterns. The determined machine learning model is then used to classify patterns in a layout design into three categories: preliminary hotspots, preliminary non-hotspots and potential hotspots. Pattern matching is then employed to identify false positives and false negatives in the first two categories. Process simulation is employed to identify boundary hotspots in the last category. 1. A method of hybrid hotspot detection , executed by at least one processor of a computer , comprising:receiving data of layout patterns of a layout design;classifying the layout patterns as preliminary hotspots, preliminary non-hotspots and potential hotspots based on machine learning;identifying false positives in the preliminary hotspots and false negatives in the preliminary non-hotspots based on pattern patching; andidentifying boundary hotspots in the potential hotspots based on process simulation.2. The method recited in claim 1 , further comprising:determining hotspot information for the layout design based on the preliminary hotspots, the preliminary non-hotspots, the false positives, the false negatives and the boundary hotspots; andstoring the hotspot information in a tangible processor-accessible medium, or displaying the hotspot information on a tangible medium.3. The method recited in claim 1 , wherein the machine learning comprises a support vector machine model.4. The method recited in claim 3 , wherein the support vector machine model is derived by a model calibration system.5. The method recited in claim 1 , wherein the potential hotspots is determined by using a predetermined value that defines a separation between hotspots and non-hotspots in a ...
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