22-07-2021 дата публикации
Номер: US20210220961A1
Принадлежит:
The present disclosure provides a tray assembly having a dual-structure. The tray assembly comprises an upper tray and a lower tray. The lower tray is capable of being easily disengaged from the upper tray by use of a dovetail joint that allows the lower tray to slidably move relative to the upper tray. The tray assembly also utilizes magnets to reduce the use of mechanical joints. The combination of the magnets together with the dovetail joint provides a quick and efficient way of sliding the lower tray in and out from the upper tray. The lower tray having a collection region collects any external, foreign materials generated during a chemical mechanical polishing/planarizing process. After the cleaning process, the lower tray can be slid back into the upper tray for use. 1. A tray assembly for a polishing head in a chemical mechanical polishing (CMP) system , comprising:a first tray having a first joint part;a second tray having a second joint part, the first joint part and the second joint, in operation, cooperating with each other to reversibly attach the second tray to the first tray, the second tray including a collection region; anda plurality of first fasteners positioned at selected locations of the first tray and which, in operation, secures the first tray to the second tray, at least one of the plurality of first fasteners positioned adjacent to the first joint part of the first tray.2. The tray assembly of claim 1 , wherein the first tray is a U-shaped tray and the second tray has a corresponding U-shape claim 1 ,{'b': 6', '1, 'wherein the collection region is U-shaped, p wherein the first joint part is a male dovetail and the second joint part is a female dovetail, and the first joint part extends to a selected length from an end of an arm of the U-shaped first tray, and the second joint part extends to the selected length from an end of an arm of the U-shaped second tray.'}3. The tray assembly of claim 2 , wherein the plurality of first fasteners ...
Подробнее