18-06-2015 дата публикации
Номер: US20150166821A1
Принадлежит:
Disclosed herein is an underlayer composition, wherein the underlayer is typically used for promoting the formation of self assembled structures, and wherein the underlayer formulation comprises: (a) a polymer comprising at least one monomer repeat unit having the structure (I) 2. The formulation of claim 1 , wherein the one or more thermal acid generator is chosen from a substituted or unsubstituted halogenated alkyl compound claim 1 , a substituted or unsubstituted alkane sulfonate claim 1 , a substituted or unsubstituted 2-nitrobenzyl sulfonic acid ester claim 1 , an acid salt of a primary amine claim 1 , an acid salt of a secondary amine claim 1 , an acid salt of a tertiary amine claim 1 , a dicarboximidyl sulfonic acid ester claim 1 , or an oxime sulfonate ester.3. The formulation of claim 1 , wherein the one or more thermal acid generator is chosen from tri-C-C-alkylammonium p-toluenesulfonate claim 1 , tri-C1-C8-alkylammonium dodecylbenzenesulfonate claim 1 , tri-C-C-alkylammonium perfluorobutane-1-sulfonate claim 1 , tri-C-C-alkylammonium trifluoromethane-sulfonate claim 1 , 1 claim 1 ,2 claim 1 ,3-tris(perfluoro C-Calkane sulfonyloxy) benzene claim 1 , 1 claim 1 ,2 claim 1 ,3-tris(C-Calkane sulfonyloxy) benzene claim 1 , 1 claim 1 ,2 claim 1 ,3-tris(p-toluene sulfonyloxy) benzene claim 1 , 4-nitrobenzyl 9 claim 1 ,10-dimethoxyanthracene-2-sulfonate claim 1 , N-hydroxyphthalimide trifluoromethane-sulfonate claim 1 , 2-nitrobenzyl trifluoromethanesulfonate claim 1 , 4-nitrobenzyl trifluoromethanesulfonate claim 1 , 2-nitrobenzyl perfluorobutanesulfonate claim 1 , 4-nitrobenzyl perfluorobutanesulfonate or a combination comprising at least one of the foregoing.4. The formulation of claim 1 , wherein the polymer further comprises one or more monomer repeat units chosen from C-Calkyl (meth)acrylate claim 1 , styrene claim 1 , vinyl pyridine claim 1 , butadiene claim 1 , isoprene claim 1 , ethylene claim 1 , propylene claim 1 , α-methyl styrene claim 1 , itaconic ...
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