03-02-2022 дата публикации
Номер: US20220032624A1
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A piezoelectric device includes a diaphragm, a piezoelectric actuator, and an orientation layer between the diaphragm and the piezoelectric layer. The piezoelectric actuator has a first electrode, a piezoelectric layer, and a second electrode, with the first electrode, a piezoelectric layer, and a second electrode on the diaphragm. The orientation layer is a stack of two or more tiers. 1. A piezoelectric device comprising:a diaphragm;a piezoelectric actuator having a first electrode, a piezoelectric layer, and a second electrode, the first electrode, a piezoelectric layer, and a second electrode being on the diaphragm; andan orientation layer between the diaphragm and the piezoelectric layer, the orientation layer being a stack of two or more tiers.2. The piezoelectric device according to claim 1 , whereinthe orientation layer is a stack of tiers containing the same material.3. The piezoelectric device according to claim 1 , whereinthe diaphragm contains silicon oxide.4. The piezoelectric device according to claim 1 , wherein{'sub': y', 'y', 'x', 'y', 'x', 'y, 'the orientation layer contains at least one selected from LaNiO, SrRuO, (Ba,Sr) TiO, and (Bi, Fe) TiO.'}5. The piezoelectric device according to claim 4 , wherein{'sub': y', 'x, 'the orientation layer is made of LaNiO.'}6. The piezoelectric device according to claim 1 , whereinthe orientation layer has a (100) preferentially oriented tier on a piezoelectric layer side.7. The piezoelectric device according to claim 1 , whereinthe orientation layer is a stack of three or more tiers.8. The piezoelectric device according to claim 1 , whereineach tier of the orientation layer has a thickness of 10 nm or less.9. The piezoelectric device according to claim 1 , further comprisinga layer containing zirconium oxide between the orientation layer and the piezoelectric layer.10. A liquid ejecting head comprising:a substrate having a recess;a diaphragm on a first side of the substrate;a piezoelectric actuator having a ...
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