ГЕНЕРАТОР ЭТАЛОННОГО ВРЕМЕНИ НА ОСНОВЕ ИНТЕГРАЛЬНОГО МИКРОМЕХАНИЧЕСКОГО НАСТРАИВАЕМОГО КАМЕРТОННОГО РЕЗОНАТОРА

Изобретение относится к генераторам эталонного времени. Техническим результатом изобретения является создание компактного генератора эталонного времени, который полностью интегрирован на одной подложке и в котором резонатор имеет большую добротность, лучшую стабильность частоты и низкое энергопотребление. Генератор (1) эталонного времени содержит резонатор (4) и интегральную электронную схему (3), предназначенную для возбуждения колебаний резонатора, а также для съема сигнала, имеющего определенную частоту, с резонатора. Резонатор представляет собой интегральный микромеханический настраиваемый камертонный резонатор (4), установленный наверху подложки (2) и выполненный с возможностью колебаний в плоскости, параллельной подложке. Настраиваемый камертонный резонатор содержит элемент (5) основы, проходящий перпендикулярно подложке, свободную колебательную структуру (6), соединенную с элементом основы и включающую, по меньшей мере, одну пару параллельных ножек (7, 8) камертона и электрод (9) ...

Zeitbezug mit einem integrierten mikromechanischen Stimmgabelresonator

OSCILLATOR

... 1441192 Piezoelectric resonators DAINI SEIKOSHA KK 25 March 1974 [29 March 1973 (2)] 13098/74 Heading H1E A piezoelectric or electrostrictive laminar resonator is mounted by a layer 32 of adhesive on a pedestal 31 and is provided on one or both sides with electrodes 15, 26 which extend (e.g. at 20, 21, 22, 30) beyond the resonator. Leads are connected to the extensions of the electrodes. The resonator may be of the tuning-fork flexural type with two or three tines and Figs. 1, 2 show a typical electrode pattern. It may be made of quartz, barium titanate lithium niobate or lead zirconate. The ends of the tines 11, 12 may carry loading material 24, 25. The adhesive 32 may be raw rubber. The resonator is suitable for use in a timepiece.

Piezoelectric crystal resonator

An apparatus and method for exciting a piezoelectric crystal resonator has an electric oscillator connected to a double ended tuning fork piezoelectric crystal so that it flexurally vibrates in air at its mechanical resonant frequency. A novel electrode pattern connects the oscillator to the crystal such that changes in humidity do not affect the resonant frequency of the crystal. This arrangement is useful in measuring force, such as weight.

PIEZO-ELECTRIC RESONATOR

PIEZO-ELECTRIC TUNING FORK RESONATORS

PIEZO-ELECTRIC OSCILLATORS

... 1348501 Electric watches JUNGHANS GmbH Gebr 19 April 1971 [27 Feb 1970] 20629/71 Heading G3T [Also in Division H1] A Piezo-electric tuning fork, possibly of quartz, and intended for use in watches has its arms 11, 12, mechanically decoupled from its mounting 15 by narrow portion 13e and an elastic member 14. Member 14 may be T-shaped, in the form of a simple plate (41) Fig.4 (not shown) inserted into a slot in the base of the fork, or in the form of two parallel plates (30), (31) Fig. 3 (not shown). Narrow portion 13e also reduces the effect of leads 20, 21 on the resonant frequency. Member 14 is preferably more resilient than portion 13e and arranged in such a way that it is considerably more resilient than portion 13e in the direction of oscillation of the arms i.e. along Z, Fig.2. The resiliency of member 14 should normally be comparatively small in the direction X, Fig.2, perpendicular to the direction of oscillation. Electrodes 16-19 and 24 are formed by vapour deposition through a ...

OSCILLATOR

... 1465970 Mounting piezoeiectric resonators DAINI SEIKOSHA KK 19 Sept 1974 40965/74 Heading H1E Pedestals are used to support both a piezoelectric or electrostrictive resonator and its lead pins. As shown, an elongated, laminar resonator 10 is supported upon an insulative pedestal 31 and secured thereto by a layer 32 of adhesive, e.g. raw rubber. Electrodes 15, 26 on both surfaces have cantilever extensions 22, 30 the ends of which are supported upon further pedestals comprising pins 33, 34 insulative pillars 28, 29 and conductive caps 18, 19. The lower electrode 26 may be without extension 30 and the lead pin for this electrode may then extend through the pedestal 31 (see Fig. 3, not shown). In another modification (Fig. 5, not shown), the resonator bears electrodes on its upper surface only. A modification is described (Fig. 6, not shown) in which the cantilever extensions of the electrodes project to either side of the resonator. The resonator may be made of quartz, barium titanate, lithium ...

VIBRATOR DEVICE

... 1495416 Mounting piezoelectric resonators DAINI SEIKOSHA KK 13 March 1975 [15 March 1974] 10599/75 Heading H1W A resilient support for a vibrator (e.g. a quartz tuning-fork 1) comprises a spring having two U-shaped limbs 2c which extend between a mounting portion 2b attached to a rigid pedestal 4 and a supporting portion (or portions) 2e to which one end of the vibrator 1 is attached, the U-shaped limbs extending, in the direction of the unsupported end 1d of the vibrator, substantially beyond the centre of gravity G of the vibrator whereby the spring flexes by equal and opposite amounts on either side of the point G and the displacement of the end of the vibrator is minimized. The portions 2e may be joined by a bridge member (not shown). The U-shaped portions 2c may extend to the end 1d of the vibrator. The pedestal 4 is affixed to the casing (not shown) and is provided with guides 5 for leads 6.

METHOD OF MAKING A PIEZO ELECTRIC VIBRATOR

PIEZOELECTRIC RESONATOR, PIEZOELECTRIC DEVICE, MANUFACTURING PROCESS THE SAME, MOBILE PHONE AND ELECTRONIC EQUIPMENT WHICH A PIEZOELECTRIC DEVICE USING.

DOUBLE RESONANCE BAR FORCE TRANSDUCER WITH REDUCED LONGITUDINAL ONE PUMPING

QUARTZRESONATOR WITH VERY SMALL DIMENSIONS

RESONATOR TEMPERATURE SENSOR.

Frequenzstabilisierter Uhrenantrieb

VIBREUR POUR INSTRUMENT HOROMETRIQUE.

DISPOSITIF VIBREUR A CRISTAL DE QUARTZ POUR UNE PIECE D'HORLOGERIE.

PROCEDE DE FABRICATION D'UN RESONATEUR A QUARTZ PIEZOELECTRIQUE POUR PIECE D'HORLOGERIE ET RESONATEUR FABRIQUE SELON CE PROCEDE.

VIBREUR A DIAPASON AU TANTALATE DE LITHIUM, PROCEDE DE FABRICATION DE CELUI-CI.

OSZILLATOR.

UNITE DE RESONATEUR A QUARTZ POUR PIECE D'HORLOGERIE.

PIEZOELEKTRISCHER STIMMGABELSCHWINGER.

PROCEDE DE FABRICATION D'UN VIBREUR PIEZO-ELECTRIQUE.

VIBREUR A DIAPASON A CRISTAL DE QUARTZ.

Stimmgabelanordnung als Zeitnormal für zeithaltende Geräte

Ensemble constitué par une arme à feu au moins semi-automatique munie d'un frein de bouche et par une grenade.

Elektromechanischer Biegeschwinger

MIKRORESONATOR.

MANUFACTORING PROCESS Of a PIEZOELECTRIC VIBRATOR.

Time standard for timepiece

To achieve small dimensions, a stable and exact frequency and simple and inexpensive production, the vibrator (8) includes a structure which may be termed two-terminal. The geometrical arrangement of the electrodes (9, 10) on the two faces of the vibrator enable its branches to be vibrated in a direction parallel to their plane. The vibrator (8) is fixed to a support stud (17) made of an insulating material, such as ceramic. This stud is equipped with conductive coatings (18, 19) which are isolated from one another. Connection wires (20, 21) form the conductors of electrodes. ...

Quartz resonator unit for timepiece

To provide for the elastic suspension of the quartz 5 in the aneroid capsule 1, the invention envisages an arrangement which simultaneously provides for elastic suspension and conduction of the current. Two rods, such as the rod 2b, are embedded in the seal 2f surrounded by the ring 2a. The latter serves in the fixing of a support in the capsule 1. Two metal plates, such as 2d, are fixed to the seal and provide for the connection between the rods such as 2b and the elastic blades such as the blade 3. The part 3a of this blade is fixed to the plate 2d. Its part 3c is elastic and terminates in the leg 3e fixed to the base of the quartz. ...

Oscillator

Method of manufacturing a piezoelectric quartz resonator for a timepiece and resonator manufactured according to this method

The quartz resonator comprises a vibrator (12) and a mounting (10). The electrodes (13) formed on the faces of the vibrator and on the mounting (11) are gold films. The vibrator (12) and the mounting (10) are pressed with the aid of a tool (15) whilst the electrodes (13, 11) are heated to a temperature of below their melting point. This heating causes a diffusion of the metals of the electrodes so as to establish the mechanical link and electrical connection of the electrodes between the vibrator and the mounting. ...

Quartz crystal vibrator

In order to obtain small dimensions, a stable and exact frequency and simple and inexpensive manufacture, the vibrator (8) includes a structure which may be called @two-terminal@. The geometric arrangement of the electrodes (9, 10) on the two faces of the vibrator makes it possible to vibrate its legs in a direction parallel to their plane. The vibrator (8) is fixed to a support block (17) made of an insulating material, such as ceramic. This block is provided with conducting coverings (18, 19) which are isolated from one another. Connection wires (20, 21) form the electrode conductors. ...

Vibrator for horometric instrument

A vibrating element (15), in the form of tuning fork, made of a quartz crystal, is fixed adhesively to a support (18). Conducting wires (20, 21) are welded to electrodes (16, 17) with which the vibrating element is provided. In order to preclude the temperature differences which arise from causing fracture of the very thin vibrating element, the support (18) is formed of a material having a coefficient of thermal expansion at least approximately equal to that which the vibrating element (15) exhibits perpendicularly to the direction of the legs of the tuning fork shape. ...

VIBRATOR HAS TUNING FORK WITH THE LITHIUM TANTALATE, MANUFACTORING PROCESS OF THIS ONE.

VIBRATOR HAS TUNING FORK HAS QUARTZ CRYSTAL.

TUNING FORK PIEZOELECTRIC RESONATOR.

Microresonator of tuning fork configuration operating at its second overtone frequency

Piezoelectric resonator element and process for producing it.

METHOD OF ADJUSTING THE RESONATOR FREQUENCY AND TEMPERATURE-ADJUSTED FREQUENCY OBTAINED BY THE IMPLEMENTATION OF THIS METHOD.

MORE PIEZOKRISTALLSCHWINGER.

Piezoelectric oscillator

Mounting apparatus and method for piezoelectric tuning fork

Thermo-compensated ceramic resonator i.e. microelectromechanical system resonator, for use in timepiece, has body whose portion comprises electrically-conductive coatings, which change in Young's modulus as function of temperature

The resonator has a body comprising a web (8) formed by ceramics material, where the ceramics material comprises glass, metallic glass and art glass ceramic. A portion of the body comprises electrically-conductive coatings (2, 4), which change in Young's modulus as a function of temperature. The ceramic material of the web enables the resonator having frequency, which is varied according to the temperature equal to zero. The coatings form a barrier against moisture. The body comprises an attachment layer between the web and the coatings.

TUNING FORK RESONATOR

Thermocompensated resonator to the first and second orders.

Linvention se rapporte à un résonateur thermocompensé comportant un corps utilisé en déformation, lâme du corps étant formé à partir dune plaque coupée dans un cristal de quartz. Selon linvention, le corps comporte un revêtement déposé au moins partiellement contre lâme, langle () de coupe de la plaque et lépaisseur (d) du revêtement étant adaptés en fonction des coefficients thermoélastiques dudit revêtement afin dobtenir des coefficients thermiques aux premier et deuxième ordres (, ) sensiblement nuls. Linvention concerne le domaine des bases de temps et de fréquence.

Thermocompensated resonator e.g. inverted type turning fork resonator, to manufacture quartz electronic watch, has body with coating partially deposited against core, where cutting angle of plate and thickness of coating are provided

The resonator i.e. turning fork type resonator (1), has a deformation body e.g. base (3) and conical arms (5, 7), with a core that is formed from a plate cut in the characterized quartz crystal. The body includes a coating e.g. germanium dioxide, partially deposited against the core, where the cutting angle of the plate and the thickness of the coating are provided according to thermoelastic coefficients of the coating to obtain thermal coefficients at first and second null orders.

Silicon resonator tuning-fork.

Linvention concerne un résonateur en silicium (10) de type diapason dont la dérive linéaire de la fréquence en fonction de la température est compensée. Le résonateur comporte un socle (14) en silicium, une pluralité de bras parallèles (11, 12, 13) capables dentrer en vibration et des moyens dactuation (18, 21, 22); les bras comprenant une couche de silicium comprise entre deux couches d oxyde de silicium dont Iépaisseur, par rapport à celle de la couche de silicium, est telle quelle permet de compenser, au premier ordre, la dérive thermique du résonateur.

Piezoelectric resonator for electronic circuits.

L’invention concerne un résonateur piézo-électrique, qui comprend une base et au moins deux bras vibrants (3) s’étendant depuis la base, au moins une rainure (4a, 4b) étant formée sur une partie de la longueur des bras, sur des faces supérieure et/ou inférieure des bras. La profondeur de la rainure est inférieure à 30% ou supérieure à 50% de l’épaisseur totale de chaque bras.

Frequenzstabilisierter Uhrenantrieb

Resonator element, piezoelectric device, and electronic device

A resonator element which can achieve a reduction in size while maintaining vibration characteristics, and a piezoelectric device and an electronic device, are to be provided. A quartz crystal resonator element has a base portion, a pair of arm portions extending from the base portion as a root, and a cut-out portion formed by reducing the width of the base portion in the width direction from each side of the arm portions. The root has a first root portion positioned on a side where the arm portions are opposed to each other, and a second root portion positioned on a side where the arm portions are not opposed to each other, and a relationship between a length A from the first root portion to the second root portion and a length B from the first root portion to an inner end portion of the cut-out portion is A>=B.

PIEZOELECTRIC RESONATOR

PROCEEDED Of ADJUSTMENT OF the FREQUENCY Of a RESONATOR AND RESONATOR FREQUENCY AJUSTEE OBTAINED BY the IMPLEMENTATION OF THIS PROCESS HAS

RESONATOR HAS QUARTZ OF THE TUNING FORK TYPE

VIBRATOR HAS QUARTZ CRYSTAL

PIEZOELECTRIC DEVICE, PORTABLE TELEPHONE AND ELECTRONIC EQUIPMENT USING THE SAME

VIBRATING REED, VIBRATOR, OSCILLATOR, AND ELETRONIC APPARATUS

Improved micromechanical resonator

The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to he substantially within the joint projection defined by the dimensions of said first and said second clement.

Angular velocity sensor and method of fabrication thereof

The present invention provides an angular velocity sensor and a method of fabrication thereof that facilitates the work of affixing a tuning-fork-type crystal element and adjusting the same, preventing waste caused by scrapping defective products and also encouraging miniaturization of components. The angular velocity sensor comprises: a tuning-fork-type crystal element which is provided with a drive electrode for exciting the vibration of the tuning fork and a sensor electrode for detecting an electrical charge that is generated in response to an angular velocity that is being detected; an independent pedestal to which a main surface of a tuning-fork base portion of the tuning-fork-type crystal element is previously affixed to form an integrated unit; a main package for surface mounting, in which the tuning-fork-type crystal element is hermetically sealed and which has a cavity with an inner base surface to which the pedestal integrated with the tuning-fork-type crystal element is affixed ...

Vibrating piece, vibrator, oscillator, and electronic equipment

A vibrating piece comprises a base and vibrating arms formed protruding from the base, wherein a groove is formed on at least one of the front side and rear side of the vibrating arms, and wherein notches are formed in the base.

Surface acoustic wave device

A tuning-fork-type piezoelectric resonator element comprises an element body (26) including base (22) and resonating arms (24) extending from one end of base (22), a support (28) including a short leg (30) connected to the base (22) and formed along another end of the base (22), and a long leg (32) extending from one end of the short leg (30) along a longitudinal direction of the piezoelectric resonator element body (26), and a mount is provided at the tip of the long leg (30) and at the short side.

TUNING FORK TYPE CRYSTAL RESONATOR

PURPOSE: To improve reliability by providing dividing grooves - where an electric field is not applied - near the center of the surface and the reverse of tuning fork arms and reducing the tip amplitude of tuning fork arms and providing a short-circuit electrode at the tip of tuning fork arms. COPYRIGHT: (C)1978,JPO&Japio ...

Resonator element, resonator, and oscillator

A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.

Method of piezoelectric vibrating piece, wafer, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece

The present invention provides a novel method of producing piezoelectric vibration pieces in which a plurality of piezoelectric vibration pieces are formed at once from a wafer, using a plurality of photoresist processes. The wafer is marked with wafer marks each unique to a different one of photoresist masks to prevent a wrong use of the photoresist masks during the photoresist processes.

Method for mounting a piezoelectric resonator in a case and packaged piezoelectric resonator

The invention concerns a method for mounting a piezoelectric resonator ( 40 ) inside a case ( 80 ) by ultrasonic bonding of the piezoelectric resonator to a base part of the case. The invention also concerns a small-sized packaged piezoelectric resonator, in which the piezoelectric resonator is ultrasonically bonded inside a base part of the package.

Mounting structure of electronic component and method of manufacturing electronic component

A mounting structure includes: an electronic component including: a functional element having a predetermined function; a first resin protrusion section having a surface covered by a covering film including a conductive section electrically connected to the functional element; and a second resin protrusion section that is disposed inside an area surrounded by the first resin protrusion section, and has adhesiveness at least on a surface of the second resin protrusion section, and a base member having a connection electrode and adapted to mount the electronic component. In the structure, the second resin protrusion section mounts the electronic component on the base member in a condition in which the conductive section of the covering film has conductive contact with the connection electrode due to elastic deformation of the first resin protrusion section.

Piezoelectric resonating device, manufacturing method thereof, piezoelectric resonator, and piezoelectric oscillator

A piezoelectric substrate includes rod-shaped resonating arms; a base portion that connects one set of end portions of the respective resonating arms; weight portions which are formed on the other end portions of the respective resonating arms and which have a width larger than that of the respective resonating arms; and groove portions which are formed on each of the front and rear surfaces along the center line of vibration of the respective resonating arms. The piezoelectric substrate also includes excitation electrodes which are formed on each of the front and rear surfaces of the respective resonating arms including the inner side of the respective groove portions. A plurality of frequency adjustment slits extending in a straight line form along the longitudinal direction of the respective resonating arms are formed on the respective weight portions so as to penetrate through the front and rear surfaces of the weight portions.

Method of manufacturing piezoelectric vibrating reed, piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic apparatus, and radio timepiece

A photoresist film forming process is performed by the use of a forming apparatus that has a sprayer which generates an air flow toward metal film on a wafer to spray the photoresist material, and a plurality of spacers which is disposed between a work stage and the wafer.

Method of manufacturing piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic apparatus, and radio timepiece

A method of manufacturing a piezoelectric vibrating reed includes an electrode mark group detecting process of detecting a wafer side mark group and an electrode mask side mark group, and an electrode mask placing process of placing the electrode film mask on the wafer while aligning the wafer side mark group and the electrode mask side mark group, wherein the wafer side mark group and the electrode mask side mark group are constituted by marks having sizes different from each other, the smallest wafer side mark and the electrode mask side mark are used for the alignment of the mutual marks, respectively, and the wafer side mark and the electrode mask side mark except for the smallest wafer side mark and the electrode mask side mark are used in the electrode mark group detecting process.

Anodic bonding apparatus, method of manufacturing package, piezoelectric vibrator, oscillator, electronic apparatus, and radio timepiece

An anodic bonding apparatus includes a first intermediate member that is disposed between an upper surface (an outer surface) of a lead substrate wafer and a first heater, has heat conductivity, and can be flexible; and a second intermediate member that is disposed between a lower surface (an outer surface) of a base substrate wafer and a second heater, has conductivity and heat conductivity, and can be flexible, wherein the first intermediate member is formed so that a central portion thereof bulges toward the base substrate wafer further than a periphery portion thereof, and the second intermediate member is formed so that a central portion thereof bulges toward the lead substrate wafer further than a periphery portion thereof, and, the first intermediate member and the second intermediate member are evenly deformed.

Spin chuck and apparatus having spin chuck for manufacturing piezoelectric resonator piece

A spin chuck rotating a substrate utilizing a centrifugal force while holding one surface of the substrate with a substrate holding section to apply a film material to another surface of the substrate. The substrate holding section includes a tapered peripheral part having a peripheral edge where a substrate holding surface and a back surface thereof are connected. The other surface of the substrate and the back surface of the substrate holding section smoothly continue with each other with the holding surface of the substrate holding section kept in contact with the other surface of the substrate.

Piezoelectric vibrating reed, piezoelectric vibrating reed manufacturing method, piezoelectric vibrator, oscillator, electronic device and radio timepiece

An electrode forming step of forming a pair of electrodes by patterning an electrode film on an outer surface of a piezoelectric plate includes: an electrode film forming step of forming the electrode film; a photoresist film forming step of forming a photoresist film on the electrode film; a first exposure step of exposing the photoresist film through a mask; and a second exposure step of further exposing the photoresist film through a correction mask on which a second opening is disposed at a position overlapping with a part of the first opening. An opening width of the second opening corresponding to a clearance between the pair of electrodes is equal to or less than an opening width of the first opening corresponding to the clearance.

Piezoelectric device and manufacturing method of piezoelectric device

A piezoelectric device, in which one of a first plate, a second plate, and an adhesive agent is colored for confirming a bonding status of the adhesive agent, and a manufacturing method thereof, are provided. A piezoelectric device includes a piezoelectric vibrating piece that vibrates by applying a voltage; a first plate and a second plate formed of glass and seal the piezoelectric vibrating piece; and an adhesive agent which bonds the first plate with the second plate, wherein one of the first plate, the second plate, and the adhesive agent is colored.

Flexural vibration piece and oscillator using the same

A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.

Piezoelectric vibration device and oscillator

A piezoelectric vibration device is provided that can reduce the stress and strain that transmit through a base substrate. The piezoelectric vibration device includes a piezoelectric vibrating reed that oscillates in an AT mode, and that includes excitation electrodes respectively formed on the front and back surfaces of the reed. One of the excitation electrodes is connected to the base substrate via a metal bump on a center line passing across the shorter sides of the piezoelectric vibrating reed and in the vicinity of one of the shorter sides of the piezoelectric vibrating reed. The other excitation electrode is connected to the base substrate via a metal bump on the same side as the above shorter side, and in the vicinity of a portion where the shorter side of the piezoelectric vibrating reed crosses one of the longer sides of the piezoelectric vibrating reed.

Piezoelectric vibration reed, piezoelectric vibrator, oscillator, electronic instrument, and radio timepiece

A piezoelectric vibration reed includes a pair of vibrating arm portions arranged in parallel to each other and a base portion. The base portion is integrally coupled to proximal ends of the pair of the vibrating arm portions in a longitudinal direction that the vibrating arm portions extend. The base portion includes a connecting portion, a mount portion, and a narrow portion between the connecting portion and the mount portion. The base portion further includes a pair of notched portions notched respectively inwardly from both sides of the base portion in the width direction and ribs projecting outwardly in the width direction of the base portion and arranged in the interiors of the notched portions.

UNIT, OSCILLATOR AND ELECTRONIC APPARATUS

In a unit, the unit comprising a quartz crystal resonator having a base portion, and first and second vibrational arms, each of the first and second vibrational arms having a length and opposite main surfaces each including a central linear portion, at least one groove being formed in the central linear portion of at least one of the opposite main surfaces of each of the first and second vibrational arms so that the at least one groove is formed continuously in the central linear portion along the length of the corresponding one of the first and second vibrational arms, a length of the base portion being less than 0.5 mm and an overall length of the quartz crystal resonator being within a range of 1.02 mm to 1.95 mm. 1. A unit comprising:a quartz crystal resonator having a base portion, and first and second vibrational arms connected to the base portion, each of the first and second vibrational arms having a length and opposite main surfaces each including a central linear portion;wherein at least one groove is formed in the central linear portion of at least one of the opposite main surfaces of each of the first and second vibrational arms so that the at least one groove is formed continuously in the central linear portion along the length of the corresponding one of the first and second vibrational arms; andwherein a length of the base portion is less than 0.5 mm and an overall length of the quartz crystal resonator is within a range of 1.02 mm to 1.95 mm.2. A unit according to ; wherein each of the first and second vibrational arms comprises a first vibrational portion having a first width and a second vibrational portion having a second width greater than the first width claim 1 , the first vibrational portion of each of the first and second vibrational arms having a first main surface and a second main surface opposite the first main surface claim 1 , each of the first and second main surfaces of the first vibrational portion of each of the first and second ...

Piezoelectric vibrator and method of manufacturing the same

There is provided a piezoelectric vibrator including: a base portion; a pair of arm portions extending from the base portion in parallel to each other; first recess portions formed in a length direction in upper surfaces of the pair of arm portions; and second recess portions formed in the length direction in lower surfaces of the pair of arm portions, wherein in a cross section of the pair of arm portions in a length-thickness direction, the first recess portions and the second recess portions may be disposed to be offset and spaced apart from one another by a predetermined interval in a width direction of the pair of arm portions. A piezoelectric vibrator having low resistance and high quality coefficient can be implemented, and thus, a stable frequency can be provided.

TUNING FORK QUARTZ CRYSTAL RESONATOR

A tuning fork quartz crystal resonator includes a base, a first resonating arm, and a second resonating arm. The base has a generally planar fifth main surface and a generally planar sixth main surface opposite to each other, and has a fifth side surface and a sixth side surface opposite to each other. The first resonating arm is connecting to one side of the base. The second resonating arm is connecting to the same side of the base. A concave of continuous curved surface is formed one each on the fifth side surface and the sixth side surface of the base respectively. 1. A tuning fork quartz crystal resonator , comprising:a base having a generally planar fifth main surface and a generally planar sixth main surface opposite to each other, and a fifth side surface and a sixth side surface opposite to each other;a first resonating arm connecting to one side of the base; anda second resonating arm connecting to the same side of the base;wherein a concave of continuous curved surface is formed one each on the fifth side surface and the sixth side surface of the base respectively.2. The tuning fork quartz crystal resonator according to claim 1 , wherein the concave comprises a turning segment and two connecting segments claim 1 , the turning segment is connected between the two connecting segments claim 1 , and the rate of change of slopes of the two connecting segments are substantially different.3. The tuning fork quartz crystal resonator according to claim 1 , wherein a recess is formed on the sixth main surface claim 1 , the recess is sized and configured such that a first width near the first resonating arm and the second resonating arm is greater than a second width away from the first resonating arm and the second resonating arm.4. The tuning fork quartz crystal resonator according to claim 1 , wherein a recess is formed on the fifth main surface claim 1 , the recess is sized and configured such that a first width near the first resonating arm and the second ...

Vibrator element, vibrator, oscillator, and electronic device

A vibrator element includes: a base having a mounting surface; a vibrating arm which is extended from the base and has a first surface and a second surface that faces the first surface and is positioned on the mounting surface side, and which performs flexural vibration in a direction normal to the first and second surfaces; and a laminated structure which is provided on at least one of the first and second surfaces of the vibrating arm, and which includes at least a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, in which the vibrating arm is warped toward the mounting surface side.

Piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece

Provided are a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece capable of preventing lowering of an electrical characteristic of a routing electrode during the frequency adjustment with respect to a piezoelectric vibrator whose frequency can be adjusted by irradiating a laser beam onto a weight metal film formed on a distal end of a vibrating arm portion. In a piezoelectric vibrator, a routing electrode is arranged in an offset manner toward one side with respect to a center line of a base substrate in the lateral width direction, and a piezoelectric vibrating piece is arranged in an offset manner toward a side opposite to the routing electrode with respect to the center line of the base substrate in the lateral direction.

Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece

Mounting electrodes are formed in a state of being separated from excitation electrodes on one main surface of a base portion, and the excitation electrodes are formed on another main surface of a piezoelectric plate and includes base portion electrodes which are connected to the excitation electrodes and conducting portions which electrically connect the mounting electrodes and the base portion electrodes in a thickness direction of the piezoelectric plate.

FLEXURAL RESONATOR ELEMENT, RESONATOR, OSCILLATOR, AND ELECTRONIC DEVICE

A crystal resonator element include a pair of resonating arms extending from a base, the resonating arms includes a groove, a slope portion is formed in a connection portion of the resonating arms to the base so that a distance between the groove and the outer edge of each of the resonating arms increases as it approaches the base from the resonating arms, and a non-electrode region which extends over a range of areas from a connection portion connected to a first side surface formed along the longitudinal direction of the groove and a connection portion connected to a second side surface facing the first side surface with a bottom portion disposed there between and in which excitation electrodes are not formed is provided in the groove in at least a part of the bottom portion positioned in the slope portion. 1. An oscillating piece comprising:a base; anda resonating arm that extends from the base along a first direction and has a groove along the first direction on at least one of two principal surfaces that are in a front and back relationship to each other, whereinan excitation electrode is disposed in the groove,the resonating arm includes a connection portion that is connected to the base,a part of the groove is disposed in the connection portion, andthe part of the groove includes a non-electrode region in which the excitation electrode is not formed.2. The oscillating piece according to claim 1 ,wherein a width of the connection portion along a second direction crossing the first direction between an outer edge of the groove and an outer edge of the resonating arm increases as it approaches the base from a tip end of the resonating arm.3. The oscillating piece according to claim 1 , whereinthe principal surfaces having the groove sandwich an opening portion of the groove in plan view and include a first principal surface and a second principal surface, the first principal surface being aligned along the second direction crossing the first direction,an ...

Base substrate, electronic device, and method of manufacturing base substrate

Abase substrate includes an insulator board comprising through holes penetrating between two opposed principal surfaces, penetrating electrodes provided within the through holes, and intermediate layers sandwiched between inner surfaces of the through holes and the penetrating electrodes and having surfaces with smaller concavities and convexities than those of the inner surfaces at the penetrating electrode sides.

Tuning bar piezoelectric vibrator and tuning fork piezoelectric vibrator

A tuning bar piezoelectric vibrator includes first and second leg portions defined by a tuning bar piezoelectric vibrator, layers of first and second inner driver electrodes arranged as inner driver electrodes between first and second piezoelectric layers that are polarized in opposite directions of a thickness direction, a first outer electrode and a second outer electrode arranged to face the first and the second inner driver electrodes with the piezoelectric layers in between, respectively, and first and second vibrator portions in which the inner driver electrodes are used as driver electrodes.

Piezoelectric vibrating strip, piezoelectric vibrator, oscillator, electronic device, and radio timepiece

A piezoelectric vibrating strip, a piezoelectric vibrator, an oscillator, an electronic device, and a radio timepiece, in which the CI value can be reduced further while preventing a vibrating arm portion from vibrating in a second warp mode. The piezoelectric vibrating strip includes a plurality of parallel vibrating arm portions in a width direction, a base portion couples base ends of the vibrating arm portions, and a groove portion resides in at least one of a main face and a back face of the vibrating arm portion and extends from proximate the base end toward a free end of the vibrating arm portion. A break portion divides the groove portion and suppresses warp deformation of the vibrating arm portion in a second warp mode between a vibrating node portion of the vibrating arm portion proximate the base end and a vibrating node portion proximate the free end.

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, AND ELECTRONIC APPARATUS

A resonator element includes a base section, a pair of vibrating arms projecting from the base section in a +Y-axis direction, and arranged in an X-axis direction intersecting with the Y-axis direction with a distance in a plan view, and a support arm disposed between the pair of vibrating arms and projecting from the base section in the +Y-axis direction. The base section includes a first shrunk-width portion disposed on an opposite side to the side on which the support arm projects taking the center of the base section as a boundary, and within a range of the distance, and having a length in the X-axis direction gradually decreasing with a distance from the support arm in a plan view. 1. A resonator element comprising:a base section;a pair of vibrating arms projecting from the base section on a same side, and arranged with a distance in a direction intersecting with a direction of the projection in a plan view; anda support arm disposed between the pair of vibrating arms, and projecting from the base section on the same side as the pair of vibrating arms,wherein the base section includes a first shrunk-width portion disposed on an opposite side to the side on which the support arm projects taking a center of the base section as a boundary, and having a width in the intersecting direction gradually decreasing with a distance from the support arm in a plan view.2. The resonator element according to claim 1 , whereina contour of the first shrunk-width portion has a symmetric shape having a pair of tilted portions each having a linear shape about a line along a direction perpendicular to the intersecting direction in a plan view.3. The resonator element according to claim 2 , whereinthe first shrunk-width portion is provided with an angle formed by the pair of tilted portions used as sides.4. The resonator element according to claim 1 , whereina contour of the first shrunk-width portion has an arc-like symmetric shape about a line along a direction perpendicular to ...

TUNING FORK AND ELECTRONIC DEVICE USING THE SAME

A tuning fork may include a vibrating part in which a plurality of vibrating members having vibrating heads which are formed at free ends of tines are connected at both sides of a connection member, and a support part in which the vibrating part is coupled with the connection member. The vibrating part may include two tines formed in parallel with each other and the connection member formed in a direction to the free end of the tines from fixed ends of the tines, being spaced apart from each other by a predetermined distance, and connecting between the two tines. 1. A tuning fork , comprising:a vibrating part comprising a plurality of vibrating members having vibrating heads which are formed at free ends of tines, the vibrating members connected at both sides of a connection member; anda support part coupled with the connection member.2. The tuning fork according to claim 1 , wherein the vibrating part includes:the parallel tines having the free ends and fixed ends; andthe connection member adjacently positioned to the fixed ends of the tines and connecting between the tines.3. The tuning fork according to claim 1 , wherein the vibrating part has an H shape.4. The tuning fork according to claim 1 , wherein the support part includes a base claim 1 , a central member connecting a central portion of the base to a central portion of the connection member claim 1 , and support arms formed at both ends of the base in parallel with the tines.5. The tuning fork according to claim 1 , wherein a distance from the fixed ends of the tines to the connection member is 0.02 to 0.2 times of a length of the vibrating members.6. The tuning fork according to claim 1 , wherein a width of the connection member is 0.5 to 1.5 times of a width of the tines.7. The tuning fork according to claim 1 , wherein a curved chamfer is formed between the connection member and the tines.8. The tuning fork according to claim 7 , wherein the chamfer is formed at an upper portion of the connection member ...

TUNING FORK TYPE PIEZOELECTRIC VIBRATION PIECE AND TUNING FORK TYPE PIEZOELECTRIC VIBRATOR

A tuning fork type piezoelectric vibration piece includes a base portion in which a piezoelectric vibration substrate has a connection area with an external element, and a pair of leg portions projecting from a first end face of the base portion. The pair of leg portions has vibrating portions equipped with drive electrodes, wide weight portions formed at tip ends of the vibrating portions, and connecting portions between the vibrating portions and the weight portions. The connecting portions have widening sections whose width increases exponentially from the vibrating portions to the weight portions. The length of the widening sections is greater than their width. The weight portions have constant-width parts whose width is fixed from their connecting positions with the connecting portions. The weight portions are free of drive electrodes. 1. A tuning fork type piezoelectric vibration piece comprising a piezoelectric vibration substrate which has a base portion and a pair of leg portions projecting side by side from a first end face of the base portion , wherein a direction in which the leg portions project is taken as a longitudinal direction and a direction in which the leg portions are arranged side by side is taken as a widthwise direction ,whereineach of the pair of leg portions comprises: a vibrating portion having a groove extending in the longitudinal direction, and a drive electrode; a weight portion integrally formed at a tip end side of the vibrating portion and including a part whose width is greater than that of the vibrating portion; and a connecting portion between the vibrating portion and the weight portion,the drive electrode in the vibrating portion comprises an inner electrode formed on an inner surface of the groove, and a side electrode formed on a side surface of the leg portion, the side electrode being opposed to the inner electrode in the widthwise direction,the connecting portion comprises a widening section whose width increases ...

Frequency adjustment method of vibrator element, vibrator element, vibrator, electronic device, and vehicle

A frequency adjustment method of a vibrator element includes preparing a vibrator element that has a vibrating arm, a first weight placed on one principal surface of the vibrating arm, and a second weight placed on the other principal surface of the vibrating arm, in which the first weight has a non-overlapping region which does not overlap the second weight in a plan view in a normal direction of the principal surface, preparing a substrate including a wiring portion, and fixing the vibrator element to the substrate by causing the other principal surface side of the vibrator element to face the substrate side, and irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm.

Vibrating Element, Vibrator, Electronic Device, And Vehicle

A vibrating element includes a base and a first vibrating arm and a second vibrating arm extending from the base. The first vibrating arm includes a first arm and a first weight. The second vibrating arm includes a second arm and a second weight. In the vibrating element, 0.952<M2/M1<1.000, wherein M1 is mass on the second vibrating arm side of the first weight with respect to a first center line of the first arm and mass on the first vibrating arm side of the second weight with respect to a second center line of the second arm and M2 is mass on a side opposite to the second vibrating arm of the first weight with respect to the first center line and mass on a side opposite to the first vibrating arm of the second weight with respect to the second center line.

TUNING FORK-TYPE PIEZOELECTRIC VIBRATION PIECE AND TUNING FORK-TYPE PIEZOELECTRIC VIBRATOR USING THE VIBRATION PIECE

Main surface electrodes formed on main surfaces on front and back sides of vibrating arms are electrically coupled via through electrodes formed in a stem portion so as to penetrate through front and back surfaces thereof. One of the main surface electrodes of the vibrating arm is electrically coupled to side surface electrodes through a routing wiring formed by way of a crotch part between roots of the vibrating arms, and the one of the main surface electrodes is further electrically coupled to the other one of the main surface electrodes through the side surface electrodes. 1. A tuning fork-type piezoelectric vibration piece , comprising:a stem portion; andfirst and second vibrating arms formed so as to extend in a pair in a direction from one end side of the stem portion,one of main surface electrodes formed on main surfaces on front and back sides of the first vibrating arm being coupled to another one of the main surface electrodes formed on the main surfaces of the first vibrating arm through one of through electrodes that are formed in a pair in the stem portion in a direction of thickness thereof,the one of the main surface electrodes of the first vibrating arm being coupled to side surface electrodes that are formed in a pair, respectively, on an outer side surface and an inner side surface of the second vibrating arm through a routing wiring formed by way of a crotch part between roots of the first and second vibrating arms extending from the stem portion,one of main surface electrodes formed on main surfaces on front and back sides of the second vibrating arm being coupled to another one of the main surface electrodes of the second vibrating arm through another one of the through electrodes, the one of the main surface electrodes of the second vibrating arm being formed on the main surface on one of the front and back sides opposite to the front or back side where the one of the main surface electrodes of the first vibrating arm is formed,the one of the ...

ANGULAR VELOCITY SENSOR

An angular velocity sensor includes a first substrate having first and second surfaces, a vibrating member disposed on the first substrate and including a drive piece capable of vibrating along the first substrate, a second substrate disposed on the first surface side, a first drive piece control electrode, a first drive piece auxiliary electrode, and a first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode. The first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control electrode and the first drive piece auxiliary electrode, the voltage to be applied to the first drive piece auxiliary electrode to maintain a constant distance between the first drive piece control electrode and the first drive piece auxiliary electrode. 1. An angular velocity sensor comprising:a first substrate including a first surface and a second surface, the second surface being disposed opposite to the first surface;a vibrating member disposed on the first substrate and including a drive piece, wherein the drive piece is capable of vibrating in a plane direction of the first substrate, and the vibrating member detects an angular velocity applied to a plane of the first substrate during a vibration of the drive piece;a second substrate disposed on a side of the first surface of the first substrate;a first drive piece control electrode disposed on a portion of the drive piece close to the second substrate;a first drive piece auxiliary electrode disposed on a portion of the second substrate facing a displaceable region of the drive piece, wherein a capacitance is generated between the first drive piece auxiliary electrode and the first drive piece control electrode; anda first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode,wherein the first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control ...

SEMICONDUCTOR DEVICE AND ELECTRONIC TIMEPIECE

A semiconductor device includes: a secondary battery; a constant voltage generation circuit that is driven in accordance with the secondary battery; a control logic circuit that is driven with a constant voltage generated by the constant voltage generation circuit and controls the constant voltage generation circuit; and a starting circuit that outputs a control signal for operating the constant voltage generation circuit in correspondence to an initialization signal input from outside in a case in which the constant voltage generation circuit is stopped. 1. A semiconductor device comprising:a constant voltage generation circuit that is driven in accordance with a power supply;a constant voltage control circuit that is driven with a constant voltage generated by the constant voltage generation circuit and controls the constant voltage generation circuit; anda starting circuit that outputs a control signal for operating the constant voltage generation circuit in correspondence to an initialization signal input from outside in a case in which the constant voltage generation circuit is stopped.2. The semiconductor device according to claim 1 , further comprising:an oscillation circuit that is driven with the constant voltage generated by the constant voltage generation circuit,wherein the constant voltage generation circuit is configured to be able to switch between a first voltage and a second voltage higher than the first voltage to generate the voltage as the constant voltage, generates the second voltage when the control signal is input from the starting circuit, and switches the second voltage to the first voltage after a predetermined time passes.3. An electronic timepiece comprising:{'claim-ref': {'@idref': 'CLM-00001', 'claim 1'}, 'the semiconductor device according to .'}4. An electronic timepiece comprising:{'claim-ref': {'@idref': 'CLM-00002', 'claim 2'}, 'the semiconductor device according to .'}5. The electronic timepiece according to claim 3 , further ...

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT

In a resonator element, when a width of each of arm portions of vibrating arms along an X-axis direction is set to W1, a width of each of two portions with a groove interposed therebetween, along the X-axis direction, in a principal surface of the vibrating arm is set to W3, and 2×W3/W1 is set to η, the relation of 14.2%<η<100% is satisfied. 1. A resonator element comprising:a vibrating arm that has a fixed end and a free end which extend along a first direction, a weight portion that is disposed on the free end of the vibrating arm, and', 'an arm portion that is disposed on the fixed end of the vibrating arm,, 'the vibrating arm includinga groove disposed in the vibrating arm along the first direction in at least one principal surface of a first principal surface and a second principal surface of the vibrating arm which serve as front and back sides of the vibrating arm, respectively, andin the principal surface provided with the groove, when a width of the arm portion along a second direction crossing the first direction is set to W1, a width, along the second direction, of a portion interposed between a side surface of the arm portion, which connects the first principal surface and the second principal surface, and an outer edge of the groove which is aligned with the side surface extending along the second direction is set to W3, and 2×W3/W1 is set to η, a relation of 14.2%<η<100% is satisfied.2. The resonator element according to claim 1 , wherein a relation of 20%≦η≦50% is satisfied.3. The resonator element according to claim 2 , wherein a relation of 30%≦η≦40% is satisfied.4. The resonator element according to claim 1 , wherein the weight portion has a width along the second direction which is larger than that of the arm portion.5. The resonator element according to claim 4 , wherein when a width of the weight portion along the second direction is set to W2 claim 4 , a relation of 1.43≦W2/W1≦1.79 is satisfied.6. The resonator element according to claim 1 , ...

QUARTZ CRYSTAL UNIT, QUARTZ CRYSTAL OSCILLATOR AND ELECTRONIC APPARATUS

In a quartz crystal unit, the unit comprising a case, a quartz crystal tuning fork resonator and a lid, the resonator having a tuning fork base, and first and second tuning fork tines, each of the first and second tuning fork tines having a first side surface and a second side surface opposite the first side surface, the first side surface of the first tuning fork tine confronting the second side surface of the second tuning fork tine; at least one groove having a plurality of surfaces including a first surface being formed in at least one of first and second main surfaces of each of the first and second tuning fork tines so that only the first surface of the at least one groove is directly opposite the first side surface of the corresponding tuning fork tine and a width of the at least one groove is greater than or equal to a distance in the width direction of the at least one groove measured from an outer edge of the at least one groove to an outer edge of the corresponding one of the first and second tuning fork tines and less than 0.07 mm. 1. A quartz crystal unit comprising:a case;a quartz crystal tuning fork resonator;and a lid;wherein the quartz crystal tuning fork resonator has a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines connected to the quartz crystal tuning fork base, each of the first and second quartz crystal tuning fork tines having a first main surface and a second main surface opposite the first main surface and a first side surface and a second side surface opposite the first side surface, the first side surface of the first quartz crystal tuning fork tine confronting the second side surface of the second quartz crystal tuning fork tine; andwherein at least one groove having a plurality of surfaces including a first surface is formed in at least one of the first and second main surfaces of each of the first and second quartz crystal tuning fork tines so that only the first surface of the surfaces of the at ...

Resonator element, resonator, oscillator, electronic apparatus, and mobile object

A resonator element includes a substrate region sandwiched by first and second excitation electrodes. The region is located within a quadrangle having four 90° corners, a pair of first sides along a thickness-shear vibration direction, and a pair of second sides perpendicular to the vibration direction. The region includes a side or a circular arc in contact with each of the first and second sides, and an outer edge recessed from at least two corners of the quadrangle in a direction intersecting the vibration direction. Further, assuming a maximum length of the region along the vibration direction is Lx, and a length of the outer edge along the vibration direction is lx, 13.7%≦(lx/Lx)≦46.0%.

RESONATOR ELEMENT, MANUFACTURING METHOD FOR RESONATOR ELEMENT, RESONATOR, ELECTRONIC DEVICE, AND MOVING OBJECT

To realize a resonator element capable of obtaining sufficient electric field efficiency and securing a satisfactory element characteristic, a resonator element of the invention includes a base section and a pair of resonating arms extending from the base section. The resonator element includes recesses having a curved surface shape respectively on two side surfaces (surfaces crossing a direction in which the resonating arms resonate) of the resonating arm. 1. A resonator element comprising a resonating arm , whereinrecesses having a curved surface shape are formed respectively on two surfaces, which are in a front-back relation each other, crossing a direction in which the resonating arm performs bending resonation.2. The resonator element according to claim 1 , wherein the recesses have symmetry with respect to a plane crossing the resonating direction of the bending resonation.3. The resonator element according to claim 1 , wherein the recesses include curved surfaces.4. The resonator element according to claim 3 , wherein claim 3 , in the recesses of the surfaces crossing the direction in which the resonating arm resonates claim 3 , a plurality of surfaces having curvatures different from one another are provided.5. The resonator element according to claim 1 , wherein quartz crystal is included in a material of the resonating arm.6. The resonator element according to claim 3 , wherein quartz crystal is included in a material of the resonating arm.7. The resonator element according to claim 4 , wherein quartz crystal is included in a material of the resonating arm.8. The resonator element according to claim 1 , wherein the resonator element is formed in a tuning fork shape.9. The resonator element according to claim 3 , wherein the resonator element is formed in a tuning fork shape.10. The resonator element according to claim 4 , wherein the resonator element is formed in a tuning fork shape.11. A manufacturing method for a resonator element comprising:forming a ...

PIEZOELECTRIC VIBRATING STRIP, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO TIMEPIECE

A piezoelectric vibrating strip includes a pair of vibrating arm portions in parallel with a central axis therebetween, and a base portion integrally cantilevering base end portions of the pair of vibrating arm portions in a length direction. Each of the pair of vibrating arm portions has a first groove portion and a second groove portion in a main face, the first groove portion being placed closer to a leading end portion in the length direction of the vibrating arm portions and having a groove width along a width direction orthogonal to the length direction and a thickness direction of the vibrating arm portion. The second groove portion is closer to the base end portion than the first groove portion and has a groove width along the width direction. The groove width ratio of the second groove portion to the first groove portion is between 0.4 and 1.0. 1. A piezoelectric vibrating strip comprising:a pair of vibrating arm portions in parallel and extending parallel to a central axis therebetween; anda base portion integrally cantilevering base end portions of the pair of vibrating arm portions in a length direction,wherein each of the pair of vibrating arm portions has a first groove portion and a second groove portion in a main face thereof,{'b': '1', 'the first groove portion closer to a leading end portion in the length direction of the vibrating arm portion and having a groove width W along a width direction orthogonal to the length direction and a thickness direction of the vibrating arm portion,'}{'b': 2', '2', '1, 'the second groove portion is closer to the base end portion than the first groove portion and has a groove width W along the width direction, where a groove width ratio W/W is between 0.4 and 1.0.'}221. The piezoelectric vibrating strip of claim 1 , wherein the groove width W of the second groove portion is smaller than the groove width W of the first groove portion.32002. The piezoelectric vibrating strip of claim 1 , wherein a ratio of a groove ...

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

A resonator element includes a base portion which includes one end portion and the other end portion opposing the one end portion in a plan view, and a pair of vibrating arms which extend along a first direction from the one end portion of the base portion. The base portion includes a reduced width portion in which a width is gradually decreased along a second direction intersecting the first direction toward a direction side which is separated from the base portion along the first direction, in at least one of the one end portion and the other end portion, and a fixing portion is provided between the one end portion and the other end portion of the base portion. 1. A resonator element comprising:a base portion which includes one end portion and the other end portion opposing the one end portion in a plan view; anda pair of vibrating arms which extend along a first direction from the one end portion of the base portion,wherein the base portion includes a reduced width portion in which a width of the base portion in a second direction intersecting the first direction is gradually decreased along the first direction, in at least one of the one end portion and the other end portion, anda fixing portion for fixing the vibrator element is provided between the one end portion and the other end portion of the base portion.2. The resonator element according to claim 1 ,wherein an outer edge of the reduced width portion passes through a center between the pair of vibrating arms in a plan view, and has a symmetrical shape with respect to a virtual center line along the first direction.3. The resonator element according to claim 1 ,wherein the outer edge of the reduced width portion has a curved shape.4. The resonator element according to claim 1 ,wherein the outer edge of the reduced width portion includes a pair of inclined portions which are inclined in mutually reversed directions with respect to the second direction.5. The resonator element according to claim 4 ,wherein ...

UNIT, OSCILLATOR AND ELECTRONIC APPARATUS

A unit comprising a quartz crystal resonator having an overall length less than 2.1 mm and a base portion including a length less than 0.5 mm and a width less than 0.55 mm, and vibrational arms, mounting arms being connected to the base portion through connecting portions, each vibrational arm having a first vibrational portion including a first width and a first length within a range of 0.32 mm to 0.72 mm and a second vibrational portion including a second width greater than the first width and a second length less than the first length, a groove being formed in at least one of opposite main surfaces of the first vibrational portions of the vibrational arms, a width of the groove being less than 0.07 mm and a distance in the width direction of the groove measured from an outer edge of the groove to an outer edge of the corresponding arm being less than 0.015 mm, a width of the mounting arms being less than 0.45 mm and a width of the connecting portions being less than 0.41 mm, the second width being greater than a spaced-apart distance between the second vibrational portions. 1. A unit comprising: a quartz crystal resonator having an overall length less than 2.1 mm and a base portion including a length less than 0.5 mm and a width less than 0.55 mm , and first and second vibrational arms connected to the base portion , a plurality of mounting arms comprising first and second mounting arms being connected to the base portion , each of the first and second vibrational arms comprising a plurality of vibrational portions having a first vibrational portion including a first width and a first length within a range of 0.32 mm to 0.72 mm and a second vibrational portion including a second width greater than the first width and a second length less than the first length , the first vibrational portion of each of the first and second vibrational arms having a first main surface and a second main surface opposite the first main surface;wherein at least one groove is formed in ...

METHOD FOR CREATING A RESONATOR

The present invention concerns a method for manufacturing a resonator in a substrate characterized in that it includes the following steps: 142-. (canceled)43. A method for manufacturing a resonator in a substrate , the method comprising:a) modifying a structure of at least one region of the substrate in order to make said at least one region more selective;b) etching said at least one region in order to selectively manufacture said resonator.44. The manufacturing method according to claim 43 , further comprising:c) releasing the resonator from said substrate.45. The manufacturing method according to claim 43 , wherein the structure of said at least one region is modified by a laser.46. The manufacturing method according to claim 45 , wherein the substrate is made of a material transparent to the laser wavelength.47. The manufacturing method according to claim 45 , wherein a pulse duration of the laser ranges from a femtosecond to a picosecond.48. The manufacturing method according to claim 46 , wherein a pulse duration of the laser ranges from a femtosecond to a picosecond.49. The manufacturing method according to claim 46 , wherein the substrate is made of single crystal material.50. The manufacturing method according to claim 46 , wherein the substrate is made of polycrystalline material.51. The manufacturing method according to claim 46 , wherein the substrate is made of polymer.52. The manufacturing method according to claim 46 , wherein the substrate is made of an amorphous material or a ceramic or glass.53. The method according to claim 43 , wherein the component is a resonator including a base from which extend at least two parallel arms each having an upper surface and a lower surface and further including at least one recess made on one of the surfaces of at least one of the at least two parallel arms.54. The method according to claim 53 , wherein said at least one recess takes a form of a groove having at least one vertical side.55. The method according ...

RESONATOR AND RESONANCE DEVICE

A resonator is provided that suppresses a shift in resonant frequency. The resonator includes a vibration member including vibration arms extending therefrom with two or more of the vibration arms performing out-of-plane bend with different phases. Moreover, the resonator includes a base having a front end connected to the vibration arms and a rear end opposing the front end and structured to bend in a direction of the out-of-plane bend when the vibration arms perform the out-of-plane bend. Moreover, a frame surrounds a periphery of the vibration member and one or more holding arms are positioned between the vibration member and the frame. One end of each holding arm is connected to the base and the other end of the holding arm is connected to the frame. The holding arms bend in the direction of the out-of-plane bend when the base bends. 1. A resonator comprising: at least three vibration arms each having a fixed end and an open end, with at least two of the vibration arms configured to perform an out-of-plane bend with different phases, and', 'a base having a front end coupled to the respective fixed ends of the at least three vibration arms and a rear end opposing the front end, the rear end being configured to bend in a direction of the out-of-plane bend when the at least two vibration arms perform the out-of-plane bend;, 'a vibration member includinga frame at least partially surrounding a periphery of the vibration member; andat least one holding arm disposed between the vibration member and the frame,wherein a first end of the at least one holding arm is connected to the base and a second end of the at least one holding arm is connected to the frame, andwherein the at least one holding arm bends in the direction of the out-of-plane bend when the base bends.2. The resonator according to claim 1 , wherein a portion between the at least two vibration arms performing the out-of-plane bend with different phases is a node.3. The resonator according to claim 1 , ...

Electronic component-use package and piezoelectric device

An electronic component-use package includes a base that holds an electronic component element, and terminal electrodes formed on a bottom surface of the base. The terminal electrodes have chamfered parts facing corner parts of the base bottom surface and having angles of chamfer ranging in ±10 degrees to a reference line. The reference line is a perpendicular line to a straight line that connects the corner parts of the base bottom surface to a central part on one side of the terminal electrode in proximity to a center point of the base bottom surface, the reference line L 8 passing through the chamfered parts.

RESONATOR DEVICE, OSCILLATOR, ELECTRONIC APPARATUS, AND VEHICLE

A resonator device includes a substrate, a resonator element including a base member having first and second surface, and a pair of excitation electrodes, and first and second bonding member. Defining center of the first and second bonding member as a first and second bonding center, a center of a resonating region as a resonating region center, and defining a distance between the first bonding center and the second bonding center as L1, a length of a perpendicular drawn from the resonating region center to an imaginary line connecting the first bonding center and the second bonding center to each other as L2, a linear expansion coefficient of the first metal layer, the second metal layer, and the base member as α1, α2, α3 respectively, and a length of the resonator element as L3, 0 Подробнее

Quartz Vibrator

A quartz vibrator that includes a substrate, a quartz vibrating element, and a dome-shaped cap. The quartz vibrating element is mounted on the substrate. The cap is bonded to the substrate. The cap defines and forms a sealed space that seals the quartz vibrating element along with the substrate. The cap has a side wall portion, a ceiling portion, and a connecting portion. The side wall portion encloses the quartz vibrating element. The ceiling portion is positioned above the quartz vibrating element. The connecting portion connects the side wall portion and the ceiling portion. The connecting portion is thinner than the side wall portion and the ceiling portion.

METAL RIBS IN ELECTROMECHANICAL DEVICES

In examples, a device comprises a semiconductor die, a thin-film layer, and an air cavity positioned between the semiconductor die and the thin-film layer. The air cavity comprises a resonator positioned on the semiconductor die. A rib couples to a surface of the thin-film layer opposite the air cavity. 1. A device , comprising:a semiconductor die;a thin-film layer;an air cavity positioned between the semiconductor die and the thin-film layer, the air cavity comprising a resonator positioned on the semiconductor die; anda rib coupled to a surface of the thin-film layer opposite the air cavity.2. The device of claim 1 , wherein the rib comprises a metal rib having a thickness ranging from 1 micron to 100 microns and having a stiffness of at least 120KN/m.3. The device of claim 1 , wherein the rib has a surface with an area matching or exceeding an area of a surface of a platform on which the resonator is positioned.4. The device of claim 1 , wherein the rib is a continuous member.5. The device of claim 1 , wherein the rib has six surfaces.6. The device of claim 1 , further comprising a conductive terminal formed in the thin-film layer and coupled to an active surface of the semiconductor die.7. The device of claim 1 , wherein the thin-film layer comprises a polymer having a thickness ranging from 1 micron to 100 microns.8. The device of claim 1 , wherein the thin-film layer has a thickness of at least 10 microns.9. The device of claim 1 , wherein the device comprises a micro-electro-mechanical system (MEMS) device or a bulk acoustic wave (BAW) device.10. The device of claim 1 , further comprising a mold compound covering the semiconductor die claim 1 , the thin-film layer claim 1 , and the rib.11. The device of claim 1 , wherein the air cavity has a depth ranging from 50 microns to 10 millimeters.12. A device claim 1 , comprising:a semiconductor die;an insulative layer;an air cavity positioned between the semiconductor die and the insulative layer, the air cavity ...

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT

A quartz crystal resonator element includes: a base portion and a pair of vibrating arms which extend from a first end portion of the base portion along a Y-axis direction. The base portion includes a second end portion provided on the opposite side to a first end portion in the Y-axis direction. The base portion is provided with a protrusion in at least one of a third end portion and a fourth end portion which respectively connect both ends of the first end portion and both ends of the second end portion. 1. A resonator element comprising:a base portion which includes, in plan view, a first end portion, a second end portion disposed at an opposite side of the base portion with respect to the first end portion, a third end portion that interconnects a first end of the first end portion and a first end of the second end portion, and a fourth end portion that interconnects a second end of the first end portion and a second end of the second end portion; andfirst and second vibrating arms which extend from the first end portion of the base portion, the first and second vibrating arms extending along a first direction and being arranged in order from the third end portion side to the fourth end portion side, whereinthe first vibrating arm includes a first arm portion that extends from the base portion and a first mass portion that is disposed at an end of the first arm portion away from the base portion, the first mass portion having a width in a second direction crossing the first direction that is greater than a width of the first arm portion in the second direction, andthe third end portion has a shape, in the plan view, which includes a protruding portion that protrudes in the second direction beyond a first straight line that connects the first end of the first end portion to the first end of the second end portion, a tip of the protruding portion is disposed between the first straight line and a first virtual line that extends in the first direction from a side of ...

QUARTZ CRYSTAL DEVICE

A quartz crystal device includes a crystal element, a container, a conductive adhesive having flexibility, first pillow portions, and a second pillow portion. The first pillow portions hold the crystal element floated from an inner bottom surface of the container at the proximities of the two positions. The second pillow portion opposes the crystal element at a proximity of a second side. The second side opposes the first side of the crystal element. A height of the first pillow portion is represented as h and a length of the first pillow portion in a direction perpendicular to the first side is represented as X, where the h is 20 μm to 50 μm and the X is 150 μm or less. The conductive adhesive covers at least a top surface and a side surface of the first pillow portion. The side surface is in a center side of the crystal element. 1. A quartz crystal device , comprising:a crystal element, having a planar shape in a square shape;a container that houses the crystal element;a conductive adhesive having flexibility that fixes the crystal element to the container at two positions at proximities of a first side of the crystal element and near both ends of the first side;first pillow portions that hold the crystal element floated from an inner bottom surface of the container at the proximities of the two positions; anda second pillow portion that opposes the crystal element at a proximity of a second side, the second side opposing the first side of the crystal element,{'b': 1', '1, 'wherein a height of the first pillow portion is represented as h, a length of the first pillow portion in a direction perpendicular to the first side is represented as X, where the h is 20 μm to 50 μm and the X is 150 μm or less, and'}the conductive adhesive covers at least a top surface and a side surface of the first pillow portion, the side surface being in a center side of the crystal element.2. The quartz crystal device according to claim 1 , whereinthe conductive adhesive has a portion ...

TORSIONAL MODE QUARTZ CRYSTAL DEVICE

The disclosed technology generally relates to quartz crystal devices and more particularly to quartz crystal devices configured to vibrate in torsional mode. In one aspect, a quartz crystal device configured for temperature sensing comprises a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal. Each of the tines has formed on one or both of opposing sides thereof a vertically protruding line structure laterally elongated in the horizontal lengthwise direction. The quartz crystal device further comprises a first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a respective axis extending in the horizontal lengthwise direction. 1. A quartz crystal device configured for temperature sensing , comprising:a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal, wherein each of the tines has formed on one or both of opposing sides thereof a vertically protruding line structure laterally elongated in the horizontal lengthwise direction; anda first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a respective axis extending in the horizontal lengthwise direction.2. The quartz crystal device of claim 1 , wherein the line structure laterally separates the first electrode from the second electrode on one or both of the opposing sides of each ...

TORSIONAL MODE QUARTZ CRYSTAL DEVICE

The disclosed technology generally relates to quartz crystal devices and more particularly to quartz crystal devices configured to vibrate in torsional mode. In one aspect, a quartz crystal device configured for temperature sensing comprises a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal, wherein each of the tines has formed on one or both of opposing sides thereof a pair of vertically recessed groove structures laterally elongated in the horizontal lengthwise direction, wherein the pair of groove structures are separated in a horizontal widthwise direction by a line structure. The quartz crystal device further comprises a first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a respective axis extending in the horizontal lengthwise direction. 1. A quartz crystal device configured for temperature sensing , comprising:a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal, wherein each of the tines has formed on one or both of opposing sides thereof a pair of vertically recessed groove structures laterally elongated in the horizontal lengthwise direction, wherein the pair of groove structures are separated in a horizontal widthwise direction by a line structure; anda first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a ...

PIEZOELECTRIC PIECE FOR PIEZOELECTRIC VIBRATOR AND MANUFACTURING METHOD THEREOF

The present invention presents a piezoelectric piece for a piezoelectric vibrator and a manufacturing method thereof. The piezoelectric piece for a piezoelectric vibrator in accordance with an embodiment of the present invention includes: a base; and a vibrating arm connected to the base and having a groove formed therein. Here, one surface inside the groove includes: a first slope extended from an upper portion of the groove in a lower direction so as to have a first angle; and a second slope extended from a lower portion of the first slope in a lower direction so as to have a second angle that is greater than the first angle, and a rate of a depth of the first slope for a depth of the groove is greater than or equal to 0.5 and less than or equal to 1. 1. A piezoelectric piece for a piezoelectric vibrator , comprising:a base; anda vibrating arm connected to the base and having a groove formed therein,wherein one surface inside the groove comprises:a first slope extended from an upper portion of the groove in a lower direction so as to have a first angle; anda second slope extended from a lower portion of the first slope in a lower direction so as to have a second angle that is greater than the first angle,wherein a rate of a depth of the first slope for a depth of the groove is greater than or equal to 0.5 and less than or equal to 1.2. The piezoelectric piece for a piezoelectric vibrator of claim 1 , wherein the first angle is 10° or less.3. The piezoelectric piece for a piezoelectric vibrator of claim 1 , wherein the other surface inside the groove facing the one surface inside the groove is formed to include a surface that is vertical from a bottom of the groove.4. The piezoelectric piece for a piezoelectric vibrator of claim 1 , wherein the groove is provided in plurality.5. The piezoelectric piece for a piezoelectric vibrator of claim 1 , wherein the groove has a protruded part formed on a bottom thereof claim 1 , the protruded part being formed in such a way ...

RESONATING SENSOR FOR HIGH-PRESSURE AND HIGH-TEMPERATURE ENVIRONMENTS

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed. 1. An apparatus comprising:a sensor including a sensing element having a double-ended tuning fork piezoelectric resonator including a first tine and a second tine spaced apart from one another so as to form a slot between the first and second tines, wherein a width of the slot from the first tine to the second tine, the width of the slot measured orthogonally to the lengths of the first and second tines, varies along the lengths of the first and second tines.2. The apparatus of claim 1 , wherein the first tine is symmetrical with the second tine.3. The apparatus of claim 2 , wherein opposite sides of the first tine are symmetrical with each other claim 2 , and wherein opposite sides of the second tine are symmetrical with each other.4. The apparatus of claim 3 , wherein the opposite sides of the first tine are inwardly tapered toward a middle of the first tine and the opposite sides of the second tine are inwardly tapered toward a middle of the second tine.5. The apparatus of claim 3 , wherein the first and second tines are not parallel.6. The apparatus of claim 1 , wherein the first and second tines bow outward from one another.7. The apparatus of claim 1 , wherein the first and second tines are formed of a piezoelectric crystal material that has a melting point above 1000° C. and does not have a Curie temperature below 1000° C.8. (canceled)9. The apparatus of claim 7 , the sensor including a body having the sensing element and caps ...

SILVER-BONDED QUARTZ CRYSTAL

The disclosed technology generally relates to packaging a quartz crystal, and more particularly to bonding a quartz crystal using sintering silver paste. In one aspect, a method of packaging a quartz crystal comprises attaching a quartz crystal to a package substrate using one or more silver paste layers comprising silver particles. The method additionally comprises sintering the silver paste in a substantially oxygen-free atmosphere and at a sintering temperature sufficient to cause sintering of the silver particles. The sintering is such that the quartz crystal exhibits a positive drift in resonance frequency of the quartz crystal over time. The method further comprises hermetically sealing the quartz crystal in the package substrate. 1. A method of packaging a quartz crystal , the method comprising:forming a sintered silver paste bonding layer between a quartz crystal and a package substrate at a first location; andforming an additional bonding layer between the quartz crystal and the package substrate at a second location, the additional bonding layer comprising one or more of an epoxy, a silicon-based elastomer and a polyimide-based material,wherein the silver paste bonding layer and the additional bonding layer are configured to cause shifts in a resonance frequency of the quartz crystal in opposite frequency directions.2. The method of claim 1 , wherein the sintered silver paste bonding layer is configured to cause the resonance frequency of the quartz crystal to increase claim 1 , whereas the additional bonding layer is configured to cause the resonance frequency of the quartz crystal to decrease.3. The method of claim 2 , wherein the sintered silver paste bonding layer and the additional bonding layer are formed on opposite edge regions of the quartz crystal.4. The method of claim 2 , further comprising attaching an integrated circuit (IC) die electrically connected to the quartz crystal to the package substrate by sintering a silver paste layer comprising ...

VIBRATING DEVICE

A vibrating device having tuning fork arms extending in a first direction that are joined to a base portion and are arranged side by side in an second direction. Each of the tuning fork arms has a structure that a silicon oxide layer is laminated on a Si layer made of a degenerate semiconductor, and that an excitation portion is provided on the silicon oxide layer. When a total thickness of the Si layer is denoted by T, a total thickness of the silicon oxide layer is denoted by T, and the temperature coefficient of resonant frequency (TCF) when the silicon oxide layer is not provided on the Si layer is denoted by x, a thickness ratio T/(T+T) is within a range of (−0.0002x−0.0136x+0.0014)±0.05. 1. A vibrating device comprising:a base portion; anda plurality of tuning fork arms each being joined at one end thereof to the base portion and extending in a first direction, the plurality of tuning fork arms being arranged side by side in a second direction that is perpendicular to the first direction,the plurality of tuning fork arms each configured to flexurally vibrate in a third direction that is perpendicular to the second direction and the first direction,{'b': 1', '2', '2', '1', '2, 'sup': '2', 'wherein each of the plurality of tuning fork arms include a Si layer made of a degenerate semiconductor, a silicon oxide layer, a piezoelectric layer, and first and second electrodes through which a voltage is applied to the piezoelectric layer, and wherein when a total thickness of the Si layer is denoted by T, a total thickness of the silicon oxide layer is denoted by T, and a temperature coefficient of resonant frequency in the vibrating device when the silicon oxide layer is not provided is denoted by x, T/(T+T) is within a range of (−0.0002x−0.0136x+0.0014)±0.05.'}2. The vibrating device according to claim 1 , wherein directions of vibrations of the plurality of tuning fork arms are symmetric between a first side of a centerline passing a center in the second direction ...

VIBRATING DEVICE

A vibrating device having a number 2N (N is an integer equal to 2 or larger) of tuning fork arms extending in a first direction are arranged side by side in a second direction. Phases of flexural vibrations of the number N of tuning fork arms positioned at a first side of an imaginary line A, which passes a center of a region in the second direction where the number 2N of tuning fork arms are disposed and which extends in the first direction, are symmetric to phases of flexural vibrations of the number N of tuning fork arms positioned at a second side of the imaginary line opposite the first side. 1. A vibrating device comprising:a base portion; anda number 2N of tuning fork arms joined to one end of the base portion and extending in a first direction, N being an integer equal to 2 or larger,wherein the number 2N of tuning fork arms are arranged side by side in a second direction that is perpendicular to the first direction, each of the tuning fork arms configured to flexurally vibrate in a third direction that is perpendicular to the second direction and the first direction, andphases of flexural vibrations of the number N of tuning fork arms positioned at a first side of an imaginary line, which passes a center of a region in the second direction where the number 2N of tuning fork arms are disposed and which extends in the first direction, are symmetric to phases of the flexural vibrations of the number N of tuning fork arms positioned at a second side of the imaginary line opposite to the first side.2. The vibrating device according to claim 1 , wherein the number N is two claim 1 , and a first set of two tuning fork arms positioned at the first side of the imaginary line and a second set of two tuning fork arms positioned at the second side of the imaginary line have flexural vibrations in opposite phases.3. The vibrating device according to claim 2 , wherein the first set of two tuning fork arms have piezoelectric layers polarized in an opposite direction to ...

Resonator, unit and oscillator

A resonator comprising a base portion, first and second vibrational arms, and a frame having first, second, third and fourth frame portions, the first and second frame portions extending in a common direction with the vibrational arms, third frame portion being connected to the base portion, the first frame portion being connected to the second frame portion through the third and fourth frame portions, each of the vibrational arms having a first vibrational portion including a first width and a first length, and a second vibrational portion including a second width greater the first width and a second length less than the first length, a groove being formed in at least one of main surfaces of each vibrational arm, and a spaced-apart distance between the second vibrational portions being less than a spaced-apart distance between the first frame portion and the first vibrational portion of the first vibrational arm.

QUARTZ CRYSTAL UNIT, QUARTZ CRYSTAL OSCILLATOR AND ELECTRONIC APPARATUS

In a quartz crystal unit, the unit comprising a case, and a resonator having a base portion, and first and second vibrational arms, the base portion having a first base portion including a first width, and a second base portion including a second width greater than the first width, each of the first and second vibrational arms having a first vibrational portion including a first width and a first length, and a second vibrational portion including a second width greater the first width and a second length less than the first length, the second base portion being mounted on a mounting portion of the case, at least one groove being formed in at least one of opposite main surfaces of the first vibrational portion of each vibrational arm, and a spaced-apart distance between the second vibrational portions of the first and second vibrational arms being less than a length of the second base portion of the base portion. 1. A quartz crystal unit comprising: a case; and a resonator having a base portion , and first and second vibrational arms connected to the base portion , the base portion having a first base portion including a first width , and a second base portion including a second width greater than the first width , each of the first and second vibrational arms having a first vibrational portion including a first width and a first length , and a second vibrational portion including a second width greater the first width and a second length less than the first length , the first vibrational portion having a first main surface and a second main surface opposite the first main surface;wherein the second base portion of the base portion is mounted on a mounting portion of the case;wherein at least one groove is formed in at least one of the first and second main surfaces of the first vibrational portion of each of the first and second vibrational arms, andwherein a spaced-apart distance between the second vibrational portion of the first vibrational arm and the second ...

TUNING FORK-TYPE VIBRATING REED, TUNING FORK-TYPE VIBRATOR AND MANUFACTURING METHOD THEREFOR

When a thick frequency adjustment metal film of a tuning fork-type vibration piece is irradiated with a beam on a wafer for frequency coarse adjustment, projections are possibly formed on a roughened end of the frequency adjustment metal film. Such projections are pressurized and pushed down not to chip off under any impact, so that the risk of frequency fluctuations is suppressed. 1. A manufacturing method for a tuning fork-type vibrator , the method comprising joining a tuning fork-type vibration piece to a package having a housing portion , and mounting the tuning fork-type vibration piece in the package ,the tuning fork-type vibration piece comprising:a stem portion; anda plurality of arm portions extending from the stem portion,the method further comprising:a first step of forming a frequency adjustment metal film in a tip-side part in a respective one of the arm portions of the tuning fork-type vibration piece;a second step of performing a frequency adjustment by removing the frequency adjustment metal film in part through irradiation of the tuning fork-type vibration piece with a beam; anda third step of applying a load to and pressurizing the frequency adjustment metal film partly removed.2. The manufacturing method according to claim 1 , whereinin the second step, the frequency adjustment metal film is partly removed from the tip-side part toward the stem portion in a respective one of the arm portions, andin the third step, at least one end partly removed of the frequency adjustment metal film is pressurized under the load applied.3. The manufacturing method according to or claim 1 , whereinin the first step, the frequency adjustment metal film is formed in the tip-side part on one of front and back main surfaces in a respective one of the arm portions of the tuning fork-type vibration piece, andin the second step, the frequency adjustment metal film is partly removed by irradiating the tuning fork-type vibration piece with the beam directed from another ...

PIEZOELECTRIC RESONATING DEVICE, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC RESONATOR, AND PIEZOELECTRIC OSCILLATOR

A piezoelectric substrate includes rod-shaped resonating arms; a base portion that connects one set of end portions of the respective resonating arms; weight portions which are formed on the other end portions of the respective resonating arms and which have a width larger than that of the respective resonating arms; and groove portions which are formed on each of the front and rear surfaces along the center line of vibration of the respective resonating arms. The piezoelectric substrate also includes excitation electrodes which are formed on each of the front and rear surfaces of the respective resonating arms including the inner side of the respective groove portions. A plurality of frequency adjustment slits extending in a straight line form along the longitudinal direction of the respective resonating arms are formed on the respective weight portions so as to penetrate through the front and rear surfaces of the weight portions. 1. A resonating device comprising:a pair of resonating arms that extend in a first direction, each of the pair of resonating arms having first and second surfaces opposite to each other;a base connected to first ends of the pair of resonating arms; anda plurality of slits that are formed in the pair of resonating arms, whereinthe plurality of slits are formed from the first surface to the second surface so as to penetrate the pair of resonating arms, and the plurality of slits linearly extend in the first direction.2. The resonating device according to claim 1 , whereinthe plurality of slits are formed in a second direction perpendicular to the first direction.3. The resonating device according to claim 2 , whereinall of the plurality of slits have the same width in the second direction.4. The resonating device according to claim 3 , whereinall of the plurality of slits have the same length in the first direction.5. The resonating device according to claim 1 , whereina first edge of one of the plurality of slits located next to the first ...

VIBRATION UNIT AND ANGULAR VELOCITY SENSOR MODULE

A vibration unit includes: a first vibration member configured to be extended from a body member and vibrated on a first plane based on a first driving signal; and a second vibration member configured to be extended from the body member, disposed to be non-parallel with respect to the first vibration member, and vibrated on the first plane based on a second driving signal. 1. A vibration unit , comprising:a first vibration member configured to be extended from a body member and vibrated on a first plane based on a first driving signal; anda second vibration member configured to be extended from the body member, disposed to be non-parallel with respect to the first vibration member, and vibrated on the first plane based on a second driving signal.2. The vibration unit of claim 1 , wherein the first vibration member and the second vibration member are disposed to form an acute angle or a right angle claim 1 , based on the body member.3. The vibration unit of claim 1 , wherein the first vibration member and the second vibration member are disposed to form an obtuse angle or a right angle claim 1 , based on the body member.4. The vibration unit of claim 1 , wherein the first vibration member and the second vibration member are configured to be vibrated in directions opposing each other claim 1 , based on the first driving signal and the second driving signal.5. The vibration unit of claim 1 , wherein the vibration members include:a first piezoelectric element configured to exert driving force by the driving signal; anda second piezoelectric element configured to convert external vibrations into an electrical signal.6. The vibration unit of claim 1 , further comprising a third vibration member configured to be extended from the body member claim 1 , disposed to be non-parallel with respect to the first vibration member and the second vibration member claim 1 , and vibrated on the first plane based on a third driving signal.7. An angular velocity sensor module claim 1 , ...

QUARTZ CRYSTAL BLANK AND QUARTZ CRYSTAL RESONATOR UNIT

A rectangular quartz crystal blank having long sides substantially parallel to a Z′ axis of the quartz crystal blank, and short sides substantially parallel to an X axis of the quartz crystal blank. The quartz crystal blank includes a first center region, a second region and a third region that are adjacent to the first region along a long-side direction, and a fourth region and a fifth region that are adjacent to the first region along a short-side direction. A thickness of the second region and a thickness of the third region are smaller than a thickness of the first region, and/or a thickness of the fourth region and a thickness of the fifth region are smaller than the thickness of the first region, and 13.92≦W/T≦14.44, where W is a length of a short side and T is a thickness. 1. An AT-cut quartz crystal blank comprising:a quartz crystal body that is rectangular in shape in a direction normal to a main surface thereof, the quartz crystal body having a first region including a center of the main surface in the direction normal to the main surface, a second region and a third region that are adjacent to the first region on opposed sides thereof along a long-side direction in which long sides of the quartz crystal body extend, and a fourth region and a fifth region that are adjacent to the first region on opposed sides thereof along a short-side direction in which short sides of the quartz crystal body extend,wherein the long sides of the main surface are substantially parallel to a Z′ axis of the quartz crystal blank,wherein the short sides of the main surface are substantially parallel to an X axis of the quartz crystal blank,wherein a frequency of a main vibration of the quartz crystal blank is in a range of 24.5 MHz to 28.5 MHz,wherein a thickness of the first region is substantially uniform,wherein at least one of (1) a thickness of the second region and a thickness of the third region are smaller than the thickness of the first region, and (2) a thickness of ...

PIEZOELECTRIC DEVICE

A piezoelectric device includes a cap, a base plate, and a flat bonding metal film. The cap has a flat plane area having a first width from a first outer peripheral end to a first inner peripheral end. The base plate has a first plane in contact with the cap and a second plane as an opposite surface of the first plane. The base plate has an outer periphery in a shape identical to the rectangular frame shape in plan view. The flat bonding metal film is formed on the first plane. The bonding metal film is formed in a rectangular frame shape in a size overlapping with the plane area. The bonding metal film has a second width from a second outer peripheral end to a second inner peripheral end. The second outer peripheral end is positioned outside the first outer peripheral end. 1. A piezoelectric device , comprising:a cap, formed in a rectangular frame shape in plan view, the cap having a flat plane area having a first width, the first width being from a first outer peripheral end to a first inner peripheral end, the cap covering a piezoelectric element;a base plate in a flat plate shape, the base plate having a first plane in contact with the cap and a second plane as an opposite surface of the first plane, the base plate having an outer periphery in a shape identical to the rectangular frame shape in plan view; anda flat bonding metal film formed on the first plane, the bonding metal film being formed in a rectangular frame shape in a size overlapping with the plane area, the bonding metal film having a second width from a second outer peripheral end to a second inner peripheral end, whereinthe second outer peripheral end is positioned outside the first outer peripheral end.2. The piezoelectric device according to claim 1 , whereinthe second inner peripheral end is positioned at a position identical to a position of the first inner peripheral end, or positioned outside the first inner peripheral end.3. The piezoelectric device according to claim 1 , wherein the second ...

Tuning-fork type crystal resonator

A tuning-fork type crystal resonator includes a base portion, a first vibration arm and a second vibration arm, a supporting arm, a first connection pad and a second connection pad, and a first excitation electrode and a second excitation electrode. The first excitation electrode is extended from the first connection pad so as to reach a side surface of the first vibration arm on the supporting arm side via a region including a part of a principal surface of the supporting arm and a part of a side surface of the supporting arm on the first vibration arm side, an inner bottom surface of a first bifurcated portion present between the supporting arm and the first vibration arm, and a circumferential portion of the first bifurcated portion in the base portion. The second excitation electrode is extended at a second bifurcated portion similarly to the first excitation electrode.

PIEZOELECTRIC VIBRATION PIECE AND PIEZOELECTRIC VIBRATOR

A piezoelectric vibration piece includes: a base portion; a pair of vibration arm portions which extends in a first (+Y) direction from the base portion, and is arranged separately in a second (X) direction intersecting with the first (+Y) direction; and a support arm portion which extends in the first (+Y) direction from the base portion. The support arm portion, includes a first arm portion formed such that a width which is a length along the second (X) direction is gradually narrowed towards a tip end portion side of the support arm portion, and a second arm portion which extends in the first (+Y) direction from the first arm portion and is formed such that the width is broadened towards the tip end portion side.

Resonator element, resonator, and electronic device

A resonator element includes a substrate that vibrates in a thickness shear vibration, a first excitation electrode that is provided on one main surface of the substrate and has a shape in which at least three corners of a virtual quadrangle are cut out, and a second excitation electrode that is provided on the other main surface of the substrate, and a ratio (S 2 /S 1 ) of an area S 1 of the virtual quadrangle and an area S 2 of the first excitation electrode satisfies a relationship of 69.2% (S 2 /S 1 ) 80.1%.

QUARTZ CRYSTAL RESONATOR UNIT, ELECTRONIC COMPONENT, AND ELECTRONIC DEVICE

A quartz crystal resonator unit that includes: a quartz crystal resonator including an excitation electrode and a connection electrode electrically connected to the excitation electrode; a base member including an electrode pad; an electrically conductive holding member that connects the connection electrode and the electrode pad to each other; and a lid member attached to the base member so as to form an internal space between the lid member and the base member in which the quartz crystal resonator is accommodated. The electrically conductive holding member is a cured product of an electrically conductive adhesive containing (1) a silicone resin as a main component and (2) an epoxy compound having two or more epoxy groups.

RESONANCE DEVICE MANUFACTURING METHOD

A method for adjusting a resonant frequency of a resonator without impairing piezoelectricity that includes preparing a lower lid; arranging a substrate with a lower surface that faces the lower lid and forming a first electrode layer, a piezoelectric film, and a second electrode layer on an upper surface of the substrate. Moreover, a vibration arm is formed that bends and vibrates from the first electrode layer, the second electrode layer, and the piezoelectric film and an upper lid faces the lower lid with the resonator interposed therebetween. The method further includes adjusting a frequency of the resonator before or after arranging the upper lid by exciting the vibration arm by applying a voltage between the first electrode layer and the second electrode layer and by causing a part of the vibration arm to collide with either or both of the lower lid and the upper lid. 1. A resonance device manufacturing method comprising:arranging a lower surface of a substrate to face a lower lid;forming a first electrode layer, a piezoelectric film and a second electrode layer on an upper surface of the substrate, the upper surface opposing the lower surface;forming a resonator that includes at least one vibration arm configured to bend and vibrate from the first electrode layer, the second electrode layer, and the piezoelectric film;arranging an upper lid that faces the lower lid with the resonator interposed therebetween; andadjusting a frequency of the resonator by exciting the at least one vibration arm by applying a voltage between the first and second electrode layers, such that at least a part of the at least one vibration arm collides with at least one of the lower lid and the upper lid.2. The resonance device manufacturing method according to claim 1 , wherein the adjusting of the frequency of the resonator is performed before the arranging of the upper lid.3. The resonance device manufacturing method according to claim 1 , wherein the adjusting of the frequency of ...

QUARTZ CRYSTAL UNIT, QUARTZ CRYSTAL OSCILLATOR AND ELECTRONIC APPARATUS

In a quartz crystal unit, the unit comprising a quartz crystal tuning fork resonator having a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines, each of the first and second quartz crystal tuning fork tines having a first vibrational portion including a first width and a second vibrational portion including a second width greater than the first width, at least one groove being formed in at least one of opposite main surfaces of the first vibrational portion of each quartz crystal tuning fork tine, the first width of the first vibrational portion of each quartz crystal tuning fork tine being greater than 0.03 mm and less than 0.075 mm and the second width of the second vibrational portion of each quartz crystal tuning fork tine being greater than 0.04 mm and less than 0.23 mm. 1. A quartz crystal unit comprising:a case;a quartz crystal tuning fork resonator;and a lid;wherein the quartz crystal tuning fork resonator has a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines connected to the quartz crystal tuning fork base, each of the first and second quartz crystal tuning fork tines comprising a plurality of vibrational portions having a first vibrational portion including a first width and a second vibrational portion including a second width greater than the first width, the first vibrational portion of each of the first and second quartz crystal tuning fork tines having a first main surface and a second main surface opposite the first main surface;wherein at least one groove is formed in at least one of the first and second main surfaces of the first vibrational portion of each of the first and second quartz crystal tuning fork tines; andwherein the first width of the first vibrational portion of each of the first and second quartz crystal tuning fork tines is greater than 0.03 mm and less than 0.075 mm and the second width of the second vibrational portion of each of the first and second ...

QUARTZ CRYSTAL BLANK AND QUARTZ CRYSTAL RESONATOR UNIT

A rectangular quartz crystal blank having long sides substantially parallel to a Z′ axis of the quartz crystal blank, and short sides substantially parallel to an X axis of the quartz crystal blank. The quartz crystal blank includes a first center region, a second region and a third region that are adjacent to the first region along a long-side direction, and a fourth region and a fifth region that are adjacent to the first region along a short-side direction. A thickness of the second region and a thickness of the third region are smaller than the thickness of the first region, and/or a thickness of the fourth region and a thickness of the fifth region are smaller than the thickness of the first region, and 12.26≦W/T≦13.02, where W is a length of a short side and T is a thickness. 1. An AT-cut quartz crystal blank comprising:a quartz crystal body that is rectangular in shape in a direction normal to a main surface thereof, the quartz crystal body having a first region including a center of the main surface in the direction normal to the main surface, a second region and a third region that are adjacent to the first region on opposed sides thereof along a long-side direction in which long sides of the quartz crystal body extend, and a fourth region and a fifth region that are adjacent to the first region on opposed sides thereof along a short-side direction in which short sides of the quartz crystal body extend,wherein the long sides of the main surface are substantially parallel to a Z′ axis of the quartz crystal blank,wherein the short sides of the main surface are substantially parallel to an X axis of the quartz crystal blank,wherein a frequency of a main vibration of the quartz crystal blank is in a range of 22.0 MHz to 24.5 MHz,wherein a thickness of the first region is substantially uniform,wherein at least one of (1) a thickness of the second region and a thickness of the third region are smaller than the thickness of the first region, and (2) a thickness of ...

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPONDING MANUFACTURING PROCESS

A microelectromechanical resonator device has: a main body, with a first surface and a second surface, opposite to one another along a vertical axis, and made of a first layer and a second layer, arranged on the first layer; a cap, having a respective first surface and a respective second surface, opposite to one another along the vertical axis, and coupled to the main body by bonding elements; and a piezoelectric resonator structure formed by: a mobile element, constituted by a resonator portion of the first layer, suspended in cantilever fashion with respect to an internal cavity provided in the second layer and moreover, on the opposite side, with respect to a housing cavity provided in the cap; a region of piezoelectric material, arranged on the mobile element on the first surface of the main body; and a top electrode, arranged on the region of piezoelectric material, the mobile element constituting a bottom electrode of the piezoelectric resonator structure. 1. A micro-electro-mechanical system resonator device , comprising:a main body having a first layer with a first surface and a second layer with a second surface opposite to the first surface along an axis, the second layer having an internal cavity facing the first layer along the axis, the first layer including a mobile element overlapping the internal cavity and suspended in a cantilever fashion relative to the internal cavity;a bonding element;a cap having first surface and a second surface opposite to one another along the axis, and the first surface of the cap bonded to the first surface of the main body by the bonding element, the cap including a housing cavity overlapping the internal cavity, the mobile element suspended in the cantilever fashion relative to the housing cavity; and the mobile element, configured as a bottom electrode;', 'a piezoelectric region of a piezoelectric material, arranged on said mobile element at the first surface of the main body; and', 'a top electrode arranged on the ...

TUNING FORK TYPE CRYSTAL BLANK, TUNING FORK TYPE CRYSTAL ELEMENT, AND CRYSTAL DEVICE

A tuning fork type crystal blank includes a base part, a pair of vibrating parts which extend from the base part parallel with each other, an auxiliary part including a support part located on one side of an alignment direction of the pair of vibrating parts relative to the base part and pair of vibrating parts and extending parallel with the pair of vibrating parts, and a holding part which is located on the opposite side to the pair of vibrating parts relative to the base part and connects the base part and the support part. When viewed in a planar view direction perpendicular to the alignment direction and to the direction in which the pair of vibrating parts extend, cut away part is formed in a side surface of the auxiliary part. 1. A tuning fork type crystal blank comprising:a base part,a pair of vibrating parts which extend from the base part in parallel with each other,an auxiliary part comprising a support part which is located at one side of the base part and the pair of vibrating parts in an alignment direction of the pair of vibrating parts and extends parallel with the pair of vibrating parts, anda holding part which is located on the side of the base part opposite to the pair of vibrating parts and connects the base part and the support part, whereina cut away part is formed in a side surface of the auxiliary part when viewed in a planar view direction which is perpendicular to the alignment direction and the extension direction of the pair of vibrating parts.2. The tuning fork type crystal blank according to claim 1 , wherein:the auxiliary part further comprises a protruding part which protrudes from a side surface of the support part, andthe cut away part is formed in a side surface of the protruding part.3. The tuning fork type crystal blank according to claim 2 , wherein claim 2 , when viewed in the planar view direction claim 2 ,the protruding part forms a substantially rectangular shape, andthe cut away part is formed in the surface of the ...

RESONATOR AND RESONANCE DEVICE

A resonator is provided having a first electrode and a second electrode; and a piezoelectric film that is disposed between the first and second electrodes, has an upper surface opposing the first electrode, and that vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the resonator includes a protective film made of an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed therebetween. Furthermore, a conductive film made of a conductor is provided that is disposed opposing the upper surface of the piezoelectric film with the protective film interposed therebetween, where the conductive film is electrically connected to any one of the first and second electrodes. 1. A resonator comprising:a first electrode and a second electrode;a piezoelectric film disposed between the first and second electrodes, the piezoelectric film having an upper surface that opposes the first electrode;a protective film comprising an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed between the protective film and the upper surface of the piezoelectric film; anda conductive film disposed opposing the upper surface of the piezoelectric film with the protective film interposed between the conductive film and the upper surface of the piezoelectric film,wherein the conductive film is electrically connected to at least one of the first electrode and the second electrode.2. The resonator according to claim 1 , wherein the piezoelectric film is configured to vibrate in a predetermined vibration mode when a voltage is applied between the first and second electrodes.3. The resonator according to claim 1 , wherein the conductive film is a frequency adjusting film configured to adjust a resonant frequency of the resonator.4. The resonator according to claim 1 ,wherein the upper surface of the piezoelectric film includes ...

CLOCK OSCILLATOR AND CLOCK OSCILLATOR PRODUCTION METHOD

A clock oscillator, a clock oscillator production method and use method, and a chip including the clock oscillator are provided. The clock oscillator includes a resonator, a shock-absorbing material layer, and a base, and at least a part of the shock-absorbing material layer is located between the resonator and the base. In the clock oscillator, the shock-absorbing material layer is added between the resonator and the base, and the shock-absorbing material layer can effectively prevent a mechanical wave from being conducted between the base and the resonator, so that the resonator is protected from external vibration. This can ensure, when there is external vibration, that an output frequency of the resonator is not deteriorated and improve shock absorption performance of the clock oscillator. 1. An apparatus for obtaining a clock frequency , comprising: a clock oscillator , a shock-absorbing material layer , and a substrate , and at least a part of the shock-absorbing material layer is located between the clock oscillator and at least a part of the substrate.2. The apparatus according to claim 1 , wherein the shock-absorbing material layer comprises a micron-level layer structure claim 1 , a nanometer-level three-dimensional mesh structure claim 1 , or a polymer material.3. The apparatus according to claim 2 , wherein the nanometer-level three-dimensional mesh structure comprises nanofibers.4. The apparatus according to claim 3 , wherein the nanofibers comprise carbon nanofibers and/or ceramic nanofibers.5. The apparatus according to claim 1 , wherein a structure of the shock-absorbing material layer comprises a planar layer structure claim 1 , the clock oscillator is located on a first side of the shock-absorbing material layer claim 1 , at least a part of the substrate is located on a second side of the shock-absorbing material layer claim 1 , and the second side of the shock-absorbing material layer is opposite to the first side of the shock-absorbing material ...

SMALL PIEZOELECTRIC RESONATOR

The invention relates to a piezoelectric resonator, which comprises a base and at least two vibrating arms () extending from the base, at least two grooves () being formed opposite each other on part of the length of the arms and on upper and lower faces of the arms. The depth of the groove on the upper face is less than 30% of the total thickness of each arm and the depth of the groove on the lower face is more than 50% of the total thickness of each arm, or reversely. 1. A piezoelectric resonator comprising a base and at least two vibrating arms connected to the base in a direction of a crystalline axis X , wherein the vibrating arms extend from the base in a direction of a crystalline axis +Y or −Y , wherein at least a first groove is formed on an upper face on a side +Z of each arm along the crystalline axis +Y or −Y on part of the length of the arms and wherein at least a second groove is formed on a lower face on a side −Z of each arm along the crystalline axis +Y or −Y on part of the length of the arms and opposite the first groove in an asymmetrical arrangement ,wherein the depth of the first groove is less than 30% of the total thickness of each arm or more than 50% of the total thickness of each arm, andwherein the depth of the second groove is more than 50% of the total thickness of each arm if the depth of the first groove is less than 30% of the total thickness of each arm, or less than 30% of the total thickness of each arm if the depth of the first groove is more than 50% of the total thickness of each arm.2. The piezoelectric resonator according to claim 1 , wherein the two vibrating arms are connected to the base in a direction of a crystalline axis X claim 1 , wherein the vibrating arms extend from the base in a direction of a crystalline axis +Y claim 1 , wherein at least a first groove is formed on an upper face on a side +Z of each arm along the crystalline axis +Y on part of the length of the arms and wherein at least a second groove is formed ...

VIBRATING REED, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD FOR MANUFACTURING VIBRATING REED

The vibrating reed includes a detection unit that vibrates along the thickness direction of a piezoelectric body when detecting. The detection unit includes a first main surface and a second main surface that face each other in the thickness direction, outside surfaces, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface, an outside surface electrode that is formed on the outside surfaces, and an inside surface electrode that is formed on an inside surface which is opposite the outside surfaces. At least one of the outside surfaces has a non-electrode-formed area where the outside surface electrode is not provided in an area from the end surface which positioned on the second main surface side in the thickness direction to the second main surface. 1. A vibrating reed comprising:a first main surface and a second main surface of a piezoelectric body, the second main surface being on a back surface of the piezoelectric body with respect to the first main surface;an outside surface that connects the first main surface and the second main surface; anda detection unit that vibrates in a direction intersecting the first main surface, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface,', 'a first inside surface and a second inside surface in the inside surface facing the inside of the groove,', 'a first outside surface and a second outside surface in the outside surface,', 'a first inside surface electrode that is provided on the first inside surface,', 'a first outside surface electrode that is provided on the first outside surface,', 'a second inside surface electrode that is provided on the second inside surface, and', 'a second outside surface electrode that is provided on the second outside surface,, 'wherein the ...

CRYSTAL OSCILLATOR CIRCUIT

An oscillator circuit includes an amplifying unit and a first feedback resistor. The amplifying unit includes an inverter at an input stage being connected to the one end of a crystal resonator, an inverter at an output stage being connected to the other end of the crystal resonator, and a linear amplifier. The linear amplifier is connected between an output terminal of the inverter at the input stage and an input terminal of the inverter at the output stage. The linear amplifier includes at least one inverter and a second feedback resistor. The second feedback resistor is connected in parallel to the at least one inverter. The linear amplifier has a conductance with a magnitude larger than a conductance of the inverter at the input stage and equal to or less than a conductance of the inverter at the output stage. 1. A crystal oscillator circuit connected to a crystal resonator for oscillating based on an oscillation of the crystal resonator , the crystal oscillator circuit comprising:an amplifying unit that includes inverters of odd-numbered stages connected in cascade, the amplifying unit having an input side connected to one end of the crystal resonator and an output side connected to another end of the crystal resonator; anda first feedback resistor connected between the one end and the other end of the crystal resonator in parallel to the amplifying unit, wherein an inverter at an input stage having an input terminal connected to the one end of the crystal resonator;', 'an inverter at an output stage having an output terminal connected to the other end of the crystal resonator; and', 'a linear amplifier connected between an output terminal of the inverter at the input stage and an input terminal of the inverter at the output stage, the linear amplifier including at least one inverter and a second feedback resistor which is connected in parallel to the at least one inverter, wherein, 'the amplifying unit includesthe linear amplifier has a conductance with a ...

VIBRATING ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc. 1. A vibrating element having a drive mode , and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode , whereinin frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], the Ta is lower than the Tb and the Tc, or the Ta is higher than the Tb and the Tc.2. The vibrating element according to claim 1 , whereinwhen a resonance frequency in the drive mode is fa, a resonance frequency in the first detection mode is fb, and a resonance frequency in the second detection mode is fc, the fa falls between the fb and the fc.3. The ...

PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE

A piezoelectric vibrating piece includes a pair of vibrating arm portions which are arranged with a center axis interposed therebetween, a base portion which is arranged between a pair of vibrating arm portions and fixed to the outside, and a pair of connecting portions which connect proximal end portions of a pair of vibrating arm portions and a proximal end portion of the base portion. The distance between distal end portions of the vibrating arm portions and the center axis is smaller than the distance between the proximal end portions of the vibrating arm portions and the center axis. 1. A piezoelectric vibrating piece comprising:a pair of vibrating arm portions;a base portion which is provided between the pair of vibrating arm portions, andconnecting portions which connect proximal end portions of the vibrating arm portions and the proximal end portion of the base portion,wherein the vibrating arm portions are provided so as to be inclined toward the base portion side.2. The piezoelectric vibrating piece of claim 1 , wherein the intersection angle of the vibrating arm portions and the connecting portions is smaller than 90 degrees.3. The piezoelectric vibrating piece of claim 1 , wherein the intersection angle of the base portion and the connecting portions is smaller than 90 degrees.4. The piezoelectric vibrating piece of claim 1 , wherein the connecting portions has at least one bent portion.5. The piezoelectric vibrating piece of claim 1 , wherein the distal end portion of the base portion has a chamfered shape.6. A piezoelectric vibrator comprising the piezoelectric vibrating piece of sealed airtight in a package.7. An oscillator comprising the piezoelectric vibrator of electrically connected to an integrated circuit.8. An electronic apparatus comprising the piezoelectric vibrator of electrically connected to a counter unit.9. A radio-controlled timepiece comprising the piezoelectric vibrator of electrically connected to a filter unit. This application ...

PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE

A piezoelectric vibrating piece includes a pair of vibrating arm portions, a base portion which is arranged between a pair of vibrating arm portions, and connecting portions which connect proximal end portions of a pair of vibrating arm portions and a proximal end portion of the base portion. Narrow width portions are provided at the base of the base portion. 1. A piezoelectric vibrating piece comprising:a pair of vibrating arm portions;a base portion which is arranged between the pair of vibrating arm portions, andconnecting portions which connect proximal end portions of the vibrating arm portions and a proximal end portion of the base portion,wherein narrow width portions are provided at the base of the base portion.2. A piezoelectric vibrating piece of claim 1 , wherein the narrow width portions are formed such that the side surface of the base portion has a curved shape which is recessed inwardly.3. A piezoelectric vibrating piece of claim 1 , wherein the side surface of each of the connecting portions has a curved shape and is connected to the curved shape of the side surface of the base portion.4. A piezoelectric vibrator comprising the piezoelectric vibrating piece of sealed airtight in a package.5. An oscillator comprising the piezoelectric vibrator of electrically connected to an integrated circuit.6. An electronic apparatus comprising the piezoelectric vibrator of electrically connected to a counter unit.7. A radio-controlled timepiece comprising the piezoelectric vibrator of electrically connected to a filter unit. This application claims priority under 35 U.S.C. §119 to Japanese Patent Application No. 2013-002910 filed on Jan. 10, 2013, the entire content of which is hereby incorporated by reference.1. Field of the InventionThe present invention relates to a piezoelectric vibrating piece, a piezoelectric vibrator, an oscillator, an electronic apparatus, and a radio-controlled timepiece.2. Background ArtIn the related art, a piezoelectric vibrating piece ...

QUARTZ CRYSTAL RESONATOR AND QUARTZ CRYSTAL RESONATOR UNIT

A quartz crystal resonator that includes a substrate including a vibration portion, a frame portion that surrounds the vibration portion, and first to fourth coupling portions that couple the vibration portion and the frame portion to each other; and first and second excitation electrodes. An intersecting point of diagonal lines of a quadrangle formed by first to fourth connection portions is located on the positive side of the z axis relative to the x axis. 1. A quartz crystal resonator comprising:a substrate that is a quartz crystal plate having a first main surface and a second main surface, the substrate including a vibration portion, a frame portion that is separated from the vibration portion and surrounds the vibration portion when viewed in a direction normal to the first main surface, and first to fourth coupling portions that couple the vibration portion and the frame portion to each other;a first excitation electrode on the first main surface in the vibration portion; anda second excitation electrode on the second main surface in the vibration portion,wherein the vibration portion has a rectangular shape having a first edge, a second edge, a third edge, and a fourth edge, the third and fourth edges being perpendicular to the first and second edges when viewed in the normal direction,wherein, when an intersecting point of diagonal lines of the vibration portion when viewed in the normal direction is defined as an origin, a first straight line that passes through the origin, that is parallel to the first edge, and that has a positive side on which the third edge is located is defined as a z axis, and a second straight line that passes through the origin, that is parallel to the third edge, and that has a positive side on which the second edge is located is defined as an x axis,the first coupling portion couples the vibration portion and the frame portion in a first region on the positive side of the z axis and the negative side of the x axis when viewed in ...

Vibrator element, electronic device, electronic apparatus, moving object, and method of manufacturing vibrator element

A vibrator element includes drive vibrating arms extending from an end of a base section, the drive vibrating arms are each provided with an obverse surface, a reverse surface disposed on an opposite side to the obverse surface, and a side surface connecting the obverse surface and the reverse surface to each other, a tilted section facing toward the obverse surface is disposed at least a part of the side surface, and there are disposed a first drive electrode and a second drive electrode obtained by bisection with an electrode separation section disposed in the tilted section.

VIBRATING ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

A tuning fork-type vibrator element as a vibrating element includes a drive vibrating arm that performs a flexural vibration, and a drive electrode (a first drive electrode and a second drive electrode) provided on the drive vibrating arm. When a direction in which the drive vibrating arm extends is a Y-axis, a direction in which the drive vibrating arm performs a primary vibration is an X-axis, and a direction orthogonal to the Y-axis and the X-axis is a Z-axis, the drive vibrating arm performs the flexural vibration with a displacement ratio of greater than 0% and 20% or less where the displacement ratio is obtained by dividing a displacement amount in the Z-axis direction by a displacement amount in the X-axis direction. 1. A vibrating element comprising:a vibrating arm that performs a flexural vibration; anda drive electrode provided on the vibrating arm, whereinwhen a direction in which the vibrating arm extends is a Y-axis, a direction in which the vibrating arm performs a primary vibration is an X-axis, and a direction orthogonal to the Y-axis and the X-axis is a Z-axis, the vibrating arm performs the flexural vibration with a displacement ratio of greater than 0% and 20% or less where the displacement ratio is obtained by dividing a displacement amount in the Z-axis direction by a displacement amount in the X-axis direction.2. The vibrating element according to claim 1 , whereinthe displacement ratio is 2% or more and 13% or less.3. A vibrating element comprising:a vibrating arm that performs a flexural vibration; anda drive electrode provided on the vibrating arm, whereinwhen a direction in which the vibrating arm extends is a Y-axis, a direction in which the vibrating arm performs a primary vibration is an X-axis, and a direction orthogonal to the Y-axis and the X-axis is a Z-axis, an amount of shift in the X-axis direction between two sides along the X-axis in a cross-section of the vibrating arm formed by the X-axis and the Z-axis is 0.8% or less with ...

PIEZOELECTRIC DEVICE

A piezoelectric device is provided and includes: a piezoelectric vibrating piece, having an outer shape in rectangular shape and including an excitation electrode formed on both principal surfaces which are a top surface and a lower surface, an electrode pad formed at both ends of one short side, and an extraction electrode extracted from the excitation electrode to the electrode pad to be electrically connected to the electrode pad; a package, including a placement surface on which the piezoelectric vibrating piece is placed as opposed to the lower surface of the piezoelectric vibrating piece, and an adhesion pad formed on the placement surface; and a conductive adhesive, securing the piezoelectric vibrating piece to the package and electrically connecting the adhesion pad to the electrode pad. An adhesive is applied on the top surface of the piezoelectric vibrating piece and between the conductive adhesive and the excitation electrode. 1. A piezoelectric device , comprising:a piezoelectric vibrating piece, having an outer shape formed into a rectangular shape, and the piezoelectric vibrating piece including: an excitation electrode formed on both principal surfaces which are a top surface and a lower surface, an electrode pad formed at both ends of one short side, and an extraction electrode extracted from the excitation electrode to the electrode pad to be electrically connected to the electrode pad;a package, including a placement surface on which the piezoelectric vibrating piece is placed as opposed to the lower surface of the piezoelectric vibrating piece, and an adhesion pad formed on the placement surface; anda conductive adhesive, securing the piezoelectric vibrating piece to the package and electrically connects the adhesion pad to the electrode pad,wherein at the piezoelectric vibrating piece, an adhesive is applied on the top surface of the piezoelectric vibrating piece, and the adhesive is between the conductive adhesive and the excitation electrode.2. ...

Electronic component manufacturing method, vibrator device, electronic apparatus, and vehicle

An electronic component manufacturing method, in which a notch and a concave portion are formed in a substrate, includes forming an etching mask in which a maximum width of a first mask portion which forms a width between two side surfaces of the concave portion along a longitudinal direction, when the substrate is seen in a plan view from a direction perpendicular to a surface of the substrate having the concave portion formed therein, is smaller than a width of a second mask portion which forms a minimum width of an opening of the notch, and forming the notch and the concave portion by performing dry etching processing on the substrate.

Vibrator Device, Vibrator, And Electronic Device

A vibrator device includes a first excitation electrode, a first pad electrode, and a first drawn wiring line that are disposed at a first surface of a vibrator element, a second excitation electrode, a second pad electrode, and a second drawn wiring line that are disposed at a second surface of the vibrator element, and a spiral first electrode pattern disposed at the first surface of the vibrator element. The first excitation electrode and the second excitation electrode are disposed so as to face each other with the vibrator element therebetween. A first central end section of the first electrode pattern is electrically coupled to the second drawn wiring line via a through electrode provided in the vibrator element. A first outer circumferential end section of the first electrode pattern is electrically coupled to the first drawn wiring line. The first drawn wiring line is electrically coupled to at least one of the first excitation electrode and the first pad electrode. The second drawn wiring line is electrically coupled to at least one of the second excitation electrode and the second pad electrode. 1. A vibrator device comprising:a first excitation electrode, a first pad electrode, and a first drawn wiring line that are disposed at one surface of a vibrator element;a second excitation electrode, a second pad electrode, and a second drawn wiring line that are disposed at another surface of the vibrator element; anda spiral first electrode pattern disposed at the one surface of the vibrator element,wherein the first excitation electrode and the second excitation electrode are disposed so as to face each other with the vibrator element therebetween,a central end section of the first electrode pattern is electrically coupled to the second drawn wiring line via a through electrode provided in the vibrator element,an outer circumferential end section of the first electrode pattern is electrically coupled to the first drawn wiring line,the first drawn wiring line is ...

Method For Manufacturing Vibration Element

A method for manufacturing a vibration element includes: a preparing step of preparing a quartz crystal substrate having a first surface and a second surface; a protective film forming step of forming a protective film on the first surface of the quartz crystal substrate, excluding groove forming regions where grooves are formed and an inter-arm region located between a first vibrating arm forming region where a first vibrating arm is formed and a second vibrating arm forming region where a second vibrating arm is formed; and a dry etching step of dry etching the quartz crystal substrate from a first surface side via the protective film and forming the grooves and contours of the first vibrating arm and the second vibrating arm. Wa/Aa<1, wherein Wa indicates a depth of the grooves formed in the dry etching step, and Aa indicates a depth of the contours.

TUNING-FORK CRYSTAL UNIT AND PACKAGE

There is provided a tuning-fork crystal unit that includes a tuning-fork piece, excitation electrodes, a package, wiring patterns and frequency adjustment portions. The tuning-fork piece has a base portion and at least two vibration arms. The at least two vibration arms extend from the base portion. The excitation electrodes are disposed at the tuning-fork piece. The package houses the tuning-fork piece. The wiring patterns are disposed at a surface of the package which houses the tuning-fork piece. The wiring patterns are a part of wirings connecting the excitation electrodes to outside. The frequency adjustment portions are disposed at distal ends of the vibration aims. The wiring patterns have parts positioned near the frequency adjustment portions. The parts are disposed at regions of the package hidden by the frequency adjustment portions. 1. A tuning-fork crystal unit , comprising:a tuning-fork piece, having a base portion and at least two vibration arms, and the at least two vibration arms extending from the base portion;excitation electrodes, being disposed at the tuning-fork piece;a package that houses the tuning-fork piece;wiring patterns, being disposed at a surface of the package which houses the tuning-fork piece, and the wiring patterns being a part of wirings connecting the excitation electrodes to an outside; andfrequency adjustment portions, being disposed at distal ends of the vibration aims,wherein the wiring patterns have parts positioned near the frequency adjustment portions, the parts being disposed at regions of the package hidden by the frequency adjustment portions.2. A tuning-fork crystal unit , comprising:a tuning-fork piece, having a base portion and at least two vibration arms, and the at least two vibration arms extending from the base portion;excitation electrodes, being disposed at the tuning-fork piece;a package that houses the tuning-fork piece;wiring patterns, being disposed at a surface of the package which houses the tuning-fork ...

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE AND MOBILE OBJECT

A resonator element includes a quartz crystal resonator blank provided with a base portion, vibrating arms extending from one end side of the base portion, a connecting portion which is disposed on the other end side of the base portion, and a coupling portion, located between the base portion and the connecting portion, which couples the base portion to the connecting portion. When a thickness of the quartz crystal resonator blank is set to T, a width of the base portion is set to W1, and a width of the coupling portion is set to W2, a relation of 110 μm≦T≦210 μm is satisfied, and a relation of 0.469≦W2/W1≦0.871 is satisfied. 1. A resonator element comprising a resonator blank which is provided with:a base portion;a vibrating arm that extends out in a first direction from one end side of the base portion, when seen in plan view;a connecting portion which is disposed on the other end side of the base portion, when seen in plan view; anda coupling portion, located between the base portion and the connecting portion when seen in plan view, which couples the base portion to the connecting portion,wherein when a thickness of the resonator blank is set to T,a width of the base portion along a second direction intersecting the first direction is set to W1, anda width of the coupling portion along the second direction is set to W2,a relation of 110 μm≦T≦210 μm is satisfied, anda relation of 0.469≦W2/W1≦0.871 is satisfied.2. The resonator element according to claim 1 , wherein a relation of 130 μm≦T≦210 μm is satisfied.3. A resonator element comprising a resonator blank which is provided with:a base portion;a vibrating arm that extends out in a first direction from one end side of the base portion, when seen in plan view;a connecting portion which is disposed on the other end side of the base portion, when seen in plan view; anda coupling portion, located between the base portion and the connecting portion when seen in plan view, which couples the base portion to the ...

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOBILE OBJECT

A resonator element includes a base section, a pair of vibrating arms extending from the base section, and a holding arm extending from the base section between the pair of vibrating arms. The vibrating arms include arm sections extending from the base section and hammerheads provided at the distal end sections of the arm sections. When the mass of the vibrating arms is represented as M1 and the mass of the holding arm is represented as M2, a relation of M1>M2 is satisfied. 1. A resonator element comprising:a base section;a pair of vibrating arms extending from the base section along a first direction and arranged side by side along a second direction, which crosses the first direction, in plan view; anda holding arm arranged between the pair of vibrating arms and extending from the base section along the first direction in plan view, whereinwhen mass of each of the pair of vibrating arms is represented as M1 and mass of the holding arm is represented as M2, a relation of M1>M2 is satisfied.2. The resonator element according to claim 1 , wherein a weight section; and', 'an arm section arranged between the base section and the weight section in plan view, and, 'the vibrating arm includeswhen mass of the weight section is represented as M3, a relation of M2<2×M3 is satisfied.3. The resonator element according to claim 2 , wherein a relation of M2M5 is satisfied.6. The resonator element according to claim 1 , whereina fixed section attached to a target object is provided in the holding arm, andthe fixed section overlaps a center of gravity of a structure including the base section, the vibrating arm, and the holding arm in plan view.7. The resonator ...

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOBILE OBJECT

A resonator element includes a base, a quartz crystal resonator blank which is integrally disposed with the base, and has a pair of vibrating arms which are disposed in parallel in an X axial direction, and extend from the base in a Y′ axial direction, the vibrating arms include arms, hammerheads which are positioned on tip end sides of the arms, and are longer than the arms in the X axial direction, a relationship of 0.033×T [μm] Подробнее

RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE OBJECT

Grooves are provided on two main surfaces of a vibration arm. When a thickness of the vibration arm is T, a width of the main surface between an outer edge of the vibration arm and the groove in a plan view along a direction orthogonal to the extending direction of the main surface is W, a sum of depths of the grooves is ta, and ta/T is η, a region that satisfies a relationship of 4.236×10×η−8.473×10×η+4.414×10 [μm]≦W [μm]≦−3.367×10×η+7.112×10×η−2.352×10 [μm], and 0.75≦η<1.00 is present on at least a part of the vibration arm in the extending direction. When a length of the vibration arm in the extending direction is L, and a length of the weight section in the extending direction is H, a relationship of 0.012 Подробнее

OSCILLATOR, ELECTRONIC APPARATUS AND VEHICLE

Provided is an oscillator including a resonator which includes a resonator element and a resonator element container accommodating the resonator element, an integrated circuit element which includes an inductor, and a nonconductive spacer member, in which the resonator and the integrated circuit element are stacked above each other, the resonator has a metal member, and the spacer member is provided between the resonator and the integrated circuit element. 1. An oscillator comprising:a resonator which includes a resonator element and a resonator element container accommodating the resonator element;an integrated circuit element which includes an inductor; anda nonconductive spacer member, whereinthe resonator and the integrated circuit element are stacked above each other,the resonator has a metal member, andthe spacer member is provided between the resonator and the integrated circuit element.2. The oscillator according to claim 1 , whereina thickness of the spacer member is ½ or more of an outer diameter of the inductor.3. The oscillator according to claim 1 , wherein a base provided with a concave portion in which the resonator element is accommodated, and', 'a lid which is the metal member, and, 'the resonator element container includes'}the resonator is mounted over the spacer member such that the lid faces the integrated circuit element.4. An oscillator comprising:a resonator which includes a resonator element and a resonator element container accommodating the resonator element;an integrated circuit element which includes an inductor; anda conductive spacer member, whereinthe resonator and the integrated circuit element are stacked above each other,the resonator has a metal member,the spacer member is provided between the resonator and the integrated circuit element, and electrically couples the resonator and the integrated circuit element to each other, andthe spacer member and the inductor do not overlap with each other when viewed in plan view.5. The ...

PIEZOELECTRIC DEVICE

A piezoelectric device includes a piezoelectric element, a package, a temperature sensitive component and a conductive adhesive. The package includes a base body and a connection conductor. The base body has electric insulation and configures a space. The space is sealed and holds the piezoelectric element. The connection conductor is located on a predetermined surface of the base body. The predetermined surface is on an outer side relative to the space. The temperature sensitive component includes apart terminal and converts temperature to an electrical signal. The conductive adhesive is configured by a thermosetting resin containing a conductive filler and is bonded to the connection conductor and the part terminal. 1. A piezoelectric device comprisinga piezoelectric element, a base body having electric insulation and configuring a space which is sealed and holds the piezoelectric element and', 'a connection conductor located on a predetermined surface of the base body, the predetermined surface being on an outer side relative to the space,, 'a package which comprises'}a temperature sensitive component which comprises a part terminal and converts temperature to an electrical signal, anda conductive adhesive which is configured by a thermosetting resin containing a conductive filler and is bonded to the connection conductor and the part terminal.2. The piezoelectric device according to claim 1 , wherein:in a plan view of the predetermined surface, the part terminal and the connection conductor are separated from each other, an element corresponding part which is bonded to the part terminal and', 'a wiring part which connects the element corresponding part and the connection conductor, and, 'the conductive adhesive comprises'}the element corresponding part and the wiring part directly contact the predetermined surface having electric insulation.3. The piezoelectric device according to claim 1 , further comprising an underfill filled between the predetermined surface ...

Surface mounting quartz crystal unit and method of fabricating the same

A surface mounting quartz crystal unit includes a ceramic substrate, a holding terminal, a metal cover, a signal line terminal and a ground terminal, and a metal layer. The holding terminal holds a crystal resonator on the substrate. The metal cover is arranged to cover the crystal resonator. The signal line terminal and a ground terminal are formed on a rear surface of the substrate. The metal layer bonds the substrate to the metal cover at a part on a front surface of the substrate. The part is in contact with the metal cover. The substrate has a first through via inside the substrate. The first through via connects the holding terminal to the signal line terminal. The substrate has a through conductor at the substrate. The through conductor connects the metal layer to the ground terminal.

Piezoelectric resonator and method for manufacturing the same

A piezoelectric resonator that includes a single crystal Si layer, a piezoelectric thin film formed from aluminum nitride and provided on the single crystal Si layer, and first and second electrodes provided so as to sandwich the piezoelectric thin film. An element excluding nitrogen and aluminum is doped into the piezoelectric thin film formed from aluminum nitride, and a synthetic acoustic velocity of portions of the piezoelectric resonator other than the single crystal Si layer substantially coincide with the acoustic velocity of the single crystal Si layer.

PIEZOELECTRIC VIBRATION ELEMENT AND PIEZOELECTRIC VIBRATION DEVICE

A crystal vibration element includes a plate shaped crystal blank including a pair of long sides and pair of short sides when viewed on a plane, and a pair of excitation electrodes superimposed on the two major surfaces of the crystal blank. When viewed on a plane, each of the pair of excitation electrodes includes a pair of short edges extending along a pair of short sides on inner sides of the pair of short sides, and a pair of long edges extending along a pair of long sides on inner sides of the pair of long sides. The pair of short edges are shaped as straight line parallel to the pair of short sides, while the pair of long edges are shaped outwardly bulging when viewed on a plane. 1. A piezoelectric vibration element comprisinga plate shaped piezoelectric blank comprising a pair of long sides and pair of short sides when viewed on a plane anda pair of excitation electrodes superimposed on the two major surfaces of the piezoelectric blank, wherein, a pair of short edges extending along the pair of short sides on an inner sides of the pair of short sides and', 'a pair of long edges extending along the pair of long sides on an inner sides of the pair of long sides,, 'when viewed on a plane, each of the pair of excitation electrodes comprises'}the pair of short edges are shaped as straight lines parallel to the pair of short sides, andthe pair of long edges are shaped outwardly bulging when viewed on a plane.2. The piezoelectric vibration element according to claim 1 , wherein the piezoelectric blank forms a flat plate shape.3. The piezoelectric vibration element according to claim 1 , wherein a mesa part on which the pair of excitation electrodes are superimposed and', 'an outer circumferential part which is thinner than the mesa part and surrounds the mesa part when viewed on a plane,, 'the piezoelectric blank comprises'}the mesa part, when viewed on a plane, is shaped so as to comprise a pair of second long sides which are parallel to the above pair of long ...

Piezoelectric vibrating piece and piezoelectric device

A piezoelectric vibrating piece includes a piezoelectric substrate and excitation electrodes. The piezoelectric substrate is formed in a flat plate shape and vibrates in a thickness-shear vibration mode. The excitation electrodes are formed on respective both principal surfaces of the piezoelectric substrate and each include a main thickness portion and a flat portion. The main thickness portion has a first thickness. The flat portion is formed in a peripheral area of the main thickness portion and has a second thickness that is thinner than the first thickness between from a portion contacting the main thickness portion to an outermost periphery of the excitation electrode, extends from the portion contacting the main thickness portion to the outermost periphery of the excitation electrode, and has a width formed to have a length of 0.63 times or more and 1.88 times or less of a flexural wavelength of an unnecessary vibration.

TUNING FORK-TYPE VIBRATOR

A tuning fork-type vibration piece is provided, in which a cushioning portion is formed on the base of a package to make contact with abutting portions of arm portions which are any parts but their edges, and the abutting portions of the arm portions allowed to contact the cushioning portion are electrodeless regions including no electrode, which prevents the risk of frequency fluctuations that may occur in case an electrode is chipped off by possible contact with the cushioning portion. 1. A tuning fork-type vibrator , comprising:a tuning fork-type vibration piece that comprises a stem portion and a plurality of arm portions extending from the stem portion; anda package including a housing portion in which the tuning fork-type vibration piece is housed,whereinthe stem portion is joined to an electrode in the housing portion of the package,whereinthe housing portion of the package has a cushioning portion formed in a certain thickness on a bottom surface thereof,whereinthe cushioning portion is formed to avoid contact of edges of the plurality of arm portions with the bottom surface by allowing abutting portions of the plurality of arm portions to contact the cushioning portion in case the plurality of arm portions on a free end side of the tuning fork-type vibration piece are warped toward the bottom surface, the abutting portions being any parts but the edges of plurality of arm portions,and whereinthe abutting portions are electrodeless regions where the tuning fork-type vibration piece has a raw surface thereof exposed in the absence of any electrode.2. A tuning fork-type vibrator , comprisinga tuning fork-type vibration piece having a stem portion and a plurality of arm portions extending from the stem portion; anda package including a housing portion in which the tuning fork-type vibration piece is housed,whereinthe stem portion is joined to an electrode in the housing portion of the package,whereinthe housing portion of the package has a cushioning portion ...

RESONATOR AND RESONANT DEVICE

A resonator is provided that includes a vibrating portion including a three or more vibrating arms each having a fixed end and a free end, with at least two of the vibrating arms configured to bend out of plane in different phases, and a base having a front end connected to the fixed end of each vibrating arm and a rear end opposite from the front end. Moreover, a frame is disposed at least partially around the vibrating portion, a holding arm is provided between the vibrating portion and the holding portion and includes a first end connected to the base and a second end connected to the frame, and a plurality of holes disposed in the vibrating portion. Moreover, the plurality of holes are each formed in a region between any one pair of adjacent two of the plurality of vibrating arms in the base portion. 1. A resonator comprising:a vibrating portion including at least three vibrating arms each having a fixed end and a free end, with at least two of the vibrating arms configured to bend out of plane in different phases, and a base having a front end coupled to the fixed end of each vibrating arm and a rear end opposite from the front end;a frame disposed at least partially around the vibrating portion;at least one holding arm disposed between the vibrating portion and the frame and including a first end connected to the base and a second end connected to the frame; anda plurality of holes disposed in the vibrating portion and each disposed in a region between a respective pair of adjacent vibrating arms in the base.2. The resonator according to claim 1 , wherein the plurality of holes is disposed in a region closer to the front end of the base than the rear end of the base.3. The resonator according to claim 2 , wherein the plurality of holes each is disposed in a region between the adjacent vibrating arms that are configured to vibrate in opposite phases from each other in the base.4. The resonator according to claim 2 , wherein the plurality of holes are each ...

VIBRATOR ELEMENT, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

A tuning fork type vibrator element, as a vibrator element, includes a base formed on a plane including a first axis and a second axis orthogonal to the first axis, a connection portion extending in a first axis direction from the base, with a thickness thereof being smaller than that of the base and a vibrating arm extending in the first axis direction from one end portion of the connection portion, with a thickness thereof being the same as that of the connection portion, in which the vibrating arm performs flexural vibration along a vertical direction with respect to the plane, and in which the connection portion is provided such that a relationship between a length L2 in the first axis direction of the connection portion and a length L1 in the first axis direction of the vibrating arm falls within a range of L1/15≦L2≦L1. 1. A vibrator element comprising:a base that includes a plane that includes a first axis and a second axis orthogonal to the first axis;a connection portion that is smaller in thickness than the base and extends along the first axis from the base; anda vibrating arm that extends along the first axis from one end portion of the connection portion,wherein the vibrating arm performs flexural vibration in a direction that intersects with respect to the plane, andwherein a length L2 of the connection portion in a first axis direction and a length L1 of the vibrating arm in the first axis direction fall within a range of L1/15≦L2≦L1.2. The vibrator element according to claim 1 ,wherein the vibrating arm includes a first vibrating arm and a second vibrating arm parallel to the first vibrating arm, andwherein the first vibrating arm and the second vibrating arm perform the flexural vibration in opposite directions to each other.3. The vibrator element according to claim 1 ,wherein a step in a thickness direction is not present between the vibrating arm and the connection portion.4. The vibrator element according to claim 1 ,wherein the base, the ...

Piezoelectric vibrator, oscillator, electronic apparatus and radio controlled timepiece

A piezoelectric vibrator is provided in which a piezoelectric vibrating piece is accommodated in a package, the piezoelectric vibrating piece including: a pair of vibrating arm sections; a base section to which each base end of the pair of vibrating arm sections is connected; and a support arm section that is connected to the base section between the pair of vibrating arm sections and extends from the base section to the same side as the vibrating arm sections, in which the piezoelectric vibrating piece is supported within the package in mount sections provided in the support arm section, and in which the mount sections are provided in a region which is defined between a position of which a distance from an end section of the base section opposite to the side where the support arm section is connected to the side of a leading end of the support arm section is 25% of a width dimension of the base section along the width direction and a position of which the distance is 65% of the width dimension.