Photodelineable coatings from hydrogen silsesquioxane resin
Номер патента: CA2064971A1
Опубликовано: 23-10-1992
Автор(ы): Keith Winton Michael, Loren Andrew Haluska
Принадлежит: Dow Corning Corporation, Keith Winton Michael, Loren Andrew Haluska
Опубликовано: 23-10-1992
Автор(ы): Keith Winton Michael, Loren Andrew Haluska
Принадлежит: Dow Corning Corporation, Keith Winton Michael, Loren Andrew Haluska
Реферат: PHOTODELINEABLE COATINGS FROM HYDROGEN SILSESQUIOXANE RESIN ABSTRACT The present invention relates to a method of forming patterned coatings on substrates, especially electronic devices, by negative resist techniques. The method comprises applying a preceramic coating comprising hydrogen silsesquioxane resin and an initiator onto the substrate and then radiating a selected region of the coating for a time sufficient to cure the resin. The uncured coating is then rinsed away leaving the patterned coating.
Photodelineable coatings from hydrogen silsesquioxane resin
Номер патента: KR100214111B1. Автор: 앤드류 할루스카 로렌,윈톤 마이클 케이트. Владелец: 맥켈러 로버트 루이스. Дата публикации: 1999-08-02.