Magnet bar with attached sensor
Номер патента: EP3948924A1
Опубликовано: 09-02-2022
Автор(ы): Francis Taylor HUMBLE, Ivan Van De Putte, Wilmert De Bosscher
Принадлежит: Soleras Advanced Coatings Bv
Опубликовано: 09-02-2022
Автор(ы): Francis Taylor HUMBLE, Ivan Van De Putte, Wilmert De Bosscher
Принадлежит: Soleras Advanced Coatings Bv
Реферат: A magnet bar structure (101) for a sputter magnetron system comprises a magnet bar (102) having attached to it a sensing device (110) for sensing intrinsic and/or extrinsic properties of a tubular sputtering target (200) when mounted over the magnet bar structure (101).
Magnet bar with attached sensor
Номер патента: US20220157582A1. Автор: Wilmert De Bosscher,Ivan Van De Putte,Francis Taylor HUMBLE. Владелец: Soleras Advanced Coatings Bv. Дата публикации: 2022-05-19.