Reticle rack system
Номер патента: EP3387490A1
Опубликовано: 17-10-2018
Автор(ы): Andy Escandon, Gilbert Hernandez, Joanne Valestin, Ryan Irish, Sean Kudel, Spencer Read
Принадлежит: Microchip Technology Inc
Опубликовано: 17-10-2018
Автор(ы): Andy Escandon, Gilbert Hernandez, Joanne Valestin, Ryan Irish, Sean Kudel, Spencer Read
Принадлежит: Microchip Technology Inc
Реферат: The present disclosure relates to semiconductor manufacturing, in particular to reticle rack systems. The teachings of the present disclosure may be embodied in a reticle rack unit including a frame with four uprights and multiple crossbars and four turnstiles. The frame may have a longest dimension defining a front side and a back side. The four turnstiles may be mounted to the frame to pivot around a respective rotational axis parallel to the four uprights. Each turnstile may define a plurality of reticle nests sized to hold reticles.
Reticle rack system
Номер патента: US09786536B2. Автор: Spencer Read,Ryan Irish,Sean Kudel,Andy Escandon,Gilbert Hernandez,Joanne Valestin. Владелец: Microchip Technology Inc. Дата публикации: 2017-10-10.