히팅 모듈 및 이를 갖는 열처리 장치
The present invention refers to heating process and having the same search device relates to heat treatment, more rapidly and to reduce a memory space, thermally treating substrates device by laminating or powder coating and can be tapped in the introduction and removal, heat treatment away from the substrate during processing a fume evacuating a a heating can be having the same module and relates to heat treatment device. Generally discharging commodities by throwing a large substrate or more 2200 × 500 mm 50 inch or more for producing display of line 8 the is production line generation, the operation number display main recent these are provided to improve yield and further provided to expand production line 8 generation of wet liquid to flow down. As such substrate for display, taking out the molten resin is also actuated, the device for heat-treating substrate should. Number of display panel process the substrate during the inorganic, organic materials and/or for forming semiconductor device under temperature profile various various semiconductor region is. being performed. The, display panel entirely so that it improves productivity, one process chamber a multiplicity the substrate of the. is preferably and annealing absportion. In addition, the large substrate such as a glass substrate in a heat treating process to enter process chamber such as robotic arm and outer surface of a copper wire rod channel through the first must be covers a portion of upper and side. standby is rotated and transferred. Of the present invention via the second inverter becomes a high area slidably the number can be tapped in the method and a heating module and a heat treatment device having the same number under public affairs 410 is pulled out from the engagement. Of the present invention other input means according to an inputted number area circumjacent thereabout, and a minienvironment has an easy and heating process and a heat treatment device having the same number under public affairs 410 is pulled out from the engagement. Another of the present invention via the second inverter becomes a high heat-treating the substrate number area as well as heat treatment away from the substrate during processing a fume evacuating a a heating module and can be a heat treatment having the same device number under public affairs 410 is pulled out from the engagement. In the embodiment according to one of the present invention heating process a frame; said nozzle coupled to frame; and, said nozzle is seated on the flat heater includes. The apparatus comprises a loading unit slidably said frame is mounted on the heat treatment device can be tapped or by using only can be member is fitted slidably. Said frame includes a heat insulator cover which are mounted thereon and provided with, the nozzle said a heat reflection plate through to a heat treatment device can be coupled to exhaust. Said a heat reflection plate a heat treatment can be on the device. Power supply cable a heat reflection plate through the said flat heater electrically may be connected to. Hollow nozzle said to a tube form, hole is plurality of nozzles can be formed. Said flat heater the multiple support for supporting a substrate can be lift device and different pallet structure. Said, in the form of square frame, the nozzle said said frame. may be arranged in in the housing in a horizontal direction. In addition, the heat treatment device of the present invention one in the embodiment according to the above-mentioned heating process a sliding manner is or drawing the apparatus comprises a loading unit. Said heating process a heat treatment by a heat treatment device installed in a spout through which the charging rail can be or drawing. Said heating process a process of heat treatment, thereby exhibiting a multiplicity is placed along the vertical direction the stack to the device may be. Method and slidably the present invention refers to a heating module and can be tapped in the heat treatment. under public affairs a device having the same number. I.e., heating process on both sides of the present invention refers to are arranged on both sides of the sliding member, by mounting a rail in heat treatment device, heating process in a sliding manner so drawing or charged heat treatment device. Replace an abraded nut capable of interrupting an the present invention refers to the heating module and a heat treatment device. under public affairs having the same number. I.e., the present invention refers to down lift and air lift ball transfer charged into a heating process using heat-treating device or by drawing, heating process for charging process for the work and outputs a relay driving signal. hereinafter. The present invention refers to heat treatment as well as for thermally processing substrates away from the substrate during processing a fume evacuating a a heating module and can be a heat treatment device. under public affairs having the same number. I.e., the present invention refers to heating process this reputation includes a heater by heat treatment the substrate mounted thereon can be, heating process in addition nozzle itself below it by the inclusion of the substrate onto the sidewall, and forcibly sucks fumes remaining over generated from outputs a relay driving signal. allow exhaled. The 1b and 1a also one of the present invention is shown that heating process in the embodiment according to a perspective view shown in the state control and temperature is cross-sectional drawing. The 2b and 2a also in the embodiment according to one of the present invention heating process (flat heater not shown) is shown that a perspective view shown in the state control and fume is cross-sectional drawing. The 3a also in the embodiment according to one of the present invention having the same heating process and it is shown a perspective view and a heat treatment device, the exhaust device only also 3b is shown in the perspective view. Also 4a and 4b one of the present invention heating process is thermally treated in the embodiment according to the device into the second state and shown in the side view and perspective view, the heating process is heat treatment absportion also 4c it is shown a device is a cross-sectional drawing. The 5a also in the embodiment according to one of the present invention heating process is down the and perspective view a is shown that when it is drawn, a heat treatment device 5b and 5c also installed, and a rail and up-down lift gearing of transfer ball lift the contact holes are shaped for one example is shown in the perspective view. Also 6a to 6e also pull-out of the heating process in the embodiment according to one of the present invention is shown that method is a perspective view. Hereinafter, with an reference to drawing to illustrate the time as large as that of the root control part of the present invention preferred embodiment. Person with skill in the art to the in the art of the present invention in the embodiment for the present invention number to describe the concave which is ball, for a variety of in the embodiment a may be deformed of means and in different phases, in the embodiment of the present invention to range not limited to. Rather, these in the embodiment the disclosure a process enabling the complete and further fidelity, to one skilled in the art of the present invention to and complete transfer event is ball number.. In addition, thickness of each layer in drawing of hereinafter described and size picture for elcellent distinctions, and is,, on similar or varying drawing a ., " refers to identical elements. As used in the present specification, terms "and/or" listed in the to test the corresponding devices and at least one either item includes any combination. The present specification specific term used in the in the embodiment is used to describe the, number of the present invention is not only for. As used in the present specification, a contextually other short-lived a moment when a is supported by the upper case and ramyon an and controlled in a more precise, can be include the type of plurality. In addition, when used in the present specification "(comprise) includes" and/or "(comprising) including" the shape, step, number, operation, member, element and/or presence of these groups is to specify which, one or more diverse shapes, step, number, operation, member, element and/or the presence or non-presence of these groups is not addition back number. Number 1 in the present specification, a set of terms, such as number 2 various member, component, region, layers and/or parts used to illustrate the but, these members, component, region, layers and/or parts must not be defined by these to terms of.. These terms a separate fixing member, component, region, layer or portion from a different region, for to distinguish from or partially layer is carried out by using an acidulous-emitting layer. Thus, the above-mentioned number 1 member hereinafter, component, region, layer or portion without away from teachings of the present invention number 2 member, component, region, layer or partially can be refers to. Also refers to surface 1a and 1b, in the embodiment according to one of the present invention heating process (100) for cross-sectional drawing for a status control and temperature perspective view is showing. Also refers to surface 2a and 2b, in the embodiment according to one of the present invention heating process (100) (flat heater (130) the not shown) for cross-sectional drawing for a status control and fume perspective view is showing. Also 1a and 2a as shown in, the present invention according to heating process (100) a frame (110), plurality of horizontal pipe or nozzle (120) and exhaust nozzle (120) is provided with a flat-plate heater rests upon (130) includes. In addition, the present invention refers to frame (110) coupled to heat insulation cover (140) may include further. Frame (110) approximately square or rectangular constitution: the storage capacitor, is hollow a cross-sectional shape of a square approximately. may be in the form. In addition, frame (110) to undercut on both sides, is the opposite sliding member (111) is formed by, heating process (100) device is thermally treated (200) and being slideable manner hereinafter for to method and/or drawing can be KIPO &. Plurality of horizontal pipe or nozzle (120) a frame (110) inside in the housing in a horizontal direction by a predetermined distance and arranged and, a tube type is hollow is is, opposing hole plurality of nozzles on both sides (121) is can be formed. Thus, such water level tube or exhaust nozzle (120) by means of controlling the substrate during processing (101) generated by the upper cover and the lower for the fume shielder with the pipes be easily discharged KIPO & hereinafter. Also 2a in water level tube or exhaust nozzle (120) about a a plurality of arrow pelletizer shown in the States that are is discharged continuously, . Flat heater (130) a frame (110) and exhaust nozzle (120) is rests upon, substrate (101) to heat in a public box by number, substrate (101) so is thermally treated. Such flat heater (130) has a lateral edge of the heating coil is formed with the press member but may be in the form of, the present invention is not limited is the component is no longer required. In particular, flat heater (130) is nozzle (120) by being located directly on, flat heater (130) nozzle fan is (120) is directly on. Thus, nozzle (120) in fume (for example, polyimide) coagulation temperature of without is lowered to a temperature to which it is bonded, the nozzle (120) by the upper cover and the lower fume through organic material to. sucked and discharged. I.e., polyimide fume is such that at approximately 80 °C hereinafter of adhesive coagulation even when the electric conductor is heated where it is heated, nozzle (120) flat panel heater (130) is in direct contact with the body since the, nozzle (120) always temperature of 80 °C and and downwardly on a curved portion or more of, the nozzle (120) organic substance by means interior of external coefficient of expansion are not adhesively bonded is solidified to article quickly allow exhaled is. Furthermore, in the present invention and the exhaust heater one structure by integrally formed in a module of, and in a regular device, is according to many substrates (101) defined-heat treatment device (200) before drawing the yarn and heating inner space of is enabled. In addition, flat heater (130) the substrate (101) for supporting a plurality of support pin (131) is installed in , the substrates (101) the heater (130) is transferred radiant heat from reaching the from. Together, this support pin (131) a substrate by (101) has scratches on the, no delamination occurs and the. Wherein, flat heater (130) reflects a the upper surface of a, for example, a described but, not the component is no longer required the present invention are defined, flat shaped depending upon the desired shape of the substrate which is heat-processed may not KIPO &. For example, curved substrate is thermally treated when, flat heater (130) takes the form curved also upper surface of. On the other hand, a heat reflection plate (140) a frame (110) is arranged on the rear surface of is coupled, through nozzle of simple structure (120) holes is KIPO & is. Discriminated when personal information again under, and a heat reflection plate (140) through exhaust nozzle (120) to heating device (200) exhaust module (210) is coupled is. Thus, nozzle (120) through fume is such that at exhaust module (210) is transferred to a. Together, this insulation cover (140) due to the presence of an adiabatic function generates a, heat treatment device (200) of can be covered. In one example, a heat reflection plate (140) the stainless steel plate in a number in a form which is different form constructing comprises isopropyl alcohol vapor and nitrogen gas bath, heat treatment device (200) the loss of heat in are provided for detecting an adiabatic cover (140) contact reference instead of the outside is through outputs a relay driving signal.. Together, flat heater (130) intended for the supply the power supply cable (132) connected to, this power supply cable (132) a thermal insulator cover (140) penetrates the a. Together, a heat reflection plate (140) outside of the this power supply cable (132) heater around the opening (130) for supplying a, and a power supply unit (141) can be has a. Furthermore, a heat reflection plate (140) outside of the heating process (100) for a device readily hot worked hereinafter (200) or charged, heat treatment device (200) handle so that it can be out from the chamber, air is can be has a. The, heating process the present invention according to (100) a frame (110), water level tube or exhaust nozzle (120), flat heater (130), power supply cable (132) and heat shield cover (140) actuators characterized in that main. Such heating process (100) a heat treatment by a heat treatment device (200) lies in the housing in a horizontal direction of, cutting the stack where it can be layer is removed therefrom, the substrates (101) also disposed in a horizontal direction and the vertical having a plenty of light out in a condition wherein a the stack where it. may be heat treated. In addition, substrate during a heat treatment (101) resulting from a fume is such that at heating process (100) a nozzle (120) directly outside through the exhaust can be. I.e., also as shown in 1b, heating process (100) a horizontal direction positioned at the, is stacked in a vertical direction, each heating process (100) substrate thereon (101) is the lamp screen is placed at the. I.e., heating process (100) a nozzle (120) on the flat heater (130) to the, flat heater (130) provided is a carrying pin (131) substrate thereon (101) the state, substrate (101) is is thermally treated. Performance to the surface of glass other, flat heater (130) from radiant heat from reaching the substrate (101) is transmitted to the solenoid housing and, substrate (101) is is thermally treated. In addition, also as shown in 2b, heating process (100) a horizontal direction positioned at the, stacked in a vertical direction, each heating process (100) the substrate onto the sidewall, and on (101) originating from the fume is such that at heating process (100) a nozzle (120) is exhaust outside through the. I.e., lower of heating process (100) is mounted and the substrate which is heat-processed (101) formed on the inner wall of the fume generated from heating process (100) to and the exhaust module (210) is exhaust outside through the. As such, substrate (101) resulting from a fume directly a top film provided on an upper nozzle (120) outside through the rapid of exhaust, heat treatment to be loaded in the S22. an exhaust process is. Also refers to surface 3a, in the embodiment according to one of the present invention heating process (100) and having the same heat treatment device (200) and it is shown for perspective view, also refers to surface 3b, exhaust module (210) for. it is shown perspective view. As shown in 3a also, heat treatment device (200) is hollow parallelepiped is formed in the shape of approximately, this heat treatment, a device (200) described a heating process (100) are the apparatus comprises a loading unit the horizon, is the stack to the is placed along the vertical direction the skin treating makes numerous. Thus, the present invention according to heat treatment device (200) the substrate (101) and the substrate (101) is minimized by a signal terminal and a ground terminal, minimal space maximum number of substrate (101) permits heat treatment. On the other hand, heating process on (100) an exhaust nozzle (120) by means of controlling it to be loaded in the exhaust the fume shielder with described. To this end the present invention refers to heating process (100) a nozzle (120) is thermally treated device (200) the outside exhaust module (210) association with a. I.e., also as shown in 3b, heating process (100) a nozzle (120) a thermal insulator cover (140) where the bar is extended and rear through the and, nozzle extended and (120) the exhaust tube number 1 (211) is engagement is distance extension constant horizontal direction. Exhaust tube in addition number 1 (211) number 2 the exhaust tube (212) is being, number 2 such exhaust tube (212) has the vertically been KIPO &. I.e., number 2 exhaust tube (212) a heat treatment device (200), and is contained in a bore rear direction perpendicular to form the erected functional. Wherein, heating process (100) in a form which is different form the stack to the a vertical direction is calculated from a of a distributor to, exhaust tube number 1 (211) also a shape vertically arranged. Together, a plurality of such number 1 exhaust tube (211) number 2 erected functional direction a vertical exhaust tube (212) and is coupled to. Wherein, also as shown in 3b, nozzle (120) the side plurality of nozzles hole (121) is can be formed. Also refers to surface 4a and 4b, in the embodiment according to one of the present invention heating process (100) device is thermally treated (200) into the second for a status perspective view and side view and it is shown, also refers to surface 4c, heating process (100) is absportion heat treatment device (200) of it is shown KIPO & cross-sectional drawing. Also 4a and 4b as shown in, the present invention according to heating process (100) a sliding manner heat treatment device (200) which drawn or charged, to this end heating process (100) both sides of i.e., frame (110) arranged on both sides of the sliding member (111) can be is provided. Together, such heating process (100) a heat treatment by a heat treatment device (200) are the apparatus comprises a loading unit in the housing in a horizontal direction, is staked in a vertical direction. In addition, also as shown in 4c, heat treatment device (200) stability of the each rail (220) is formed. Thus, heating process (100) the edge segment on both sides of a sliding member (111) is rail (220) while sliding over heat treatment device (200) may be charging into the interior of. In 4c also although heating process of 4 (100) device is thermally treated (200) is formed integrally with the screw and is shown into the second, such number is not limited is the present invention. Refers to surface 5a also, in the embodiment according to one of the present invention heating process (100) is down lift (230) are drawn by and it is shown a perspective view, also refers to surface 5b and 5c, heat treatment device (200) installed, and a rail (220) and up-down lift (230) installed in air lift ball transfer (231) of. it is shown perspective view. Also as shown in 5a, heating process (100) having a a separate down lift (230) with the aid of heat treatment device (200) or charged into a device or heat (200) can be tapped from the.. Such down lift (230) heating process size top of (100) sufficiently has constitution: a. In addition, also as shown in 5b, heat treatment device (200) stability of the a length of rail (220) is previously installed is, such rail (220) a heat treatment by a heat treatment device (200) stability of lower support block (221) is supported by. While, as shown in 5c also, heating process (100) air lift ball transfer (231) by heat treatment device (200) or charged into a device or heat (200) can be tapped from the.. Air lift ball transfer (231) a body the air is inflated (232) and a, body (232) coupled to, a plurality of which can be moved upwards and lower ball (233) includes. The lift ball transfer (231) the above-mentioned rail (220) and/or down lift (230) is prepositioned. Then, air lift ball transfer (231) on heating process (100) is the lamp screen is placed at the. After, air lift ball transfer (231) the air layer an, plurality of ball (233) which project out cannot be driven to the top, the heating process thereon (100) and makes available for [...] part, and a is. Thus, heating process (100) in a sliding manner heat treatment device (200) for to hereinafter to charging or heat treatment device (200) for from can be position and a closed hereinafter. Also refers to surface 6e also to 6a, in the embodiment according to one of the present invention heating process (100) method for pull-out of. it is shown perspective view. As shown in 6a also first, down lift (230) for heat-treating a device (200) to placed proximate to rear side, a of. Wherein, heat treatment device (200) ones of the plurality of heating process (100) to open-close of a cover (140) is machine is thermal storage plates, heat treatment device (200) in back of a number separate cover or the like can be by eliminating a work in which a triggers. As shown in 6b also then, heating process (100) is connected to and isolated various structure. For example, heating process (100) is connected to an exhaust module (210) (number 1 exhaust tube (211) number 2 and exhaust tube (212)) and, power supply cable (132) and, various [...] heating process (100) separated from the. As shown in 6c also then, heating process (100) heat-treating device (200) secures the be a heat insulating block (240) are separated from each other and. triggers number. This insulation block (240) by the separation of, heat treatment device (200) from heating process (100) part, and a is a state where to allow the CD holder to slide. As shown in 6d also then, down lift (230) air lift ball transfer (231). placing. Although drawing plurality of line type air lift ball transfer (231) but it is shown, into the present invention is not limited is a (for example such that the wider rectangular or square form). if it ladles air lift ball transport. Finally also 6e as shown in, heat treatment device (200) from heating process (100) placed on the lower side of a lift down the (230). moved from one side. Such lift down operation (230), while maintaining control over the height of by repeated many times, heat treatment device (200) within heating process all-coupled source/drain regions (100). pull-out of. Well as, the present invention refers to this order of opposed heating process (100) heat-treating device (200). of course the 110,115 to. The present invention refers to the heating process (100) sliding member on both sides of (111) are arranged on both sides of the, heat treatment device (200) in rail (220) by mounting a, heating process (100) in a sliding manner heat treatment device (200) for to so drawing or charging to hereinafter. In addition, the present invention refers to down lift (230) and air lift ball transfer (231) heating process using (100) heat-treating device (200) by drawing or charged, heating process (100) for charging process for the work and outputs a relay driving signal. hereinafter. Furthermore, the present invention refers to heating process (100) flat panel heater (130) thereon by comprising a the substrate mounted onto the sidewall by (101) can be heat-treated and ground, in addition heating process (100) the exhaust nozzle (120) below it by the inclusion of the substrate onto the sidewall, and (101) resulting from a forcibly sucks fumes remaining over outputs a relay driving signal. allow exhaled. The present invention according to the taught or more heating process and a heat treatment device having the same embodiment for efficacy as an anti-to a modem in the embodiment, in the embodiment a the present invention refers to said without limit to an, hereinafter claimed in claim of the present as without deviating from the subject matter of invention the invention is in range a/various whoever ramyon person with skill in the art capable of embodiment of the present invention technical mental extent will it. 100; the present invention according to heating process 101; substrate 110; frame 111; sliding member 120; nozzle 121; nozzle hole 130; flat heater 131; support pin 132; power supply cable 140; a heat reflection plate 141; power supply unit 200; heat treatment device 210; exhaust module 211; 212 exhaust tube number 1; number 2 exhaust tube 220; rail 221; lower support block 230; down lift 231; air lift ball transfer 232; 233 body; ball 240; heat insulating block The present invention relates to a heating module capable of being easily inserted and withdrawn, and exhausting fume generated from a substrate in a thermal processing process, and a thermal processing device having the same. The heating module comprises: a frame; a heater mounted on the frame; and a power supply cable which supplies power to the heater. Disclosed is the heating module in which the frame, the heater, and the power supply cable are integrally formed. In addition, according to the present invention, disclosed is the thermal processing device which the heating module can be slidingly inserted into or withdrawn from, and a plurality of heating modules are vertically stacked in. Frame; said frame the heater; and, a power supply supplying power to said heater comprising a cable of and, said frame, heater and power supply cable is formed unitary with the, said frame is coupled is further water level tube, said water level tube the exhaust nozzle characterized in that the heating process. Number ablation According to Claim 1, said heater is prevented by absorbing said exhaust nozzle characterized in that the heating process.. According to Claim 1, the apparatus comprises a loading unit slidably said frame is mounted on the heat treatment device can be tapped or sliding member is to by using only into the heating module. According to Claim 1, said side of the frame includes a heat insulator cover which are mounted thereon and provided with, the nozzle said said exhaust device to a heat treatment through a heat reflection plate coupled to a heating process. According to Claim 5, a heat treatment a heat reflection plate on the device a heating process. According to Claim 5, said power supply cable a heat reflection plate through the heater electrically connected to said a heating process. According to Claim 1, said nozzle is the interior hollow tube form, plurality of nozzles hole is formed characterized in that the heating process. According to Claim 1, the heater said multiple support for supporting a substrate lift device and different pallet structure characterized in that the heating process. According to Claim 1, said, in the form of square frame, said exhaust nozzle arranged in said frame in the housing in a horizontal direction characterized in that the heating process. Anti number 3 term and number 10 to number 1 is either anti heating process a sliding manner inwardly charging characterized in withdrawal, from the interior or for use in a thermal processing device. According to Claim 11, said heating process the rail when it is drawn or a spout through which the charging characterized in for use in a thermal processing device. According to Claim 11, said heating module includes multiple is placed along the vertical direction the stack to the device characterized in that heat treatment.
