Patterning method, chemically-amplified resist composition, and resist film

10-10-2017 дата публикации

Номер:

KR101783729B1

Автор: 카오루 이와토

Принадлежит: 후지필름 가부시키가이샤

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C07 C07C C07C2 C07C26 C07C260 C07C2604 C07C2604/C07C2604/0 C07C2604/00 C07D C07D2 C07D20 C07D209 C07D209/C07D209/7 C07D209/70 G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/004 G03F7/0045 G03F7/0047 G03F7/03 G03F7/038 G03F7/0382 G03F7/0388 G03F7/039 G03F7/0392 G03F7/0397 G03F7/2 G03F7/20 G03F7/200 G03F7/2002 G03F7/3 G03F7/32 G03F7/325 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/027 H01L21/0274 H01L21/0275 Y Y1 Y10 Y10S Y10S4 Y10S43 Y10S430 Y10S430/Y10S430/1 Y10S430/11 Y10S430/114 Y10S430/115 Y10S430/12 Y10S430/128

IPC - классификация

C C0 C07 C07C C07C3 C07C38 C07C381 C07C381/C07C381/1 C07C381/12 G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/03 G03F7/038 G03F7/039 G03F7/0397

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