CASSETTE TRANSFER APPARATUS
The present invention refers to cassette transfer device relates to, multiple substrates can be cassette transfer device for conveying a supports a cassette are disclosed. Liquid crystal display device number order unit processes a high pressure liquid coolant to substrates of a plurality of hierarchies. For carrying out the process equipment for carrying said substrate transfer device is into each are used. The, said transfer device for transferring said substrates in order to enhance efficiency can be contained in a rack behind cassette, said cassette vehicle next said transfer device is placed in the transfer as follows. The delivery device according to the prior art along the rail vehicle for conveying said cassette, said cassette transfer unit using said expense it will grow with transfer rail on said cassette loading unit for conveying rail positioned on a side between said cassette unloading and loading each other. Said cassette unloading and loading said cassette transfer unit via said cassette carrying unit and said cassette loading unit is retry, said cassette unloading and loading material is added thereto. The, lowering the efficiency of said cassette transfer process are disclosed. In addition, cassette unloading and loading said retry is exposed to the outside so that said cassette, said cassette can be positioned to enter. The, said cassette is located are room contamination flow tides. The present invention refers to quickly so that the cassette, said cassette can be prevented from being exposed coolant is a cassette device number under public affairs substrate. The present invention according to the substrate cassette transfer device and loading a cassette, expense it will grow with lower opens, said vehicle for transporting a transfer rail extending in one direction and horizontal direction, transfer rail at one side of said support for conveying rail to said lower surface, said support plate and an open area for transferring the cassette in a vertical direction, said open area that has been, a door to open and close said open area, said open area of said opening of said support plate disposed below the supporting the cassette ports to and disposed between said port area, said port when said cassette is conveyed between said expense it will grow with particles entering said cassette can be shield for blocking the tunnel. In the embodiment of the present invention according to one, said perpendicular to said horizontal direction for conveying rail extend in a direction toward said door open region can be opened and closed. In the embodiment of the present invention according to one, said cassette transfer device is moved in a longitudinal direction and said shield tunnel, forming an airflow into said shield tunnel further comprises fan filter unit can be. In the embodiment of the present invention according to one, said cassette transfer device is to provide a tilting device for lifting and lowering said lower surface along the circumference and, said support plate further comprises a unit for opening or closing the space between said expense it will grow with locking and open the can. In the embodiment of the present invention according to one, combining means includes said vehicle said cassette, said cassette in a vertical direction are provided to reduce an clamp for lifting and lowering the inner transfer may have. The present invention according to tilting device below cassette transfer device is opened, the door is opened and closed by the open space support plate, said expense it will grow with port between cassette vertically re-be immediately unloading and loading. The, said cassette unloading and loading time required can be reduced. In addition, said cassette transfer device using said shield between said expense it will grow with comprises blocking unit support plate, said support plate and said heat shield plate for a shield tunnel using the port, said external air to be exposed to a servicing the cassette that are conveyed in a vertical direction. The, said cassette in a space that is shielded so that unloading, said corrupted by the cassette by using a substrate particles can be prevent. In the embodiment according to Figure 1 shows a side cross-section of the present invention to account for one cassette transfer device also are disclosed. Figure 2 shows a barrier unit lowered to account for state 1 also also shown in side cross-section are disclosed. Hereinafter, with reference to the drawing objects for cassette transfer device according to an embodiment of the present invention detailed as follows. The present invention refers to various modification may have bar can apply in various forms, a specific embodiment and examples herein detailed drawing example broadcast receiver. However, the present invention is defined with respect to a particular disclosure form be but is, all changing range of idea and techniques of the present invention, including the water to replacement should understood to evenly. Each drawing are described as well as a component while similar references in a similar. In the attached drawing, the dimensions of the structures of the present invention can be higher than the virtualization clarity thread number series are disclosed. Number 1, number 2 describes various components such as term can be used but, in terms of said components are defined by said back like. Components are mounted to one of said terms are used only distinguished from other components of the object. For example, number 1 number 2 outside of the range of the present invention rights without components can be termed components, similarly number 2 of the elements can be termed component number 1. The term used in application specific embodiment is only used to account for example, defining the present invention intending to be is endured. It is apparent that a single representation of the differently in order not providing language translators, comprising plurality of representation. In the application, the term "comprising" or "having disclosed" specification of articles feature, number, step, operation, component, piece or specify a combination not present included, another aspect of one or more moveable number, step, operation, component, piece or a combination of pre-times the number should not understood to presence or additional possibility. Not defined differently, scientific or technical terms so that all terms in the present invention thus is provided to the person with skill in the art will generally have the meanings etc. by same. Dictionary used for such as generally defined on the context of respective technical terms have the meanings must be consistent semantics and having interprets, the application will not become manifest in defining, or overly formal sense interpreted not ideal. Figure 1 shows a cassette transfer device of the present invention to account for side and also one in the embodiment according to cross-sectional drawing, also shown in Figure 2 1 state blocking unit lowered to account for side cross-section are disclosed. The reference also 1 and 2 also, cassette transfer device (100) includes a plurality of block by cassette (10) is for conveying, vehicle (110), transfer rail (120), support plate (130), door (140), blocking unit (150), port (160), shield tunnel (170), fan filter unit (180) comprises. Vehicle (110) has approximately hollow hexahedron shape, are easy. Vehicle (110) a cassette (10) supporting each other. In addition, vehicle (110) constant cassette for conveying path, i.e., transfer rail (120) traveling along the substrate. And, vehicle (110) has a wheel, said drive wheel further comprises a drive unit for driving can be. Vehicle (110) are provided to reduce an inner lifting clamp (112) has. Clamp (112) includes a vehicle (110) is received in a cassette (10) can be fixed to a support. In addition, clamp (112) includes a cassette (10) for unloading and loading of cassette (10) can be lifting. For example, vehicle (110) transfer rail (120) moves along clamp (112) includes a cassette (10) fixed to the substrate. Vehicle (110) in a paper feeding cassette (10) when unloading and loading of, clamp (112) is while lifting and lowering the cassette (10) lifting the substrate. Transfer rail (120) the vehicle (110) travels path number under public affairs substrate. Transfer rail (120) is a substrate (not shown) for processing said device are is arranged above the substrate. Support plate (130) the delivery rail (120) lower surface of the substrate. Support plate (130) (not shown) by said processing device is a separate component secured or a ceiling space. Support plate (130) the delivery rail (120) which can support a vehicle (110) due to load transfer rail (120) can be prevent drooping. Support plate (130) is an open area (132) has. Open area (132) a cassette (10) of unloading and loading air cassette (10) vertical passage for transfer are disclosed. Door (140) a support plate (130) of open area (132) is equipped, open area (132) to open and close. Specifically, vehicle (110) transfer rail (120) when traveling along, door (140) is closed remains open area (132) are shut off. Vehicle (110) open area (132) in vehicle stops traveling in (110) clamp (112) to cassette (10) said a vertically each other to, door (140) is an open area (132) to be coated is open open. The, door (140) the delivery rail (120) a horizontal direction perpendicular to the extension direction of the open area (132) can be open and close. On the other hand, door (140) a support play (130) hinge-coupled on an open region (132) close a disapproval. Blocking unit (150) is vehicle (110) along the circumference on the lower face of combined with each other. Blocking unit (150) are integrated while vehicle (110) the carrier plate (140) space between blocking and open other. Blocking unit (150) the blocking element (152) and second display parts (154) having a predetermined wavelength. Blocking member (152) includes a vehicle (110) along the circumference on the lower face of combined with each other. In one example, blocking member (152) includes a vehicle (110) into a lower portion of an inner surface of the four side parallel can be made. By the absence of separate said plates are connected each other. I.e., said separate member removably connected by upper and lower plates are open hollow shape. The, plates the height of the vehicle (110) the carrier plate (140) or larger than the distance between such as preferably. As another alternative, blocking member (152) includes a vehicle (110) along the inner surfaces of said lower end with a rectangular corrugated pipe can be made. Blocking member (152) is results of said corrugated pipe, said tube to shrink the blocking member (152) to minimize the height of the can. The, blocking member (152) has a necessary space can be minimize. Driver (154) includes a vehicle (110) fixed to the lower surface, blocking member (152) of lifting the substrate. Driver (154) examples of linear motors can be used. Specifically, driver (154) comprises blocking member (152) can be set by lowering a blocking member (152) is vehicle (110) the carrier plate (140) can be blocking the space between. The, blocking member (152) is around said particles, said particles vehicle (110) can enter the interior of the indoors. In addition, driver (154) comprises blocking member (152) through the vehicle (110) the carrier plate (140) can open space between. On the other hand, although not shown, vehicle (120) lateral face of a vehicle (110) formed particles prevent the introduction of air into the interior of the filter unit to a cooling fan with disapproval. Blocking unit (150) a cassette (10) upon unloading of vehicle (110) the carrier plate (140) are shut off space between. Specifically, vehicle (110) is halted, cassette (10) a vehicle (110) is loaded into a or vehicle (110) when cassette under economy, blocking unit (150) a cassette (10) upon unloading of vehicle (110) the carrier plate (140) are shut off space between. The, said particle cassette (10) can be prevented from contaminating the substrate. Blocking unit (150) is vehicle (110) of traveling vehicle (110) the carrier plate (140) open space between each other. Specifically, blocking unit (150) the vehicle (110) the carrier plate (140) space between cutting off the vehicle (110) when a travel, blocking unit (150) support plate (140) hitting a vehicle (110) traveling can interfere disclosed. The, cassette (10) upon completion of unloading and loading material, blocking unit (150) is vehicle (110) includes a support plate (140) open space between each other. Port (160) has an open area (132) disposed below the cassette (10) are retained. In addition, port (160) of said processing device are on one side of substrate. The, port said processing device (10) supported in the cassette (10) substrate by transferring a machined or, processed substrate cassette (10) fixed to each other. Shield tunnel (170) includes a support plate (130) of open area (132) and port (160) disposed between, cassette (10) is vertically supporting a receptacle and said 35a.. The, shield tunnel (170) is vehicle (110) and port (160) between the cassette (10) is conveyed particles when cassette (10) shut off from entering. Therefore, said particles located (10) by using a contaminated substrate can be prevent. Fan filter unit (180) is shield tunnel (170) is equipped, shield tunnel (170) airflow into the interior of the form. Fan filter unit (180) by the fan and the filter consisting of an. Said pan is spaced away from the form an airflow. Said filter includes the first decodes said airflow inlet. The, fan filter unit (180) is shield tunnel (170) number for reparing over said air into the interior of the particles can be. For example, fan filter unit (180) is shield tunnel (170) can be on either side of the. As another alternative, fan filter unit (180) is shield tunnel (170) of opposing two sides or adjacent two sides can be provided. Fan filter unit (180) formed by airflow has a supporting plate (130) on the shielding unit (150) between, support plate (130) on shield tunnel (170) between, shield tunnel (170) and port (160) can be discharged to the outside through between. I.e., fan filter unit (180) by shield tunnel (170) in the interior of the outwardly directed air flow is formed. Therefore, airflow said support plate (130) on the shielding unit (150) between, support plate (130) on shield tunnel (170) between, shield tunnel (170) and port (160) between the upper and lower substrates of particles introduced into said can. As above-mentioned, the present invention according to the cassette transfer device expense it will grow with substrate processing device port between said cassette unloading and loading cassette vertically generated material has a plurality of hierarchies. Thus, the time required to provide the required unloading and loading of said cassette, said cassette can be process more efficient. In addition, cassette transfer device using said tunnel comprises blocking unit and shield can prevent particles from entering said cassette. The, said cassette by using a contaminated by particles can prevent said substrate, said substrate can be to improve the quality of. In a of the present invention preferred embodiment said through a browser but, if a corresponding splicing one skilled art poriae patent idea of the present invention within a range that the present invention not and area away from may be understand various modifying and changing it will rain. 100: cassette transfer device 110: vehicle 120: transfer rail 130: support plate 140: door 150: blocking unit 160: port 170: shield tunnel 180: fan filter unit 10: cassette A cassette transfer apparatus comprises: a vehicle which accommodates a cassette loaded with substrates, having an open lower part; a transfer rail extended in one direction to transfer the vehicle in a horizontal direction; a supporting plate which supports a lower side of the transfer rail to prevent the transfer rail from drooping, and which has an open area to transfer the cassette upwards and downwards; a door arranged on the open area to open and close the open area; a port arranged under the open area to support the cassette; and a shield tunnel arranged between the open area of the supporting plate and the port, preventing particles from being placed into the cassette when the cassette is transferred between the vehicle and the port. As such, the cassette transfer apparatus is able to quickly load and unload the cassette without the inclusion of particles. COPYRIGHT KIPO 2016 Substrate loading and a cassette, a vehicle that enables easy; said vehicle for transporting a transfer rail extending in one direction horizontal direction: for conveying rail transfer rail at one side of said support to said lower surface, said support plate having an open region for transferring the cassette in a vertical direction; while said opening, a door to open and close said open area; disposed below said open area of said supporting the cassette ports to; open region disposed between said support plate and said port, said port when said cassette is conveyed between said expense it will grow with particles entering said cassette including cassette device characterized shield for blocking the tunnel. According to Claim 1, a horizontal direction perpendicular to said door for conveying rail extend in a direction toward said open region characterized said air cassette device. According to Claim 1, equipped at one side of said tunnel shield, said shield protecting air flow to the fan filter unit characterized further including forming a cassette device. According to Claim 1, drawn up and down along said lower surface and around tilting device, said support plate further including locking and open the space between said expense it will grow with characterized cassette unit for opening or closing the device. According to Claim 1, combining means includes said vehicle said cassette, said cassette in a vertical direction for lifting and lowering the inner transfer are provided to reduce an cassette device characterized with a clamp.
