METHOD FOR MANUFACTURING POROUS METAL MEMBRANE FOR FLUX IN LARGE QUANTITY
The present invention refers to porous metal membrane manufacturing method relates to, simple manufacturing method is provided, which process is selected, and has excellent mechanical strength, and also number hereinafter pores for magnets, low surface roughness number reaches to a high flow rate of porous metal membrane tank method are disclosed. Semiconductor wafer number numerical control machine generally used for process gas can HCl, BCl3, strongly corrosive gas pipe CF4 gas as much as a toxic reaction chamber are disclosed. Such process gas impurities as determined by particles of the reaction chamber from the reaction chamber aging results in damage and contamination of the wafer and wafer yield is lowered to a value generated. Therefore, semiconductor number [...] ratio gas tube connected at a point impurity particle introducing gas filter for lengthening its number is very important that disclosed. Ultra high purity gas and a gas filter for lengthening of the chemical impurity particles number number number defined by maintaining a stable [...] used further pore-pore-microbalance substrate. Current semiconductor manufacturing process gas filter [...] corrosion-resistant sincerity as well as display, zymotic, bio, nuclear, aerospace or the like in fields requiring both parts to a user are disclosed. The, development of associated parts and workpiece to an impurity particles number for lengthening [...] gas filter operating in highly industrial need for calling very important disclosed. A gas transmitting and dopant particles and gas filter screening porous membranes (membrane), housing (housing) and supporting the gas tube and a connection made of disclosed. Most gas filter core is directly within a gas passes through the membrane and, recent interest for dielectric constant number-by the workpiece is hereinafter high fluid permeability of pore distribution pore surface area resulting in higher cleaning easy smooth metal which shows membrane are disclosed. Metal membrane is ceramic or polymeric membranes damage is higher than the tensile properties and is high pressure liquid coolant gas filter number pin is necessary. In particular in the case of nickel oxide layer membrane number suitable for corrosion resistance and sintering of the bath. However normal metal membrane polymeric membranes of pore sizes when compared to high purity WIPO. The, metal wire form a high pressure liquid coolant number then molding, sintering method or material polymer solution dispersing slurry after sintering method response from the number using high pressure liquid coolant. The method of using such a high degree of pore and exhibit a high breathable gas filter or, process for preparing steam bath and number to a specific number, the number of pore size and distribution difficulties ensuring that impurity particles number is commonly referred to as magnets etc. not efficient. On the other hand, in the case of membrane filter using the metal powder, metal fiber as compared to costs and, in a variety of shapes and excellent chemical resistance, good mechanical strength despite lower than 30% degree of pore number etc. point charge door pointed. The present invention and the manufacturing method is simple if the number, process which is selected, and has excellent mechanical strength, and also number hereinafter pores for magnets, low surface roughness number reaches a high flow rate of a porous metal membrane tank number [...] method and can be recycled. The present invention refers to, according to the particle size classifier using a classification device and metal powder, said metal powder particle size classifier using a classification device according each having a metal powder particle size in consideration of the weight particle size of filling density and degree of electrical screening using a mixer according to beyond the periphery of the blending, said mixer mixing through heating for constructing a blending the mixed powder and a binder, said binder material outside said body includes a plate spring polymer mixture of the mixed powder after a sheet, gradations and constant cold isotropic pressure pressurizing through an input light guide, said molding member and a second mold layer, layer charged into a vacuum sintering furnace [...] molding, said binder pyrolytic temperature higher than the melting temperature at a lower temperature than said mixed powder maintains binder optionally degreased, and phase is heated above the sintering temperature, by using a liquid and electropolishing sintered electropolishing, the number of electrolytic polishing liquid and drying rinsing and drying said every other microporous sintered body regulates the electrolytic polishing liquid component since the sintering furnace in a stand-alone source of vacuum in order number photoresist including a porous metal membrane manufacturing method number [...] substrate. Said classifying device different mesh size sieve (sieve) is different positions (height) are sequentially arranged on the device and, said classifying device mesh (sieve) is fitted to the top of one large body size and number is, a lower control [...] smaller body (siever) is up in an internal housing. A classification device for classifying said bi-provided at the lower vibrating smoothly (vibrator) is fitted to the in which a vibrator, said vibrator causes the vibrational energy is delivered to the body by an elastic member in a classifier in thereby giving preferably. The porosity of the membrane tank number porous metal, preferably using paraffin wax binder said considering the size pores. Said metal powder is stainless steel powder, [theyl with 8W (Hastelloy), nickel (Nickel) 1 can be selected from at least one powder. 100 Parts by weight of said binder said mixed powder 0. 1 ∼ 5 parts by weight of the preferred mixing. Said step of pressurized at a constant pressure through an isotropic pressure pressurizing cold pressure of at least 1000 ∼ 3000 bar formed in a preferably. Said mold having a structure of greater length than the saw generally comprises bar-type, a center portion of said mold made of metal material with a plate spring and encircling said polymer [...][...][...] is in apart, said space between said [...][...] the third said mixed powder can be receiving a mixture of said binder. By said space between said [...][...] can determine the thickness of the porous metal membrane, said [...] diameter determining the inner diameter of the porous metal membrane (placing a diameter) can be, for adjusting a length of a second period said mold can be porous metal membrane, said porous metal membrane is the interior may have a hollow tubular form. Said temperature of 400 ∼ 800 °C will be preferably carried out in the other. Said cool said pyrolytic temperature higher than the melting temperature lower than the temperature of said binder mixed powder preferably carried out in the 900 ∼ 1200 °C. Degreasing and cool said H2 Preferably carried out in the atmosphere containing argon gas. Said process for electrolytic polishing liquid (H2 SO4 ), Phosphoric acid (H3 PO4 ), Including electrolytic polishing liquid or a distilled water and surfactant number, sulfuric acid (H2 SO4 ), Phosphoric acid (H3 PO4 ), Distilled water, number and chromium (Cr) be a electrolytic polishing liquid including a surfactant. The boiling point higher than the melting temperature of said baking said electrolytic polishing liquid metal membrane preferably carried out in the temperature of lower than 150 ∼ 400 °C. The H said baking2 Preferably carried out in the atmosphere containing argon gas. According to the present invention, simple manufacturing method, process which is selected, and has excellent mechanical strength, pore number for magnets also hereinafter described. The present invention may have low surface roughness by number prepared by the porous metal membrane. Figure 1 shows a according to one example shown also in molds for forming as a drawing, length in a direction perpendicular cross-sectional look by cutting are disclosed. Figure 2 shows a tubular porous metal membrane by using a mold which is also 1 also shown in as shown in the drawing number produced therewith, length in a direction perpendicular cross-sectional look by cutting are disclosed. Figure 5 shows a tubular porous metal membrane surface according to exemplary experiments also 3 to also is shown the number produced therewith are disclosed. Figure 6 relative to the flow test (Flow test) according to exemplary experiment number prepared by the tubular porous metal by performing as a result indicating the graph are disclosed. Hereinafter, the present invention according to preferred embodiment with reference to the attached drawing detail are described as follows. However, in the embodiment of the present invention with conventional knowledge in the art hereinafter no to co number will sufficiently to various other shape can be provided which, in the embodiment of the present invention range is next described and not the limited to. The absorbent article in a drawing code identical elements defines other. In hereinafter, this invention also provides a multi-metal as well as metal alloy also including sense less than 2000. The manufacturing method of the present invention preferred embodiment according to porous metal membrane reaches high flow rate, particle size classifier using a classification device according and metal powder, said metal powder particle size classifier using a classification device according each having a metal powder particle size in consideration of the weight particle size of filling density and degree of electrical screening using a mixer according to beyond the periphery of the blending, said mixer mixing through heating for constructing a blending the mixed powder and a binder, said binder material outside said body includes a plate spring polymer mixture of the mixed powder after a sheet, gradations and constant cold isotropic pressure pressurizing through an input light guide, said molding member and a second mold layer, layer charged into a vacuum sintering furnace [...] molding, said binder pyrolytic temperature higher than the melting temperature at a lower temperature than said mixed powder maintains binder optionally degreased, and phase is heated above the sintering temperature, electropolishing sintered by using a liquid electrolytic polishing step, the number of electrolytic polishing liquid and drying rinsing and drying said every other microporous sintered body regulates the electrolytic polishing liquid component number since baked at a stand-alone source of vacuum in order to sintering for carrying out the process comprising the following steps. Said classifying device different mesh size sieve (sieve) is different positions (height) are sequentially arranged on the device and, said classifying device mesh (sieve) is fitted to the top of one large body size and number is, a lower control [...] smaller body (siever) is up in an internal housing. A classification device for classifying said bi-provided at the lower vibrating smoothly (vibrator) is fitted to the in which a vibrator, said vibrator causes the vibrational energy is delivered to the body by an elastic member in a classifier in thereby giving preferably. The porosity of the membrane tank number porous metal, preferably using paraffin wax binder said considering the size pores. Said metal powder is stainless steel, [theyl with 8W (Hastelloy), nickel (Nickel) 1 can be selected from at least one powder. 100 Parts by weight of said binder said mixed powder 0. 1 ∼ 5 parts by weight of the preferred mixing. Said step of pressurized at a constant pressure through an isotropic pressure pressurizing cold pressure of at least 1000 ∼ 3000 bar formed in a preferably. Said mold having a structure of greater length than the saw generally comprises bar-type, a center portion of said mold made of metal material with a plate spring and encircling said polymer [...][...][...] is in apart, said space between said [...][...] the third said mixed powder can be receiving a mixture of said binder. By said space between said [...][...] can determine the thickness of the porous metal membrane, said [...] diameter determining the inner diameter of the porous metal membrane (placing a diameter) can be, for adjusting a length of a second period said mold can be porous metal membrane, said porous metal membrane is the interior may have a hollow tubular form. Said temperature of 400 ∼ 800 °C will be preferably carried out in the other. Said cool said pyrolytic temperature higher than the melting temperature lower than the temperature of said binder mixed powder preferably carried out in the 900 ∼ 1200 °C. Degreasing and cool said H2 Preferably carried out in the atmosphere containing argon gas. Said process for electrolytic polishing liquid (H2 SO4 ), Phosphoric acid (H3 PO4 ), Including electrolytic polishing liquid or a distilled water and surfactant number, sulfuric acid (H2 SO4 ), Phosphoric acid (H3 PO4 ), Distilled water, number and chromium (Cr) be a electrolytic polishing liquid including a surfactant. Said number of ethylene glycol surfactants, including the amide is water (water) and nicotine may be disclosed. The boiling point higher than the melting temperature of said baking said electrolytic polishing liquid metal membrane preferably carried out in the temperature of lower than 150 ∼ 400 °C. The H said baking2 Preferably carried out in the atmosphere containing argon gas. In hereinafter, more specifically described manufacturing method of the present invention preferred embodiment according to porous metal membrane reaches high flow rate of 2000. Stainless steel (stainless steel) processed raw material, [theyl with 8W (Hastelloy), nickel (Nickel), using a device such as a mixture of these metal powder (powder) according to particle size classifier for classifying other. Said metal powder is 10 ∼ 150 micro m, more preferably 50 ∼ 100 micro m powder having an average particle size of about 3 nm to 150. Said classifying device different mesh size sieve (sieve) is different positions (height) are sequentially arranged on the device are disclosed. For example, the uppermost portion of said mesh size classifying device number one large body (sieve) (for example, 125 micro m sieve of mesh size) is mounted and, a lower control [...] smaller body (siever) (e.g., sieve mesh size of 38 micro m) is up in an internal housing. In an alternative embodiment of the present invention 6 experiment of classifying device mounted they are using but, 125 micro m mesh body having a size of number 1, number 2 body 106 having a size of micro m mesh, 90 micro m number 3 body having a size, number 4 body having a size not exceeding 75 micro m, m mesh number 5 body having a size of 45 micro, mesh size of 38 micro m number 6 is mounted curvedly. When using such a classifying device, each particle size, i.e. 125 micro m or more, less than 106 125 micro m micro m or more, less than 106 m or more micro 90 micro m, less than 75 micro m 90 micro m or more, less than 75 micro m 45 micro m or more, less than 45 micro m 38 m or more micro, 38 is graded metal powder having a particle size of less than 7 micro m total is to be coated. In addition, the lower portion of said bi-classifying device for classifying smoothly vibrating vibrator (vibrator) is mounted thereof can. Causing said vibrator vibrate as energy is delivered to the body in a vibration device thereby giving causes heat transfer material to the classifier. The particle size of the metal powder by classifying such classifying device according to be coated. Said classifying device for classifying using metal powder in each particle size particle size selection of the weight having a metal powder (e.g., 3 dimensional mixer) according to a beyond the periphery of the mixer using an other. Large particle size metal powder and particles mixed in the small-large particle size when compared with a character message are provided to improve mixing metal powder filling density can be reduced wherein pore size, this device would be for classifying according to particle size classifier using a method of selecting by mixing metal powder filling density, porosity of the membrane (pore also), like the pin is part number [...] pore size. A mixer mixing said mixed powder and a binder which is improved in heating through blending other. Generally hereinafter for forming said binder for use but using an organic binder, the porosity of the membrane tank number porous metal, such as pore size when considered most preferably using paraffin wax. 100 Parts by weight of said binder said mixed powder 0. 1 ∼ 5 parts by weight of the preferred mixing. 0 Content of said binder. 1 Parts by weight of molding may be less than if the inner part, said binder content of 5 parts by weight if so can be higher than in the desired porosity. 10 Minutes at a temperature of said heating is performed during the time mixing in mixer 80 ∼ 180 °C ∼ 24 degree preferably. Said sprocket and a binder are mixed powder due to electrical pulses at rates when a classification (e.g., 300 ∼ 800 micro m) (sieve) having a mesh size greater than a mesh sieve for classifying using disapproval. Figure 1 shows a according to one example shown also in molds for forming as a drawing, length in a direction perpendicular cross-sectional look by cutting are disclosed. A tubular porous metal membrane molds for high pressure liquid coolant number shown in mold 1 also are disclosed. High pressure liquid coolant in the form of number consists of a tubular porous metal membrane may also be used but, although not shown in the form of disk (Disk), rod (rod) forming like disapproval. Said binder material outside said mixed powder body includes a plate spring a mixture of polymer (10) after a sheet, cold isotropic pressure pressurizing (Cold isostatic pressing; hereinafter 'CIP' multi-) maintaining constant pressure through an input (e.g., 1000 ∼ 3000 Bar) by molding the substrate. ∼ 24 preferably is performed during the time CIP 1 minutes. As shown in 1 also mold (10) is [...] metal material (12) is connected to both [...] center (12) made of a polymer having a resilient force while surrounding spaced [...] (14) can be connected to an antenna, said [...] (14) on said [...] (12) space between the third powder (said binder mixture of said mixed powder) can be receiving. Said [...] (14) is a plate spring such as urethane polymer is made disclosed. Said [...] (12) is rigid (hard) annealed metal is made disclosed. Said [...] (14) on said [...] (12) determine the thickness of the spacing between the elements and tubular membrane, said [...] (14) on said [...] (12) with respect to the space between tubular membrane thickness can be formed. CIP pressure to pressurize the control tubular membrane as well as by the colloid disapproval. Said mold (10) generally is large (e.g., length/diameter ratio of 10 or more) than the saw-length rod-like structure. Said mold (10) determining the length and the length of the tubular membrane elements, the mold (10) with respect to the length length of tubular membrane can be formed. Said [...] (12) the diameter of the inner diameter of the tubular membrane (placing a diameter) and determining element, the [...] (12) with respect to the diameter of the inner diameter of the tubular membrane (placing a diameter) can be formed. Rod-like or disk type membrane is in the case of forming a mold can be used to have an [...] are disclosed. A green body mold (10) member in etched. 1 Mold which is also shown in the case into a green body is the interior hollow tubular shape to be coated. A green body charged into a vacuum sintering furnace, said binder pyrolytic temperature higher than the melting temperature at a lower temperature than the binder and held in said mixed powder (e.g., 400 ∼ 800 °C) optionally degreased, heated above the sintering temperature phase is disclosed. Polymer binder for use because of the pyrolysis at temperatures less than 400 °C encoded. Thus, the sintering temperature to a temperature of at least 400 °C fourth binder is connected to the previous substrate. Degreasing and cool said reducing gas (for example, H2 Argon gas is contained 4%) preferably carried out in the atmosphere. Cool said pyrolytic temperature higher than the melting temperature at a lower temperature than said mixed powder binder (e.g., 900 ∼ 1200 °C, more preferably 950 ∼ 1150 °C) preferably performed. Binder by pyrolysis of pores which is provided to the user, is generated even own sintered pores formed porous membranes to be coated. Said degreasing temperature (e.g., 400 ∼ 800 °C) 1 other will be preferably performed in performing ∼ 6 minutes. Cool said sintering temperature (e.g., 900 ∼ 1200 °C, more preferably 950 ∼ 1150 °C) performing ∼ 12 preferably performed in 10 minutes. Cool said lower vacuum pressure (e.g., 5. 7 × 10-2 Torr) preferably performed. Said degreasing temperature up 0. For raising the temperature of the temperature is preferably [...] 1 ∼ 50 °C/min, until said sintering temperature 0. Preferably [...] 1 ∼ 50 °C/min for raising the temperature of the temperature rise. Performing the sintering process, to reduce the temperature sintered body sintered to said unloading accesses. Sintering said cooling with high purity is cooled to stored in the natural state or, optionally temperature falling rate (e.g., 10 °C/min) is not cooling set may be filled. CIP improves propelling power-like shape appearing through the formed ends and, at the end of cut out the same number for lathing through a stand-alone process performing sintered disapproval. The membrane is a porous metal sintered body prepared by the number, the wetting ability to internal and external surfaces of the membrane and a contaminant number for the different roughness performing electropolishing processes. The purpose of the invention is inputted and compromising the electropolishing electropolishing but all electrolytic polishing liquid used, preferably sulfuric acid (H2 SO4 ), Phosphoric acid (H3 PO4 ), Distilled water, or the like including electropolishing solution used in a number surfactants, sulfuric acid (H2 SO4 ), Phosphoric acid (H3 PO4 ), Distilled water, number surfactants, such as chromium (Cr) addition of like number including electrolytic polishing liquid is used, the pieces are not correct. Said number of ethylene glycol surfactants, including the amide is water (water) and nicotine may be disclosed. In one case by the electropolishing said porous metal preferably is performed on both the interior and exterior of tubular the [pu carrying on shoulder. After electropolishing processes, the number of electrolytic polishing liquid every other cleaning process has a plurality of hierarchies. For example, the number of electrolytic polishing liquid at the front end of a transfer line about 1 ∼ 60 minutes to wash away the membrane inserting [...] fuzzy, hot deionized water (e.g., deionized solution 40 ∼ 90 °C) remove s7. dipped in the membranes. Said cleaning process is complete, a stand-alone number for cleaning solution to dry substrate. About 1 ∼ 60 minutes drying said deionized water dropped from the number and nitrogen so that the membrane alone, in that no temperature in 10 minutes time performed during the drying furnace atmosphere 60 ∼ 150 °C ∼ 24 preferably. Microporous (10 micro m hereinafter) (for example, sulfur, phosphate) regulates the electrolytic polishing liquid component (baking) baked at a stand-alone source of vacuum in order to number since a sintering process has a plurality of hierarchies. Said baking of a reduced gas (e.g., H2 Argon gas is contained 4%) preferably carried out in the atmosphere. Said a support baking, boiling point higher than the melting temperature of the electrolytic polishing liquid such as phosphate (e.g., 150 ∼ 400 °C) carried out in the metal of the membrane at a lower temperature than preferably. Said vacuum baking process is lower than the atmospheric pressure (e.g., 5. 7 × 10-2 Torr) Preferably performed. Said bake temperature up 0. Preferably [...] 1 ∼ 50 °C/min for raising the temperature of the temperature rise. The aforementioned core number can be porous metal membrane hereinafter for the high pressure liquid coolant. Figure 2 shows a tubular porous metal membrane also as shown in the drawing, cut to length in a direction perpendicular cross-sectional look are disclosed. The reference 2 also, high pressure liquid coolant to number 1 using a mold which is also shown in porous metal membrane (100) is the interior hollow tubular shape to be coated. High pressure liquid coolant in the form of number consists of a tubular porous metal membrane may also be used but, although not shown in the form of disk (Disk), rod (rod) high pressure liquid coolant like number disapproval. In hereinafter, embodiments of the present invention according to experiments in number specifically adapted, then a process by the present invention is restricted in number experiments are not correct. <Experiment example> 1. Classifying material Raw material powder (powder) 316L stainless steel (stainless steel) processed using a classification device for classifying time was 1. 316L stainless steel powder having an average particle size of said powder is 70 micro m was used. Said classifying device has a mesh size sieve 38 ∼ 125 micro m was used. Said classifying device different mesh size sieve (sieve) is different positions (height) are sequentially arranged on the device are disclosed. For example, the uppermost portion of said mesh size classifying device number one large body (sieve) (for example, 125 micro m sieve of mesh size) is mounted and, a lower control [...] smaller body (siever) (e.g., sieve mesh size of 38 micro m) is up in an internal housing. In an alternative embodiment of the present invention 6 experiment of classifying device mounted they are using but, 125 micro m mesh body having a size of number 1, number 2 body 106 having a size of micro m mesh, 90 micro m number 3 body having a size, number 4 body having a size not exceeding 75 micro m, m mesh number 5 body having a size of 45 micro, mesh size of 38 micro m number 6 is mounted curvedly. When using such a classifying device, each particle size, i.e. 125 micro m or more, less than 106 125 micro m micro m or more, less than 106 m or more micro 90 micro m, less than 75 micro m 90 micro m or more, less than 75 micro m 45 micro m or more, less than 45 micro m 38 m or more micro, micro powder having a particle size of less than 38 m is equal to total 7 is graded. In addition, the lower portion of said bi-classifying device for classifying smoothly vibrating vibrator (vibrator) is up in an internal housing. Causing said vibrator vibrate as energy is delivered to the body in a vibration device thereby giving causes heat transfer material to the classifier. The particle size of the powder by classifying device is graded along part of the cab. 2. Mixing Said classifying device for classifying micro m or more in less than 125 106 powder using micro m (52. 5 G), less than 106 m or more micro 90 micro m (52. 5 G), 75 micro m or more less than 90 micro m (52. 5 G), less than 75 micro m 45 micro m or more (52. 5 G), 38 less than 45 m or more micro micro m (194. 5 G), micro m 38 (194. 5 G) powder having a particle size of less than 6 screening is the total of the weight particle size of 30 minutes is mixed using a mixer according to beyond the periphery of the 3 dimensional. Large particle size small particle size powder mixed powder mixing large particle size when compared with a character message are provided to improve pore size is kept small wherein filling density, this classifier for classifying device would be using powders such as by mixing the particle size selecting filling density, porosity (pore also), like the pin is part number [...] pore size. 3. Binder mixing Through said 3 dimensional mixer mixing the mixed powder and a binder for constructing a heating at a temperature of 120 °C time 30 minutes 1 paraffin wax is mixed. Said paraffin wax mixture powder 200g reference 2. 5 Wt % ratio of his kiln. 4. Classifying mixed powder Such a mixed powder said sprocket and a sieve mesh size 500 micro m pulses at rates due to binder (sieve) for classifying using his. 5. Molding Said binder to said mixture of mixed powder after a sheet has a urethane mold 570g external urethanes, CIP through an input, to maintain pressure was 10 minutes 1500 Bar by molding. 600 Mm having an outer diameter of said urethane mold is curvedly. A central portion of the urethane mold made of stainless steel [...] with disclosed. 6. Sintering A green body charged into a vacuum sintering furnace, argon (Ar) gas (H2 Is contained 4% argon gas) atmosphere at a temperature of 750 °C 1 performed binder optionally degreased, sintering temperature of 1050 °C 1 performed sintering in the matter. A vacuum to said vacuum sintering 5. 7 × 10-2 Torr onions. It does, [...] degreasing temperature 5 °C/min temperature until the temperature rise, the temperature rise up-gate [...] 5 °C/min temperature sintering temperature. 7. Processing CIP number goes through molded article which improves propelling power-like shape is shown, a stand-alone same number for lathing through sintered body ending of old branches. 8. Welding (Micro TIG) welding utilizing the micro TIG welding when the performed, using the same as a material contacts the workpiece welding of abortion. 9. Cleaning: to internal and external surfaces of the membrane having a porosity and roughness are isolated by the process for reducing a contaminant number when the wetting ability, said process involves the following 6 steps of abortion. 1) Electropolishing (Electrolytic polishing; EP) 2 Minutes by using a liquid membrane (mbembrane) electropolishing internally and externally with his electropolishing. Said electropolishing is formed on the sulfuric acid (H2 SO4 ) 30 Volume %, phosphoric acid (H3 PO4 ) 60 Volume %, 5% surfactants and number 5 volume % volume made of distilled water was used. Said number surfactants of ethylene glycol 70 volume %, 20 volume % volume % water (water) and nicotinamide 10 including a curvedly. 2) Fuzzy cleaning The number of electrolytic polishing liquid every other membrane at the front end of a transfer-gate about 2 ∼ 3 minutes by inserting a fuzzy [...] cleaning. 3) Hot deionized water (Deionized Water) cleaning and ultrasonic cleaning Hot deionized water (deionized solution 60 °C) membranes organometalloid ultrasonic cleaning of abortion. 2 Band fuzzy numerical control machine 10 minutes each bath cleaning of abortion. 4) Nitrogen drying About 1 ∼ 2 minutes nitrogen injecting deionized water dropped from the number been membrane to a stand-alone. 5) Drying atmosphere In standby drying furnace in 100 °C while maintaining his 1. 6) Baking (baking) A liquid component (e.g., sulfur, phosphate) microporous electropolishing remaining number since sintering furnace in a stand-alone source of vacuum in order argon (Ar) gas (H2 Is contained 4% argon gas) atmosphere 250 °C 1 baking (baking) process time of abortion. A vacuum to said vacuum sintering 5. 7 × 10-2 Torr onions. Bake temperature 5 °C/min temperature until the temperature [...]-gate. Figure 5 shows a tubular porous metal membrane surface according to exemplary experiments also 3 to also is shown the number produced therewith are disclosed. The reference also 3 to 5 also, smoker recognizes the pore surface of the porous metal membrane exists can be delivered. Porous metal tubular prepared by the number relative to the flow test (Flow test) according to exemplary experiment result table 1 and also to perform 6 precursor, said flow test at a temperature of 20 ± 1 °C relative humidity of 50 ± 1% (Relative humidity), atmospheric pressure (0. 988 Bar) was embodiment conditions. Or more, of the present invention preferred embodiment detailed but for example, the present invention refers to said in the embodiment has the limited to, within the range of technical idea of the present invention pivotably in was found by person with skill in the art numerous modifications. 10: Mold 12: [...] 14: [...] 100: Porous metal membrane The present invention relates to a method for manufacturing a porous metal membrane for flux in large quantity. According to the present invention, a manufacturing method is simple, processing costs are relatively low, the metal membrane has excellent mechanical strength, and it is easy to control porosity. The method for manufacturing a porous metal membrane comprises the following steps of: classifying the metal powders according to the particle sizes by using a classifier; using the classifier to select each metal powder having a different particle size from the metal powders classified according to the particle sizes, putting the metal powders in a mixer by weight and the particle size to control the filling density and the porosity of the membrane, and mixing the metal powder by using the mixer; putting the powder mixed in the mixer and a binder in a heating mixer and mixing them; inserting a mixture of the binder and the mixed powder into a mold with an elastic polymer material formed the outside thereof and pressurizing and molding the mold at a predetermined pressure by using a cold isostatic pressing apparatus; demolding a hollow tube-shaped molded material from the mold; inserting the demolded molded material into a vacuum sintering furnace, degreasing the binder at the temperature higher than the temperature at which the binder is thermally decomposed and lower than the temperature at which the mixed powder is melted, and sintering the molded material by raising the temperature to the sintering temperature; electrolytically polishing a sintered body by using an electrolytic polishing solution; washing and drying the sintered body to remove the electrolytic polishing solution therefrom; and performing a baking process in a vacuum sintering furnace to burn and remove electrolytic polishing solution components remaining in the micropores of the dried sintered body. COPYRIGHT KIPO 2018 Classifying device according to particle size metal powder using a classification step; said classifying device according to particle size using metal powder in each particle size classification having a metal powder filling density and degree of the weight particle size of electrical screening by considering each using a mixer mixing in a beyond the periphery of the; mixing said mixer through heating for constructing a mixing in a mixed powder and a binder; said binder material outside said body includes a plate spring polymer mixture of the mixed powder after a sheet, shaping the constant cold isotropic pressure pressurizing through an input light guide; said step layer molding mold member; charged into a vacuum sintering furnace [...] molding layer, said binder pyrolytic temperature higher than the melting temperature at a lower temperature than said mixed powder maintains binder optionally degreased, a mixed material is heated above the sintering temperature; electropolishing electropolishing the sintered by using a liquid; the rinsing and drying the step number before said [...][...] every other; and drying microporous sintered body regulates the electrolytic polishing liquid component since the sintering furnace in a stand-alone source of vacuum in order number photoresist including a porous metal membrane manufacturing method characterized. According to Claim 1, said classifying device different mesh size sieve (sieve) is different positions (height) which are sequentially arranged on the device, said device being capable of classifying a top mesh size number (sieve) and one large body is mounted, a lower control [...] smaller body (siever) is mounted, classifying said vibrating device provided at the lower classification (vibrator) is mounted for bi-smoothly and vibrator, said vibrator causes the vibrational energy is delivered to the body by an elastic member in a classifier in each characterized by porous metal membrane manufacturing method. According to Claim 1, porous metal membrane number bath porosity, pore size using paraffin wax by considering said binder, said metal powder is stainless steel, 8W (Hastelloy) and nickel (Nickel) [theyl with at least one powder selected from 1 is used, said mixed powder 100 parts by weight of said binder 0. 1 ∼ 5 parts by weight of porous metal membrane manufacturing method characterized by mixing. According to Claim 1, said constant pressure pressurized cold isotropic pressure pressurizing through an input includes forming a porous metal membrane manufacturing method characterized in that a pressure of at least 1000 ∼ 3000 bar. According to Claim 1, said mold having a structure of greater length than the saw generally comprises bar-type, a center portion of said mold made of metal material with a plate spring and encircling said polymer [...][...][...] is in apart, said mixture of said mixed powder is filled between said [...][...] said binder to which it, said space between said [...][...] by and determine the thickness of the porous metal membrane, said [...] diameter determines the inner diameter of the porous metal membrane (placing a diameter), for adjusting a length of porous metal membrane determines the length of said mold, said porous metal membrane is the interior hollow tubular position in the porous metal membrane manufacturing method characterized. According to Claim 1, and said other will be at a temperature of from 400 ∼ 800 °C, cool said pyrolytic temperature higher than the melting temperature lower than said binder and said mixed powder at a temperature of from 900 ∼ 1200 °C, degreasing and cool said H2 Characterized containing argon gas atmosphere carried out in the porous metal membrane manufacturing method. According to Claim 1, said electrolytic polishing liquid sulfate (H2 SO4 ), Phosphoric acid (H3 PO4 ), Including electrolytic polishing liquid or a distilled water and surfactant number, sulfuric acid (H2 SO4 ), Phosphoric acid (H3 PO4 ), Distilled water, and chromium (Cr) number surfactants including a porous metal membrane manufacturing method characterized electropolishing solution. According to Claim 7, said electrolytic polishing liquid boiling point higher than the melting temperature of said baking is carried out at a temperature of lower than 150 ∼ 400 °C and metal membrane, said baking is H2 Characterized containing argon gas atmosphere carried out in the porous metal membrane manufacturing method. Shear pressures (psig) (LPM) flow 7. 7 2041 14. 6 4089 21. 3 6169 29. 1 8593 35. 0 10373 43. 5 12825 51. 4 14952 58. 1 16459 65. 8 18190 72. 1 19621
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