Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus

20-04-2021 дата публикации
Номер:
US0010983361B2
Автор: Sander Bas Roobol, Simon Gijsbert Josephus MATHIJSSEN, Stefan Michael Bruno Bäumer, ROOBOL SANDER BAS, MATHIJSSEN SIMON GIJSBERT JOSEPHUS, BÄUMER STEFAN MICHAEL BRUNO, Roobol, Sander Bas, MATHIJSSEN, Simon Gijsbert Josephus, Bäumer, Stefan Michael Bruno
Принадлежит: ASML NETHERLANDS B.V, ASML NETHERLANDS BV, ASML NETHERLANDS B.V.
Контакты:
Номер заявки: 94-83-1589
Дата заявки: 16-02-2018







CPC - классификация

GG0G02G02BG02B2G02B27G02B27/G02B27/4G02B27/42G02B27/425G02B27/4255G02B27/6G02B27/62G03G03FG03F7G03F7/G03F7/7G03F7/70G03F7/701G03F7/7015G03F7/70158G03F7/702G03F7/7025G03F7/70258G03F7/703G03F7/7031G03F7/70316G03F7/705G03F7/7057G03F7/70575G03F7/7059G03F7/70591G03F7/708G03F7/7085

IPC - классификация

GG0G02G02BG02B2G02B27G02B27/G02B27/4G02B27/42G02B27/6G02B27/62G03G03FG03F7G03F7/G03F7/2G03F7/20

Цитирование НПИ

250/548
257/797
355/67
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359/566
International Search Report and Written Opinion of the International Searching Authority directed to related International Patent Application No. PCT/EP2018/051843, dated Mar. 14, 2018; 15 pages.
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