Vacuum pumping system

12-12-2023 дата публикации

Номер:

US11839903B2

Автор: Christopher Mark Bailey, Michael Roger Czerniak

Принадлежит: Edwards Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B01 B01D B01D5 B01D53 B01D53/B01D53/0 B01D53/00 B01D53/6 B01D53/64 B01F B01F2 B01F23 B01F23/B01F23/1 B01F23/19 B01F23/191 B01F3 B01F35 B01F35/B01F35/2 B01F35/21 B01F35/211 B01F35/2111 B01F35/213 B01F35/2132 B01F35/22 B01F35/221 B01F35/2211 B01F35/7 B01F35/71 B01F35/718 B08 B08B B08B1 B08B15 B08B15/B08B15/0 B08B15/02 F F0 F04 F04B F04B2 F04B23 F04B23/F04B23/0 F04B23/04 F04B4 F04B41 F04B41/F04B41/0 F04B41/06 F04C F04C1 F04C11 F04C11/F04C11/0 F04C11/00 F04C11/001 F04C13 F04C13/F04C13/0 F04C13/00 F04C2 F04C22 F04C221 F04C2210 F04C2210/F04C2210/2 F04C2210/22 F04C222 F04C2220 F04C2220/F04C2220/1 F04C2220/10 F04C23 F04C23/F04C23/0 F04C23/00 F04C25 F04C25/F04C25/0 F04C25/02 F04D F04D1 F04D13 F04D13/F04D13/0 F04D13/00 F04D13/1 F04D13/12 F04D19 F04D19/F04D19/0 F04D19/04 F04D2 F04D25 F04D25/F04D25/0 F04D25/06 F04D25/1 F04D25/16 F04D27 F04D27/F04D27/0 F04D27/02 F04D27/029 F04D27/0292 F05 F05B F05B2 F05B22 F05B221 F05B2210 F05B2210/F05B2210/1 F05B2210/12 G G0 G03 G03F G03F7 G03F7/G03F7/7 G03F7/70 G03F7/709 G03F7/7091 G03F7/70916 G03F7/7093 G03F7/70933 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/670 H01L21/6701 H01L21/67017

IPC - классификация

B B0 B01 B01D B01D5 B01D53 B01D53/B01D53/6 B01D53/64 B01F B01F2 B01F25 B01F25/B01F25/3 B01F25/31 B01F25/314 B01F3 B01F35 B01F35/B01F35/2 B01F35/22 B01F35/221 B01F35/2211

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