Counter flow mixer for process chamber

18-06-2019 дата публикации

Номер:

US10322384B2

Автор: Chris Wuester, John F. Stumpf

Принадлежит: ASM IP Holding BV

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B01 B01F B01F2 B01F20 B01F200 B01F2005 B01F2005/B01F2005/0 B01F2005/00 B01F2005/003 B01F2005/0034 B01F202 B01F2025 B01F2025/B01F2025/9 B01F2025/91 B01F2025/918 B01F21 B01F210 B01F2101 B01F2101/B01F2101/5 B01F2101/58 B01F23 B01F23/B01F23/1 B01F23/10 B01F23/19 B01F25 B01F25/B01F25/2 B01F25/25 B01F25/3 B01F25/31 B01F25/313 B01F25/3131 B01F25/3133 B01F25/4 B01F25/40 B01F25/42 B01F25/43 B01F25/433 B01F25/4334 B01F3 B01F3/B01F3/0 B01F3/02 B01F5 B01F5/B01F5/0 B01F5/02 B01F5/026 B01F5/0268 B01F5/04 B01F5/045 B01F5/0451 B01F5/046 B01F5/0461 B01F5/06 B01F5/065 B01F5/0651 B01J B01J1 B01J19 B01J19/B01J19/0 B01J19/08 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/323 H01J37/3235 H01J37/32357 H01J37/324 H01J37/3244 H01J37/32449 H01L H01L2 H01L29 H01L292 H01L2924 H01L2924/H01L2924/1 H01L2924/14 H01L2924/142 H01L2924/1422

IPC - классификация

B B0 B01 B01F B01F2 B01F25 B01F25/B01F25/2 B01F25/25 B01F25/3 B01F25/31 B01F25/313 B01F25/3131 B01F25/4 B01F25/45 B01F25/452 B01F25/4521

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