COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING THE COMPONENT

07-01-2021 дата публикации

Номер:

US20210002754A1

Автор: Koji Mitsuhashi, Satoshi Nishimura, MITSUHASHI KOJI, NISHIMURA Satoshi, Mitsuhashi, Koji, Nishimura, Satoshi

Принадлежит: Tokyo Electron Limited

Контакты:

Номер заявки: 43-16-1702

Дата заявки: 15-09-2020

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/45 C23C16/455 C23C16/4556 C23C16/45565 C23C4 C23C4/C23C4/0 C23C4/02 C23C4/06 C23C4/1 C23C4/11 C23C4/12 C23C4/18 C25 C25D C25D1 C25D11 C25D11/C25D11/0 C25D11/04 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/324 H01J37/3244 H01J37/3247 H01J37/32477 H01J37/325 H01J37/3255 H01J37/32559 H01J37/326 H01J37/3263 H01J37/32633

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/45 C23C16/455 C23C4 C23C4/C23C4/0 C23C4/02 C23C4/06 C23C4/1 C23C4/11 C23C4/12 C23C4/18 C25 C25D C25D1 C25D11 C25D11/C25D11/0 C25D11/04 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/32

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